摘要:
A method of manufacturing structures such as a pressure gauge, an accelerometer and the like with a single crystal material such as silicon uses etching techniques where the shape of a part subjected to stress concentration has a curvature, another part is formed in a plane body and a polyhedron is constituted by combining both.To attain the above constitution, a wafer of single crystal material is formed with a stepped surface having a value corresponding to at least the depth of the curvature in a first anisotropic etching process using a prescribed etching mask, and in a second anisotropic etching process, an etching mask is used by removing at least a part of the etching mask used in the first anisotropic etching process.
摘要:
A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.
摘要:
Disclosed is a gas valve capable of switching gases to be introduced within a vacuum chamber with high speed thereby enhancing the controllability of the composion of a semiconducting thin film growing on a substrate and shortening the time required for growth of the thin film. The gas valve comprises a bendable film between a pair of parallel plate electrodes whereby operating the film by an electrostatic force and opening and closing a port for releasing gas to a substrate mounted on the wall surface of a gas chamber and a port for exhausting an unnecessary gas to an exhaust passage. The gas valve is mounted in the vicinity of the substrate within the vacuum chamber for supplying a working gas in a minimum amount required for the film growth.
摘要:
Disclosed is a gas valve capable of switching gases to be introduced within a vacuum chamber with high speed thereby enhancing the controllability of the composion of a semiconducting thin film growing on a substrate and shortening the time required for growth of the thin film. The gas valve comprises a bendable film between a pair of parallel plate electrodes whereby operating the film by an electrostatic force and opening and closing a port for releasing gas to a substrate mounted on the wall surface of a gas chamber and a port for exhausting an unnecessary gas to an exhaust passage. The gas valve is mounted in the vicinity of the substrate within the vacuum chamber for supplying a working gas in a minimum amount required for the film growth.
摘要:
A composition for cosmetics is provided, which has a UV shielding effect and which can produce a cosmetic having good dispersibility, an excellent UV shielding effect and excellent use feeling, cosmetic effect, long-lasting cosmetic performance. The cosmetic obtained by using the same is provided. The composition for cosmetics includes (A) microparticulate titanium dioxide, (B) one kind or two or more kinds of magnesium hydroxide and calcium hydroxide. The composition for cosmetics preferably contains further (C) a clay mineral. The compounding weight ratio among (A): (B): (C) is preferably 20 to 60: 3 to 40: 0 to 77. In addition, the composition for cosmetics is preferably one in which a mixed powder of (A), (B) and (C) is lipophilically treated.
摘要:
A laser marking device that irradiates a laser beam on a workpiece (W) to transform a portion inside the workpiece at a focal point of the laser beam, thus putting a dot in each predetermined area. The laser marking device includes acquiring mechanism (10, 20) that acquires, as information on the dot, at least two-dimensional position information of an exposed section of the workpiece (W), and density information of the dot, coordinate setting mechanism (30) that calculates, for each dot according to the density information, dot depth information showing the distance from the surface of the workpiece (W) to the dot in the thickness direction of the workpiece (W), and sets three-dimensional coordinates for each dot based on a position specified by the dot depth information and the two-dimensional position information, and laser marking mechanism (40) that performs marking with the three-dimensional coordinates as a laser beam focal point.
摘要:
To provide mercury-removal adsorbents, a method of producing mercury-removal adsorbents, and a method of removing mercury by adsorption which are capable of realizing efficient removal of mercury by adsorption from liquid hydrocarbon, thermal power station exhaust combustion gas, natural gas, off gas of various process plants, and so on which contain mercuries in various forms such as elemental mercury, ionic mercury, and organic mercury, and a concomitant hindering mercury adsorption.Mercury-removal adsorbents carrie potassium iodide in an amount of 27 to 70% of a total adsorbent weight, and a volume of pores with a 1 μm pore diameter or more in the mercury-removal adsorbents is 0.6 mL/g or more. These mercury-removal adsorbents are filled in, for example, an adsorption tower 10, and a hydrocarbon liquid is passed therethrough (mercury removal step). In a case where the hydrocarbon liquid contains saturated water, a dehydration unit 9 or the like is installed on a preceding stage of the adsorption tower 10 to dehydrate the hydrocarbon liquid (dehydration step).
摘要:
A filter is set by a control apparatus automatically detecting a vibration frequency and determining a filter to be needed, in a simple method that does not require a special process.A servo control apparatus which drives a servo motor includes a vibration detection section which detects vibration of a control system, and a vibration frequency measuring and analyzing section. The vibration detection section detects the vibration when the vibration is generated during driving. The vibration frequency measuring and analyzing section measures a frequency of which vibration frequency component is large. Then, a frequency of a vibration suppression filter is set based on the vibration frequency.
摘要:
A power generation control device for determining a crank position of an engine to reduce a start-up torque following an engine stop, enhancing startability, and reducing electric power consumption of a battery at start-up is provided. The power generation control device includes a magneto generator rotated by an engine, a generated electric current controller that rectifies an alternating electric current generated by the magneto into a direct current and supplies the direct current as a generated electric current to an electric appliance and controls a power generation amount to the electric appliance. A controlling section controls a power generation amount of a rectifying section. The controlling section is provided with an exhaust stroke stop estimation time control module for calculating engine rotational speed and acceleration values based on a signal related to a rotation cycle of a crankshaft or the magneto generator, for estimating a stop of the engine according to the rotational speed and the acceleration values, and for performing a control for increasing the power generation amount of the rectifying section when the engine stop is estimated to occur at an exhaust stroke of the engine.
摘要:
It is an object of the present invention to provide a method for extracting a maximum gain of a servo controller in which while a machine is vibrated by raising a control gain, the vibration is rapidly detected so that the machine does not greatly vibrate or noise is not generated.In a method for extracting a maximum gain of a servo controller for driving a servo motor, a simulated disturbance torque is applied to a torque command by a vibrating unit while a control gain is raised and the vibration of a control system is detected by a vibration detecting unit (1). A process for applying the simulated disturbance torque is repeated while the control gain is raised until the vibration of a prescribed level is detected. The control gain when the vibration detecting unit (1) detects the vibration exceeding the prescribed level is set as a maximum gain.