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    Embedded motion sensing technology for integration within commercial ultrasound probes
    1.
    发明授权
    Embedded motion sensing technology for integration within commercial ultrasound probes 有权

    公开(公告)号：US10026338B2

    公开(公告)日：2018-07-17

    申请号：US13481725

    申请日：2012-05-25

    申请人： Eric Savitsky ,  Dan Katz ,  Gabriele Nataneli

    发明人： Eric Savitsky ,  Dan Katz ,  Gabriele Nataneli

    IPC分类号： A61B8/00 ,  G09B23/28

    摘要： An ultrasound system including an ultrasound machine and an ultrasound probe. The ultrasound probe includes an ultrasound transducer, ultrasound circuitry, a six degree of freedom (6-DOF) sensor, and a probe housing. The probe housing encases the ultrasound transducer and the 6-DOF sensor. By embedding motion-sensing technology directly within the housing of the ultrasound transducer, the position and orientation of the ultrasound probe can be tracked in an automated manner in relation to an indicator mark on the ultrasound screen. This allows assisting technologies to mitigate human error that arises from misalignment of the transducer indicator.

    Substrate processing with rapid temperature gradient control
    2.
    发明授权
    Substrate processing with rapid temperature gradient control 有权
    基板加工快速温度梯度控制

    公开(公告)号：US09275887B2

    公开(公告)日：2016-03-01

    申请号：US11778019

    申请日：2007-07-14

    申请人： Alexander Matyushkin ,  Dan Katz ,  John Holland ,  Theodoros Panagopoulos ,  Michael D. Willwerth

    发明人： Alexander Matyushkin ,  Dan Katz ,  John Holland ,  Theodoros Panagopoulos ,  Michael D. Willwerth

    IPC分类号： B05C11/00 ,  H01L21/683 ,  H01L21/67 ,  B05C13/00

    CPC分类号： H05B3/0047 ,  B05C13/00 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6831 ,  H01L21/6833

    摘要： A substrate processing chamber comprises an electrostatic chuck comprising a ceramic puck having a substrate receiving surface and an opposing backside surface. In one version, the ceramic puck comprises a thickness of less than 7 mm. An electrode is embedded in the ceramic puck to generate an electrostatic force to hold a substrate, and heater coils in the ceramic puck allow independent control of temperatures at different heating zones of the puck. A chiller provides coolant to coolant channels in a base below the ceramic puck. A controller comprises temperature control instruction sets which set the coolant temperature in the chiller in relation prior to ramping up or down of the power levels applied to the heater.

    摘要翻译： 基板处理室包括静电卡盘，该静电卡盘包括具有基板接收表面和相对的背面的陶瓷盘。 在一个版本中，陶瓷盘包括小于7mm的厚度。 电极嵌入陶瓷盘中以产生静电力来保持基板，并且陶瓷盘中的加热器线圈允许独立地控制在不同加热区域的温度。 冷却器为陶瓷盘下方的底座中的冷却剂通道提供冷却剂。 控制器包括温度控制指令集，其将冷却器内的冷却剂温度设定为在施加到加热器的功率水平上升或下降之前。

    System and Method for Teaching Basic Ultrasound Skills
    3.
    发明申请
    System and Method for Teaching Basic Ultrasound Skills 审中-公开
    基础超声技术教学系统与方法

    公开(公告)号：US20140170620A1

    公开(公告)日：2014-06-19

    申请号：US14109706

    申请日：2013-12-17

    申请人： Eric Savitsky ,  Gabriele Nataneli ,  Dan Katz ,  Kresimir Petrinec

    发明人： Eric Savitsky ,  Gabriele Nataneli ,  Dan Katz ,  Kresimir Petrinec

    IPC分类号： G09B23/28

    CPC分类号： G09B23/286 ,  A61B8/466 ,  G06F19/00

    摘要： A system and method that improves the speed and efficiency through which ultrasound practitioners acquire and develop essential basic ultrasound skills in a simulated environment without the need of actual patients or subjects. The system utilizes a simulator with an input device that manipulate a virtual transducer probe in a simulated 3D space to cut a slice through a basic shape. A 2D section of the cut plane is also displayed so that the practitioner can learn to relate 2D section with their 3D objects cut in cross-section.

    摘要翻译： 一种提高超声从业者在模拟环境中获取和发展必要的基本超声技能而不需要实际患者或受试者的速度和效率的系统和方法。 该系统利用具有输入设备的模拟器，该模拟器在模拟的3D空间中操纵虚拟换能器探头以通过基本形状切割切片。 还显示了切割平面的2D部分，以便从业者可以学习将2D部分与其横截面切割的3D对象相关联。

    Cathode with inner and outer electrodes at different heights
    4.
    发明授权
    Cathode with inner and outer electrodes at different heights 有权
    阴极与不同高度的内外电极

    公开(公告)号：US08607731B2

    公开(公告)日：2013-12-17

    申请号：US12144463

    申请日：2008-06-23

    申请人： Daniel J. Hoffman ,  Douglas A. Buchberger, Jr. ,  Semyon L. Kats ,  Dan Katz

    发明人： Daniel J. Hoffman ,  Douglas A. Buchberger, Jr. ,  Semyon L. Kats ,  Dan Katz

    IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00

    CPC分类号： H01L21/6833

    摘要： An apparatus for generating uniform plasma across and beyond the peripheral edge of a substrate has a dielectric body with an upper electrode and an annular electrode embedded therein. The outer perimeter of the upper electrode overlaps the inner perimeter of the annular electrode. In one embodiment, the upper electrode and the annular electrode are electrically coupled by molybdenum vias. In one embodiment, the upper electrode is coupled to a DC power source to provide electrostatic force for chucking the substrate. In one embodiment, the upper electrode is coupled to an RF source for exciting one or more processing gasses into plasma for substrate processing.

    摘要翻译： 用于在衬底的周边边缘上产生均匀等离子体的装置具有电介质体，其具有嵌入其中的上电极和环形电极。 上电极的外周与环形电极的内周重叠。 在一个实施例中，上电极和环形电极通过钼通孔电耦合。 在一个实施例中，上电极耦合到DC电源以提供用于夹持衬底的静电力。 在一个实施例中，上电极耦合到RF源，用于将一个或多个处理气体激发成用于衬底处理的等离子体。

    Embedded Motion Sensing Technology for Integration within Commercial Ultrasound Probes
    5.
    发明申请
    Embedded Motion Sensing Technology for Integration within Commercial Ultrasound Probes 有权
    嵌入式运动感应技术，用于商业超声波探头的集成

    公开(公告)号：US20120238875A1

    公开(公告)日：2012-09-20

    申请号：US13481725

    申请日：2012-05-25

    申请人： Eric Savitsky ,  Dan Katz ,  Gabriele Nataneli

    发明人： Eric Savitsky ,  Dan Katz ,  Gabriele Nataneli

    IPC分类号： A61B8/14

    CPC分类号： G09B23/286 ,  A61B8/4254

    摘要： An ultrasound system including an ultrasound machine and an ultrasound probe. The ultrasound probe includes an ultrasound transducer, ultrasound circuitry, a six degree of freedom (6-DOF) sensor, and a probe housing. The probe housing encases the ultrasound transducer and the 6-DOF sensor. By embedding motion-sensing technology directly within the housing of the ultrasound transducer, the position and orientation of the ultrasound probe can be tracked in an automated manner in relation to an indicator mark on the ultrasound screen. This allows assisting technologies to mitigate human error that arises from misalignment of the transducer indicator.

    摘要翻译： 包括超声机和超声波探头的超声系统。 超声波探头包括超声波换能器，超声波电路，六自由度（6自由度）传感器和探头外壳。 探头外壳包围超声波换能器和6自由度传感器。 通过将运动感测技术直接嵌入在超声波换能器的壳体内，可以以超声波屏幕上的指示标记的自动化方式跟踪超声波探头的位置和方向。 这允许协助技术减轻由于换能器指示器的未对准而引起的人为错误。

    System and Method for Improving Acquired Ultrasound-Image Review
    6.
    发明申请
    System and Method for Improving Acquired Ultrasound-Image Review 审中-公开
    改进获得性超声影像检查的系统和方法

    公开(公告)号：US20120237102A1

    公开(公告)日：2012-09-20

    申请号：US13481703

    申请日：2012-05-25

    申请人： Eric Savitsky ,  Dan Katz

    发明人： Eric Savitsky ,  Dan Katz

    IPC分类号： G06K9/00

    CPC分类号： G09B23/286

    摘要： A system for creating 3D ultrasound case volumes from 2D scans and aligning the ultrasound case volumes with a virtual representation of a body to create an adapted virtual body that is scaled and accurately reflects the morphology of a particular patient. The system improves a radiologist's or treating physician's ability to examine and interact with a patient's complete ultrasound case volume independent of the patient, the type of ultrasound machine used to acquire the original data, and the original scanning session.

    摘要翻译： 一种用于从2D扫描创建3D超声外壳卷并将超声外壳体与身体的虚拟表示对准以创建适应的虚拟身体的系统，该虚拟身体被缩放并准确地反映特定患者的形态。 该系统改善放射科医师或治疗医师检查和与病人完整的超声外壳体积无关的能力，与患者无关，用于获取原始数据的超声机的类型和原始扫描会话。

    CATHODE WITH INNER AND OUTER ELECTRODES AT DIFFERENT HEIGHTS
    8.
    发明申请
    CATHODE WITH INNER AND OUTER ELECTRODES AT DIFFERENT HEIGHTS 有权
    在不同高度的内部和外部电极的阴极

    公开(公告)号：US20090314433A1

    公开(公告)日：2009-12-24

    申请号：US12144463

    申请日：2008-06-23

    申请人： Daniel J. Hoffman ,  Douglas A. Buchberger, JR. ,  Semyon L. Kats ,  Dan Katz

    发明人： Daniel J. Hoffman ,  Douglas A. Buchberger, JR. ,  Semyon L. Kats ,  Dan Katz

    IPC分类号： C23F1/00 ,  H01L21/683

    CPC分类号： H01L21/6833

    摘要： An apparatus for generating uniform plasma across and beyond the peripheral edge of a substrate has a dielectric body with an upper electrode and an annular electrode embedded therein. The outer perimeter of the upper electrode overlaps the inner perimeter of the annular electrode. In one embodiment, the upper electrode and the annular electrode are electrically coupled by molybdenum vias. In one embodiment, the upper electrode is coupled to a DC power source to provide electrostatic force for chucking the substrate. In one embodiment, the upper electrode is coupled to an RF source for exciting one or more processing gasses into plasma for substrate processing.

    摘要翻译： 用于在衬底的周边边缘上产生均匀等离子体的装置具有电介质体，其具有嵌入其中的上电极和环形电极。 上电极的外周与环形电极的内周重叠。 在一个实施例中，上电极和环形电极通过钼通孔电耦合。 在一个实施例中，上电极耦合到DC电源以提供用于夹持衬底的静电力。 在一个实施例中，上电极耦合到RF源，用于将一个或多个处理气体激发成用于衬底处理的等离子体。

    METHOD TO CONTROL UNIFORMITY USING TRI-ZONE SHOWERHEAD
    9.
    发明申请
    METHOD TO CONTROL UNIFORMITY USING TRI-ZONE SHOWERHEAD 失效
    使用TRI-ZONE SHOWERHEAD控制均匀性的方法

    公开(公告)号：US20090218317A1

    公开(公告)日：2009-09-03

    申请号：US12039350

    申请日：2008-02-28

    申请人： RODOLFO P. BELEN ,  Edward P. Hammond, IV ,  Brian K. Hatcher ,  Dan Katz ,  Alexander M. Paterson ,  Valentin N. Todorow

    发明人： RODOLFO P. BELEN ,  Edward P. Hammond, IV ,  Brian K. Hatcher ,  Dan Katz ,  Alexander M. Paterson ,  Valentin N. Todorow

    IPC分类号： C23F1/08 ,  C23F1/00

    CPC分类号： C23C16/45565 ,  C23C16/45574 ,  H01J37/3244 ,  H01J37/32449

    摘要： Embodiments of the present invention provide apparatus and method for processing a substrate with increased uniformity. One embodiment of the present invention provides an apparatus for processing a substrate. The apparatus comprises a chamber body defining a processing volume, a substrate support disposed in the processing volume, a showerhead disposed in the processing volume opposite to the substrate support, and a plasma generation assembly configured to ignite a plasma from the processing gases in the processing gas in the processing volume. The showerhead is configured to provide one or more processing gases to the processing volume. The showerhead has two or more distribution zones each independently controllable.

    摘要翻译： 本发明的实施例提供了用于以均匀性增加来处理衬底的装置和方法。 本发明的一个实施例提供一种用于处理衬底的装置。 该装置包括限定处理体积的室主体，设置在处理容积中的基板支撑件，设置在与基板支撑件相对的处理体积中的喷头，以及等离子体产生组件，其被配置为在处理中点燃来自处理气体的等离子体 气体处理量。 喷头构造成为处理量提供一种或多种处理气体。 喷头具有两个或更多个分配区，每个分配区可独立控制。