公开(公告)号：US08506359B2

公开(公告)日：2013-08-13

申请号：US12866571

申请日：2009-01-16

申请人： Hirotaka Shida ,  Takafumi Shimizu ,  Masatoshi Ikeda ,  Shou Kubouchi ,  Yousuke Shibata ,  Kazuhito Uchikura ,  Akihiro Takemura

发明人： Hirotaka Shida ,  Takafumi Shimizu ,  Masatoshi Ikeda ,  Shou Kubouchi ,  Yousuke Shibata ,  Kazuhito Uchikura ,  Akihiro Takemura

IPC分类号： H01L21/302

CPC分类号： H01L21/3212 ,  C09G1/02 ,  C09K3/1409 ,  C09K3/1436 ,  C09K3/1463 ,  H01L21/31053

摘要： A chemical mechanical polishing aqueous dispersion including (A) silica particles, and (B1) an organic acid, the sodium content, the potassium content, and the ammonium ion content of the silica particles (A) determined by ICP atomic emission spectrometry, ICP mass spectrometry, or ammonium ion quantitative analysis using ion chromatography having a relationship in which the sodium content is 5 to 500 ppm and at least one of the potassium content and the ammonium ion content is 100 to 20,000 ppm.

摘要翻译： 包含（A）二氧化硅颗粒和（B1）有机酸的化学机械研磨水分散体，通过ICP原子发射光谱法测定的二氧化硅颗粒（A）的钠含量，钾含量和铵离子含量，ICP质量 使用具有钠含量为5〜500ppm，钾含量和铵离子含量中的至少一种为100〜20000ppm的关系的离子色谱法进行光谱法或铵离子定量分析。

公开(公告)号：US07862939B2

公开(公告)日：2011-01-04

申请号：US12349368

申请日：2009-01-06

申请人： Takashi Ono ,  Naruto Takahashi ,  Masatoshi Ikeda ,  Kazumasa Maruya ,  Michiaki Nishimura

发明人： Takashi Ono ,  Naruto Takahashi ,  Masatoshi Ikeda ,  Kazumasa Maruya ,  Michiaki Nishimura

IPC分类号： H01M8/06

CPC分类号： H01M8/04022 ,  H01M8/0267 ,  H01M8/04007 ,  H01M8/0625 ,  H01M8/2425 ,  H01M8/2465 ,  H01M8/2484 ,  H01M2008/1293

摘要： A fuel cell assembly has a housing defining an electricity generation/combustion chamber, and electricity generation/combustion means disposed within the housing. A fuel gas and an oxygen-containing gas are supplied to the electricity generation/combustion means, and a combustion gas formed within the electricity generation/combustion chamber is discharged from the electricity generation/combustion chamber. A heat exchanger having a first channel and a second channel is disposed on at least one surface of the housing, the combustion gas is discharged from the interior of the electricity generation/combustion chamber through the first channel of the heat exchanger, and one of the oxygen-containing gas and the fuel gas is supplied to the electricity generation/combustion means through the second channel of the heat exchanger. A plurality of electricity generation units are arranged in parallel within the housing, and each of the electricity generation units includes a cell stack constituting the electricity generation/combustion means.

摘要翻译： 燃料电池组件具有限定发电/燃烧室的壳体，以及设置在壳体内的发电/燃烧装置。 向发电/燃烧装置供给燃料气体和含氧气体，在发电·燃烧室内形成的燃烧气体从发电·燃烧室排出。 具有第一通道和第二通道的热交换器设置在壳体的至少一个表面上，燃烧气体通过热交换器的第一通道从发电/燃烧室的内部排出，其中一个 含氧气体和燃料气体通过热交换器的第二通道供应到发电/燃烧装置。 多个发电单元并联设置在壳体内，发电单元包括构成发电/燃烧装置的电池组。

公开(公告)号：US20090246924A1

公开(公告)日：2009-10-01

申请号：US12382943

申请日：2009-03-26

申请人： Yuki NIIYAMA ,  Seikoh Yoshida ,  Masatoshi Ikeda ,  Hiroshi Kambayashi ,  Takehiko Nomura

发明人： Yuki NIIYAMA ,  Seikoh Yoshida ,  Masatoshi Ikeda ,  Hiroshi Kambayashi ,  Takehiko Nomura

IPC分类号： H01L21/336

CPC分类号： H01L29/7834 ,  H01L21/26553 ,  H01L21/268 ,  H01L29/2003 ,  H01L29/66522 ,  H01L29/7835

摘要： The laser beam with a wavelength having a higher energy than the band gap energy of the material forming the carrier moving layer is irradiated to activate the impurities contained in the constituent layer of the field effect transistor in the method of producing the field effect transistor. The method of the invention does not apply the heating of the substrate or the sample stage to raise the temperature of the semiconductor layer using the thermal conductivity so as to activate the impurities. Thus, the implanted impurities can be activated without deteriorating the performance of the device and reliability.

摘要翻译： 在产生场效应晶体管的方法中，照射具有比形成载流子移动层的材料的能隙高的波长的激光束激发包含在场效应晶体管的构成层中的杂质。 本发明的方法不适用基板或样品台的加热，以提高使用导热率的半导体层的温度以激活杂质。 因此，可以在不降低器件性能和可靠性的情况下激活注入的杂质。

公开(公告)号：US07531947B2

公开(公告)日：2009-05-12

申请号：US11221299

申请日：2005-09-07

申请人： Hitoshi Shindo ,  Eturo Yasuda ,  Masatoshi Ikeda ,  Masaya Nakamura ,  Tatsuhiko Nonoyama ,  Toshiatsu Nagaya

发明人： Hitoshi Shindo ,  Eturo Yasuda ,  Masatoshi Ikeda ,  Masaya Nakamura ,  Tatsuhiko Nonoyama ,  Toshiatsu Nagaya

IPC分类号： H01L41/08

CPC分类号： H01L41/273 ,  H01L41/0477 ,  H01L41/083 ,  H01L41/297

摘要： A stacked piezoelectric element obtained by alternately stacking a piezoelectric ceramic layer and an electrode layer, wherein said electrode layer mainly comprises an electrically conducting base metal electrode material, and the region held between the electrode layer positioned at the top of each ceramic layer and the electrode layer positioned at the bottom of each ceramic layer contains a material having no piezoelectricity, in which a constituent element of said material having no piezoelectricity is uniformly dispersed so as not to have local distribution of a distributed strength exceeding 2 times the distributed strength which is distributed in a largest number of places and is not 0.

摘要翻译： 通过交替层叠压电陶瓷层和电极层而获得的堆叠压电元件，其中所述电极层主要包括导电基底金属电极材料，并且保持在位于每个陶瓷层顶部的电极层和电极之间的区域 位于每个陶瓷层底部的层包含不具有压电性的材料，其中所述不具有压电性的材料的构成元素均匀分散，以便不具有超过分布强度分布强度的2倍的分布强度的局部分布 在最多的地方，不是0。

公开(公告)号：US06653840B2

公开(公告)日：2003-11-25

申请号：US10115022

申请日：2002-04-04

申请人： Hiroshi Yorita ,  Masatoshi Ikeda ,  Makoto Toriyama ,  Tohru Yoshinaga

发明人： Hiroshi Yorita ,  Masatoshi Ikeda ,  Makoto Toriyama ,  Tohru Yoshinaga

IPC分类号： F02P1700

CPC分类号： F02P17/12 ,  F02P2017/125

摘要： In an engine ignition unit, a transistor and a current detecting resistor are connected to primary and secondary windings of an ignition coil, respectively. The current detecting resistor is used for detecting a current flowing between the opposing electrodes of spark plug. At an ignition by the spark plug, high-frequency square wave signals are generated by an oscillator after an ignition signal is cut off. The square wave signals turn on and off the transistor. By this operation, a battery voltage is intermittently applied to the primary winding and an ion current is measured. A frequency of the square wave signals is set close to a resonant frequency of an ion current path including the spark plug, the secondary winding of the ignition coil and the current detecting resistor.

公开(公告)号：US06639732B2

公开(公告)日：2003-10-28

申请号：US10310780

申请日：2002-12-06

申请人： Yasuhiro Omura ,  Tetsuo Takahashi ,  Masatoshi Ikeda ,  Shiwen Li

发明人： Yasuhiro Omura ,  Tetsuo Takahashi ,  Masatoshi Ikeda ,  Shiwen Li

IPC分类号： G02B1700

CPC分类号： G02B17/0892 ,  G02B13/143 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70808 ,  G03F7/70825 ,  G03F7/70833

摘要： The present invention relates to a projection exposure apparatus (10) for and method of imaging a reticle (R) having patterned surface onto a substrate (W) in photolithographic processes for manufacturing a variety of devices. The invention further relates to an optical system (C) having a folding member (M1) suited to the projection exposure apparatus, and a method for manufacturing the optical system. The projection exposure apparatus comprises an illumination optical system (IS) and a reticle stage (RS) capable of holding the reticle so the normal line to its patterned surface is in the direction of gravity. The apparatus also includes a substrate stage (WS) capable of holding the substrate with its surface normal parallel to the direction of gravity. The optical system includes a first imaging optical system (A) comprising a concave reflecting mirror and a dioptric optical member arranged along a first optical axis. The first imaging optical system (A) forms an intermediate image of the patterned surface. The optical system also includes a second imaging optical system (B) having a second optical axis, and forms a reduced image of the intermediate image on the substrate. The first folding member is arranged in the optical path from the first imaging optical system to the second imaging optical system. The first and second imaging optical systems and the first and second folding members are positioned so that a reduced image of the pattered surface is formed parallel to the pattern surface of the reticle, and the first and second optical axes are positioned so that they are substantially parallel to the direction of gravity.

公开(公告)号：US06529264B1

公开(公告)日：2003-03-04

申请号：US09576215

申请日：2000-05-23

申请人： Masatoshi Ikeda

发明人： Masatoshi Ikeda

IPC分类号： G03B2742

CPC分类号： G03F7/70225 ,  G03F7/70275 ,  G03F7/70808 ,  G03F7/70833 ,  G03F7/709

摘要： A projection exposure apparatus for transferring a pattern on a mask onto a substrate, including a projection optical system having a first reflection optical element for bending an optical axis, a first optical system arranged between the mask and the first reflection optical element, and a second optical system arranged between the first reflection optical element and the substrate; a frame for integrally supporting a first barrel for holding the first optical system and a second barrel for holding the second optical system, and a connecting member for connecting the first barrel and the second barrel at positions different from the frame.

摘要翻译： 一种用于将掩模上的图案转印到基板上的投影曝光装置，包括具有用于弯曲光轴的第一反射光学元件的投影光学系统，布置在掩模和第一反射光学元件之间的第一光学系统，以及第二 光学系统布置在第一反射光学元件和衬底之间; 用于一体地支撑用于保持第一光学系统的第一筒和用于保持第二光学系统的第二筒的框架，以及用于在与框架不同的位置连接第一筒和​​第二筒的连接构件。

公开(公告)号：US6043863A

公开(公告)日：2000-03-28

申请号：US968435

申请日：1997-11-12

申请人： Masatoshi Ikeda

发明人： Masatoshi Ikeda

IPC分类号： G02B7/182 ,  G02B17/08 ,  G03F7/20 ,  G03B27/42 ,  G02B5/08

CPC分类号： G02B7/1825 ,  G02B17/08 ,  G02B17/0892 ,  G03F7/70225 ,  G03F7/70258 ,  G03F7/70825

摘要： A holder improving the optical performance of a reflecting optical member in a projection optical system which projects an image of a pattern formed on a mask onto a photosensitive substrate, and an exposure apparatus having the holder. A support mechanism supports a back surface of the reflecting optical member, which is reverse to a reflecting surface thereof, at at least three points. The support points are positioned on a circumference away from the center of the reflecting surface by a distance at least 0.6 times the distance from the center of the reflecting surface to the outer periphery of the reflecting optical member such that the support points are circumferentially spaced along the circumference at equal intervals. Alternatively, a holding member supports the reflecting optical member and forms a closed chamber in combination with the reflecting optical member. The pressure in the closed chamber at the back of the reflecting surface of the reflecting optical member is regulated to a predetermined level. The reflecting optical member is integrally formed with a mounting portion which is secured to the projection optical system.

摘要翻译： 提高投影光学系统中的反射光学部件的光学性能的保持器，其将形成在掩模上的图案的图像投影到感光基板上，以及具有该保持器的曝光装置。 支撑机构在至少三个点处支撑反射光学构件的与其反射表面相反的背面。 支撑点位于距离反射面中心的圆周上距离反射面的中心至反射光学构件的外周的距离的至少0.6倍的距离，使得支撑点沿周向间隔开 周长等间隔。 或者，保持构件支撑反射光学构件并与反射光学构件组合形成封闭室。 反射光学部件的反射面的背面的封闭室内的压力被调节到预定的水平。 反射光学构件与固定到投影光学系统的安装部一体地形成。

公开(公告)号：US5995813A

公开(公告)日：1999-11-30

申请号：US946973

申请日：1997-10-08

申请人： Akira Ishikura ,  Buntaro Sawa ,  Masatoshi Ikeda

发明人： Akira Ishikura ,  Buntaro Sawa ,  Masatoshi Ikeda

IPC分类号： H04B1/38 ,  H04B7/005 ,  H04W52/00 ,  H04W52/02 ,  H04W52/52 ,  H04B1/02

CPC分类号： H04W52/52 ,  H04B1/3877

摘要： In a radio telephone equipment which includes a portable radiotelephone (100) and a booster (400), an output from the portable radiotelephone (100) whose output level is set according to a level control signal transmitted from a base station is amplified with a preset amplification factor by an automatic gain control circuit (22) provided in the booster (400). As a result, since the amplification factor of the amplifier in the booster and the portable radiotelephone are independently controlled, the booster can be connected to even a portable radiotelephone which is designed without considering that it will be connected to the booster.

摘要翻译： 在包括便携式无线电话机（100）和升压器（400）的无线电话设备中，根据从基站发送的电平控制信号设置其输出电平的便携式无线电话机（100）的输出被放大预设 通过设置在增压器（400）中的自动增益控制电路（22）进行放大。 结果，由于升压器和便携式无线电话机中的放大器的放大系数被独立地控制，所以升压器可以连接到甚至便携式无线电话机，该便携式无线电话机被设计而不考虑它将被连接到增强器。

公开(公告)号：US5576895A

公开(公告)日：1996-11-19

申请号：US225963

申请日：1994-04-08

申请人： Masatoshi Ikeda

发明人： Masatoshi Ikeda

IPC分类号： G02B7/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F7/70833 ,  G02B7/028 ,  G03F7/70891

摘要： A lens barrel holding apparatus for fixing a lens barrel having at least one optical element. The apparatus fixes a lens barrel to a lens barrel holding bed. The lens barrel has a flange portion formed along the circumferential direction of the outer peripheral portion of the lens barrel. The lens barrel holding bed has a cylindrical recess of a diameter larger than the outer diameter of the flange portion. The apparatus includes a plurality of bar-like first supporting members for coupling the bottom surface of the recess and the flange portion together. Also included is a second supporting member that has at least three bar members disposed on the upper part of the flange portion along the circumferential direction of the flange portion so as to surround the lens barrel. The at least three bar members are coupled to the flange portion and to the lens barrel holding bed.

摘要翻译： 一种用于固定具有至少一个光学元件的镜筒的镜筒保持装置。 该装置将透镜筒固定到镜筒保持床。 镜筒具有沿透镜筒的外周部的圆周方向形成的凸缘部。 透镜筒保持床具有直径大于凸缘部分的外径的圆柱形凹部。 该装置包括用于将凹部的底表面和凸缘部分联接在一起的多个条形的第一支撑构件。 还包括第二支撑构件，其具有至少三个杆件，沿着凸缘部分的圆周方向布置在凸缘部分的上部上，以围绕镜筒。 至少三个杆构件联接到凸缘部分和镜筒保持床。