摘要:
An exhaust gas processing device preheats processing target exhaust gas in the presence of moisture with heat from at least either an electric heater or a heat exchanger and subsequently thermally decomposes the exhaust gas with an atmospheric pressure plasma. A device main body has a heating decomposition chamber therein. A plasma generator is installed at a top surface portion of the device main body. A reactor has a cylindrical shape and is installed within the device main body such that an upper end opening thereof is directed toward a plasma emission port of the plasma generator. A moisture supply unit is provided at an inlet side of the device main body. At least either the electric heater or the heat exchanger is disposed in a first space.
摘要:
Provided is a novel exhaust gas processing device which allows processing target exhaust gas having a large flow volume to be handled with a small-capacity plasma generator, by preheating a high-temperature decomposable gas component of the processing target exhaust gas. An exhaust gas processing device 10 preheats processing target exhaust gas F in the presence of moisture with heat from at least either an electric heater 15 or a heat exchanger 17 and subsequently thermally decomposes the exhaust gas with an atmospheric pressure plasma P. A device main body 11 has a heating decomposition chamber T therein. A plasma generator 14 is of a non-transferred type and is installed at a top surface portion 11a of the device main body 11. A reactor 12 has a cylindrical shape and is installed within the device main body 11 such that an upper end opening 12i thereof is directed toward a plasma emission port 14f of the plasma generator 14. A moisture supply unit 18 is provided at an inlet side of the device main body 11. At least either the electric heater 15 or the heat exchanger 17 is disposed in a first space T1.
摘要:
A method for removing contaminants from industrial exhaust gas. The method includes contacting the exhaust gas with a mist of water and RNH2 (amine) to form a liquid solution of CO2. The method further includes extracting the liquid solution of CO2 and contacting the exhaust gas with granular activated carbon.
摘要:
A system and method for processing unconditioned syngas first removes solids and semi-volatile organic compounds (SVOC), then removes volatile organic compounds (VOC), and then removes at least one sulfur containing compound from the syngas. Additional processing may be performed depending on such factors as the source of syngas being processed, the products, byproducts and intermediate products desired to be formed, captured or recycled and environmental considerations.
摘要:
A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH4, H2O, H2, NF3, SF6, F2, HCl, HF, Cl2, and HBr. Representative condensing abating reagents include, for example, H2, H2O, O2, N2, O3, CO, CO2, NH3, N2O, CH4, and combinations thereof.
摘要:
An apparatus for purifying waste gases for an integrated semiconductor is provided, which includes a cover including a burner mounted thereon to generate a flame and a plurality of waste gas inlet pipes formed on a circumference of the burner to make waste gases flow therethrough; a reactor including upper and lower openings formed thereon so that the cover is detachably coupled to the upper opening, a converging member tapered to have a smaller diameter as going toward a lower portion thereof, and a transport pipe vertically arranged to communicate with an apex of the converging member, in which a water curtain is formed to prevent accumulation of by-products, to burn and discharge the inflow waste gases; and a cleaning portion integrally formed in the reactor to water-clean the burnt waste gases that are discharged into the reactor after passing through the transport pipe to collect particles. Since the burner, the reactor, and the scrubber are integrally formed in a body.
摘要:
A system and method for processing unconditioned syngas first removes solids and semi-volatile organic compounds (SVOC), then removes volatile organic compounds (VOC), and then removes at least one sulfur containing compound from the syngas. Additional processing may be performed depending on such factors as the source of syngas being processed, the products, byproducts and intermediate products desired to be formed, captured or recycled and environmental considerations.
摘要:
An array includes a plurality of refractory bricks, each having a substantially tubular body including a first end, an opposed second end, a central bore extending from the first end to the second end along the longitudinal length thereof and defining an inner surface of the refractory brick, and an outer surface extending from the first end to the second end along the longitudinal length thereof. The outer surface of each refractory brick has a shape that transitions axially between a plurality of hexagonal portions and non-hexagonal portions along the longitudinal lengths thereof, and the plurality of refractory bricks are arranged and interlocked with one another in a vertical and horizontal manner via mating members provided on the hexagonal portions of the outer surfaces thereof. A continuous plenum space is defined by the non-hexagonal portions of the refractory bricks arranged in the array.
摘要:
Improved methods and systems for purifying exhaust gases using regenerative post-combustion systems help reduce operating problems and increase service life of such regenerative post-combustion systems. One such method may involve preheating an exhaust gas to be purified before feeding the exhaust gas into a regenerative post-combustion system. The exhaust gas may be preheated in at least one preheating stage to temperatures between 100° C. and 250° C., for instance, preferably between 100° C. and 200° C., and most preferably between 120° C. and 150° C. Moreover, one regenerative post-combustion system may include a preheating stage, two heat stores, and an oxidation zone disposed between the heat stores for oxidizing harmful constituents present in the exhaust gas.
摘要:
A method for removing contaminants from the combustion gases generated by the incineration of waste. Air is injected into an incineration device along with a fuel and is supplemented by a oxygen feed. The resulting combustion waste gas stream contains contaminants such as nitrogen oxides and is quenched, then fed to a reaction zone where it will contact ozone for a predetermined period of time. The thus treated combustion waste gas stream can be fed to a scrubber assembly where the reaction products formed by the reaction of ozone and the contaminants are removed.