Method of manufacturing NAND flash device
    2.
    发明授权
    Method of manufacturing NAND flash device 失效
    制造NAND闪存器件的方法

    公开(公告)号:US06979618B2

    公开(公告)日:2005-12-27

    申请号:US10887964

    申请日:2004-07-09

    申请人: Young Ki Shin

    发明人: Young Ki Shin

    摘要: A method of manufacturing a NAND flash device which can improve uniformity of disturb fail characteristics by performing an annealing process after an ion implantation process for forming a P well, reduce a fail bit count by performing an annealing process after an ion implantation process for controlling a threshold voltage and before a process for forming a high voltage gate oxide film, and prevent disturb fail by omitting an STI ion implantation process in a cell region.

    摘要翻译: 一种制造NAND闪存器件的方法,其可以通过在用于形成P阱的离子注入工艺之后执行退火处理来提高干扰失真特性的均匀性,通过在离子注入过程之后执行退火处理来减少失效比特数,以控制 阈值电压之前和用于形成高电压栅氧化膜的处理之前,并且通过省略细胞区域中的STI离子注入工艺来防止干扰失败。

    Method of manufacturing a flash memory cell capable of increasing a coupling ratio
    3.
    发明授权
    Method of manufacturing a flash memory cell capable of increasing a coupling ratio 失效
    制造能够提高耦合比的闪存单元的方法

    公开(公告)号:US07015099B2

    公开(公告)日:2006-03-21

    申请号:US11004301

    申请日:2004-12-03

    IPC分类号: H01L21/336

    CPC分类号: H01L27/11521 H01L21/76235

    摘要: A method of manufacturing a flash memory cell. The method includes controlling a wall sacrificial oxidization process, a wall oxidization process and a cleaning process of a trench insulating film that are performed before/after a process of forming the trench insulating film for burying a trench to etch the trench insulating film to a desired space. Therefore, it is possible to secure the coupling ratio of a floating gate by maximum and implement a device of a smaller size.

    摘要翻译: 一种制造闪存单元的方法。 该方法包括控制在形成用于埋入沟槽的沟槽绝缘膜的工艺之前/之后执行的沟槽绝缘膜的壁牺牲氧化过程,壁氧化过程和清洁过程,以将沟槽绝缘膜蚀刻到期望的 空间。 因此,可以最大限度地确保浮动栅极的耦合比,并且实现更小尺寸的器件。

    Method of manufacturing a flash memory device
    4.
    发明授权
    Method of manufacturing a flash memory device 有权
    制造闪存装置的方法

    公开(公告)号:US06403419B1

    公开(公告)日:2002-06-11

    申请号:US09717049

    申请日:2000-11-22

    IPC分类号: H01L21336

    摘要: There is disclosed a method of manufacturing a flash memory device by which an insulating film spacer is formed on both sidewalls of a gate electrode and a drain region is then formed. Thus, the present invention can improve coverage during a deposition process for forming a select gate and reduce the overlapping area of a floating gate and a drain region. Therefore, as the resistance of the select gate itself is reduced depending on the coverage, the present invention can increase the operating speed of a device and can improve the erase characteristic by F-N tunneling due to reduced overlapping area.

    摘要翻译: 公开了一种制造闪存器件的方法,通过该方法,在栅电极的两个侧壁上形成绝缘膜间隔物,然后形成漏极区域。 因此,本发明可以改善用于形成选择栅极的沉积工艺中的覆盖,并且减小浮置栅极和漏极区域的重叠面积。 因此,由于根据覆盖范围减小了选择栅极本身的电阻,本发明可以提高器件的工作速度,并且可以通过减少重叠面积的F-N隧穿来提高擦除特性。

    Display substrate and method of manufacturing the same
    5.
    发明授权
    Display substrate and method of manufacturing the same 有权
    显示基板及其制造方法

    公开(公告)号:US09025118B2

    公开(公告)日:2015-05-05

    申请号:US13619120

    申请日:2012-09-14

    摘要: A display substrate includes a base substrate, a switching element, a gate line, a data line and a pixel electrode. Each of the gate line and the data line includes a first metal layer, and a second metal layer directly on the first metal layer. The switching element is on the base substrate, and includes a control electrode and an input electrode or an output electrode. The control electrode includes the first metal layer and excludes the second metal layer, and extends from the gate line. The input electrode or the output electrode includes a second metal layer and excludes the first metal layer. The input electrode extends from the data line. The pixel electrode is electrically connected to the output electrode of the switching element through a first contact hole, and includes a transparent conductive layer.

    摘要翻译: 显示基板包括基底基板,开关元件,栅极线,数据线和像素电极。 栅极线和数据线中的每一个包括第一金属层和直接在第一金属层上的第二金属层。 开关元件在基底基板上,并且包括控制电极和输入电极或输出电极。 控制电极包括第一金属层,并且不包括第二金属层,并且从栅极线延伸。 输入电极或输出电极包括第二金属层,并且不包括第一金属层。 输入电极从数据线延伸。 像素电极通过第一接触孔电连接到开关元件的输出电极,并且包括透明导电层。

    DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME 有权
    显示基板及其制造方法

    公开(公告)号:US20130105826A1

    公开(公告)日:2013-05-02

    申请号:US13619120

    申请日:2012-09-14

    IPC分类号: H01L33/08

    摘要: A display substrate includes a base substrate, a switching element, a gate line, a data line and a pixel electrode. Each of the gate line and the data line includes a first metal layer, and a second metal layer directly on the first metal layer. The switching element is on the base substrate, and includes a control electrode and an input electrode or an output electrode. The control electrode includes the first metal layer and excludes the second metal layer, and extends from the gate line. The input electrode or the output electrode includes a second metal layer and excludes the first metal layer. The input electrode extends from the data line. The pixel electrode is electrically connected to the output electrode of the switching element through a first contact hole, and includes a transparent conductive layer.

    摘要翻译: 显示基板包括基底基板,开关元件,栅极线,数据线和像素电极。 栅极线和数据线中的每一个包括第一金属层和直接在第一金属层上的第二金属层。 开关元件在基底基板上,并且包括控制电极和输入电极或输出电极。 控制电极包括第一金属层,并且不包括第二金属层,并且从栅极线延伸。 输入电极或输出电极包括第二金属层,并且不包括第一金属层。 输入电极从数据线延伸。 像素电极通过第一接触孔电连接到开关元件的输出电极,并且包括透明导电层。

    Method of manufacturing high voltage transistor in flash memory device
    9.
    发明授权
    Method of manufacturing high voltage transistor in flash memory device 有权
    闪存器件制造高压晶体管的方法

    公开(公告)号:US06991983B2

    公开(公告)日:2006-01-31

    申请号:US10737559

    申请日:2003-12-16

    申请人: Young Ki Shin

    发明人: Young Ki Shin

    IPC分类号: H01L21/336

    摘要: Disclosed is a method of manufacturing a high voltage transistor in a flash memory device. The method can prohibit a punch leakage current of an isolation film while satisfying active characteristics of the high voltage transistor without the need for a mask process for field stop of the high voltage transistor ion implantation process and a mask removal process.

    摘要翻译: 公开了一种在闪速存储器件中制造高压晶体管的方法。 该方法可以在满足高压晶体管的有源特性的同时,禁止隔离膜的冲击泄漏电流,而不需要用于高电压晶体管离子注入工艺的场停止的掩模处理和掩模去除处理。