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35 条记录 (耗时 0.019 秒)

    Method and apparatus for separating disc-shaped substrates
    3.
    发明授权
    Method and apparatus for separating disc-shaped substrates 失效
    用于分离盘形基板的方法和装置

    公开(公告)号：US07520954B2

    公开(公告)日：2009-04-21

    申请号：US11085430

    申请日：2005-03-21

    申请人： Martin Kratzer ,  Bernd Heinz

    发明人： Martin Kratzer ,  Bernd Heinz

    IPC分类号： B32B38/10

    CPC分类号： G11B7/26 ,  G11B7/24038 ,  Y10T29/49821 ,  Y10T29/49822 ,  Y10T29/53683 ,  Y10T156/1126 ,  Y10T156/1132 ,  Y10T156/1939 ,  Y10T156/1944

    摘要： A method for separating bonded substrates and a respective apparatus used for that method is disclosed. The method comprises positioning the bonded substrates (1) in an evacuable chamber (2) by respective means, detaching a space (10) from that evacuable chamber by means of a sealing arrangement (4) so that said space comprises a partial area of the substrates with at least one gap (5) between the bonded substrates (1), lowering the pressure in the vacuum chamber (2) while maintaining the pressure in the space (10), thereby causing the bonded substrates to separate.

    摘要翻译： 公开了一种用于分离粘结基片的方法和用于该方法的相应装置。 该方法包括通过相应的装置将接合的基板（1）定位在可抽空的室（2）中，借助于密封装置（4）将空间（10）从该可抽空腔中分离出来，使得所述空间包括 在所述接合的基板（1）之间具有至少一个间隙（5）的基板，同时在保持所述空间（10）中的压力的​​同时降低所述真空室（2）中的压力，从而使所述接合的基板分离。

    Cathodic sputtering device
    4.
    发明授权
    Cathodic sputtering device 失效
    阴极溅射装置

    公开(公告)号：US6096180A

    公开(公告)日：2000-08-01

    申请号：US171192

    申请日：1999-05-26

    申请人： Eggo Sichmann

    发明人： Eggo Sichmann

    IPC分类号： C23C14/34 ,  H01J37/34 ,  C23C14/00

    CPC分类号： C23C14/3407 ,  H01J37/3405

    摘要： A target for a cathode sputtering device for producing coatings on a substrate (27) by a sputtering cathode (2), which can be introduced into a vacuum chamber, the target having a center axis (44) and being dynamically balanced with respect to the center axis (44) and having a back surface (40) and a target surface (41), the target surface (41) being spaced from the back surface and being concave as a new target surface. The target surface (41) is formed by at least two concentric target surface portions which are inclined with respect to each other, the target surface portions including an outer, radially inwardly extending target surface portion (49, 76) enlarging conically away from the center axis in a direction away from the back surface, and an inner, radially outwardly extending target surface portion (78') narrowing conically toward the center axis in the direction away from the back surface. The target surface (41) has a radially outer edge delimited by an axially projecting edge (72) being inclined with respect to the center axis (44). A concentric target surface intermediate portion (50) extending in a plane perpendicular to the center axis (44) is provided between the outer target surface portion (49) and the axially projecting edge (72).

    摘要翻译： PCT No.PCT / EP97 / 01871 Sec。 371日期1999年5月26日 102（e）日期1999年5月26日PCT提交1997年4月14日PCT公布。 公开号WO97 / 39161 日期1997年10月23日阴极溅射装置的目的是通过溅射阴极（2）在衬底（27）上生产涂层的阴极溅射装置，其可以被引入到真空室中，靶具有中心轴（44）并且是动态的 相对于中心轴线（44）平衡并且具有后表面（40）和目标表面（41），目标表面（41）与后表面间隔开并且作为新的目标表面是凹的。 目标表面（41）由相对于彼此倾斜的至少两个同心目标表面部分形成，目标表面部分包括从中心扩大圆锥形的外部径向向内延伸的目标表面部分（49,76） 轴线，以及沿着远离背面的方向朝向中心轴线缩小的内部径向向外延伸的目标表面部分（78'）。 目标表面（41）具有由相对于中心轴线（44）倾斜的轴向突出的边缘（72）限定的径向外边缘。 在外目标表面部分（49）和轴向突出的边缘（72）之间设置有在垂直于中心轴线（44）的平面内延伸的同心目标表面中间部分（50）。

    PLASMA TREATMENT SYSTEM AND PLASMA TREATMENT METHOD
    7.
    发明申请
    PLASMA TREATMENT SYSTEM AND PLASMA TREATMENT METHOD 有权

    公开(公告)号：US20220336188A1

    公开(公告)日：2022-10-20

    申请号：US17640782

    申请日：2020-08-11

    申请人： SINGULUS TECHNOLOGIES AG

    发明人： Frank May ,  Bernhard Cord ,  Simon Hübner ,  Peter Wohlfart

    IPC分类号： H01J37/32

    摘要： A treatment system (100) comprises a process chamber (101) for dynamic or static treatment of at least one substrate. An inductively coupled plasma source, ICP source (120, 120′), comprises at least one inductor (130a, 130b) extending along the longitudinal direction of the ICP source (120, 120′), a gas supply device (141, 142) for one or a plurality of process gases, and a gas directing arrangement (150) disposed in the process chamber (101), said gas directing arrangement (150) extending along the longitudinal direction of the ICP source (120, 120′) and partially surrounding the at least one inductor (130a, 130b).

    Continuous system
    9.
    发明授权
    Continuous system 有权

    公开(公告)号：US10167548B2

    公开(公告)日：2019-01-01

    申请号：US15116049

    申请日：2015-12-11

    申请人： SINGULUS TECHNOLOGIES AG

    发明人： Stefan Kempf ,  Holger Schramm

    IPC分类号： B65G29/00 ,  C23C14/56 ,  B65G35/06 ,  C23C16/54

    摘要： A continuous system for transmitting accelerating forces and decelerating forces by interlocking, consisting of at least one carrier system having at least two connecting elements, a plurality of transport systems arranged one behind the other, wherein each transport system has a cam drum or cylindrical cam having a helical groove and the connecting elements of the carrier system are suitable for interlockingly engaging with the groove of the cam drum, and at least one motor, which drives the cam drums.

    Method and device for identifying objects and for tracking objects in a production process
    10.
    发明授权
    Method and device for identifying objects and for tracking objects in a production process 有权
    用于在生产过程中识别对象和跟踪对象的方法和设备

    公开(公告)号：US08903125B2

    公开(公告)日：2014-12-02

    申请号：US12998830

    申请日：2010-04-06

    申请人： Edgar Rüth ,  Wolfgang Becker

    发明人： Edgar Rüth ,  Wolfgang Becker

    IPC分类号： G06K9/00 ,  G06T7/00 ,  H01L21/67

    CPC分类号： G06T7/001 ,  G06K9/00577 ,  G06T2207/30148 ,  H01L21/67294

    摘要： An object (1) is identified based on the unique, characteristic, optical properties (10) before the object is processed in a facility (3). In addition, a clear identification is assigned to the object (1). All production data and process parameters for all facilities (3) through which the object (1) passes are stored together with the identification in an electronic data processing means (6). After the object (1) has passed through a facility (3), the object (1) can be identified again based on its unique, characteristic, optical properties (10). Thus, it can be examined whether the system for tracking the object (1) within a production facility (3) functions without errors. Alternatively, the new identification can also be used to assign a new identification to an object (1) for which the unique, characteristic, optical properties (10) have changed during the production process.

    摘要翻译： 基于在设备（3）中处理对象之前的唯一的，特征的光学特性（10）来识别对象（1）。 另外，将清楚的识别分配给对象（1）。 对象（1）通过的所有设施（3）的所有生产数据和处理参数与标识一起存储在电子数据处理装置（6）中。 在物体（1）通过设施（3）之后，可以基于其唯一的，特性的光学特性（10）再次识别物体（1）。 因此，可以检查用于跟踪生产设施（3）内的物体（1）的系统是否没有错误地起作用。 或者，新标识也可以用于向生产过程中特有的，特性的光学特性（10）已经改变的对象（1）分配新的标识。