Semiconductor device having a decoupling capacitor and method of making
    1.
    发明授权
    Semiconductor device having a decoupling capacitor and method of making 失效
    具有去耦电容器的半导体器件及其制造方法

    公开(公告)号:US5920102A

    公开(公告)日:1999-07-06

    申请号:US867663

    申请日:1997-05-30

    IPC分类号: H01L27/06 H01L29/76 H01L29/94

    CPC分类号: H01L27/0629

    摘要: A semiconductor device (10) is formed in a pedestal structure (16) overlying an epitaxial layer (12) and a semiconductor substrate (11). The semiconductor device (10) includes a doped region (13) that forms a PN junction with the epitaxial layer (12). The semiconductor device (10) also includes a dielectric layer (22) that has an opening (23) that exposes a portion of the doped region (13) and an opening (24) that exposes a portion of the epitaxial layer (12). The openings (23, 24) are filled with a conductive material (36, 37) to provide contacts (100, 101). Due to the presence of the PN junction, the contacts (100, 101) are capacitively coupled to each other.

    摘要翻译: 半导体器件(10)形成在覆盖外延层(12)和半导体衬底(11)的基座结构(16)中。 半导体器件(10)包括与外延层(12)形成PN结的掺杂区域(13)。 半导体器件(10)还包括具有露出掺杂区域(13)的一部分的开口(23)和露出外延层(12)的一部分的开口(24)的电介质层(22)。 开口(23,24)填充有导电材料(36,37)以提供触点(100,101)。 由于PN结的存在,触点(100,101)彼此电容耦合。

    Insulated gate semiconductor device and method of manufacture
    4.
    发明授权
    Insulated gate semiconductor device and method of manufacture 失效
    绝缘栅半导体器件及其制造方法

    公开(公告)号:US5817561A

    公开(公告)日:1998-10-06

    申请号:US720509

    申请日:1996-09-30

    摘要: An insulated gate semiconductor device (10) has a double spacer gate structure (45). To form the gate structure (45), a stack having sidewalls (22) is formed over a major surface (12) of a semiconductor substrate (11). A gate oxide (23) is then formed over the major surface (12) adjacent the sidewalls (22). A first polysilicon layer (24) is deposited on the gate oxide (23) and the stack. The first polysilicon layer (24) is etched to form a first conductive spacer (32) of the gate structure (45). A second polysilicon layer (44) is deposited on first spacer (32) and the stack. The second polysilicon layer (44) is then etched to form a second conductive spacer (46) of the gate structure (45). Because the double spacer gate structure (45) is formed without relying on photolithographic techniques, its size is smaller than the size of a gate structure formed using conventional photolithography.

    摘要翻译: 绝缘栅半导体器件(10)具有双间隔栅极结构(45)。 为了形成栅极结构(45),在半导体衬底(11)的主表面(12)上形成具有侧壁(22)的叠层。 然后在邻近侧壁(22)的主表面(12)上形成栅极氧化物(23)。 第一多晶硅层(24)沉积在栅极氧化物(23)和堆叠上。 蚀刻第一多晶硅层(24)以形成栅极结构(45)的第一导电间隔物(32)。 第二多晶硅层(44)沉积在第一间隔物(32)和堆叠体上。 然后蚀刻第二多晶硅层(44)以形成栅极结构(45)的第二导电间隔物(46)。 由于双重间隔栅极结构(45)不依赖于光刻技术而形成,因此其尺寸小于使用常规光刻形成的栅极结构的尺寸。

    Insulated gate semiconductor device having a cavity under a portion of a
gate structure and method of manufacture
    6.
    发明授权
    Insulated gate semiconductor device having a cavity under a portion of a gate structure and method of manufacture 失效
    绝缘栅半导体器件具有在栅极结构的一部分下方的空腔和制造方法

    公开(公告)号:US5612244A

    公开(公告)日:1997-03-18

    申请号:US408657

    申请日:1995-03-21

    摘要: An insulated gate field effect transistor (10) having an reduced gate to drain capacitance and a method of manufacturing the field effect transistor (10). A dopant well (13) is formed in a semiconductor substrate (11). A gate oxide layer (26) is formed on the dopant well (13) wherein the gate oxide layer (26) and a gate structure (41) having a gate contact portion (43) and a gate extension portion (44). The gate contact portion (43) permits electrical contact to the gate structure (41), whereas the gate extension portion (44) serves as the active gate portion. A portion of the gate oxide (26) adjacent the gate contact portion (43) is thickened to lower a gate to drain capacitance of the field effect transistor (10) and thereby increase a bandwidth of the insulated gate field effect transistor (10).

    摘要翻译: 具有减小的栅极 - 漏极电容的绝缘栅场效应晶体管(10)和制造场效应晶体管(10)的方法。 掺杂剂阱(13)形成在半导体衬底(11)中。 栅极氧化物层(26)形成在掺杂剂阱(13)上,其中栅极氧化物层(26)和具有栅极接触部分(43)和栅极延伸部分(44)的栅极结构(41)。 栅极接触部分(43)允许与栅极结构(41)的电接触,而栅极延伸部分(44)用作有源栅极部分。 与栅极接触部分(43)相邻的栅极氧化物(26)的一部分被加厚以降低场效应晶体管(10)的栅极到漏极电容,从而增加绝缘栅极场效应晶体管(10)的带宽。

    Semiconductor component including MOSFET with asymmetric gate electrode
where the drain electrode over portions of the lightly doped diffusion
region without a gate dielectric
    7.
    发明授权
    Semiconductor component including MOSFET with asymmetric gate electrode where the drain electrode over portions of the lightly doped diffusion region without a gate dielectric 有权
    半导体元件包括具有非对称栅极电极的MOSFET,其中漏电极在轻掺杂扩散区的部分上而没有栅极电介质

    公开(公告)号:US6153905A

    公开(公告)日:2000-11-28

    申请号:US502694

    申请日:2000-02-11

    CPC分类号: H01L27/0623 H01L21/8249

    摘要: A semiconductor component includes an asymmetric transistor having two lightly doped drain regions (1300, 1701), a channel region (1702), a source region (1916) located within the channel region (1702), a drain region located outside the channel region (1702), a dielectric structure (1404) located over at least one of the two lightly doped drain regions (1300, 1701), two gate electrodes (1902, 1903) located at opposite sides of the dielectric structure (1404), a drain electrode (1901) overlying the drain region (1915), and a source electrode (1904) overlying the source region (1916). The semiconductor component also includes another transistor having an emitter electrode (122) located between a base electrode (121) and a collector electrode (123) where the base electrode (121) is formed over a dielectric structure (1405).

    摘要翻译: 半导体部件包括具有两个轻掺杂漏极区域(1300,1701),沟道区域(1702),位于沟道区域(1702)内的源极区域(1916))的不对称晶体管,位于沟道区域外部的漏极区域 1702),位于两个轻掺杂漏极区(1300,1701)中的至少一个上的电介质结构(1404),位于电介质结构(1404)的相对侧的两个栅电极(1902,1903),漏电极 (1901)和覆盖源区(1916)的源电极(1904)。 该半导体元件还包括另一晶体管,其具有位于介电结构(1405)之间形成基极(121)的基极(121)和集电极(123)之间的发射极(122)。

    Differential amplifier having unilateral field effect transistors and
process of fabricating
    9.
    发明授权
    Differential amplifier having unilateral field effect transistors and process of fabricating 失效
    具有单向场效应晶体管的差分放大器及其制造工艺

    公开(公告)号:US5811341A

    公开(公告)日:1998-09-22

    申请号:US762170

    申请日:1996-12-09

    摘要: A differential amplifier (10) includes three unilateral field effect transistors (12, 14, 16) formed in a common well (40) of a semiconductor material. Each of the three unilateral field effect transistors (12, 14, 16) has an asymmetric channel doping profile. The performance of the differential amplifier (10) is significantly improved by properly orienting the three unilateral field effect transistors (12, 14, 16).

    摘要翻译: 差分放大器(10)包括形成在半导体材料的共同阱(40)中的三个单边场效应晶体管(12,14,16)。 三个单侧场效应晶体管(12,14,16)中的每一个具有非对称沟道掺杂分布。 通过适当地定向三个单边场效应晶体管(12,14,16),差分放大器(10)的性能得到显着提高。

    Diode-connected semiconductor device and method of manufacture
    10.
    发明授权
    Diode-connected semiconductor device and method of manufacture 失效
    二极管连接的半导体器件及其制造方法

    公开(公告)号:US5714393A

    公开(公告)日:1998-02-03

    申请号:US762229

    申请日:1996-12-09

    CPC分类号: H01L27/0629

    摘要: A compact diode-connected semiconductor device (20) and a method of manufacturing the field effect transistor (10). A doped layer (44) is formed in a semiconductor substrate (41) which serves as a drain extension region. An oxide layer (46) is formed on the semiconductor substrate (41) and an opening (50) is formed in the oxide layer (46). A gate structure (81) having an active gate portion (78) and a gate shorting structure (22) are formed on the oxide layer (46). The gate shorting structure (22) and the portion of the semiconductor substrate (41) adjacent the active gate portion (78) are doped with an impurity material of the same conductivity type as the doped layer (44). The gate shorting structure (22) serves as a source of impurity material for the drain region.

    摘要翻译: 紧凑二极管连接的半导体器件(20)和制造场效应晶体管(10)的方法。 掺杂层(44)形成在用作漏极延伸区域的半导体衬底(41)中。 在半导体基板(41)上形成氧化物层(46),在氧化物层(46)上形成开口(50)。 具有有源栅极部分(78)和栅极短路结构(22)的栅极结构(81)形成在氧化物层(46)上。 栅极短路结构(22)和与有源栅极部分(78)相邻的半导体衬底(41)的部分掺杂有与掺杂层(44)相同导电类型的杂质材料。 栅极短路结构(22)用作漏极区域的杂质材料源。