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    RIDGE WAVEGUIDE SEMICONDUCTOR LASER DIODE AND METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    RIDGE WAVEGUIDE SEMICONDUCTOR LASER DIODE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    RIDGE波导半导体激光二极管及其制造方法

    公开(公告)号：US20140328363A1

    公开(公告)日：2014-11-06

    申请号：US14147923

    申请日：2014-01-06

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Oh Kee KWON ,  Chul-Wook LEE ,  Yongsoon BAEK

    IPC: H01S5/026 ,  H01S5/22

    CPC classification number: H01S5/22 ,  H01S5/2086 ,  H01S5/209 ,  H01S5/2202 ,  H01S5/3213 ,  H01S2301/166 ,  H01S2301/176

    Abstract: Provided is a method of manufacturing a ridge waveguide type semiconductor laser diode, the method including sequentially forming, on a substrate, a lower clad layer, an active layer, a first upper clad layer, and a second upper clad layer; forming an insulating mask on the second upper clad layer; wet-etching the second upper clad layer by using the insulating mask to form channels passing through the second upper clad layer and a ridge between the channels; and performing dry-etching by using the insulating mask to form trenches that are extended from the channels and pass through the first upper clad layer.

    Abstract translation: 提供一种制造脊波导型半导体激光二极管的方法，该方法包括在基底上顺序地形成下包层，有源层，第一上覆层和第二上覆层; 在所述第二上包覆层上形成绝缘掩模; 通过使用绝缘掩模对第二上覆层进行湿式蚀刻，以形成通过第二上覆层的沟道和通道之间的脊; 并通过使用绝缘掩模进行干蚀刻以形成从沟道延伸并穿过第一上包层的沟槽。

    OPTICAL DEVICES AND METHODS OF FABRICATING THE SAME
    4.
    发明申请
    OPTICAL DEVICES AND METHODS OF FABRICATING THE SAME 有权
    光学装置及其制造方法

    公开(公告)号：US20140302623A1

    公开(公告)日：2014-10-09

    申请号：US14311372

    申请日：2014-06-23

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Young-Tak HAN ,  Sang Ho PARK ,  Dong-Hun LEE ,  Jang Uk SHIN ,  Sang-Pil HAN ,  Yongsoon BAEK

    IPC: G02B6/136 ,  H01L23/00

    CPC classification number: G02B6/136 ,  G02B6/423 ,  G02B6/4231 ,  G02B2006/12176 ,  H01L24/11 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/00

    Abstract: Provided is an optical device. The optical device includes a substrate having a waveguide region and a mounting region, a planar lightwave circuit (PLC) waveguide including a lower-clad layer d an upper-clad layer on the waveguide region of the substrate and a platform core between the lower-clad layer and the upper-clad layer, a terrace defined by etching the lower-clad layer on the mounting region of the substrate, the terrace including an interlocking part, an optical active chip mounted on the mounting region of the substrate, the optical active chip including a chip core therein, and a chip alignment mark disposed on a mounting surface of the optical active chip. The optical active chip is aligned by interlocking between the interlocking part of the terrace and the chip alignment mark of the optical active chip and mounted on the mounting region.

    Abstract translation: 提供了一种光学装置。 光学装置包括具有波导区域和安装区域的基板，在基板的波导区域上包括下包层d的上包层的平面光波电路（PLC）波导， 包覆层和上包层，通过蚀刻衬底的安装区域上的下包覆层限定的平台，所述露台包括互锁部分，安装在衬底的安装区域上的光学有源芯片，光学活动 芯片，其中包括芯片芯片，以及设置在光学有源芯片的安装表面上的芯片对准标记。 光学有源芯片通过在平台的互锁部分和光学有源芯片的芯片对准标记之间的互锁对准并且安装在安装区域上。

    OPTICAL TRANSMITTER MODULE
    8.
    发明申请
    OPTICAL TRANSMITTER MODULE 有权

    公开(公告)号：US20210234615A1

    公开(公告)日：2021-07-29

    申请号：US17156073

    申请日：2021-01-22

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Young-Tak HAN ,  Seok Jun YUN ,  Seoktae KIM ,  Sang Ho PARK ,  Yongsoon BAEK ,  Jang Uk SHIN ,  Seo Young LEE

    IPC: H04B10/50 ,  H01S3/00 ,  H01S3/23 ,  G02B6/12 ,  H04J14/02 ,  H04Q11/00

    Abstract: Disclosed is an optical transmitter module including a directly modulated laser transmitter based on a directly modulated laser (DML) and an arrayed waveguide grating (AWG) chip that is vertically polished. The directly modulated laser transmitter includes a directly modulated laser chip array including one or more directly modulated laser chips, an impedance matching circuit that allows each of the one or more directly modulated laser chips to operate at a critical speed of 100 Gbps per channel or higher, and a radio frequency-flexible printed circuit board (RF-FPCB) that transmits a radio frequency (RF) modulating signal to the directly modulated laser chip array. The arrayed waveguide grating chip includes an optical waveguides that transfer multi-channel optical signals and a wavelength multiplexer that multiplexes the multi-channel optical signals. The directly modulated laser transmitter and the arrayed waveguide grating chip are spaced apart from each other and are optically coupled in chip-to-chip.

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