公开(公告)号：US20050205998A1

公开(公告)日：2005-09-22

申请号：US11110849

申请日：2005-04-21

申请人： Tomohiro Yamada ,  Eiji Shidoji ,  Akira Mitsui ,  Takuji Oyama ,  Toshihisa Kamiyama

发明人： Tomohiro Yamada ,  Eiji Shidoji ,  Akira Mitsui ,  Takuji Oyama ,  Toshihisa Kamiyama

IPC分类号： C23C14/08 ,  C23C14/10 ,  H01L21/4763 ,  H01L23/48 ,  H01Q1/12

CPC分类号： C23C14/10 ,  C23C14/083 ,  H01Q1/1271 ,  Y10T428/26 ,  Y10T428/266

摘要： A multilayer film-coated substrate having the stress of the film relaxed by depositing a multilayer film comprising a metal oxide film and a silicon oxide film on a substrate at a high speed by a sputtering method using a conductive sputtering material, and a process for producing a multilayer film-coated substrate having such a low stress, are presented. A multilayer film-coated substrate comprising a substrate and at least a metal oxide film and a silicon oxide film laminated thereon repeatedly at least once, wherein at least one layer of said metal oxide film is a metal oxide film deposited by sputtering by using, as the target material, a metal oxide MOX which is deficient in oxygen than the stoichiometric composition, to have the oxygen deficiency resolved, and the stress of the multilayer film is from −100 MPa to +100 MPa.

摘要翻译： 通过使用导电性溅射材料的溅射法，通过在基板上高速沉积包含金属氧化物膜和氧化硅膜的多层膜而使薄膜的应力弛豫的多层膜被覆基板，以及制造方法 提出了具有如此低应力的多层膜涂覆的基板。 一种多层膜被覆基板，包括基板和至少一层金属氧化物膜和氧化硅膜，其上重复层叠至少一次，其中至少一层所述金属氧化物膜是通过溅射沉积的金属氧化物膜，其通过使用作为 目标材料，缺氧量低于化学计量组成的金属氧化物MO X X，以使氧缺陷分解，多层膜的应力为-100MPa〜+100MPa。

公开(公告)号：US20050064303A1

公开(公告)日：2005-03-24

申请号：US10936806

申请日：2004-09-09

申请人： Tomohiro Yamada ,  Ryo Kuroda ,  Natsuhiko Mizutani

发明人： Tomohiro Yamada ,  Ryo Kuroda ,  Natsuhiko Mizutani

IPC分类号： G03C5/04 ,  G03F1/08 ,  G03F1/14 ,  G03F9/00 ,  H01J3/14

CPC分类号： G03F1/54 ,  G03F1/50

摘要： A near-field light generating structure for generating near-field light has a pattern of a fine metal structure comprising a light blocking layer or a pattern of a fine opening provided in the light blocking layer. The fine metal structure or the fine opening has a size of not more than a wavelength of incident light. The fine metal structure or the fine opening has a sectional shape, in a plane parallel with the incident light, which is asymmetrical in terms of a member adjacent to the fine metal structure or the fine opening.

摘要翻译： 用于产生近场光的近场光产生结构具有包括遮光层的细金属结构图案或设置在遮光层中的精细开口图案。 细金属结构或微细开口具有不大于入射光波长的尺寸。 细金属结构或微细开口在与入射光平行的平面中具有与邻近细金属结构或微细开口的构件不对称的截面形状。

公开(公告)号：US20050063445A1

公开(公告)日：2005-03-24

申请号：US10937387

申请日：2004-09-10

申请人： Natsuhiko Mizutani ,  Tomohiro Yamada

发明人： Natsuhiko Mizutani ,  Tomohiro Yamada

IPC分类号： G11B7/135 ,  G01Q60/18 ,  G11B7/12 ,  G11B7/125 ,  H01S3/083 ,  H01S5/042 ,  H01S5/10 ,  H01S5/12 ,  H01S5/14 ,  H01S5/22 ,  H01S5/223

CPC分类号： G11B7/127 ,  G11B7/1353 ,  G11B7/1387 ,  H01S5/0425 ,  H01S5/1071 ,  H01S5/1085 ,  H01S5/141 ,  H01S5/2214 ,  H01S5/2231

摘要： Disclosed are a near-field light source device as well as an optical head, an optical device, an exposure apparatus and a microscope device having such near-field light source device. As an example, the near-field light source device has a semiconductor laser having a ring-type optical resonator with a plurality of wave guides connected via mirror portions, a light blocking film formed in one of the mirror portions and having a small opening not greater than a wavelength size, and a diffraction grating formed on the light blocking film, wherein light oscillated from the semiconductor laser is diffracted by the diffraction grating, and the diffracted light is coupled to a rotation mode in the ring-type optical resonator.

摘要翻译： 公开了一种近场光源装置以及具有这种近场光源装置的光头，光学装置，曝光装置和显微镜装置。 作为示例，近场光源装置具有半导体激光器，该半导体激光器具有环状光谐振器，该环状光谐振器具有通过镜部分连接的多个波导，形成在一个反射镜部分中且具有小开口的遮光膜 大于波长尺寸，以及形成在遮光膜上的衍射光栅，其中从半导体激光器振荡的光被衍射光栅衍射，并且衍射光耦合到环形光学谐振器中的旋转模式。

公开(公告)号：US20050057752A1

公开(公告)日：2005-03-17

申请号：US10911697

申请日：2004-08-05

申请人： Yasuhisa Inao ,  Tomohiro Yamada

发明人： Yasuhisa Inao ,  Tomohiro Yamada

IPC分类号： G01B11/00 ,  B81B3/00 ,  G03F7/20 ,  H01L21/027 ,  G03B27/42 ,  G03F9/00

CPC分类号： G03F7/7035 ,  B82Y10/00 ,  G03F1/50 ,  G03F7/70325

摘要： Disclosed is a method of detecting an attraction force between substrates, and a near-field exposure method and apparatus, wherein, in the attraction force detecting method, an elastically deformable first substrate is intimately contacted to a second substrate which is not elastically deformable as compared with the first substrate and, when the first and second substrates so contacted are separated from each other, an attraction force acting between the first and second substrates is detected. Specifically, the includes at least one of (i) a step for detecting an attraction force acting between the first and second substrates on the basis of a difference between (a) a physical quantity necessary for intimately contacting the first substrate to the second substrate and (b) a physical quantity necessary for separating the first substrate from the second substrate, and (ii) a step of detecting an attraction force acting between the first and second substrates on the basis of an amount of deformation of the first substrate relative to the second substrate.

摘要翻译： 公开了一种检测基板之间的吸引力的方法以及近场曝光方法和装置，其中在吸引力检测方法中，可弹性变形的第一基板与不能弹性变形的第二基板紧密接触， 与第一基板相接触，并且当相互接触的第一和第二基板彼此分离时，检测作用在第一和第二基板之间的吸引力。 具体而言，包括以下中的至少一个：（i）基于（a）使第一基板与第二基板紧密接触所需的物理量与第一基板与第二基板紧密接触的物理量之间的差异来检测作用在第一和第二基板之间的吸引力的步骤和 （b）从第二基板分离第一基板所需的物理量，以及（ii）基于第一基板相对于第一基板的变形量来检测作用在第一基板与第二基板之间的吸引力的步骤 第二基板。

公开(公告)号：US6070971A

公开(公告)日：2000-06-06

申请号：US932259

申请日：1997-09-22

申请人： Minoru Usui ,  Takahiro Katakura ,  Munehide Kanaya ,  Motonori Okumura ,  Tomohiro Yamada ,  Shinsuke Yano

发明人： Minoru Usui ,  Takahiro Katakura ,  Munehide Kanaya ,  Motonori Okumura ,  Tomohiro Yamada ,  Shinsuke Yano

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  H01L41/09

CPC分类号： B41J2/1637 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1634

摘要： An actuator for an ink jet printer includes: an ink tank comprising a thick substrate having a cavity structure and a vibrating plate covering a cavity; and a piezoelectric/electrostrictive working portion comprising an upper electrode layer, a lower electrode layer, and a piezoelectric/electrostrictive layer between the electrode layers, the piezoelectric/electrostrictive working portion being disposed on the ink tank so that the lower electrode layer contacts with the vibrating plate. The upper electrode is trimmed only in the portion where the piezoelectric/electro-strictive layer covers the vibrating plate so as to control an effective electrode area and adjust an ink jet volume to be appropriate. The upper electrode layer is trimmed with the piezoelectric/electrostrictive layer covering the vibrating plate at least near the portion to be trimmed of the upper electrode layer so as to control an effective electrode area and adjust an ink jet volume.

摘要翻译： 用于喷墨打印机的致动器包括：墨盒，包括具有空腔结构的厚基底和覆盖空腔的振动板; 以及包括在电极层之间的上电极层，下电极层和压电/电致伸缩层的压电/电致伸缩工作部分，压电/电致伸缩工作部分设置在墨罐上，使得下电极层与 振动板 仅在压电/电绝缘层覆盖振动板的部分中修整上电极，以便控制有效电极面积并调整喷墨量是合适的。 上电极层用压电/电致伸缩层进行修整，该压电/电致伸缩层至少在上电极层的修剪部分附近覆盖振动板，以便控制有效电极面积并调节喷墨体积。

公开(公告)号：US08693151B2

公开(公告)日：2014-04-08

申请号：US13146423

申请日：2010-01-28

申请人： Masaharu Iwasa ,  Tomohiro Yamada

发明人： Masaharu Iwasa ,  Tomohiro Yamada

IPC分类号： H02H9/04

CPC分类号： H03H7/0107 ,  H03H7/427

摘要： A differential transmission circuit is capable of realizing a high resistance to electrostatic breakdown without deteriorating a transmission signal. The differential transmission circuit includes ESD protection elements connected between transmission lines and a ground, respectively, a common mode filter in which an inductor element is serially connected between transmission lines, and an inductor element serially connected between transmission lines are magnetically coupled to each other, ESD protection diodes of which cathodes are connected to transmission, respectively, and anodes thereof connected to grounds, respectively, and resistors of which one side terminals are connected to transmission lines, respectively, and the other side terminals thereof are connected to transmission lines, respectively. Resistance values of the resistors are set to 10 to 15 ohms, respectively, electrostatic capacitance values of the ESD protection elements are less than 0.3 pF, respectively, and a clip voltage of each of the ESD protection diodes is set to a value less than 10 V.

摘要翻译： 差分传输电路能够实现高抗静电击穿，而不会降低传输信号。 差分传输电路分别包括连接在传输线和接地之间的ESD保护元件，其中电感器元件串联连接在传输线之间的共模滤波器，串联连接在传输线之间的电感器元件彼此磁耦合， 分别连接到传输的ESD保护二极管和分别连接到接地的阳极和分别连接到传输线的电阻器和其它侧端子分别连接到传输线 。 电阻器的电阻值分别设定为10〜15欧姆，ESD保护元件的静电电容值分别小于0.3pF，并且每个ESD保护二极管的钳位电压设定为小于10的值 五

公开(公告)号：US08291558B2

公开(公告)日：2012-10-23

申请号：US11962863

申请日：2007-12-21

申请人： Takao Ohnishi ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

发明人： Takao Ohnishi ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

IPC分类号： H04R17/10 ,  C04B35/64

CPC分类号： H01L41/0973 ,  H01L41/0475 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： A method for manufacturing a piezoelectric/electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled.

摘要翻译： 压电/电致伸缩元件的制造方法包括在使膜静置直到电常数在热处理后收敛的状态下，对压电/电致伸缩薄膜进行热处理和极化处理的步骤。 通过该方法制造的压电/电致伸缩元件在压电/电致伸缩膜中残留的应力小，例如在位移量，位移产生力和电力效率（消耗电力）中作为 压电/电致伸缩元件（压电/电致伸缩膜）从未被破坏。

公开(公告)号：US08278237B2

公开(公告)日：2012-10-02

申请号：US12524029

申请日：2008-02-13

申请人： Shinichi Yamada ,  Tomohiro Yamada ,  Yuji Ogawa ,  Hirokazu Akiyama ,  Takuya Hatagishi

发明人： Shinichi Yamada ,  Tomohiro Yamada ,  Yuji Ogawa ,  Hirokazu Akiyama ,  Takuya Hatagishi

IPC分类号： B01J29/06 ,  C07C2/52 ,  C07C15/00

CPC分类号： C10G45/68 ,  B01J21/16 ,  B01J23/885 ,  B01J29/0308 ,  B01J29/041 ,  B01J29/076 ,  B01J29/40 ,  B01J29/48 ,  B01J29/7876 ,  B01J35/023 ,  B01J37/0201 ,  B01J37/088 ,  B01J37/18 ,  B01J2229/12 ,  B01J2229/123 ,  B01J2229/32 ,  B01J2229/40 ,  C01B3/40 ,  C01B2203/02 ,  C01B2203/1241 ,  C07C2/76 ,  C10G2400/30 ,  Y02P20/52 ,  C07C15/02

摘要： A catalyst for producing aromatic compounds from lower hydrocarbons while improving activity life stability of methane conversion rate; benzene formation rate; naphthalene formation rate; and total formation rate of benzene, toluene and xylene is formed by loading molybdenum and copper on metallo-silicate serving as a substrate and then calcining the metallo-silicate. When the catalyst is reacted with a reaction gas containing lower hydrocarbons and carbonic acid gas, aromatic compounds are produced. In order to obtain the catalyst, it is preferable that molybdenum and copper are loaded on zeolite formed of metallo-silicate after the zeolite is treated with a silane compound larger than a pore of the zeolite in diameter and having an amino group and a straight-chain hydrocarbon group, the amino group being able to selectively react with the zeolite at a Bronsted acid point of the zeolite. It is preferable that a loaded amount of molybdenum is within a range of from 2 to 12 wt. % based on total amount of the calcined catalyst while copper is loaded at a copper to molybdenum molar ratio of 0.01 to 0.8.

摘要翻译： 一种用于从低级烃生产芳族化合物的催化剂，同时提高甲烷转化率的活性寿命稳定性; 苯形成率; 萘形成率; 苯，甲苯和二甲苯的总形成速率是通过将钼和铜负载在作为基底的金属硅酸盐上，然后煅烧金属硅酸盐而形成的。 当催化剂与含有低级烃和碳酸气体的反应气体反应时，产生芳族化合物。 为了得到催化剂，优选在沸石用直径大于沸石孔的硅烷化合物进行处理并具有氨基和直链状烷基的情况下，将钼和铜负载在由金属硅酸盐形成的沸石上， 链烷烃基，该氨基能够在沸石的布朗斯台德酸点处与沸石选择性反应。 钼的负载量优选在2〜12重量％的范围内。 基于煅烧催化剂的总量的％，而铜以铜与钼的摩尔比为0.01至0.8。

公开(公告)号：US08135524B2

公开(公告)日：2012-03-13

申请号：US12010422

申请日：2008-01-24

申请人： Takeshi Yoneda ,  Keisuke Hosokawa ,  Koichi Inoue ,  Hirowatari Yosuke ,  Tomohiro Yamada ,  Koji Matsuno ,  Masaru Kogure ,  Satoru Akiyama ,  Masato Igarashi ,  Yosuke Morokuma

发明人： Takeshi Yoneda ,  Keisuke Hosokawa ,  Koichi Inoue ,  Hirowatari Yosuke ,  Tomohiro Yamada ,  Koji Matsuno ,  Masaru Kogure ,  Satoru Akiyama ,  Masato Igarashi ,  Yosuke Morokuma

IPC分类号： B60K28/16

CPC分类号： B60W30/18172 ,  B60K23/0808 ,  B60W10/06 ,  B60W10/14 ,  B60W40/064 ,  B60W2510/0604 ,  B60W2510/0638 ,  B60W2510/1005 ,  B60W2510/20 ,  B60W2520/125 ,  B60W2520/14 ,  B60W2520/28 ,  B60W2540/10 ,  B60W2550/148 ,  B60W2710/0666 ,  B60W2720/30

摘要： A driving force control device includes an individual-wheel friction-circle limit-value calculating portion that calculates friction-circle limit-values of individual wheels, an individual-wheel requested-resultant-tire-force calculating portion that calculates requested resultant tire forces of the individual wheels, an individual-wheel resultant-tire-force calculating portion that calculates resultant tire forces of the individual wheels, an individual-wheel requested-excessive-tire-force calculating portion that calculates requested excessive tire forces of the individual wheels, an individual-wheel excessive-tire-force calculating portion that calculates excessive tire forces of the individual wheels, an excessive-tire-force calculating portion that calculates an excessive tire force, an over-torque calculating portion that calculates an over-torque, and a control-amount calculating portion that calculates a control amount that is output to an engine control unit.

摘要翻译： 驱动力控制装置包括计算各个车轮的摩擦圆极限值的单轮摩擦圆限制值计算部，计算要求的轮胎的所需轮胎力的单轮请求结果轮胎力计算部 单个车轮，计算各车轮的合成轮胎力的单轮车轮产生轮胎力计算部，计算出各车轮所要求的过度轮胎力的单轮要求过量轮胎力计算部， 计算各个车轮的过大轮胎力的单轮过轮胎力计算部，计算过大轮胎力的过度轮胎力计算部，计算过转矩的过转矩运算部，以及 控制量计算部，其计算输出到发动机控制单元的控制量。

公开(公告)号：US08094394B2

公开(公告)日：2012-01-10

申请号：US12665562

申请日：2008-07-14

申请人： Tomohiro Yamada ,  Masaya Ogino ,  Yasuhisa Inao

发明人： Tomohiro Yamada ,  Masaya Ogino ,  Yasuhisa Inao

IPC分类号： G02B5/22 ,  G02F1/03

CPC分类号： G02B5/223 ,  G02B5/008 ,  G02B5/201 ,  G02B5/204 ,  H01L27/1462 ,  H01L27/14621

摘要： An optical filter that transmits light of the visible light region includes a dielectric substrate; a dielectric layer that is formed on a surface of the dielectric substrate; and a first metal structure group in which a plurality of first metal structures are arranged two-dimensionally in an isolated state in the in-plane direction of the dielectric substrate, that is provided between the dielectric substrate and the dielectric layer, comprising: the first metal structures having first and second lengths in first and second directions orthogonal to each other, which lengths are equal to or less than a first wavelength in the visible light region; and a transmittance of the first wavelength being reduced or a reflectance being increased by surface plasmons induced on a surface of the first metal structures by resonance between light incident on the dielectric substrate or the dielectric layer and the first metal structures.

摘要翻译： 透射可见光区域的光的滤光器包括电介质基片; 介电层，其形成在所述电介质基板的表面上; 以及设置在所述电介质基板和所述电介质层之间的所述电介质基板的面内方向上以隔离状态二维地配置多个所述第一金属结构体的第一金属结构体，所述第一金属结构体包括：所述第一金属结构体， 在第一和第二方向上具有彼此正交的第一和第二长度的金属结构，其长度等于或小于可见光区域中的第一波长; 并且通过入射到电介质基板或电介质层上的光与第一金属结构之间的共振，在第一金属结构的表面上引起的表面等离子体激元的第一波长的透射率减小或反射率增加。