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9 条记录 (耗时 0.034 秒)

    Method for determining lens errors in a particle-optical device
    1.
    发明授权
    Method for determining lens errors in a particle-optical device 有权
    用于确定粒子 - 光学器件中的透镜误差的方法

    公开(公告)号：US07518121B2

    公开(公告)日：2009-04-14

    申请号：US11512806

    申请日：2006-08-30

    申请人： Diederik Jan Maas ,  Sjoerd Antonius Maria Mentink ,  Jeroen Jan Lambertus Horikx ,  Bert Henning Freitag

    发明人： Diederik Jan Maas ,  Sjoerd Antonius Maria Mentink ,  Jeroen Jan Lambertus Horikx ,  Bert Henning Freitag

    IPC分类号： G21K1/08

    CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/282

    摘要： The invention relates to a method for determining lens errors in a Scanning Electron Microscope, more specifically to a sample that enables such lens errors to be determined. The invention describes, for example, the use of cubic MgO crystals which are relatively easy to produce as so-called ‘self-assembling’ crystals on a silicon wafer. Such crystals have almost ideal angles and edges. Even in the presence of lens errors this may give a clear impression of the situation if no lens errors are present. This enables a good reconstruction to be made of the cross-section of the beam in different under- and over-focus planes. The lens errors can then be determined on the basis of this reconstruction, whereupon they can be corrected by means of a corrector.

    摘要翻译： 本发明涉及一种用于确定扫描电子显微镜中的透镜误差的方法，更具体地涉及能够确定这种透镜误差的样本。 本发明描述了例如使用在硅晶片上相对容易产生的所谓“自组装”晶体的立方MgO晶体。 这种晶体具有几乎理想的角度和边缘。 即使存在镜头错误，如果没有镜头错误，这可能给出一个清晰的情况。 这使得能够在不同的底部和过度聚焦平面上对梁的横截面进行良好的重建。 然后可以基于该重建来确定透镜误差，由此可以通过校正器校正透镜误差。

    Simultaneous Electron Detection
    3.
    发明申请
    Simultaneous Electron Detection 有权
    同时电子检测

    公开(公告)号：US20110278451A1

    公开(公告)日：2011-11-17

    申请号：US13106726

    申请日：2011-05-12

    申请人： Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

    发明人： Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

    IPC分类号： G01N23/04

    CPC分类号： H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

    摘要： The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

    摘要翻译： 本发明提供了多个检测器，其检测已经通过样品的电子。 检测器优选在电子通过通过根据其能量分离电子的棱镜之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例为核心损耗电子提供EELS，同时从低损耗电子提供亮场STEM信号。

    Method for Inspecting a Sample
    5.
    发明申请
    Method for Inspecting a Sample 有权
    检查样品的方法

    公开(公告)号：US20110006208A1

    公开(公告)日：2011-01-13

    申请号：US12833750

    申请日：2010-07-09

    申请人： Bert Henning Freitag ,  Georg Alexander Rosenthal ,  Daniel Woodrow Phifer, JR.

    发明人： Bert Henning Freitag ,  Georg Alexander Rosenthal ,  Daniel Woodrow Phifer, JR.

    IPC分类号： G01N23/00 ,  G21K5/08

    CPC分类号： G01N23/2251 ,  G01N2223/611 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2008

    摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

    摘要翻译： 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示连接焊盘505,508与待放置样品的区域A的电极504,507。 将样品置于样品载体上后，导电图案沉积在样品上，以便可以对样品的局部化部分施加电压和电流。 在样品上施加图案可以通过例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建电子部件，例如电阻器，电容器，电感器和有源元件，例如FET。

    Method for inspecting a sample
    6.
    发明授权
    Method for inspecting a sample 有权
    检查样品的方法

    公开(公告)号：US08389936B2

    公开(公告)日：2013-03-05

    申请号：US12833750

    申请日：2010-07-09

    申请人： Bert Henning Freitag ,  Georg Alexander Rosenthal ,  Daniel Woodrow Phifer, Jr.

    发明人： Bert Henning Freitag ,  Georg Alexander Rosenthal ,  Daniel Woodrow Phifer, Jr.

    IPC分类号： G21K5/10 ,  G21K5/00 ,  G21K7/00

    CPC分类号： G01N23/2251 ,  G01N2223/611 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2008

    摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

    摘要翻译： 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示连接焊盘505,508与待放置样品的区域A的电极504,507。 将样品置于样品载体上后，导电图案沉积在样品上，以便可以对样品的局部化部分施加电压和电流。 在样品上施加图案可以通过例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建电子部件，例如电阻器，电容器，电感器和有源元件，例如FET。

    Simultaneous electron detection
    7.
    发明授权
    Simultaneous electron detection 有权
    同时电子检测

    公开(公告)号：US08859966B2

    公开(公告)日：2014-10-14

    申请号：US13106726

    申请日：2011-05-12

    申请人： Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

    发明人： Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

    IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/05

    CPC分类号： H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

    摘要： The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

    摘要翻译： 本发明提供了多个检测器，其检测已经通过样品的电子。 检测器优选在电子通过通过根据其能量分离电子的棱镜之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例为核心损耗电子提供EELS，同时从低损耗电子提供亮场STEM信号。