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    Method to reduce adhesion between a conformable region and a pattern of a mold
    1.
    发明申请
    Method to reduce adhesion between a conformable region and a pattern of a mold 有权
    降低适形区域和模具图案之间粘合的方法

    公开(公告)号：US20040256764A1

    公开(公告)日：2004-12-23

    申请号：US10463396

    申请日：2003-06-17

    Applicant: University of Texas System Board of Regents ,  MOLECULAR IMPRINTS, INC.

    Inventor： Byung Jin Choi ,  Frank Y. Xu ,  Nicholas A. Stacy ,  Van Nguyen Truskett ,  Michael P.C. Watts

    IPC: B29C059/00

    CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    Abstract: The present invention provides a method to reduce adhesion between a conformable region on a substrate and a pattern of a mold, which selectively comes into contact with the conformable region. The method features forming a conformable material on the substrate and contacting the conformable material with the surface. A conditioned layer is formed from the conformable material. The conditioned layer has first and second sub-portions, with the first sub-portion being solidified and the second sub-portion having a first affinity for the surface and a second affinity for the first sub-portion. The first affinity is greater than the second affinity. In this fashion, upon separation of the mold from the conditioned layer, a subset of the second sub-portion maintains contact with the mold, thereby reducing the probability that a pattern formed in the conditioned layer becomes compromised. These and other embodiments are described herein.

    Abstract translation: 本发明提供一种降低基材上的适形区域和选择性地与适形区域接触的模具图案之间的粘附性的方法。 该方法的特征在于在基底上形成适形材料并使适形材料与表面接触。 由适形材料形成调理层。 调理层具有第一和第二子部分，其中第一子部分被固化，第二子部分对于表面具有第一亲和力，对第一子部分具有第二亲和力。 第一亲和力大于第二亲和力。 以这种方式，在模具与调理层分离时，第二子部分的子集保持与模具的接触，从而降低在调理层中形成的图案变得损害的可能性。 这些和其他实施例在本文中描述。

    Method of manufacturing a vacuum chuck used in imprint lithography
    2.
    发明申请
    Method of manufacturing a vacuum chuck used in imprint lithography 审中-公开
    制造用于压印光刻的真空吸盘的方法

    公开(公告)号：US20040149687A1

    公开(公告)日：2004-08-05

    申请号：US10616799

    申请日：2003-07-10

    Applicant: University of Texas System, Board of Regents, UT System

    Inventor： Byung Jin Choi ,  Sidlgata V. Sreenivasan ,  Stephen C. Johnson

    IPC: B44C001/22

    CPC classification number: G03F9/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    Abstract: Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.

    Abstract translation: 用于在压印光刻期间用于模板衬底的高精度定位的工艺和相关设备包括具有校准阶段的校准系统和能够在模板和衬底之间保持均匀间隙的精细取向阶段。 精细取向平台包括一对挠曲构件，其具有用于围绕与第一和第二取向轴相交的枢轴点运动的挠曲接头。 执行器延长或缩短以伸缩或收缩挠曲件。 使用剥离和拉伸方法来实现模板的分离，该方法避免了印刷特征从基材的破坏。

    Device for holding a template for use in imprint lithography
    6.
    发明申请
    Device for holding a template for use in imprint lithography 有权
    用于保存用于压印光刻的模板的装置

    公开(公告)号：US20040141163A1

    公开(公告)日：2004-07-22

    申请号：US10747737

    申请日：2003-12-29

    Applicant: The University of Texas System, Board of Regents, UT System

    Inventor： Todd Bailey ,  Byung J. Choi ,  Matthew E. Colburn ,  S. V. Sreenivasan ,  C. Grant Willson ,  John Ekerdt

    IPC: G03B027/00 ,  G03B027/62

    CPC classification number: G11B5/855 ,  B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S977/887

    Abstract: Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.

    Abstract translation: 描述了压印光刻模板，形成和使用模板的方法以及模板保持装置。 压印光刻模板可以包括在主体的表面上具有多个凹部的主体。 身体可以是对于激活光是基本上透明的材料。 多个凹部的至少一部分可以限定具有小于约250nm的特征尺寸的特征。 可以通过获得对于激活光而基本上透明并在模板的表面上形成多个或多个凹陷的材料来形成模板。 在一些实施例中，模板还可以包括至少一个对准标记。 在一些实施例中，模板还可以包括间隙感测区域。 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间，模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体，支撑板和耦合到主体的至少一个压电致动器。 压电致动器可以被配置为在使用期间改变模板的物理尺寸。

    System and method for cooperation diversity through coding
    10.
    发明申请
    System and method for cooperation diversity through coding 有权
    通过编码进行协作分集的系统和方法

    公开(公告)号：US20030148732A1

    公开(公告)日：2003-08-07

    申请号：US10360971

    申请日：2003-02-07

    Applicant: The University of Texas System Board of Regents

    Inventor： Todd E. Hunter ,  Aria Nosratinia

    IPC: H04B001/60

    CPC classification number: H04L1/0618

    Abstract: A method for providing wireless transmission diversity wherein an error correcting codeword is divided into first and second segments at first and second transmitting units. The first segments are transmitted from each of the first and second transmitting units and received at the first and second transmitting units, respectively. The received first segments are decoded and, responsive to the decoding, transmission of a second segment is made from each of the first and second transmitting units.

    Abstract translation: 一种用于提供无线传输分集的方法，其中纠错码字在第一和第二传输单元被划分成第一和第二段。 第一段从第一和第二发送单元中的每一个发送，并分别在第一和第二发送单元处接收。 所接收的第一段被解码，并且响应于解码，从第一和第二传送单元中的每一个进行第二段的传输。

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