摘要:
An integrated circuit may include lines that traverse a cross-point array, the lines fabricated at a first pitch on a first layer, wherein the first pitch is sub-lithographic, and leads on a second layer, the leads having a second pitch that is twice as large as the first pitch. The lines may be routed outside of the array in alternating groups to opposite sides of the array where the lines couple to the leads.
摘要:
An integrated circuit may include lines that traverse a cross-point array, the lines fabricated at a first pitch on a first layer, wherein the first pitch is sub-lithographic, and leads on a second layer, the leads having a second pitch that is twice as large as the first pitch. The lines may be routed outside of the array in alternating groups to opposite sides of the array where the lines couple to the leads.
摘要:
Methods and structures provide horizontal conductive lines of fine pitch and self-aligned contacts extending from them, where the contacts have at least one dimension with a more relaxed pitch. Buried hard mask materials permit self-alignment of the lines and contacts without a critical mask, such as for word-line electrode lines and word-line contacts in a memory device.
摘要:
Methods and structures provide horizontal conductive lines of fine pitch and self-aligned contacts extending from them, where the contacts have at least one dimension with a more relaxed pitch. Buried hard mask materials permit self-alignment of the lines and contacts without a critical mask, such as for word-line electrode lines and word-line contacts in a memory device.
摘要:
Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a first conductive material having a looped feature using a self-aligning multiple patterning technique, and forming a first sealing material over the looped feature. A first chop mask material is formed over the first sealing material. The looped feature and the first sealing material are removed outside the first chop mask material.
摘要:
A phase change memory device with reduced programming disturbance and its operation are described. The phase change memory includes an array with word lines and bit lines and voltage controlling elements coupled to bit lines adjacent to an addressed bit line to maintain the voltage of the adjacent bit lines within an allowed range.
摘要:
Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a first conductive material having a looped feature using a self-aligning multiple patterning technique, and forming a first sealing material over the looped feature. A first chop mask material is formed over the first sealing material. The looped feature and the first sealing material are removed outside the first chop mask material.
摘要:
Methods and structures provide horizontal conductive lines of fine pitch and self-aligned contacts extending from them, where the contacts have at least one dimension with a more relaxed pitch. Buried hard mask materials permit self-alignment of the lines and contacts without a critical mask, such as for word-line electrode lines and word-line contacts in a memory device.