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    METHOD FOR CREATING A MICROMECHANICAL MEMBRANE STRUCTURE AND MEMS COMPONENT
    1.
    发明申请
    METHOD FOR CREATING A MICROMECHANICAL MEMBRANE STRUCTURE AND MEMS COMPONENT 有权
    用于创建微机电薄膜结构和MEMS组件的方法

    公开(公告)号：US20120126346A1

    公开(公告)日：2012-05-24

    申请号：US13290905

    申请日：2011-11-07

    申请人： Arnim Hoechst ,  Jochen Reinmuth ,  Brett Diamond

    发明人： Arnim Hoechst ,  Jochen Reinmuth ,  Brett Diamond

    IPC分类号： H01L29/84 ,  H01L21/02

    CPC分类号： B81C1/00595 ,  B81B2201/0235 ,  B81B2203/0127 ,  B81B2203/0181 ,  B81B2203/053 ,  B81C2201/0112 ,  B81C2201/0133 ,  B81C2201/0136

    摘要： In a method for manufacturing a micromechanical membrane structure, a doped area is created in the front side of a silicon substrate, the depth of which doped area corresponds to the intended membrane thickness, and the lateral extent of which doped area covers at least the intended membrane surface area. In addition, in a DRIE (deep reactive ion etching) process applied to the back side of the silicon substrate, a cavity is created beneath the doped area, which DRIE process is aborted before the cavity reaches the doped area. The cavity is then deepened in a KOH etching process in which the doped substrate area functions as an etch stop, so that the doped substrate area remains as a basic membrane over the cavity.

    摘要翻译： 在制造微机械膜结构的方法中，在硅衬底的前侧产生掺杂区域，其掺杂区域的深度对应于所需的膜厚度，并且其掺杂区域的横向范围至少覆盖预期的 膜表面积。 另外，在施加到硅衬底的背侧的DRIE（深反应离子蚀刻）工艺中，在掺杂区域之下产生空腔，在空腔到达掺杂区域之前DRIE工艺被中止。 然后在KOH蚀刻工艺中加深空腔，其中掺杂衬底区域用作蚀刻停止层，使得掺杂衬底区域保持为空腔上的基本膜。

    Method for creating a micromechanical membrane structure and MEMS component
    2.
    发明授权
    Method for creating a micromechanical membrane structure and MEMS component 有权
    用于产生微机械膜结构和MEMS部件的方法

    公开(公告)号：US08691611B2

    公开(公告)日：2014-04-08

    申请号：US13290905

    申请日：2011-11-07

    申请人： Arnim Hoechst ,  Jochen Reinmuth ,  Brett Diamond

    发明人： Arnim Hoechst ,  Jochen Reinmuth ,  Brett Diamond

    IPC分类号： H01L21/3065

    CPC分类号： B81C1/00595 ,  B81B2201/0235 ,  B81B2203/0127 ,  B81B2203/0181 ,  B81B2203/053 ,  B81C2201/0112 ,  B81C2201/0133 ,  B81C2201/0136

    摘要： In a method for manufacturing a micromechanical membrane structure, a doped area is created in the front side of a silicon substrate, the depth of which doped area corresponds to the intended membrane thickness, and the lateral extent of which doped area covers at least the intended membrane surface area. In addition, in a DRIE (deep reactive ion etching) process applied to the back side of the silicon substrate, a cavity is created beneath the doped area, which DRIE process is aborted before the cavity reaches the doped area. The cavity is then deepened in a KOH etching process in which the doped substrate area functions as an etch stop, so that the doped substrate area remains as a basic membrane over the cavity.

    摘要翻译： 在制造微机械膜结构的方法中，在硅衬底的前侧产生掺杂区域，其掺杂区域的深度对应于所需的膜厚度，并且其掺杂区域的横向范围至少覆盖预期的 膜表面积。 另外，在施加到硅衬底的背侧的DRIE（深反应离子蚀刻）工艺中，在掺杂区域之下产生空腔，在空腔到达掺杂区域之前DRIE工艺被中止。 然后在KOH蚀刻工艺中加深空腔，其中掺杂衬底区域用作蚀刻停止层，使得掺杂衬底区域保持为空腔上的基本膜。

    Method for Manufacturing a Micromechanical Component, and Micromechanical Component
    5.
    发明申请
    Method for Manufacturing a Micromechanical Component, and Micromechanical Component 失效
    微机械部件的制造方法和微机械部件

    公开(公告)号：US20100260974A1

    公开(公告)日：2010-10-14

    申请号：US11921999

    申请日：2006-04-27

    申请人： Hans Artmann ,  Andrea Urban ,  Arnim Hoechst

    发明人： Hans Artmann ,  Andrea Urban ,  Arnim Hoechst

    IPC分类号： B32B3/00 ,  B44C1/22

    CPC分类号： B81C1/00595 ,  B81B2203/0315 ,  Y10T428/24562

    摘要： A micromechanical method for manufacturing a cavity in a substrate, and a micromechanical component manufactured with this method. In this method, in a first step a first layer is produced on or in a substrate. At least one second layer is then applied onto the first layer. An access hole is produced in this second layer. Material of the first layer and of the substrate can be dissolved out through this hole, so that a cavity is produced in the substrate beneath at least a portion of the second layer. This second layer above the cavity can subsequently be used as a membrane. In addition, the possibility also exists of depositing further layers onto the second layer, only the totality of which layers constitutes the membrane. The material of the first layer is selected so that dissolving out the material of the first layer produces a transition edge in the first layer, which edge at is at a predefinable angle between the substrate and the second layer.

    摘要翻译： 用于制造衬底中的空腔的微机械方法和用该方法制造的微机械部件。 在该方法中，在第一步骤中，在衬底上或衬底中产生第一层。 然后将至少一个第二层施加到第一层上。 在该第二层中产生通孔。 可以通过该孔将第一层和基底的材料溶解出来，从而在第二层的至少一部分下面的衬底中产生空腔。 随后可以将空腔上方的第二层用作膜。 此外，还存在将另外的层沉积到第二层上的可能性，仅这些层的总体构成膜。 选择第一层的材料，使得溶解第一层的材料在第一层中产生过渡边缘，该边缘处于基板和第二层之间的预定角度。

    ACOUSTIC SENSOR ELEMENT
    6.
    发明申请
    ACOUSTIC SENSOR ELEMENT 有权
    声学传感器元件

    公开(公告)号：US20100135123A1

    公开(公告)日：2010-06-03

    申请号：US12598994

    申请日：2008-06-10

    申请人： Frank Fischer ,  Arnim Hoechst

    发明人： Frank Fischer ,  Arnim Hoechst

    IPC分类号： H04R19/00

    CPC分类号： H04R19/04 ,  H04R19/005

    摘要： A micromechanical acoustic sensor element, which has at least one diaphragm and at least one fixed counter element, the diaphragm being situated in a cavity between a substrate and the counter element and acting as movable electrode of a capacitor system, the counter element acting as first fixed counter electrode of this capacitor system, and at least one through hole being formed in the substrate for the application of sound pressure to the diaphragm. For fixation and strengthening purposes, the counter element is connected to the substrate via at least one support element. The support element is situated in the region of the cavity, and an opening is formed in the diaphragm for the support element.

    摘要翻译： 一种微机械声学传感器元件，其具有至少一个隔膜和至少一个固定的计数元件，所述隔膜位于基板和所述相对元件之间的空腔中，并且用作电容器系统的可移动电极，所述对置元件作为第一 该电容器系统的固定对置电极，以及至少一个通孔，形成在基板中，用于向隔膜施加声压。 为了固定和加强目的，计数元件经由至少一个支撑元件连接到基底。 支撑元件位于空腔的区域中，并且在用于支撑元件的隔膜中形成开口。

    Micromechanical component having a diaphragm, and method for manufacturing such a component
    7.
    发明申请
    Micromechanical component having a diaphragm, and method for manufacturing such a component 失效
    具有隔膜的微机械部件及其制造方法

    公开(公告)号：US20050204821A1

    公开(公告)日：2005-09-22

    申请号：US11072859

    申请日：2005-03-03

    申请人： Frank Fischer ,  Hans Artmann ,  Lars Metzger ,  Arnim Hoechst ,  Julian Gonska

    发明人： Frank Fischer ,  Hans Artmann ,  Lars Metzger ,  Arnim Hoechst ,  Julian Gonska

    IPC分类号： G01L9/00 ,  B81B3/00 ,  B81C1/00 ,  G01J1/02 ,  G01L7/08 ,  H01L29/84

    CPC分类号： B81B7/0029 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0338 ,  B81C2201/0109

    摘要： A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a component is also provided. The structure of the component is implemented in a layer structure which includes at least one first sacrificial layer and a layer system over the first sacrificial layer. A cavity is formed in the first sacrificial layer underneath the diaphragm. In the region of the diaphragm between the upper layer and the lower layer of the layer system situated directly above the first sacrificial layer, at least one access channel to the cavity is formed which has at least one opening in the upper layer and at least one opening in the lower layer, the opening in the upper layer and the opening in the lower layer being offset with respect to each other.

    摘要翻译： 提供了具有隔膜的微机械部件，其结构有效地防止了灰尘颗粒进入空腔。 还提供了制造这种部件的方法。 组件的结构以包括至少一个第一牺牲层和第一牺牲层上的层系统的层结构来实现。 在隔膜下方的第一牺牲层中形成空腔。 在位于第一牺牲层正上方的层系统的上层和下层之间的隔膜区域中，形成至少一个到空腔的通道，其在上层中具有至少一个开口，并且至少一个开口 在下层中开口，上层中的开口和下层中的开口相对于彼此偏移。

    SENSOR AND METHOD FOR PRODUCING THE SAME
    9.
    发明申请
    SENSOR AND METHOD FOR PRODUCING THE SAME 有权
    传感器及其制造方法

    公开(公告)号：US20110002359A1

    公开(公告)日：2011-01-06

    申请号：US12302677

    申请日：2007-04-23

    申请人： Hubert Benzel ,  Simon Armbruster ,  Arnim Hoechst ,  Christoph Schelling ,  Ando Feyh

    发明人： Hubert Benzel ,  Simon Armbruster ,  Arnim Hoechst ,  Christoph Schelling ,  Ando Feyh

    IPC分类号： G01K7/01 ,  C25D5/00

    CPC分类号： B81B3/0081 ,  B81B2201/0278 ,  B81B2203/0109 ,  B81B2207/015 ,  B81C2201/0109 ,  G01J5/06 ,  G01J5/20

    摘要： A sensor, in particular for the spatially resolved detection, includes a substrate, at least one micropatterned sensor element having an electric characteristic whose value varies as a function of the temperature, and at least one diaphragm above a cavity, the sensor element being disposed on the underside of the at least one diaphragm, and the sensor element being contacted via connecting lines, which extend within, on top of or underneath the diaphragm. In particular, a plurality of sensor elements may be formed as diode pixels within a monocrystalline layer formed by epitaxy. Suspension springs, which accommodate the individual sensor elements in elastic and insulating fashion, may be formed within the diaphragm.

    摘要翻译： 特别是用于空间分辨检测的传感器包括基板，至少一个微图案化的传感器元件，其具有值随温度变化的电特性，以及在空腔上方的至少一个隔膜，传感器元件设置在 所述至少一个隔膜的下侧，并且所述传感器元件经由连接线接触，所述连接线在隔膜的顶部或下方延伸。 特别地，多个传感器元件可以形成为通过外延形成的单晶层内的二极管像素。 可以在隔膜内形成以弹性和绝缘方式容纳各个传感器元件的悬挂弹簧。