公开(公告)号：US09007067B2

公开(公告)日：2015-04-14

申请号：US13597251

申请日：2012-08-28

申请人： Ming-Wei Lin ,  Ming-Hsien Lee ,  Ching-Liang Lin

发明人： Ming-Wei Lin ,  Ming-Hsien Lee ,  Ching-Liang Lin

IPC分类号： G01N27/416 ,  H02J7/00 ,  H02J7/04 ,  G01R31/36 ,  H01M10/42 ,  H01M10/48 ,  G01R19/165

CPC分类号： G01R31/3658 ,  G01R19/16542 ,  H01M10/4207 ,  H01M10/482

摘要： A battery condition estimating apparatus for a battery pack having a plurality of battery cells connected in series includes an analog channel switching circuit and a battery gas gauge circuit. The analog channel switching circuit has a plurality of input ports and an output port, wherein the input ports are coupled to the battery cells via a plurality of analog channels, respectively, and the analog channel switching circuit is arranged to couple the output port to a selected input port of the input ports for allowing the output port N5 to be coupled to a selected battery via a selected analog channel. The battery gas gauge circuit is coupled to the output port of the analog channel switching circuit, and used for estimating a battery condition of the battery pack by monitoring the selected battery cell via the selected analog channel.

摘要翻译： 具有串联连接的多个电池单元的电池组的电池状态估计装置包括模拟通道切换电路和电池气量计电路。 模拟通道切换电路具有多个输入端口和输出端口，其中输入端口分别经由多个模拟通道耦合到电池单元，并且模拟通道切换电路被布置为将输出端口耦合到 输入端口的选择输入端口，用于允许输出端口N5经由选择的模拟通道耦合到所选择的电池。 电池气量计电路耦合到模拟通道切换电路的输出端口，并用于通过经由选择的模拟通道监视所选择的电池单元来估计电池组的电池状况。

公开(公告)号：US20060243596A1

公开(公告)日：2006-11-02

申请号：US11119183

申请日：2005-04-28

申请人： Ming-Wei Lin ,  Ming-Hsing Tsai

发明人： Ming-Wei Lin ,  Ming-Hsing Tsai

IPC分类号： C25D7/12 ,  C25D17/06

CPC分类号： C25D17/06 ,  C25D5/18 ,  C25D7/123 ,  C25D17/001 ,  C25D17/005 ,  H01L21/2885

摘要： An electrochemical plating apparatus and method for facilitating uniform current distribution across a wafer during loading into an ECP (electrochemical plating) apparatus is disclosed. The apparatus includes a bath container for containing a bath solution, an anode provided in the bath container, a cathode ring for supporting a wafer in the bath container and a current source electrically connected to the anode and the cathode ring. According to the method, a voltage potential is applied to the cathode ring as it is immersed into the solution and prior to immersion of the wafer in the solution, thereby facilitating a substantially uniform plating current across the wafer upon immersion of the wafer.

公开(公告)号：US20060189127A1

公开(公告)日：2006-08-24

申请号：US11410229

申请日：2006-04-24

申请人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

发明人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

IPC分类号： H01L21/44

CPC分类号： H01L21/2885 ,  C25D3/38 ,  C25D5/10 ,  C25D7/123 ,  H01L21/7684 ,  H01L21/76877 ,  H05K3/423

摘要： Narrow trenches in a substrate tend to fill more rapidly than wide trenches This results in a non-planar surface once all trenches have been filled. The present invention solves this problem by performing the electro-deposition in two steps. The plating bath used during the first step, is optimized for filling narrow trenches while the plating bath used during the second step, is optimized for filling wide trenches. The net result is a final layer having a planar surface, with all trenches being properly filled.

摘要翻译： 衬底中的窄沟槽倾向于比宽沟槽更快地填充。这导致一旦所有沟槽都被填充，就会形成非平面表面。 本发明通过两步进行电沉积来解决这个问题。 在第一步骤期间使用的电镀槽在针对第二步骤期间使用的电镀槽进行优化以优化用于填充窄沟槽的情况下进行优化，以优化填充宽的沟槽。 最终的结果是具有平坦表面的最终层，其中所有的沟槽被正确填充。

公开(公告)号：US07064068B2

公开(公告)日：2006-06-20

申请号：US10763306

申请日：2004-01-23

申请人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

发明人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

IPC分类号： H01L21/44

CPC分类号： H01L21/2885 ,  C25D3/38 ,  C25D5/10 ,  C25D7/123 ,  H01L21/7684 ,  H01L21/76877 ,  H05K3/423

摘要： Narrow trenches in a substrate tend to fill more rapidly than wide trenches This results in a non-planar surface once all trenches have been filled. The present invention solves this problem by performing the electro-deposition in two steps. The plating bath used during the first step, is optimized for filling narrow trenches while the plating bath used during the second step, is optimized for filling wide trenches. The net result is a final layer having a planar surface, with all trenches being properly filled.

摘要翻译： 衬底中的窄沟槽倾向于比宽沟槽更快地填充。这导致一旦所有沟槽都被填充，就会形成非平面表面。 本发明通过两步进行电沉积来解决这个问题。 在第一步骤期间使用的电镀槽在针对第二步骤期间使用的电镀槽进行优化以优化用于填充窄沟槽的情况下进行优化，以优化填充宽的沟槽。 最终的结果是具有平坦表面的最终层，其中所有的沟槽被正确填充。

公开(公告)号：US20050164495A1

公开(公告)日：2005-07-28

申请号：US10763306

申请日：2004-01-23

申请人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

发明人： Shih-Wei Chou ,  Ming-Hsing Tsai ,  Ming-Wei Lin

IPC分类号： C25D3/38 ,  C25D5/10 ,  C25D7/12 ,  H01L21/288 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/768 ,  H05K3/42

CPC分类号： H01L21/2885 ,  C25D3/38 ,  C25D5/10 ,  C25D7/123 ,  H01L21/7684 ,  H01L21/76877 ,  H05K3/423

摘要： Narrow trenches in a substrate tend to fill more rapidly than wide trenches This results in a non-planar surface once all trenches have been filled. The present invention solves this problem by performing the electro-deposition in two steps. The plating bath used during the first step, is optimized for filling narrow trenches while the plating bath used during the second step, is optimized for filling wide trenches. The net result is a final layer having a planar surface, with all trenches being properly filled.

摘要翻译： 衬底中的窄沟槽倾向于比宽沟槽更快地填充。这导致一旦所有沟槽都被填充，就会产生非平面表面。 本发明通过两步进行电沉积来解决这个问题。 在第一步骤期间使用的电镀槽在针对第二步骤期间使用的电镀槽进行优化以优化用于填充窄沟槽的情况下进行优化，以优化填充宽的沟槽。 最终的结果是具有平坦表面的最终层，其中所有的沟槽被正确填充。

公开(公告)号：US08912769B2

公开(公告)日：2014-12-16

申请号：US13354427

申请日：2012-01-20

申请人： Ming-Wei Lin ,  Robert Yung-His Tsu ,  Ching Long Lin ,  Ke-Horng Chen ,  Yu-Huei Lee ,  Shih-Wei Wang ,  Wei-Chan Wu ,  Ping-Ching Huang

发明人： Ming-Wei Lin ,  Robert Yung-His Tsu ,  Ching Long Lin ,  Ke-Horng Chen ,  Yu-Huei Lee ,  Shih-Wei Wang ,  Wei-Chan Wu ,  Ping-Ching Huang

IPC分类号： G05F3/16 ,  H02M3/158

CPC分类号： H02M3/1582

摘要： A current mode buck-boost converter has an input terminal, an output terminal, and an output capacitor coupled to the output terminal. The input terminal is used to receive an input voltage, and the output terminal is for producing the output voltage. The current mode buck-boost converter comprises a voltage converter and a control circuit. The voltage converter comprises an inductor. The control circuit is for detecting the current passing through the inductor to determine the electric energy transmitted to the output terminal by the voltage converter. Accordingly, the current mode buck-boost converter has fast response, and the electrical energy can be recycled and stored to the voltage source when the current mode buck-boost converter operates in down-tracking process.

摘要翻译： 电流模式降压 - 升压转换器具有输入端子，输出端子和耦合到输出端子的输出电容器。 输入端用于接收输入电压，输出端用于产生输出电压。 电流模式降压 - 升压转换器包括电压转换器和控制电路。 电压转换器包括电感器。 控制电路用于检测通过电感器的电流，以确定由电压转换器传输到输出端的电能。 因此，电流模式降压 - 升压转换器具有快速响应，并且当电流模式降压 - 升压转换器在下行跟踪过程中操作时，电能可以被再循环并存储到电压源。

公开(公告)号：US20140062494A1

公开(公告)日：2014-03-06

申请号：US13597251

申请日：2012-08-28

申请人： Ming-Wei Lin ,  Ming-Hsien Lee ,  Ching-Liang Lin

发明人： Ming-Wei Lin ,  Ming-Hsien Lee ,  Ching-Liang Lin

IPC分类号： G01R31/36

CPC分类号： G01R31/3658 ,  G01R19/16542 ,  H01M10/4207 ,  H01M10/482

摘要： A battery condition estimating apparatus for a battery pack having a plurality of battery cells connected in series includes an analog channel switching circuit and a battery gas gauge circuit. The analog channel switching circuit has a plurality of input ports and an output port, wherein the input ports are coupled to the battery cells via a plurality of analog channels, respectively, and the analog channel switching circuit is arranged to couple the output port to a selected input port of the input ports for allowing the output port N5 to be coupled to a selected battery via a selected analog channel. The battery gas gauge circuit is coupled to the output port of the analog channel switching circuit, and used for estimating a battery condition of the battery pack by monitoring the selected battery cell via the selected analog channel.

摘要翻译： 具有串联连接的多个电池单元的电池组的电池状态估计装置包括模拟通道切换电路和电池气量计电路。 模拟通道切换电路具有多个输入端口和输出端口，其中输入端口分别经由多个模拟通道耦合到电池单元，并且模拟通道切换电路被布置为将输出端口耦合到 输入端口的选择输入端口，用于允许输出端口N5经由选择的模拟通道耦合到所选择的电池。 电池气量计电路耦合到模拟通道切换电路的输出端口，并用于通过经由选择的模拟通道监视所选择的电池单元来估计电池组的电池状况。

公开(公告)号：US20120274295A1

公开(公告)日：2012-11-01

申请号：US13354427

申请日：2012-01-20

申请人： MING-WEI LIN ,  ROBERT YUNG-HIS TSU ,  CHING LONG LIN ,  KE-HORNG CHEN ,  YU-HUEI LEE ,  SHIH-WEI WANG ,  WEI-CHAN WU ,  PING-CHING HUANG

发明人： MING-WEI LIN ,  ROBERT YUNG-HIS TSU ,  CHING LONG LIN ,  KE-HORNG CHEN ,  YU-HUEI LEE ,  SHIH-WEI WANG ,  WEI-CHAN WU ,  PING-CHING HUANG

IPC分类号： G05F1/10

CPC分类号： H02M3/1582

摘要： A current mode buck-boost converter has an input terminal, an output terminal, and an output capacitor coupled to the output terminal. The input terminal is used to receive an input voltage, and the output terminal is for producing the output voltage. The current mode buck-boost converter comprises a voltage converter and a control circuit. The voltage converter comprises an inductor. The control circuit is for detecting the current passing through the inductor to determine the electric energy transmitted to the output terminal by the voltage converter. Accordingly, the current mode buck-boost converter has fast response, and the electrical energy can be recycled and stored to the voltage source when the current mode buck-boost converter operates in down-tracking process.

摘要翻译： 电流模式降压 - 升压转换器具有输入端子，输出端子和耦合到输出端子的输出电容器。 输入端用于接收输入电压，输出端用于产生输出电压。 电流模式降压 - 升压转换器包括电压转换器和控制电路。 电压转换器包括电感器。 控制电路用于检测通过电感器的电流，以确定由电压转换器传输到输出端的电能。 因此，电流模式降压 - 升压转换器具有快速响应，并且当电流模式降压 - 升压转换器在下行跟踪过程中操作时，电能可以被再循环并存储到电压源。

公开(公告)号：US20060054508A1

公开(公告)日：2006-03-16

申请号：US10943744

申请日：2004-09-16

申请人： Ming-Wei Lin ,  Ming-Hsing Tsai

发明人： Ming-Wei Lin ,  Ming-Hsing Tsai

IPC分类号： C25D3/48 ,  C25D3/38 ,  C25D5/48

CPC分类号： H01L21/2885 ,  C25D3/02 ,  C25D3/38 ,  H01L21/7684

摘要： A new and improved method for electroplating a metal onto a substrate in such a manner as to render the metal essentially corrosion-resistant during subsequent substrate processing such as chemical mechanical polishing. The process involves incorporating nitrogen into the metal as the metal is electroplated onto the substrate. The process includes preparing the electroplating bath, placing a leveler chemical containing nitrogen in the prepared bath, circulating the leveler chemical throughout the bath and then electroplating the metal on the substrate. In a preferred embodiment, alkyl polyamide, alkyl amine, alkyl amine oxide or thiourea with molecular weight ranging from 100˜1,000,000 is used as the leveler chemical.

摘要翻译： 一种新的和改进的方法，用于将金属电镀到基底上，使得金属在随后的基底处理（例如化学机械抛光）中基本上具有耐腐蚀性。 该方法包括在将金属电镀到基底上时将氮掺入金属中。 该方法包括制备电镀浴，将准备好的浴中含有氮的矫正剂化学品放置在整个浴中，使整平剂化学品循环，然后将金属电镀在基底上。 在优选的实施方案中，使用分子量为100〜1,000,000的烷基聚酰胺，烷基胺，烷基氧化胺或硫脲作为矫光剂。

公开(公告)号：US07544281B2

公开(公告)日：2009-06-09

申请号：US11119183

申请日：2005-04-28

申请人： Ming-Wei Lin ,  Ming-Hsing Tsai

发明人： Ming-Wei Lin ,  Ming-Hsing Tsai

IPC分类号： C25D5/02

CPC分类号： C25D17/06 ,  C25D5/18 ,  C25D7/123 ,  C25D17/001 ,  C25D17/005 ,  H01L21/2885

摘要： An electrochemical plating apparatus and method for facilitating uniform current distribution across a wafer during loading into an ECP (electrochemical plating) apparatus is disclosed. The apparatus includes a bath container for containing a bath solution, an anode provided in the bath container, a cathode ring for supporting a wafer in the bath container and a current source electrically connected to the anode and the cathode ring. According to the method, a voltage potential is applied to the cathode ring as it is immersed into the solution and prior to immersion of the wafer in the solution, thereby facilitating a substantially uniform plating current across the wafer upon immersion of the wafer.

摘要翻译： 公开了一种用于在装载到ECP（电化学电镀）装置中时促进在晶片上均匀分布电流的电化学电镀装置和方法。 该装置包括用于容纳浴溶液的浴容器，设置在浴容器中的阳极，用于在浴容器中支撑晶片的阴极环和与阳极和阴极环电连接的电流源。 根据该方法，当阴极环浸入溶液中并且在将晶片浸入溶液之前，电压电势被施加到阴极环上，从而有助于在晶片浸入时跨晶片的基本均匀的电镀电流。