公开(公告)号：US09149551B2

公开(公告)日：2015-10-06

申请号：US13884469

申请日：2011-11-09

Applicant: Kazutoshi Takenoshita ,  Makoto Miyamoto ,  Seiro Yuge ,  Yuki Kumagai ,  Yoko Nakayama ,  Hideo Nojima ,  Myung Chul Kim

Inventor： Kazutoshi Takenoshita ,  Makoto Miyamoto ,  Seiro Yuge ,  Yuki Kumagai ,  Yoko Nakayama ,  Hideo Nojima ,  Myung Chul Kim

IPC: A61L2/00 ,  A62B7/08 ,  B01J19/08 ,  H05F3/00 ,  A61L9/015 ,  A61L9/22 ,  H05H1/24

CPC classification number: A61L9/015 ,  A61L9/22 ,  A61L2209/212 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2245/121

Abstract: The purpose of the present invention is to minimize ozone production while increasing the production of an active species. The plasma generating device (100) comprises: a pair of electrodes (21, 22) in which dielectric films (21a, 21b) are disposed on at least one opposing face; voltage application means (4) for applying a pulse voltage across the electrodes (21, 22) to bring about a plasma discharger; and fluid circulation holes (21b, 22b) that are disposed in locations corresponding to the electrodes (21, 22), respectively, and that are configured to pass entirely therethrough. The plasma generating device is also configured such that a fluid passing through the fluid circulation holes (21b, 22b) comes into contact with the plasma, generating ions or radicals, wherein the voltage applying means (4) varies the peak value and/or the pulse width of the pulse voltage applied across the electrodes (21, 22).

Abstract translation: 本发明的目的是在增加活性物质的生产的同时最小化臭氧产生。 等离子体产生装置（100）包括：一对电极（21,22），其中介电膜（21a，21b）设置在至少一个相对面上; 电压施加装置（4），用于在电极（21,22）之间施加脉冲电压以产生等离子体放电器; 和流体循环孔（21b，22b），其分别设置在与电极（21,22）对应的位置，并且被配置为完全通过。 等离子体产生装置还被构造成使得通过流体循环孔（21b，22b）的流体与等离子体接触，产生离子或自由基，其中电压施加装置（4）改变峰值和/或 施加在电极（21,22）上的脉冲电压的脉冲宽度。

公开(公告)号：US20150265998A1

公开(公告)日：2015-09-24

申请号：US14630957

申请日：2015-02-25

Applicant: NGK INSULATORS, LTD.

Inventor： Yoshimasa KONDO ,  Shoji YOKOI ,  Tatsuya TERAZAWA ,  Naoya TAKASE

IPC: B01J19/08 ,  C01B13/11

CPC classification number: B01J19/088 ,  B01J2219/0809 ,  B01J2219/0815 ,  B01J2219/083 ,  C01B13/11 ,  C01B13/115 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/62 ,  H05H1/2406 ,  H05H2001/2418

Abstract: An electrode structural body includes a first electrode and a second electrode, and further includes a first retainer and a second retainer for fixing the first electrode and the second electrode. The first electrode and the second electrode are separated from each other, their axial directions being parallel to each other. The first electrode contains a first insulating body having a first hollow portion and a first conducting body located in the first hollow portion. The second electrode contains a second insulating body having a second hollow portion and a second conducting body located in the second hollow portion. At least in the first electrode, at least one end surface of the first conducting body is positioned inside the first hollow portion at a distance from one end surface of the first insulating body.

Abstract translation: 电极结构体包括第一电极和第二电极，并且还包括用于固定第一电极和第二电极的第一保持器和第二保持器。 第一电极和第二电极彼此分离，它们的轴向彼此平行。 第一电极包括第一绝缘体，其具有第一中空部分和位于第一中空部分中的第一导电体。 第二电极包含具有第二中空部分的第二绝缘体和位于第二中空部分中的第二导电体。 至少在第一电极中，第一导电体的至少一个端面位于与第一绝缘体的一个端面相距一定距离处的第一中空部内。

公开(公告)号：US20150262804A1

公开(公告)日：2015-09-17

申请号：US14433008

申请日：2013-10-07

Applicant: Sandra MARTÍNEZ JARQUÍN ,  Robert WINKLER

Inventor： Sandra Martínez Jarquín ,  Robert Winkler

IPC: H01J49/10 ,  H05H1/24

CPC classification number: H01J49/105 ,  H01J49/142 ,  H05H1/2406 ,  H05H2001/2437 ,  H05H2001/2443

Abstract: The present invention relates to a non-thermal plasma jet device as spatial ionization source for ambient mass spectrometry of the type which allows a free adjustment of the geometry of the plasma beam, wherein the device comprises a double dielectric barrier probe of non-thermal plasma or NTP probe, which generates a non-thermal plasma jet; a high voltage and high frequency transformer circuit that connects an outer electrode through which it is possible to perform a discharge for the ionization of a gas which produces plasma, and wherein said plasma generator circuit is in turn connected to a source of AC power; an inner electrode which is grounded and allows to perform the discharge for the production of plasma; a storage tank of a gas serving as discharge gas; a test sample on which the non-thermal plasma jet is applied; and a ion transfer adapter to direct the ions produced by the device from the vacuum-free sample into a mass analyzer. The device described allows to directly analyzing live samples (plants, for example) without causing any damage to them.

Abstract translation: 本发明涉及一种非热等离子体喷射装置，其是用于环境质谱的空间电离源，其允许自由调节等离子体束的几何形状，其中该装置包括非热等离子体的双电介质阻挡探针 或NTP探针，其产生非热等离子体射流; 高电压和高频变压器电路，其连接外部电极，通过该外部电极可以执行用于产生等离子体的气体的电离的放电，并且其中所述等离子体发生器电路又连接到AC电源; 内部电极接地并允许进行用于制造等离子体的放电; 用作放电气体的气体的储罐; 其上施加非热等离子体射流的测试样品; 以及离子转移适配器，用于将由装置产生的离子从无真空样品引导到质量分析器中。 所描述的装置允许直接分析活样品（例如植物）而不对它们造成任何损害。

公开(公告)号：US20150258815A1

公开(公告)日：2015-09-17

申请号：US14656552

申请日：2015-03-12

Applicant: Ricoh Company, Ltd.

Inventor： Kengo Tsubaki ,  Satoshi Katoh

IPC: B41J11/00 ,  B41M1/36 ,  H01J37/32 ,  H05H1/24

CPC classification number: B41J11/0015 ,  B41J3/60 ,  B41M1/36 ,  H01J37/32532 ,  H01J37/32889 ,  H01J2237/338 ,  H05H1/2406 ,  H05H2001/2412

Abstract: A treated object modifying apparatus includes a plasma-treating unit that includes a first electrode unit, a second electrode unit, and a dielectric that is interposed between the first electrode unit and the second electrode unit, and that plasma-treats a treated object positioned between the first electrode unit and the dielectric; and a controlling unit that controls the plasma-treating unit so that the amount of plasma energy delivered to any one of sides of the treated object in a duplex treatment that are performed with the one side of the treated object facing the first electrode unit and with the other side of the treated object facing the first electrode unit is different from the amount of plasma energy delivered to any one of the sides of the treated object in a simplex treatment that is performed with the one side of the treated object facing the first electrode unit.

Abstract translation: 处理对象修改装置包括等离子体处理单元，其包括插入在第一电极单元和第二电极单元之间的第一电极单元，第二电极单元和电介质，并且等离子体处理位于 第一电极单元和电介质; 以及控制单元，其控制等离子体处理单元，使得在处理对象的一侧面对第一电极单元执行的双相处理中输送到处理对象的任何一侧的等离子体能量的量，并且与 面对第一电极单元的被处理物体的另一侧不同于在处理物体的面对第一电极的一侧进行的单面处理中输送到被处理物体的任一侧的等离子体能量的量 单元。

公开(公告)号：US09131595B2

公开(公告)日：2015-09-08

申请号：US12521473

申请日：2007-12-28

Applicant: Yves Lodewijk Maria Creyghton ,  Marcel Simor ,  Timo Huijser

Inventor： Yves Lodewijk Maria Creyghton ,  Marcel Simor ,  Timo Huijser

IPC: B01J19/08 ,  H05H1/24

CPC classification number: H05H1/2406 ,  H05H2001/245

Abstract: The invention relates to a surface dielectric barrier discharge plasma unit. The unit comprises a solid dielectric structure provided with an interior space wherein an interior electrode is arranged. Further, the unit comprises a further electrode for generating in concert with the interior electrode a surface dielectric barrier discharge plasma. The unit is also provided with a gas flow path along a surface of the structure.

Abstract translation: 本发明涉及一种表面电介质势垒放电等离子体单元。 该单元包括设置有内部空间的固体电介质结构，其中布置有内部电极。 此外，该单元包括用于与内部电极一起产生表面电介质势垒放电等离子体的另一电极。 该单元还设置有沿着结构的表面的气体流动路径。

公开(公告)号：US09117616B2

公开(公告)日：2015-08-25

申请号：US14414517

申请日：2013-06-27

Applicant: SP TECH CO., LTD.

Inventor： Hee Sik Sohn

IPC: H01J1/88 ,  H01J19/42 ,  H05H1/24 ,  H01J1/02 ,  A61L9/22 ,  A61L2/14

CPC classification number: H01J1/88 ,  A61L2/14 ,  A61L9/22 ,  H01J1/02 ,  H01T19/04 ,  H01T23/00 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2437

Abstract: Provided is a dielectric barrier discharge-type electrode structure for generating plasma. The electrode structure, according to the present invention, comprises: an upper conductive body electrode and a lower conductive body electrode; at least one conductive body electrode protrusion portion, which is formed on at least one surface of the upper conductive body electrode and/or the lower conductive body electrode; a dielectric layer which is formed on at least one of the inner surfaces of the upper conductive body electrode and the lower conductive body electrode that face each other, so as to have a substantially uniform thickness; and a specific gap (d) which is formed between the upper and lower conductive body electrodes and the dielectric layer, or between dielectric layers, due to the protruding effect of the conductive body electrode protrusion portion when the upper conductive body electrode and the lower conductive body electrodes come into close contact, wherein the plasma is generated by applying a pulse power or an alternating power to the upper conductive body electrode and the lower conductive body electrode.

Abstract translation: 提供一种用于产生等离子体的电介质阻挡放电型电极结构。 根据本发明的电极结构包括：上导电体电极和下导电体电极; 形成在上导电体电极和/或下导电体电极的至少一个表面上的至少一个导电体电极突出部分; 形成在所述上导电体电极和所述下导电体电极的至少一个内表面上彼此面对的电介质层，以具有基本均匀的厚度; 以及由上导电体电极和下导电体的导电体电极突出部的突出效果而在上下导电体电极与电介质层之间或电介质层之间形成的特定间隙（d） 体电极紧密接触，其中通过向上导电体电极和下导电体电极施加脉冲功率或交流电力来产生等离子体。

公开(公告)号：US09114373B2

公开(公告)日：2015-08-25

申请号：US14274261

申请日：2014-05-09

Applicant: Saga University

Inventor： Tatsuya Misawa ,  Nobuya Hayashi

IPC: H01J17/26 ,  H01J61/28 ,  B01J19/08 ,  H05H1/24

CPC classification number: B01J19/088 ,  B01J19/08 ,  B01J2219/0809 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2418

Abstract: There is provided a plasma generation device capable of suppressing arc discharge in which discharge is localized to cause a high temperature, and allowing atmospheric discharge plasma to be stably generated with a high generation efficiency in a low temperature at about a room temperature without being spatially biased. The plasma generation device arranged with a plurality of electrodes facing each other includes a discharge position control unit, which is arranged between each of the plurality of electrodes, and is formed by containing an inverse characteristic material composed of a fluid having polarizability and a property that dielectric constant decreases with an increase in temperature, in a container formed of a dielectric material, wherein the inverse characteristic material is spaced apart from each of the plurality of electrodes.

Abstract translation: 提供了一种能够抑制放电定位以产生高温的电弧放电的等离子体产生装置，并且在大约室温下在低温下以高发电效率稳定地产生大气放电等离子体，而不会被空间偏置 。 布置有彼此面对的多个电极的等离子体产生装置包括排出位置控制单元，其布置在多个电极中的每一个之间，并且由包含由具有极化性的流体构成的反向特性材料形成， 在由电介质材料形成的容器中，介电常数随着温度的升高而降低，其中反向特征材料与多个电极中的每一个间隔开。

公开(公告)号：US20150228548A1

公开(公告)日：2015-08-13

申请号：US14179099

申请日：2014-02-12

Applicant: International Business Machines Corporation

Inventor： Shawn A. Adderly ,  Jeffrey P. Gambino ,  Eric A. Joseph ,  Anthony C. Speranza

IPC: H01L21/66 ,  H01L21/768 ,  C23C16/30 ,  H01J37/32 ,  C23C16/00

CPC classification number: H01L22/12 ,  C23C16/04 ,  C23C16/513 ,  G01N23/2252 ,  G01N2223/6116 ,  G01N2223/645 ,  H01J37/32082 ,  H01J37/32366 ,  H01J37/32449 ,  H01J37/32568 ,  H01J2237/2817 ,  H01J2237/334 ,  H01L21/485 ,  H01L21/67069 ,  H01L21/67115 ,  H01L21/76892 ,  H01L21/76894 ,  H05H1/2406 ,  H05H2001/2431

Abstract: An apparatus for and methods of repairing and manufacturing integrated circuits using the apparatus. The apparatus, comprising: a vacuum chamber containing: a movable stage configured to hold a substrate; an inspection and analysis probe; a heat source; a gas injector; and a gas manifold connecting multiple gas sources to the gas injector.

Abstract translation: 使用该装置修复和制造集成电路的装置和方法。 该装置包括：真空室，包含：可移动台，其构造成保持基板; 检查和分析探针; 热源; 气体喷射器 以及将多个气体源连接到气体喷射器的气体歧管。

公开(公告)号：US20150191371A1

公开(公告)日：2015-07-09

申请号：US14662182

申请日：2015-03-18

Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

Inventor： Masaki FUJIKANE ,  Mari ONODERA ,  Hironori KUMAGAI ,  Shin-ichi IMAI

IPC: C02F1/46 ,  B01J19/08

CPC classification number: C02F1/4608 ,  B01J19/088 ,  B01J2219/0809 ,  B01J2219/0815 ,  B01J2219/0894 ,  C02F2201/46 ,  C02F2201/46175 ,  C02F2303/04 ,  H05H1/2406 ,  H05H2001/2418

Abstract: The present disclosure provides a liquid treatment device, a liquid treatment method, and a plasma treatment liquid each capable of efficiently generating plasma and treating a liquid in a short time period. A liquid treatment device according to the present disclosure includes a first electrode, a second electrode disposed in a liquid to be treated, an insulator disposed around the first electrode with a space between the first electrode and the insulator, the insulator has an opening portion in a position in contact with the liquid to be treated, a power supply that applies voltage between the first electrode and the second electrode, and a supply device supplying a liquid to the space before the power source applies the voltage.

Abstract translation: 本公开内容提供了能够在短时间内有效地产生等离子体和处理液体的液体处理装置，液体处理方法和等离子体处理液。 根据本公开的液体处理装置包括第一电极，设置在待处理液体中的第二电极，在第一电极周围设置有在第一电极和绝缘体之间具有空间的绝缘体，绝缘体具有开口部分 与待处理的液体接触的位置，在第一电极和第二电极之间施加电压的电源以及在电源施加电压之前向空间供应液体的供应装置。

公开(公告)号：US20150157870A1

公开(公告)日：2015-06-11

申请号：US14564717

申请日：2014-12-09

Applicant: Sameer Kalghatgi ,  Tsung-Chan Tsai ,  Daphne Pappas Antonakas ,  Robert L. Gray

Inventor： Sameer Kalghatgi ,  Tsung-Chan Tsai ,  Daphne Pappas Antonakas ,  Robert L. Gray

IPC: A61N1/44 ,  A61F7/02

CPC classification number: A61N1/44 ,  A61F7/02 ,  A61L2/14 ,  A61N1/0468 ,  H01J37/32348 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437 ,  H05H2277/10

Abstract: Exemplary embodiments of shape conforming dielectric barrier discharge (DBD) plasma generators are disclosed herein. One exemplary embodiment includes a flexible pad and a plurality of electrodes located in the pad within close proximity of each other, and a flexible dielectric barrier surrounding the plurality of electrodes and separating the plurality of electrodes from each other. Wherein when a high voltage pulse is applied to one or more of the plurality of electrodes, plasma is produced between a surface of the flexible pad and a portion of the body in close proximity to the flexible pad.

Abstract translation: 本文公开了形状一致的电介质势垒放电（DBD）等离子体发生器的示例性实施例。 一个示例性实施例包括柔性焊盘和位于焊盘中彼此靠近的多个电极以及围绕多个电极并将多个电极彼此分离的柔性电介质阻挡层。 其中当高电压脉冲被施加到所述多个电极中的一个或多个电极时，在所述柔性焊盘的表面和所述主体的靠近所述柔性焊盘的部分之间产生等离子体。