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    Pressure sensor
    1.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号：US06363791B1

    公开(公告)日：2002-04-02

    申请号：US09356666

    申请日：1999-07-19

    申请人： Akihito Kurosaka ,  Osamu Nakao ,  Takanao Suzuki ,  Masahiro Sato ,  Hitoshi Nishimura

    发明人： Akihito Kurosaka ,  Osamu Nakao ,  Takanao Suzuki ,  Masahiro Sato ,  Hitoshi Nishimura

    IPC分类号： G01L912

    CPC分类号： G01L9/0073

    摘要： A capacitance pressure sensor that prevents leakage from outside the sensor to the reference pressure cavity, has a structure that can decrease defects due to leakage compared to conventional technology. An electrode comprising a thin metallic layer is formed on the upper surface of a glass substrate that forms one of the substrates of a pressure sensor and an external electrode is formed on the surface edge of the substrate. In addition, in the region where the silicon substrate is bonded, a feedthrough extending from the electrode to the external electrode is formed, and spine shaped layers with three braches for blocking leakage gas are formed perpendicularly to the feedthrough.

    摘要翻译： 阻止传感器外部泄漏到参考压力腔的电容式压力传感器具有与传统技术相比能够减少泄漏的缺陷的结构。 在形成压力传感器的基板之一的玻璃基板的上表面上形成有薄金属层的电极，在基板的表面边缘上形成外部电极。 此外，在硅基板接合的区域中，形成从电极延伸到外部电极的馈通，并且与馈通垂直地形成具有三个用于阻断泄漏气体的支柱的脊形层。

    Process for preparing barium titanate single crystals
    7.
    发明授权
    Process for preparing barium titanate single crystals 失效
    制备钛酸钡单晶的方法

    公开(公告)号：US5366583A

    公开(公告)日：1994-11-22

    申请号：US957902

    申请日：1992-10-08

    申请人： Akihito Kurosaka ,  Kazuhiko Tomomatu ,  Osamu Nakao ,  Shoji Ajimura ,  Haruo Tominaga

    发明人： Akihito Kurosaka ,  Kazuhiko Tomomatu ,  Osamu Nakao ,  Shoji Ajimura ,  Haruo Tominaga

    IPC分类号： C30B15/00 ,  C30B29/32

    CPC分类号： C30B15/00 ,  C30B29/32

    摘要： A mixture of titanium dioxide and an oxide or carbonate of barium includes one or more transition metal elements selected from the group of V, Cr, Mn, Fe, Co, Ni and Cu, in the amount of 2 ppm or more. This mixture is used as a starting material. The mixture is heated to a predetermined temperature to make a melt. Then, a seed crystal of BaTiO.sub.3 is brought into contact with the melt under an environment with a low oxygen partial pressure of 0.02 atm. or less. From this state, the above melt is slowly cooled to grow a single crystal on the seed crystal. The thus obtained single crystal is heated in a temperature of 600 .degree. C. or more, under an oxidizing environment with its oxygen partial pressure more than 0.1 atm.

    摘要翻译： 二氧化钛和钡的氧化物或碳酸盐的混合物包括选自V，Cr，Mn，Fe，Co，Ni和Cu中的一种或多种过渡金属元素，其量为2ppm以上。 该混合物用作原料。 将混合物加热至预定温度以使其熔融。 然后，在0.02atm的低氧分压的环境下，使BaTiO 3的晶种与熔体接触。 或更少。 从该状态，将上述熔体缓慢冷却以在晶种上生长单晶。 将得到的单晶在氧分压大于0.1atm的氧化环境下，在600℃以上的温度下加热。