Etching method
    2.
    发明授权

    公开(公告)号:US12119233B2

    公开(公告)日:2024-10-15

    申请号:US17595416

    申请日:2021-01-12

    申请人: SHOWA DENKO K.K.

    发明人: Kazuma Matsui

    IPC分类号: H01L21/311

    CPC分类号: H01L21/31116 H01L21/31122

    摘要: An etching method capable of selectively etching an oxide, which method includes an etching step in which an etching target (12) including an oxide is placed in a chamber (10), and the oxide included in the etching target (12) is etched in the chamber (10) using an etching gas containing a fluorine-containing compound including a functional group represented by the chemical formula below:




    wherein a symbol * means a bonding point with another atom or atomic group. The oxide is at least one of a metal oxide or a semimetal oxide. Further, in the etching step, the etching is performed without generating a plasma of the etching gas in the chamber (10).

    Recording and reproducing device with medium regulating portion

    公开(公告)号:US12106775B2

    公开(公告)日:2024-10-01

    申请号:US18460989

    申请日:2023-09-05

    发明人: Fuminobu Oohashi

    IPC分类号: G11B25/04 G11B33/08 G11B5/53

    摘要: A recording and reproducing device including, a case; at least one recording medium having a disk-shape, a motor configured to rotate the at least one recording medium, a head configured to read or write information from or to the at least one recording medium, and an actuator configured to drive the head to scan in a radial direction of the at least one recording medium which are provided in the case; and a regulating portion configured to, when an external shock is applied to the at least one recording medium, contact an outer peripheral edge of the at least one recording medium to regulate displacements of the at least one recording medium due to bending of the at least one recording medium, wherein the regulating portion includes a regulating member which is movable in an axial direction parallel to a rotation axis of the at least one recording medium.

    MATERIAL DESIGN SUPPORT APPARATUS, MATERIAL DESIGN SUPPORT METHOD, AND PROGRAM

    公开(公告)号:US20240319706A1

    公开(公告)日:2024-09-26

    申请号:US18578973

    申请日:2022-07-15

    IPC分类号: G05B19/4097

    摘要: A material design support apparatus for supporting optimization of a design condition for a material, the material design support apparatus including: a design condition setting unit configured to set a range of a design condition for a material; a required characteristic setting unit configured to set a range of a required characteristic of the material; an exhaustive prediction point generation unit configured to generate a plurality of exhaustive prediction points within the range of the design condition; a prediction unit configured to input the exhaustive prediction points into a trained model in which a correspondence between a design condition for the material and a characteristic value of the material is learned, thereby to predict a characteristic value of the material; and a design condition adjustment unit configured to adjust a range of the design condition for the material in which a plurality of exhaustive prediction points are subsequently generated.

    Technical knowledge prediction apparatus, method, and program

    公开(公告)号:US12099935B2

    公开(公告)日:2024-09-24

    申请号:US17292493

    申请日:2019-11-22

    申请人: SHOWA DENKO K.K.

    IPC分类号: G06N5/02 G06N20/00

    CPC分类号: G06N5/02 G06N20/00

    摘要: Technical knowledge which is difficult for the expert to express in words or numerical form is predicted and reproduced. A technical knowledge prediction apparatus according to one embodiment of the present invention includes a problem setting unit configured to automatically create and set a problem which includes a control factor of a manufacturing step, and a variable of the control factor, an answer acquiring unit configured to acquire an answer with respect to the problem and indicating a decision of the manufacturing step, a query acquiring unit configured to acquire a query, and a prediction output unit configured to predict and output an answer corresponding to the query acquired by the query acquiring unit, based on a corresponding relationship between the problem and the answer.

    Method for producing fluorine gas and device for producing fluorine gas

    公开(公告)号:US12098468B2

    公开(公告)日:2024-09-24

    申请号:US17595713

    申请日:2020-12-11

    申请人: SHOWA DENKO K.K.

    摘要: A method for producing fluorine gas including electrolyzing an electrolyte in an electrolytic cell, measuring an intensity of sound generated near an anode in an inside of the electrolytic cell as the electrolyte is electrolyzed in the electrolyzing, and sending a fluid generated in the inside of the electrolytic cell in the electrolyzing the electrolyte, from the inside to the outside of the electrolytic cell through a flow path. The flow path is switched in accordance with the intensity of sound measured, such that the fluid is sent to a first flow path when the intensity of sound measured in the measuring an intensity of sound is not more than a predetermined reference value, or the fluid is sent to a second flow path when the intensity of sound measured in the measuring an intensity of sound is more than the predetermined reference value.

    Document retrieval device
    9.
    发明授权

    公开(公告)号:US12093292B2

    公开(公告)日:2024-09-17

    申请号:US18245061

    申请日:2021-09-07

    CPC分类号: G06F16/332 G06F16/338

    摘要: To improve accuracy in a document search for a document that includes a typographical error. A document retrieval device according to one embodiment of the present invention includes a misidentification table storing a correctly identified character string and a misidentified character string. The document retrieval device includes a document searcher. The document searcher obtains a search character string, and retrieves the search character string from both a document and a character string that is obtained by changing the misidentified character string included in the document to the correctly identified character string.