摘要:
An apparatus and method for forming a bubble within a microchannel of a microinjector to function as a valve mechanism between the chamber and manifold, that provides for a high resistance to liquid exiting the chamber through the manifold during fluid ejection through an orifice and that also provides a low resistance to refilling of liquid into the chamber after ejection of fluid and collapse of the bubble. This effectively minimizes cross talk between adjacent chambers and increases injection frequency of the microinjector. The formation of a second bubble within the chamber coalesces with a first formed bubble between the chamber and manifold to abruptly terminate the ejection of fluid, thereby eliminating satellite droplets.
摘要:
An apparatus and method for forming a bubble within a microchannel of a microinjector to function as a valve mechanism between the chamber and manifold, that provides for a high resistance to liquid exiting the chamber through the manifold during fluid ejection through an orifice and that also provides a low resistance to refilling of liquid into the chamber after ejection of fluid and collapse of the bubble. This effectively minimizes cross talk between adjacent chambers and increases injection frequency of the microinjector. The formation of a second bubble within the chamber coalesces with a first formed bubble between the chamber and manifold to abruptly terminate the ejection of fluid, thereby eliminating satellite droplets.
摘要:
A filtering film structure includes a film, a conductive layer and a dielectric layer. The film includes a plurality of holes. The conductive layer is disposed on the inner surface of the holes, and the dielectric layer is disposed on the conductive layer. When applying a voltage to the conductive layer, an electrical charge layer forms on the surface of the dielectric layer.
摘要:
A lens device and a method of manufacturing the same are provided, wherein the lens device includes a transparent substrate, a metal layer, a hydrophobic layer and an aspherical lens. The metal layer is formed on the transparent substrate, and the hydrophobic layer is formed on the metal layer. The metal layer has a first opening, such that an area of the transparent substrate corresponding to the first opening is not covered by the metal layer. The hydrophobic layer has a second opening connected to the first opening, and the second opening is larger than the first opening, such that a portion of the metal layer adjacent to a peripheral edge of the first opening is not covered by the hydrophobic layer. The aspherical lens is formed on the area of the transparent substrate and contacts the portion of the metal layer.
摘要:
A heatable droplet device is used to embody real-time detection by means of the device's temperature control and surface treated and trimmed. A temperature causing internal stability disturbed is immediately detected with a designed sensor while affecting a specific area.
摘要:
An immersion lithography apparatus including a container, at least a liquid, a platform, a fixture, a roller, a light source, and a filter is provided. The container includes a bottom plate, a plurality of side plates, and a bearing hole penetrated through one of the side plates. The liquid is filled in the container. The platform is immersed in the liquid. The platform includes a pair of axles. The axles are parallel to the bottom plate. One of the axles passes through the bearing hole. The fixture is mounted on the platform for clamping a mask and a wafer. The roller is connected to the axle, passes through the bearing hole, and is operated to rotate the connected axle. The light source generates ultraviolet light to incident on the mask and the wafer. The filter is located between the light source and the fixture.
摘要:
A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
摘要:
At least two Fresnel lenses are formed on a transparent substrate, and a set of parallel plates are established in an acute included angle (from 19° to 90°) with the transparent substrate by an inclined exposure process employing a thick film photoresist. The parallel plates are separately placed over the Fresnel lenses. Metal layers are separately deposited on the outside surfaces of the parallel plates far from the acute included angle. A transparent polymeric material is overlaid on the surface of the transparent substrate till the parallel plates are immersed. An objective lens, placed over a photo detector, is formed on the surface of the transparent polymeric material. A laser diode is placed at a location on the surface of the substrate opposite to one of the Fresnel lenses, and the photo detector is placed at a location on the surface of that opposite to another of the Fresnel lenses.
摘要:
Various embodiments are directed to the electrochemical fabrication of multilayer mesoscale or microscale structures which are formed using at least one conductive structural material, at least one conductive sacrificial material, and at least one dielectric material. In some embodiments the dielectric material is a UV-curable photopolymer. In other embodiments, electrochemically fabricated structures are formed on dielectric substrates.
摘要:
A filtering film structure includes a film, a conductive layer and a dielectric layer. The film includes a plurality of holes. The conductive layer is disposed on the inner surface of the holes, and the dielectric layer is disposed on the conductive layer. When applying a voltage to the conductive layer, an electrical charge layer forms on the surface of the dielectric layer.