THIN FILM DEPOSITION APPARATUS
    3.
    发明申请
    THIN FILM DEPOSITION APPARATUS 审中-公开
    薄膜沉积装置

    公开(公告)号:US20170051409A1

    公开(公告)日:2017-02-23

    申请号:US15164915

    申请日:2016-05-26

    IPC分类号: C23C16/455 C23C16/458

    摘要: A thin film deposition apparatus, including a processing chamber; a boat in the processing chamber, the boat to accommodate a plurality of substrates therein; and a nozzle to supply a source gas to the processing chamber to form a thin film on each of the substrates, the nozzle including a plurality of T-shaped nozzle pipes, each of the T-shaped nozzle pipes including a first pipe having closed ends and a second pipe coupled to a middle portion of the first pipe.

    摘要翻译: 一种薄膜沉积设备,包括处理室; 在处理室中的船,其中容纳多个基板的船; 以及喷嘴,用于将源气体供应到处理室以在每个基板上形成薄膜,喷嘴包括多个T形喷嘴管,每个T形喷嘴管包括具有封闭端的第一管 以及联接到所述第一管的中间部分的第二管。

    GAS INJECTORS
    7.
    发明申请
    GAS INJECTORS 审中-公开
    燃气喷射器

    公开(公告)号:US20160168704A1

    公开(公告)日:2016-06-16

    申请号:US14963744

    申请日:2015-12-09

    IPC分类号: C23C16/455

    CPC分类号: C23C16/45578 C23C16/45546

    摘要: A gas injector may comprise: a gas introduction tube configured to introduce reaction gas into a reaction tube from a gas supply source; and/or a gas distributor connected to the gas introduction tube, extending from the gas introduction tube in a direction within the reaction tube, including a plurality of ejection holes in an inner surface of the gas distributor, and having an arc shape extending in a circumferential direction of the reaction tube. The ejection holes may be spaced apart from each other in the extending direction of the gas distributor, and are configured to spray the reaction gas.

    摘要翻译: 气体注入器可以包括:气体引入管,其构造成将反应气体从气体供应源引入反应管中; 和/或气体分配器,其连接到气体导入管,从气体导入管沿着反应管内的方向延伸,包括在气体分配器的内表面中的多个喷射孔,并且具有在 反应管的圆周方向。 喷射孔可以在气体分配器的延伸方向上彼此间隔开,并且被配置为喷射反应气体。

    Method for indicating precoding matrix indicator in uplink MIMO system with based on SC-FDMA
    8.
    发明授权
    Method for indicating precoding matrix indicator in uplink MIMO system with based on SC-FDMA 有权
    基于SC-FDMA的上行MIMO系统中预编码矩阵指示符的方法

    公开(公告)号:US09178595B2

    公开(公告)日:2015-11-03

    申请号:US13148886

    申请日:2010-02-19

    IPC分类号: H04B7/216 H04B7/06 H04L5/00

    CPC分类号: H04B7/0639 H04L5/0039

    摘要: A method of transmitting PMI (precoding matrix indicator) information in an uplink MIMO system is disclosed. The present invention includes the steps of receiving channel information from a user equipment and transmitting information on a resource allocated to the user equipment in uplink transmission and PMI information indicating a precoding matrix to apply to a region of the resource among a plurality of precoding matrices to the user equipment based on the received channel information, wherein the resource allocated to the user equipment is allocated by a bundle unit of a prescribed number of subcarriers, wherein each of a plurality of the precoding matrices are applied to regions generated from dividing a whole frequency band into a prescribed number of regions, respectively, and wherein the precoding matrix applied to the resource among a plurality of the precoding matrices has a maximum area resulting from overlapping a frequency band occupied by the allocated resource with a frequency band having the precoding matrix applied thereto.

    摘要翻译: 公开了一种在上行链路MIMO系统中发送PMI(预编码矩阵指示符)信息的方法。 本发明包括以下步骤:从用户设备接收信道信息,并在上行链路传输中发送关于分配给用户设备的资源的信息,以及指示预编码矩阵的PMI信息,以应用于多个预编码矩阵中的资源区域,以 所述用户设备基于所接收的信道信息,其中,分配给所述用户设备的资源由规定数量的副载波的分组单元分配,其中,所述多个预编码矩阵中的每一个被应用于从分频整个频率 并且其中在多个预编码矩阵中应用于资源的预编码矩阵具有由所分配的资源占据的频带与具有预编码矩阵的频带重叠而产生的最大区域 到此。

    TUNNEL INSULATION LAYER STRUCTURES, METHODS OF MANUFACTURING THE SAME, AND VERTICAL MEMORY DEVICES INCLUDING THE SAME
    9.
    发明申请
    TUNNEL INSULATION LAYER STRUCTURES, METHODS OF MANUFACTURING THE SAME, AND VERTICAL MEMORY DEVICES INCLUDING THE SAME 有权
    隧道绝缘层结构及其制造方法以及包括其的垂直存储器件

    公开(公告)号:US20150279955A1

    公开(公告)日:2015-10-01

    申请号:US14644408

    申请日:2015-03-11

    摘要: Tunnel insulation layer structures and methods of manufacturing the same are disclosed. The tunnel insulation layer structures may include a first tunnel insulation layer, a second tunnel insulation layer, a third tunnel insulation layer, a fourth tunnel insulation layer and a fifth tunnel insulation layer. The first tunnel insulation layer on a substrate has a first band gap energy. The second tunnel insulation layer on the first tunnel insulation layer has a second band gap energy which is lower than the first band gap energy. The third tunnel insulation layer on the second tunnel insulation layer has a third band gap energy which is higher than the second band gap energy. The fourth tunnel insulation layer on the third tunnel insulation layer has a fourth band gap energy which is lower than the third band gap energy. The fifth tunnel insulation layer on the fourth tunnel insulation layer has a fifth band gap energy which is higher than the fourth band gap energy.

    摘要翻译: 公开了隧道绝缘层结构及其制造方法。 隧道绝缘层结构可以包括第一隧道绝缘层,第二隧道绝缘层,第三隧道绝缘层,第四隧道绝缘层和第五隧道绝缘层。 衬底上的第一隧道绝缘层具有第一带隙能量。 第一隧道绝缘层上的第二隧道绝缘层具有低于第一带隙能量的第二带隙能量。 第二隧道绝缘层上的第三隧道绝缘层具有高于第二带隙能量的第三带隙能量。 第三隧道绝缘层上的第四隧道绝缘层具有低于第三带隙能量的第四带隙能量。 第四隧道绝缘层上的第五隧道绝缘层具有比第四带隙能量高的第五带隙能量。

    Method for performing retransmission in MIMO wireless communication system and apparatus therefor
    10.
    发明授权
    Method for performing retransmission in MIMO wireless communication system and apparatus therefor 有权
    MIMO无线通信系统中的重传方法及其装置

    公开(公告)号:US09042314B2

    公开(公告)日:2015-05-26

    申请号:US13386015

    申请日:2010-08-02

    摘要: A method for performing retransmission at a user equipment of a MIMO wireless communication system is disclosed. The method comprises transmitting multiple transport blocks to a base station for a transmission unit time in accordance with uplink grant information, which includes a first new data indicator; receiving ACK/NACK (Acknowledgement/Negative-ACK) responses corresponding to the respective transport blocks and uplink grant information, which includes a second new data indicator, from the base station; and performing new transmission or retransmission for the multiple transport blocks in one transport block unit for a transmission unit time in accordance with the ACK/NACK responses and the second new data indicator, if transport rank is reduced to 1.

    摘要翻译: 公开了一种在MIMO无线通信系统的用户设备进行重传的方法。 该方法包括:根据包括第一新数据指示符的上行授权信息向基站发送多个传输块用于传输单元时间; 从基站接收对应于相应传输块的ACK / NACK(确认/否定ACK)响应和包括第二新数据指示符的上行链路许可信息; 并且如果传输等级减少到1,则根据ACK / NACK响应和第二新数据指示符,针对传输单元时间的一个传输块单元中的多个传输块执行新的传输或重传。