Chemical vapor deposition reactor that pre-heats applied gas and substrate before reaction
    1.
    发明申请
    Chemical vapor deposition reactor that pre-heats applied gas and substrate before reaction 审中-公开
    化学气相沉积反应器在反应前预加热气体和底物

    公开(公告)号:US20080047489A1

    公开(公告)日:2008-02-28

    申请号:US11595903

    申请日:2006-11-13

    IPC分类号: C23C16/00

    CPC分类号: C23C16/509 C23C16/4557

    摘要: A CVD (chemical vapor deposition) reactor is disclosed to include a reaction chamber, a gas heater, a substrate holder, a substrate heater, hot filaments, an electric field generator, and a magnetic field generator. By means of preheating applied gas with the gas heater and heating the substrate with the substrate holder and the hot filaments, the gas and substrate heating speed is accelerated, thereby saving much deposition time and greatly improving deposition efficiency. Matching with the electric field generator and the magnetic field generator, the ionization of applied gas in the reaction chamber is enhanced and, the uniformity of the thickness of deposition of metal substance on the surface of the substrate(s) is increased.

    摘要翻译: 公开了一种CVD(化学气相沉积)反应器,包括反应室,气体加热器,衬底保持器,衬底加热器,热丝,电场发生器和磁场发生器。 通过利用气体加热器对施加的气体进行预加热,并加热衬底和热丝,使气体和衬底加热速度加快,从而节省了大量沉积时间并大大提高了沉积效率。 与电场发生器和磁场发生器匹配,提高反应室中施加气体的离子化,并且提高金属物质在基片表面上的沉积厚度的均匀性。

    Diamond diaphragm
    4.
    发明申请
    Diamond diaphragm 审中-公开
    金刚石隔膜

    公开(公告)号:US20070042185A1

    公开(公告)日:2007-02-22

    申请号:US11504645

    申请日:2006-08-16

    摘要: A method for fabricating a diamond diaphragm is provided, wherein a non-homogeneous energy, generated by a hot wire, plasma, or flame, for activating and dissociating gas is provided to pass above a mold. Due to different distances between a curved surface of the mold and the non-homogeneous energy, different heating effects are produced on the surface of the mold. When the diamond material is coated and grows on the surface of the mold, the growth rate of the diamond material appears to be different by location, thus, the diamond diaphragm has a non-homogeneous vibration characteristic, and thereby having a response bandwidth wider than that of a diamond diaphragm with homogeneous vibration characteristic.

    摘要翻译: 提供一种用于制造金刚石膜片的方法,其中提供用于激活和解离气体的由热丝,等离子体或火焰产生的非均匀能量以通过模具上方。 由于模具的曲面与非均匀能量之间的距离不同,在模具表面产生不同的加热效果。 当金刚石材料被涂覆并在模具的表面上生长时,金刚石材料的生长速率似乎不同于位置,因此金刚石隔膜具有非均匀的振动特性,从而具有比 具有均匀振动特性的金刚石隔膜。