Abstract:
Provided are new resins that comprise multi-ring, aromatic and/or multi-cyclic ester unit which preferably are photoacid-labile. Also provided are chemically-amplified positive photoresist that comprise such resins as well as multi-ring, aromatic and/or multi-cyclic ester monomers.
Abstract:
New methods are provided for synthesis of photoacid generator compounds (“PAGs”), new photoacid generator compounds and photoresist compositions that comprise such PAG compounds. In a particular aspect, sulfonium-containing (S+) photoacid generators and methods of synthesis of sulfonium photoacid generators are provided.
Abstract:
A photoacid generator has the formula (I): wherein R1, R2, R3, L1, L2, L3 X, Z+, a, b, c, d, p, q, and r, are defined herein. A photoresist comprises the photoacid generator, and a coated article comprises the photoresist. The photoresist can be used to form an electronic device.
Abstract:
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that have sugar substitution. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
Abstract:
New bis(sulfonyl)imide and tri(sulfonyl)methide photoacid generator compounds (“PAGs”) are provided as well as photoresist compositions that comprise such PAG compounds.
Abstract:
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise a multi cyclic lactone moiety.
Abstract:
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.
Abstract:
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that comprise one or more base reactive groups and (i) one or more polar groups distinct from the base reactive groups, and/or (ii) at least one of the base reactive groups is a non-perfluorinated base reactive group. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
Abstract:
An analog-to-digital converter is provided. The analog-to-digital converter includes a sampling-voltage providing circuit, a first comparison circuit, a second comparison circuit, and an encoder circuit. The sampling-voltage providing circuit provides a group of first comparison voltages and a group of second comparison voltages. The first comparison circuit performs a first comparison operation to an analog-signal input quantity according to the group of first comparison voltages to generate a first comparison digital quantity. The second comparison circuit selects second comparison voltages among the group of second comparison voltages according to the first comparison digital quantity and performs a second comparison operation to the analog-signal input quantity according to the selected second comparison voltages to generate a second comparison digital quantity. The encoder circuit encodes the first comparison digital quantity and the second comparison digital quantity and generates a digital quantity corresponding to the analog-signal input quantity.
Abstract:
A device for inspecting contraband in an aviation cargo containers includes: a turntable located at an object inspecting position and configured to carry the object to be inspected and bring the object into rotation; an object conveying system; a scanning system including a radiation source and a detector which can synchronously move in the vertical direction; a turntable drive/control system which drives and controls rotation of said turntable so that the turntable can continuously rotate about its rotation axis or rotate to any predetermined angular position; a scanning drive/control system which drives and controls the radiation source and the detector into synchronous movement in the vertical direction so that the radiation source and the detector can continuously move in the vertical direction or move to any predetermined vertical position. The device of the present invention can scan the object and form images in various scanning modes to meet different needs.