公开(公告)号：US07951303B2

公开(公告)日：2011-05-31

申请号：US11960304

申请日：2007-12-19

Applicant: Masanao Munekane

Inventor： Masanao Munekane

IPC: C23F1/00

CPC classification number: H01J37/3056 ,  H01J37/20 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/31745

Abstract: By working a grabbing portion by a charged particle beam of FIB or the like, the grabbing portion in parallel with the beam can be formed, and also dust adhered to the grabbing portion is removed. When a small sample represented by a TEM sample is fabricated by being cut out by etching by a charged particle beam and is carried at inside of an apparatus of irradiating a charged particle beam, the sample is etched in a direction of irradiating the charged particle beam, and therefore, a mechanism pinched by a grabbing face of a grabbing portion can be worked in a direction the same as that in working the sample, and therefore, a change in an attitude can be reduced when the sample and the grabbing face are fabricated by parallel faces.

Abstract translation: 通过利用FIB等的带电粒子束来抓取部分，可以形成与梁平行的抓取部分，并且除去附着在抓取部分上的灰尘。 当由TEM样品表示的小样品通过用带电粒子束蚀刻而切割并在照射带电粒子束的装置的内部被携带时，沿着照射带电粒子束的方向来蚀刻样品 因此，可以在与加工样品相同的方向上加工由抓取部分的抓握面夹持的机构，因此当制造样品和抓取面时可以降低姿态的变化 通过平行面。

公开(公告)号：US07923267B2

公开(公告)日：2011-04-12

申请号：US11346826

申请日：2006-02-03

Applicant: Masanao Munekane ,  Junichi Tashiro

Inventor： Masanao Munekane ,  Junichi Tashiro

IPC: G01R31/26

CPC classification number: H01L22/12

Abstract: A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.

Abstract translation: 基板包括具有要在其上形成测量对象物品的表面的基板主体。 在要形成测量对象物品的表面的区域附近，在基板主体的表面上设置基准刻度。 参考刻度具有彼此间隔开预定距离的相邻刻度。

公开(公告)号：US07755065B2

公开(公告)日：2010-07-13

申请号：US12046987

申请日：2008-03-12

Applicant: Yoshitomo Nakagawa ,  Kenichi Nishinaka

Inventor： Yoshitomo Nakagawa ,  Kenichi Nishinaka

IPC: H01J37/08

CPC classification number: H01J37/08 ,  H01J37/28 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0817 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/31749

Abstract: A focused ion beam apparatus includes a plasma generator having a plasma torch therein, which lets plasma flow out while being kept inside, a differential exhaust chamber that is connected to the plasma torch via the torch orifice to cause adiabatic expansion of the plasma flowing out of the plasma torch to form a supersonic flow of the plasma, a drawing orifice provided at the differential exhaust chamber at a position facing the torch orifice to draw ions from the supersonic flow of the plasma, a drawing electrode that electrostatically accelerates ions having passed through the drawing orifice to further draw ions, and an ion optical system that focuses the ions drawn from the drawing electrode and causing the ions to enter the sample by optically manipulating the ions.

Abstract translation: 聚焦离子束装置包括等离子体发生器，其中具有等离子体焰炬，其允许等离子体在被保持在内部的同时流出;差动排气室，其通过炬孔连接到等离子体焰炬，以使等离子体流出的等离子体 等离子体焰炬以形成等离子体的超音速流动，在差动排气室处设置在面向炬孔的位置处以从等离子体的超音速流中吸引离子的抽吸孔，静电加速已经通过 拉伸孔以进一步拉伸离子;以及离子光学系统，其聚焦从拉伸电极吸取的离子并通过光学操作离子使离子进入样品。

公开(公告)号：US07744273B2

公开(公告)日：2010-06-29

申请号：US11841400

申请日：2007-08-20

Applicant: Kanji Nagasawa ,  Rintaro Nakatani

Inventor： Kanji Nagasawa ,  Rintaro Nakatani

IPC: G01N25/00 ,  G01K17/06 ,  G01K3/06

CPC classification number: G01N25/20

Abstract: A thermal analysis apparatus possesses a temperature sensor measuring a temperature of a heating furnace inside, a temperature program setter which can set a temperature program and outputs a temperature program signal, a temperature control section adjusting a supply electric power to a heater in compliance with a difference between the temperature program signal and a detection signal of the temperature sensor, a processor section calculating an air flow rate corresponding to a program temperature, and a mass flow controller which adjusts an air flow rate supplied to the heating furnace inside in compliance with a signal of the air flow rate calculated by the processor section. In the processor section, operation expressions calculating the air flow rate are set so as to differ respectively in a higher temperature side and a lower temperature side than a predetermined boundary temperature.

Abstract translation: 热分析装置具有测量内部的加热炉的温度的温度传感器，能够设定温度程序并输出温度程序信号的温度程序设定器，温度控制部，其根据 温度程序信号与温度传感器的检测信号之间的差异，计算对应于程序温度的空气流量的处理器部分和质量流量控制器，该质量流量控制器根据下述方式调节供应到加热炉内部的空气流量： 由处理器部分计算的空气流量的信号。 在处理器部分中，计算空气流量的操作表达式被设定为在比预定边界温度高的温度侧和较低温度侧分别不同。

公开(公告)号：US07700367B2

公开(公告)日：2010-04-20

申请号：US10563515

申请日：2004-07-05

Applicant: Toshiaki Fujii

Inventor： Toshiaki Fujii

IPC: G01N1/00

CPC classification number: H01J37/3005 ,  G01N1/32 ,  H01J37/304 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/31745 ,  Y10T436/25

Abstract: In a method of making a lamina specimen, first and second ion beams are simultaneously used to sputter etch first and second side walls of a lamina region at the same time under first and second ion beam conditions. A scanning ion microscope observation of the lamina region is made using the second ion beam while sputter etching of the first and second side walls is continued using the first ion beam until the thickness of the lamina has a predetermined value.

Abstract translation: 在制备薄片样品的方法中，第一和第二离子束同时用于在第一和第二离子束条件下同时溅射蚀刻层板区域的第一和第二侧壁。 使用第二离子束进行层状区域的扫描离子显微镜观察，同时使用第一离子束继续溅射蚀刻第一和第二侧壁，直到层的厚度具有预定值。

公开(公告)号：US07588605B2

公开(公告)日：2009-09-15

申请号：US11835036

申请日：2007-08-07

Applicant: Norio Ookubo

Inventor： Norio Ookubo

IPC: G01N13/10

CPC classification number: G01Q60/32 ,  G01Q10/06 ,  G01Q30/04

Abstract: To be able to measure a value with regard to a dissipation, or a value in proportion to a dissipation energy without making a premise by being brought into a steady state. Exciting means 12 for carrying out an excitation by following a resonance frequency of a cantilever 2, a displacement detector 10 for detecting a displacement of a stylus at a tip of the cantilever 2, an amplitude detector 20 for successively providing an amplitude from a signal from the displacement detector 10, a difference value detector 21 for providing a time difference value of the amplitude, a divider 22 for providing a value of a quotient between the time difference values, a logarithmic converter 23 for providing a logarithmic value of the value of the quotient, and a second divider 24 for providing a value with regard to a dissipation by calculating a value constituted by dividing the logarithmic value by a difference time period are provided.

Abstract translation: 能够测量关于耗散的值，或者与耗散能量成比例的值，而不会通过进入稳定状态而进行前提。 用于通过跟随悬臂2的共振频率来执行激励的激励装置12，用于检测悬臂2的尖端处的触针的位移的位移检测器10，用于连续地从悬臂2的信号提供振幅的振幅检测器20 位移检测器10，用于提供振幅的时间差值的差值检测器21，用于提供时间差值之间的商的值的分频器22，用于提供时间差值的对数值的对数转换器23 商以及用于通过计算通过将对数值除以差分时间段而构成的值来提供关于耗散的值的第二分频器24。

公开(公告)号：US07550723B2

公开(公告)日：2009-06-23

申请号：US10592844

申请日：2005-03-02

Applicant: Takashi Kaito

Inventor： Takashi Kaito

IPC: G01N31/00 ,  G01N23/00 ,  G01N33/00 ,  G21K7/00 ,  G21K5/10 ,  H01J37/08 ,  G01F23/00

CPC classification number: G01N1/32 ,  B82Y35/00 ,  H01J2237/3109

Abstract: A preliminary processing technology for a sample locally cuts out a sample part of a device to be analyzed and processes it into a needle-like projection, and a technology of realizing SAP analysis on an atomic level by ensuring stabilized ion evaporation sequentially even in the case of a sample of multilayer structure including an element layer of small evaporation electric field. The preliminary processing method for a sample used on atom probe apparatus comprises a step for cutting the desired observing part of the sample into a block using an FIB equipment, a step for transferring the sample block onto a sample substrate and fixing the sample block in place, and a step for processing the sample block fixed onto the sample substrate into a needle-point shape by FIB etching. The sample processed into a needle-point shape is shaped such that the layer direction of the multilayer structure becomes parallel to the longitudinal direction of the needle.

Abstract translation: 用于样品的初步处理技术局部切出要分析的装置的样品部分并将其处理成针状投影，以及通过确保稳定的离子蒸发来实现原子级分析的技术即使在这种情况下 包括具有小蒸发电场的元件层的多层结构样品。 用于原子探针装置的样品的预处理方法包括使用FIB设备将样品的期望观察部分切割成块的步骤，将样品块转移到样品基底上并将样品块固定到位的步骤 以及通过FIB蚀刻将固定在样品基板上的样品块处理成针尖形状的步骤。 加工成针尖形状的样品成形为使得多层结构的层方向平行于针的纵向。

公开(公告)号：US07518125B2

公开(公告)日：2009-04-14

申请号：US11501629

申请日：2006-08-09

Applicant: Yo Yamamoto ,  Haruo Takahashi ,  Toshiaki Fujii

Inventor： Yo Yamamoto ,  Haruo Takahashi ,  Toshiaki Fujii

IPC: G01N23/00

CPC classification number: G01N1/32

Abstract: A processing apparatus uses a focused charged particle beam to process a micro sample that is supported on a micro mount part. The micro mount part is supported on a micro sample stage and locally cooled by a cooling unit. The micro mount part is thermally independent of the micro sample stage and, due to its small size, can be cooled rapidly by the cooling unit.

Abstract translation: 处理装置使用聚焦带电粒子束来处理支撑在微安装部件上的微样品。 微型安装部分支撑在微量样品台上，并由冷却单元局部冷却。 微型安装部件与微型样品台热独立，并且由于其小尺寸，可以通过冷却单元快速冷却。

公开(公告)号：US07508907B2

公开(公告)日：2009-03-24

申请号：US11845540

申请日：2007-08-27

Applicant: Norio Sasayama

Inventor： Norio Sasayama

IPC: G01N23/223 ,  G21K1/02

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: When an X-ray focused by using an X-ray lens is irradiated to a sample, there is generated an X-ray halo component at the peripheral part of the focal point of the focused X-ray in the sample and, by this, precision of an analysis of a microscopic region becomes an issue. In order to control the shape of the X-rays from the X-ray lens, a collimator is installed between the X-ray lens and the sample, with an opening part having a tapering shape in which the opening at the side toward the sample is made smaller than that at the side toward the X-ray lens.

Abstract translation: 当通过使用X射线透镜聚焦的X射线照射到样品时，在样品中的聚焦X射线的焦点的周边部分处产生X射线晕圈成分，由此， 微观区域的分析精度成为一个问题。 为了控制来自X射线透镜的X射线的形状，在X射线透镜和样品之间安装有准直仪，开口部具有锥形形状，其中朝向样品的一侧的开口 被制成小于朝向X射线透镜的一侧的尺寸。

公开(公告)号：US07494575B2

公开(公告)日：2009-02-24

申请号：US10822994

申请日：2004-04-13

Applicant: Shoji Sadayama ,  Yoshiharu Shirakawabe ,  Kazutaka Takahashi

Inventor： Shoji Sadayama ,  Yoshiharu Shirakawabe ,  Kazutaka Takahashi

IPC: C23C14/34 ,  C23F1/00

CPC classification number: G01Q20/04 ,  G01Q70/10

Abstract: A method of manufacturing a split probe tip on a cantilever comprises providing a cantilever having a surface on which is formed a probe that projects outwardly from the surface at one end of the cantilever, irradiating and scanning a tip of the probe with a focused particle beam directed in a direction that is inclined relative to the surface of the cantilever to obtain an image of the probe tip, and determining the center of the probe tip from the image of the probe tip. Then a first channel is formed in the probe tip at the center thereof by irradiating and scanning the center of the probe tip with a focused particle beam to form a split probe tip having two spaced-apart probe tip parts. The forming step comprises using the focused particle beam to form a first channel section that extends radially inwardly from a periphery of the probe tip, and then using the focused particle beam to form a second channel section that extends radially inwardly from the periphery of the probe tip at a location opposite the first channel section and that connects to the first channel section to define therewith the first channel.

Abstract translation: 在悬臂上制造分割探针尖端的方法包括提供具有表面的悬臂，其上形成有从悬臂的一端从表面向外突出的探针，用聚焦粒子束照射和扫描探针的尖端 指向相对于悬臂的表面倾斜的方向以获得探针尖端的图像，并且从探针尖端的图像确定探针尖端的中心。 然后，通过用聚焦粒子束照射和扫描探针尖端的中心，在探针尖端的中央形成第一通道，以形成具有两个间隔开的探针尖端部分的分离探针尖端。 成形步骤包括使用聚焦的粒子束形成从探针尖端的周边径向向内延伸的第一通道部分，然后使用聚焦的粒子束形成从探针的周边径向向内延伸的第二通道部分 尖端在与第一通道部分相对的位置处并且连接到第一通道部分以与第一通道部分限定第一通道。