Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions
    7.
    发明授权
    Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions 有权
    酸产生剂,磺酸,磺酰卤和辐射敏感性树脂组合物

    公开(公告)号:US08043786B2

    公开(公告)日:2011-10-25

    申请号:US10547769

    申请日:2004-02-20

    摘要: The invention provides novel acid generators which are unproblematic in combustibility and accumulation inside the human body and can generate acids having high acidities and high boiling points and exhibiting properly short diffusion lengths in resist coating films and which permit the formation of resist patterns excellent smoothness with little dependence on the denseness of a mask pattern; sulfonic acids generated from the acid generators; sulfonyl halides useful as raw material in the synthesis of the acid generators; and radiation-sensitive resin compositions containing the acid generators. The acid generators have structures represented by the general formula (I), wherein R1 is a monovalent substituent such as alkoxycarbonyl, alkylsulfonyl, or alkoxysulfonyl; R2 to R4 are each hydrogen or alkyl; k is an integer of 0 or above; and n is an integer of 0 to 5. Among the radiation-sensitive resin compositions, a positive one contains a resin having acid-dissociable groups in addition to the above acid generator, while a negative one contains an alkali-soluble resin and a crosslinking agent in addition to the acid generator.

    摘要翻译: 本发明提供了新颖的酸产生剂,其在人体内的可燃性和积聚中是无问题的,并且可以产生具有高酸度和高沸点的酸,并且在抗蚀剂涂膜中显示适当短的扩散长度,并且允许形成抗蚀剂图案,具有极好的平滑性 依赖于掩模图案的致密度; 酸产生器产生的磺酸; 用于合成酸发生剂的原料的磺酰卤; 和含有酸发生剂的辐射敏感性树脂组合物。 酸产生剂具有由通式(I)表示的结构,其中R 1是一价取代基,例如烷氧基羰基,烷基磺酰基或烷氧基磺酰基; R2至R4各自为氢或烷基; k为0以上的整数; 并且n为0〜5的整数。在这些辐射敏感性树脂组合物中,除了上述酸产生剂之外,阳性物质含有具有酸解离基团的树脂,而负极性物质含有碱溶性树脂和交联 除酸产生剂外还可加入。