公开(公告)号：US08698247B2

公开(公告)日：2014-04-15

申请号：US13156352

申请日：2011-06-09

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Wen-Fang Lee ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Wen-Fang Lee ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee

IPC分类号： H01L23/62

CPC分类号： H01L27/0277 ,  H01L21/761 ,  H01L21/823481 ,  H01L21/823493 ,  H01L27/0623 ,  H01L27/0922

摘要： The present invention provides a semiconductor device including a substrate, a deep well, a high-voltage well, and a doped region. The substrate and the high-voltage well have a first conductive type, and the deep well and the doped region have a second conductive type different from the first conductive type. The substrate has a high-voltage region and a low-voltage region, and the deep well is disposed in the substrate in the high-voltage region. The high-voltage well is disposed in the substrate between the high-voltage region and the low-voltage region, and the doped region is disposed in the high-voltage well. The doped region and the high-voltage well are electrically connected to a ground.

摘要翻译： 本发明提供一种包括衬底，深阱，高压阱和掺杂区的半导体器件。 衬底和高压阱具有第一导电类型，并且深阱和掺杂区具有不同于第一导电类型的第二导电类型。 衬底具有高电压区域和低电压区域，并且深阱设置在高压区域中的衬底中。 高电压阱设置在高电压区域和低电压区域之间的衬底中，掺杂区域设置在高压阱中。 掺杂区和高电压阱电连接到地。

公开(公告)号：US20130049114A1

公开(公告)日：2013-02-28

申请号：US13216276

申请日：2011-08-24

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Shan-Shi Huang ,  Ke-Feng Lin ,  Te-Yuan Wu

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Shan-Shi Huang ,  Ke-Feng Lin ,  Te-Yuan Wu

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/66681 ,  H01L21/0334 ,  H01L21/266 ,  H01L29/0619 ,  H01L29/0634 ,  H01L29/0696 ,  H01L29/0878 ,  H01L29/402 ,  H01L29/404 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/66659 ,  H01L29/7816

摘要： The present invention provides a high voltage metal-oxide-semiconductor transistor device including a substrate, a deep well, and a doped region. The substrate and the doped region have a first conductive type, and the substrate has at least one electric field concentration region. The deep well has a second conductive type different from the first conductive type. The deep well is disposed in the substrate, and the doped region is disposed in the deep well. The doping concentrations of the doped region and the deep well in the electric field have a first ratio, and the doping concentrations of the doped region and the deep well outside the electric field have a second ratio. The first ratio is greater than the second ratio.

摘要翻译： 本发明提供一种包括衬底，深阱和掺杂区的高电压金属氧化物半导体晶体管器件。 衬底和掺杂区域具有第一导电类型，并且衬底具有至少一个电场集中区域。 深井具有不同于第一导电类型的第二导电类型。 深阱设置在衬底中，并且掺杂区域设置在深阱中。 掺杂区域和深阱在电场中的掺杂浓度具有第一比例，并且掺杂区域和电场外的深阱的掺杂浓度具有第二比例。 第一比例大于第二比率。

公开(公告)号：US20120313175A1

公开(公告)日：2012-12-13

申请号：US13156352

申请日：2011-06-09

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Wen-Fang Lee ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Wen-Fang Lee ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee

IPC分类号： H01L27/06

CPC分类号： H01L27/0277 ,  H01L21/761 ,  H01L21/823481 ,  H01L21/823493 ,  H01L27/0623 ,  H01L27/0922

摘要： The present invention provides a semiconductor device including a substrate, a deep well, a high-voltage well, and a doped region. The substrate and the high-voltage well have a first conductive type, and the deep well and the doped region have a second conductive type different from the first conductive type. The substrate has a high-voltage region and a low-voltage region, and the deep well is disposed in the substrate in the high-voltage region. The high-voltage well is disposed in the substrate between the high-voltage region and the low-voltage region, and the doped region is disposed in the high-voltage well. The doped region and the high-voltage well are electrically connected to a ground.

摘要翻译： 本发明提供一种包括衬底，深阱，高压阱和掺杂区的半导体器件。 衬底和高压阱具有第一导电类型，并且深阱和掺杂区具有不同于第一导电类型的第二导电类型。 衬底具有高电压区域和低电压区域，并且深阱设置在高压区域中的衬底中。 高电压阱设置在高电压区域和低电压区域之间的衬底中，掺杂区域设置在高压阱中。 掺杂区和高电压阱电连接到地。

公开(公告)号：US08921937B2

公开(公告)日：2014-12-30

申请号：US13216276

申请日：2011-08-24

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Shan-Shi Huang ,  Ke-Feng Lin ,  Te-Yuan Wu

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Shan-Shi Huang ,  Ke-Feng Lin ,  Te-Yuan Wu

IPC分类号： H01L29/78 ,  H01L21/336 ,  H01L29/08 ,  H01L21/266 ,  H01L29/66 ,  H01L29/06 ,  H01L29/40 ,  H01L29/423

CPC分类号： H01L29/66681 ,  H01L21/0334 ,  H01L21/266 ,  H01L29/0619 ,  H01L29/0634 ,  H01L29/0696 ,  H01L29/0878 ,  H01L29/402 ,  H01L29/404 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/66659 ,  H01L29/7816

摘要： The present invention provides a high voltage metal-oxide-semiconductor transistor device including a substrate, a deep well, and a doped region. The substrate and the doped region have a first conductive type, and the substrate has at least one electric field concentration region. The deep well has a second conductive type different from the first conductive type. The deep well is disposed in the substrate, and the doped region is disposed in the deep well. The doping concentrations of the doped region and the deep well in the electric field have a first ratio, and the doping concentrations of the doped region and the deep well outside the electric field have a second ratio. The first ratio is greater than the second ratio.

摘要翻译： 本发明提供一种包括衬底，深阱和掺杂区的高电压金属氧化物半导体晶体管器件。 衬底和掺杂区域具有第一导电类型，并且衬底具有至少一个电场集中区域。 深井具有不同于第一导电类型的第二导电类型。 深阱设置在衬底中，并且掺杂区域设置在深阱中。 掺杂区域和深阱在电场中的掺杂浓度具有第一比例，并且掺杂区域和电场外的深阱的掺杂浓度具有第二比例。 第一比例大于第二比率。

公开(公告)号：US08436418B2

公开(公告)日：2013-05-07

申请号：US13163734

申请日：2011-06-20

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee ,  Wen-Fang Lee

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee ,  Wen-Fang Lee

IPC分类号： H01L29/94

CPC分类号： H01L27/0251 ,  H01L27/0266 ,  H01L29/0634 ,  H01L29/1087 ,  H01L29/404 ,  H01L29/42368 ,  H01L29/7817 ,  H01L29/7835 ,  H01L29/7838 ,  H01L29/861

摘要： The present invention provides a high-voltage semiconductor device including a deep well, a first doped region disposed in the deep well, a high-voltage well, a second doped region disposed in the high-voltage well, a first gate structure disposed on the high-voltage well between the second doped region and the first doped region, a doped channel region disposed in the high-voltage region and in contact with the second doped region and the deep well, and a third doped region disposed in the high-voltage well. The high-voltage well has a first conductive type, and the deep well, the first doped region, the second doped region, the doped channel region, and the third doped region have a second conductive type different from the first conductive type.

摘要翻译： 本发明提供了一种高压半导体器件，包括深阱，设置在深阱中的第一掺杂区，高电压阱，设置在高压阱中的第二掺杂区，设置在高阱上的第一栅极结构 在所述第二掺杂区域和所述第一掺杂区域之间的高电压阱，设置在所述高压区域中并与所述第二掺杂区域和所述深阱接触的掺杂沟道区域，以及设置在所述高压区域中的第三掺杂区域 好。 高电压阱具有第一导电类型，并且深阱，第一掺杂区域，第二掺杂区域，掺杂沟道区域和第三掺杂区域具有不同于第一导电类型的第二导电类型。

公开(公告)号：US20120319189A1

公开(公告)日：2012-12-20

申请号：US13163734

申请日：2011-06-20

申请人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee ,  Wen-Fang Lee

发明人： Chih-Chung Wang ,  Wei-Lun Hsu ,  Te-Yuan Wu ,  Ke-Feng Lin ,  Shan-Shi Huang ,  Ming-Tsung Lee ,  Wen-Fang Lee

IPC分类号： H01L29/739

CPC分类号： H01L27/0251 ,  H01L27/0266 ,  H01L29/0634 ,  H01L29/1087 ,  H01L29/404 ,  H01L29/42368 ,  H01L29/7817 ,  H01L29/7835 ,  H01L29/7838 ,  H01L29/861

摘要： The present invention provides a high-voltage semiconductor device including a deep well, a first doped region disposed in the deep well, a high-voltage well, a second doped region disposed in the high-voltage well, a first gate structure disposed on the high-voltage well between the second doped region and the first doped region, a doped channel region disposed in the high-voltage region and in contact with the second doped region and the deep well, and a third doped region disposed in the high-voltage well. The high-voltage well has a first conductive type, and the deep well, the first doped region, the second doped region, the doped channel region, and the third doped region have a second conductive type different from the first conductive type.

摘要翻译： 本发明提供了一种高压半导体器件，包括深阱，设置在深阱中的第一掺杂区，高电压阱，设置在高压阱中的第二掺杂区，设置在高阱上的第一栅极结构 在所述第二掺杂区域和所述第一掺杂区域之间的高电压阱，设置在所述高压区域中并与所述第二掺杂区域和所述深阱接触的掺杂沟道区域，以及设置在所述高压区域中的第三掺杂区域 好。 高电压阱具有第一导电类型，并且深阱，第一掺杂区域，第二掺杂区域，掺杂沟道区域和第三掺杂区域具有不同于第一导电类型的第二导电类型。

公开(公告)号：US08592905B2

公开(公告)日：2013-11-26

申请号：US13169008

申请日：2011-06-26

申请人： Shih-Chieh Pu ,  Ching-Ming Lee ,  Wei-Lun Hsu ,  Chih-Chung Wang ,  Ke-Feng Lin

发明人： Shih-Chieh Pu ,  Ching-Ming Lee ,  Wei-Lun Hsu ,  Chih-Chung Wang ,  Ke-Feng Lin

IPC分类号： H01L29/66

CPC分类号： H01L29/8611 ,  H01L27/0255 ,  H01L29/0619 ,  H01L29/0649 ,  H01L29/36

摘要： A high-voltage semiconductor device is disclosed. The HV semiconductor device includes: a substrate; a well of first conductive type disposed in the substrate; a first doping region of second conductive type disposed in the p-well; a first isolation structure disposed in the well of first conductive type and surrounding the first doping region of second conductive type; and a first drift ring of second conductive type disposed between the first doping region of second conductive type and the first isolation structure.

摘要翻译： 公开了一种高压半导体器件。 HV半导体装置包括：基板; 设置在基板中的第一导电类型的阱; 布置在p阱中的第二导电类型的第一掺杂区; 第一隔离结构，设置在第一导电类型的阱中，并且包围第二导电类型的第一掺杂区; 以及设置在第二导电类型的第一掺杂区域和第一隔离结构之间的第二导电类型的第一漂移环。

公开(公告)号：US20120326266A1

公开(公告)日：2012-12-27

申请号：US13169008

申请日：2011-06-26

申请人： Shih-Chieh Pu ,  Ching-Ming Lee ,  Wei-Lun Hsu ,  Chih-Chung Wang ,  Ke-Feng Lin

发明人： Shih-Chieh Pu ,  Ching-Ming Lee ,  Wei-Lun Hsu ,  Chih-Chung Wang ,  Ke-Feng Lin

IPC分类号： H01L27/04

CPC分类号： H01L29/8611 ,  H01L27/0255 ,  H01L29/0619 ,  H01L29/0649 ,  H01L29/36

摘要： A high-voltage semiconductor device is disclosed. The HV semiconductor device includes: a substrate; a well of first conductive type disposed in the substrate; a first doping region of second conductive type disposed in the p-well; a first isolation structure disposed in the well of first conductive type and surrounding the first doping region of second conductive type; and a first drift ring of second conductive type disposed between the first doping region of second conductive type and the first isolation structure.

摘要翻译： 公开了一种高压半导体器件。 HV半导体装置包括：基板; 设置在基板中的第一导电类型的阱; 布置在p阱中的第二导电类型的第一掺杂区; 第一隔离结构，设置在第一导电类型的阱中，并且包围第二导电类型的第一掺杂区; 以及设置在第二导电类型的第一掺杂区域和第一隔离结构之间的第二导电类型的第一漂移环。

公开(公告)号：US08890144B2

公开(公告)日：2014-11-18

申请号：US13414723

申请日：2012-03-08

申请人： Pao-An Chang ,  Ching-Ming Lee ,  Te-Yuan Wu ,  Chih-Chung Wang ,  Wen-Fang Lee ,  Wei-Lun Hsu

发明人： Pao-An Chang ,  Ching-Ming Lee ,  Te-Yuan Wu ,  Chih-Chung Wang ,  Wen-Fang Lee ,  Wei-Lun Hsu

IPC分类号： H01L29/04 ,  H01L29/10 ,  H01L31/00

CPC分类号： H01L27/0629 ,  H01L29/0634

摘要： A high voltage semiconductor device includes a substrate, an insulating layer positioned on the substrate, and a silicon layer positioned on the insulating layer. The silicon layer further includes at least a first doped strip, two terminal doped regions formed respectively at two opposite ends of the silicon layer and electrically connected to the first doped strip, and a plurality of second doped strips. The first doped strip and the terminal doped regions include a first conductivity type, the second doped strips include a second conductivity type, and the first conductivity type and the second conductivity type are complementary. The first doped strip and the second doped strips are alternately arranged.

摘要翻译： 高电压半导体器件包括衬底，位于衬底上的绝缘层和位于绝缘层上的硅层。 硅层还包括至少第一掺杂条，分别在硅层的两个相对端形成并电连接到第一掺杂条的两个端子掺杂区和多个第二掺杂条。 第一掺杂带和端子掺杂区包括第一导电类型，第二掺杂条包括第二导电类型，第一导电类型和第二导电类型是互补的。 交替布置第一掺杂条和第二掺杂条。

公开(公告)号：US20130234141A1

公开(公告)日：2013-09-12

申请号：US13414723

申请日：2012-03-08

申请人： Pao-An Chang ,  Ching-Ming Lee ,  Te-Yuan Wu ,  Chih-Chung Wang ,  Wen-Fang Lee ,  Wei-Lun Hsu

发明人： Pao-An Chang ,  Ching-Ming Lee ,  Te-Yuan Wu ,  Chih-Chung Wang ,  Wen-Fang Lee ,  Wei-Lun Hsu

IPC分类号： H01L27/088

CPC分类号： H01L27/0629 ,  H01L29/0634

摘要： A high voltage semiconductor device includes a substrate, an insulating layer positioned on the substrate, and a silicon layer positioned on the insulating layer. The silicon layer further includes at least a first doped strip, two terminal doped regions formed respectively at two opposite ends of the silicon layer and electrically connected to the first doped strip, and a plurality of second doped strips. The first doped strip and the terminal doped regions include a first conductivity type, the second doped strips include a second conductivity type, and the first conductivity type and the second conductivity type are complementary. The first doped strip and the second doped strips are alternately arranged.

摘要翻译： 高电压半导体器件包括衬底，位于衬底上的绝缘层和位于绝缘层上的硅层。 硅层还包括至少第一掺杂条，分别在硅层的两个相对端形成并电连接到第一掺杂条的两个端子掺杂区和多个第二掺杂条。 第一掺杂带和端子掺杂区包括第一导电类型，第二掺杂条包括第二导电类型，第一导电类型和第二导电类型是互补的。 交替布置第一掺杂条和第二掺杂条。