公开(公告)号：US20150214057A1

公开(公告)日：2015-07-30

申请号：US14422607

申请日：2013-09-13

Applicant: APPLIED MATERIALS, INC.

Inventor： Fatih Mert Ozkeskin ,  Jose Manuel Dieguez-Campo

IPC: H01L21/268 ,  H01L21/02 ,  H01L21/321 ,  H01L51/00

CPC classification number: H01L21/268 ,  H01L21/0217 ,  H01L21/321 ,  H01L21/67092 ,  H01L51/0021 ,  H01L51/0023 ,  H01L51/5206 ,  H01L51/5221

Abstract: Methods for processing a substrate are described herein. A method for removing a layer from a substrate, can include positioning a substrate within a processing chamber, wherein the substrate can include an upper surface, and one or more metal features with a separation energy formed on the upper surface; forming a layer over the one or more metal features and the exposed portion of the upper surface; focusing a source of transmissive radiant energy at the layer; pulsing transmissive radiant energy at the upper surface of the substrate creating a separated portion and an attached portion of the layer; and removing the separated portion of the layer.

Abstract translation: 本文描述了用于处理衬底的方法。 从衬底去除层的方法可以包括将衬底定位在处理室内，其中衬底可以包括上表面，以及在上表面上形成有分离能的一个或多个金属特征; 在所述一个或多个金属特征和所述上表面的暴露部分上形成层; 将透射辐射能的源聚焦在该层; 在衬底的上表面上脉冲发射辐射能产生分离的部分和该层的附着部分; 并移除层的分离部分。

公开(公告)号：US09627211B2

公开(公告)日：2017-04-18

申请号：US14422607

申请日：2013-09-13

Applicant: Applied Materials, Inc.

Inventor： Fatih Mert Ozkeskin ,  Jose Manuel Dieguez-Campo

IPC: H01L21/268 ,  H01L21/67 ,  H01L51/00 ,  H01L21/02 ,  H01L21/321 ,  H01L51/52

CPC classification number: H01L21/268 ,  H01L21/0217 ,  H01L21/321 ,  H01L21/67092 ,  H01L51/0021 ,  H01L51/0023 ,  H01L51/5206 ,  H01L51/5221

Abstract: Methods for processing a substrate are described herein. A method for removing a layer from a substrate, can include positioning a substrate within a processing chamber, wherein the substrate can include an upper surface, and one or more metal features with a separation energy formed on the upper surface; forming a layer over the one or more metal features and the exposed portion of the upper surface; focusing a source of transmissive radiant energy at the layer; pulsing transmissive radiant energy at the upper surface of the substrate creating a separated portion and an attached portion of the layer; and removing the separated portion of the layer.

公开(公告)号：US09523158B2

公开(公告)日：2016-12-20

申请号：US14606884

申请日：2015-01-27

Applicant: Applied Materials, Inc.

Inventor： Takao Yonehara ,  Karl J. Armstrong ,  Fatih Mert Ozkeskin

IPC: B32B38/10 ,  C30B33/00 ,  C30B25/02 ,  H01L21/677 ,  H01L21/304 ,  H01L21/306 ,  B32B43/00 ,  H01L21/673 ,  H01L21/683 ,  H01L21/67 ,  H01L21/687 ,  H01L21/02

CPC classification number: C30B33/00 ,  B32B38/10 ,  B32B43/006 ,  C30B25/02 ,  H01L21/02005 ,  H01L21/02513 ,  H01L21/02658 ,  H01L21/304 ,  H01L21/306 ,  H01L21/67092 ,  H01L21/67383 ,  H01L21/6776 ,  H01L21/6838 ,  H01L21/68721 ,  H01L21/68764 ,  H01L2221/683 ,  H01L2221/68318 ,  H01L2221/68363 ,  Y10T156/1121 ,  Y10T156/1132 ,  Y10T156/19 ,  Y10T156/1922 ,  Y10T156/1944

Abstract: Method and apparatus for forming free-standing, substantially monocrystalline semiconductor substrates is described. A template substrate is subjected to a process of forming a porous layer on each major surface of the template substrate. The porous layer is smoothed, and then an epitaxial layer is formed on each porous layer. Mechanical energy is used to separate the epitaxial layers from the template substrate, which is recycled by removing any remaining porous and epitaxial material.

Abstract translation: 描述了用于形成独立的，基本单晶半导体衬底的方法和装置。 对模板基板进行在模板基板的每个主表面上形成多孔层的工艺。 使多孔层平滑，然后在每个多孔层上形成外延层。 使用机械能来将外延层与模板衬底分离，通过去除任何剩余的多孔和外延材料来再循环外延层。

公开(公告)号：US09958855B2

公开(公告)日：2018-05-01

申请号：US14438219

申请日：2013-10-25

Applicant: Applied Materials, Inc.

Inventor： Fatih Mert Ozkeskin

IPC: B23H1/02 ,  G05B19/402 ,  B23H9/00 ,  B23H7/26 ,  H01L21/768 ,  H01L23/48 ,  H01L21/306 ,  G05B19/404 ,  B23H5/02

CPC classification number: G05B19/402 ,  B23H1/028 ,  B23H5/02 ,  B23H7/265 ,  B23H9/00 ,  G05B19/404 ,  G05B2219/37032 ,  G05B2219/37435 ,  H01L21/30608 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An electro discharge machining system, and manufacturing method therefor, including: providing an electro discharge machining unit and control; providing a workpiece holder; providing a tool holder for a tool having an electrode array; and operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro-discharge machining of a workpiece to a configuration compatible with the electrode array.

公开(公告)号：US20150293521A1

公开(公告)日：2015-10-15

申请号：US14438219

申请日：2013-10-25

Applicant: APPLIED MATERIALS, INC.

Inventor： Fatih Mert Ozkeskin

IPC: G05B19/402 ,  G05B19/404

CPC classification number: G05B19/402 ,  B23H1/028 ,  B23H5/02 ,  B23H7/265 ,  B23H9/00 ,  G05B19/404 ,  G05B2219/37032 ,  G05B2219/37435 ,  H01L21/30608 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An electro discharge machining system, and manufacturing method therefor, including: providing an electro discharge machining unit and control; providing a workpiece holder; providing a tool holder for a tool having an electrode array; and operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro-discharge machining of a workpiece to a configuration compatible with the electrode array.

Abstract translation: 一种放电加工系统及其制造方法，包括：提供放电加工单元和控制; 提供工件支架; 提供具有电极阵列的工具的刀架; 并且将工件保持器和工具夹具可操作地连接到放电加工单元，并且将工件的批次电子放电加工控制到与电极阵列相容的配置。

公开(公告)号：US20150273600A1

公开(公告)日：2015-10-01

申请号：US14438221

申请日：2013-10-25

Applicant: APPLIED MATERIALS, INC.

Inventor： Fatih Mert Ozkeskin

IPC: B23H1/04 ,  B23H7/26 ,  B23H9/18 ,  B23H11/00

CPC classification number: B23H1/04 ,  B23H1/00 ,  B23H5/02 ,  B23H7/26 ,  B23H9/00 ,  B23H9/008 ,  B23H9/18 ,  B23H11/003 ,  Y10T29/49002

Abstract: An electro discharge machining system, and method of manufacture therefor, providing: an electro discharge machining unit and control; a workpiece holder; a tool having an electrode array formed of a plurality of geometrically shaped electrodes; and wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.

Abstract translation: 一种放电加工系统及其制造方法，提供：放电加工单元和控制; 工件支架; 具有由多个几何形状的电极形成的电极阵列的工具; 并且其中所述工件保持器和所述工具保持器可操作地连接到所述放电加工单元，并且用于对具有多个几何形状结构的构造的工件进行批次电放电加工的控制。