Method for producing columnar structured material
    3.
    发明授权
    Method for producing columnar structured material 失效
    柱状结构材料的制造方法

    公开(公告)号:US08435899B2

    公开(公告)日:2013-05-07

    申请号:US12555195

    申请日:2009-09-08

    IPC分类号: H01L21/311

    CPC分类号: C30B7/00 C30B7/005 C30B29/605

    摘要: A microcolumnar structured material having a desired material. The columnar structured material includes columnar members obtained by introducing a filler into columnar holes formed in a porous material. The porous material has the columnar holes formed by removing columnar substances from a structured material in which the columnar substances containing a first component are dispersed in a matrix member containing a second component capable of forming a eutectic with the first component. The matrix member may be removed. In the columnar structured material, the filler is a conductive material, and an electrode can be structured by electrically connecting the conductive materials in at least a part of a plurality of holes to a conductor.

    摘要翻译: 具有所需材料的微柱结构材料。 柱状结构材料包括通过将填料引入形成在多孔材料中的柱状孔中获得的柱状构件。 多孔材料具有通过从其中含有第一成分的柱状物质分散在含有能够与第一成分形成共晶的第二成分的基质成分的结构化材料中除去柱状物质而形成的柱状孔。 可以去除矩阵构件。 在柱状结构材料中,填料是导电材料,并且电极可以通过将多个孔的至少一部分中的导电材料电连接到导体来构造。

    Columnar structured material, electrode having columnar structured material, and production method therefor
    6.
    发明申请
    Columnar structured material, electrode having columnar structured material, and production method therefor 审中-公开
    柱状结构材料,具有柱状结构材料的电极及其制造方法

    公开(公告)号:US20060128155A1

    公开(公告)日:2006-06-15

    申请号:US10538127

    申请日:2003-12-12

    IPC分类号: H01L21/311

    CPC分类号: C30B7/00 C30B7/005 C30B29/605

    摘要: To obtain a microcolumnar structured material having a desired material. The columnar structured material includes columnar members 15 obtained by introducing a filler into columnar holes formed in a porous material. The porous material has the columnar holes 14 formed by removing columnar substances from a structured material in which the columnar substances 12 containing a first component are dispersed in a matrix member 13 containing a second component capable of forming a eutectic with the first component. The matrix member 13 may be removed. In the columnar structured material, the filler is a conductive material, and an electrode can be structured by electrically connecting the conductive materials in at least a part of a plurality of holes to a conductor.

    摘要翻译: 获得具有所需材料的微柱结构材料。 柱状结构材料包括通过将填料引入形成在多孔材料中的柱状孔中获得的柱状构件15。 多孔材料具有通过从其中将含有第一成分的柱状物质12分散在含有能够与第一成分形成共晶的第二成分的基质成分13中的结构化材料中除去柱状物质而形成的柱状孔14。 矩阵构件13可以被移除。 在柱状结构材料中,填料是导电材料,并且电极可以通过将多个孔的至少一部分中的导电材料电连接到导体来构造。

    METHOD FOR PRODUCING COLUMNAR STRUCTURED MATERIAL
    7.
    发明申请
    METHOD FOR PRODUCING COLUMNAR STRUCTURED MATERIAL 失效
    生产柱状结构材料的方法

    公开(公告)号:US20100003822A1

    公开(公告)日:2010-01-07

    申请号:US12555195

    申请日:2009-09-08

    IPC分类号: H01L21/311

    CPC分类号: C30B7/00 C30B7/005 C30B29/605

    摘要: A microcolumnar structured material having a desired material. The columnar structured material includes columnar members obtained by introducing a filler into columnar holes formed in a porous material. The porous material has the columnar holes formed by removing columnar substances from a structured material in which the columnar substances containing a first component are dispersed in a matrix member containing a second component capable of forming a eutectic with the first component. The matrix member may be removed. In the columnar structured material, the filler is a conductive material, and an electrode can be structured by electrically connecting the conductive materials in at least a part of a plurality of holes to a conductor.

    摘要翻译: 具有所需材料的微柱结构材料。 柱状结构材料包括通过将填料引入形成在多孔材料中的柱状孔中获得的柱状构件。 多孔材料具有通过从其中含有第一成分的柱状物质分散在含有能够与第一成分形成共晶的第二成分的基质成分的结构化材料中除去柱状物质而形成的柱状孔。 可以去除矩阵构件。 在柱状结构材料中,填料是导电材料,并且电极可以通过将多个孔的至少一部分中的导电材料电连接到导体来构造。

    Thermoelectric conversion material, thermoelectric conversion device and manufacturing method thereof
    8.
    发明申请
    Thermoelectric conversion material, thermoelectric conversion device and manufacturing method thereof 审中-公开
    热电转换材料,热电转换装置及其制造方法

    公开(公告)号:US20060032526A1

    公开(公告)日:2006-02-16

    申请号:US10537161

    申请日:2003-12-12

    IPC分类号: B32B3/26 H01L35/30 H01L35/28

    摘要: A thermoelectric conversion material and a thermoelectric conversion device having a novel structure of an increased figure of merit are provided by forming nano-wires of thermoelectric material in a smaller cross-sectional size. The thermoelectric conversion material comprises nano-wires obtained by introducing a thermoelectric material (semiconductor material) into columnar pores of a porous body. The porous body is formed by providing a structure in which columns of a column-forming material containing a first component (for example, aluminum) are distributed in a matrix containing a second component (for example, silicon or germanium or a mixture of them) being eutectic with the first component, and then removing the column-forming material from the structure. The average diameter of the nano-wires of the thermoelectric material is 0.5 nm or more and less than 15 nm, and the spacing of the nano-wires is 5 nm or more and less than 20 nm.

    摘要翻译: 通过以更小的横截面尺寸形成热电材料的纳米线,提供具有增加的品质因数的新颖结构的热电转换材料和热电转换装置。 热电转换材料包括通过将热电材料(半导体材料)引入到多孔体的柱状孔中而获得的纳米线。 多孔体通过提供一种结构形成,其中含有第一组分(例如铝)的成柱材料的塔分布在含有第二组分(例如硅或锗或它们的混合物)的基质中, 与第一组分共晶,然后从结构中除去柱形成材料。 热电材料的纳米线的平均直径为0.5nm以上且小于15nm,纳米线的间隔为5nm以上且小于20nm。

    Columnar structured material and method of manufacturing the same
    9.
    发明申请
    Columnar structured material and method of manufacturing the same 失效
    柱状结构材料及其制造方法

    公开(公告)号:US20060012013A1

    公开(公告)日:2006-01-19

    申请号:US10535452

    申请日:2003-12-12

    IPC分类号: H01L29/40

    摘要: A method of forming, on a substrate, minute-sized columnar portions of a columnar structured material at minute intervals, and a columnar structured material formed by the manufacturing method. A columnar structured material is formed through an etching process in which a pattern of minute dots formed on the substrate is utilized as a mask. The pattern of the minute dots is obtained by introducing a mask material into columnar microholes of a porous film formed on the substrate and then removing the porous film. The porous film is formed by removing columnar substances from a structured material in which the columnar substances which are so formed as to contain a first component are dispersed in a matrix which is made of another component and is so formed as to contain a second component that can form a eutectic together with the first component.

    摘要翻译: 在基板上以微小的间隔在柱状结构材料的微小尺寸的柱状部分上形成通过该制造方法形成的柱状结构材料的方法。 通过蚀刻工艺形成柱状结构材料,其中使用形成在基板上的微小点的图案作为掩模。 通过将掩模材料引入形成在基板上的多孔膜的柱状微孔中,然后除去多孔膜,获得微小点的图案。 通过从结构材料中除去柱状物质形成多孔膜,其中将形成为含有第一成分的柱状物质分散在由另一成分制成的基体中,并形成为含有第二成分 可以与第一组分一起形成共晶体。

    Field-effect transistor, sensor using it, and production method thereof
    10.
    发明申请
    Field-effect transistor, sensor using it, and production method thereof 失效
    场效应晶体管,使用它的传感器及其制造方法

    公开(公告)号:US20060120918A1

    公开(公告)日:2006-06-08

    申请号:US10530549

    申请日:2004-08-04

    IPC分类号: G01N33/00

    摘要: A sensor which has high measuring sensitivity and is excellent in response is provided by forming a porous film in a sensitive section of a field-effect transistor. It comprises a porous body, which is formed on a sensitive section (here, a gate insulating film) of the field-effect transistor and has cylindrical pores which are formed almost perpendicularly to a substrate, and the field-effect transistor. It uses as a porous film a porous film which is made of a semiconductor material whose main component (except oxygen) is silicon, germanium, or a composite of silicon and germanium, or a porous film made of an insulation material whose main component is silicon oxide, which has pores perpendicular to the substrate.

    摘要翻译: 通过在场效应晶体管的敏感部分中形成多孔膜来提供具有高测量灵敏度和响应性优异的传感器。 它包括形成在场效应晶体管的敏感部分(这里是栅极绝缘膜)上并具有几乎垂直于基板形成的圆柱形孔的多孔体和场效应晶体管。 作为多孔膜,使用由主要成分(氧除外)为硅,锗或硅与锗的复合体的半导体材料制成的多孔膜,或由主要成分为硅的绝缘材料构成的多孔膜 氧化物,其具有垂直于衬底的孔。