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公开(公告)号：US08503131B2
公开(公告)日：2013-08-06
申请号：US13339310
申请日：2011-12-28
申请人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
发明人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
IPC分类号： G11B5/147
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T428/11 , Y10T428/1186
摘要： A magnetic write head for perpendicular magnetic data recording. The write head includes a substrate and a magnetic write pole formed on the substrate, the write pole having a trailing edge and first and second sides. A magnetic stitched pole is formed over a portion of the magnetic write pole, the stitched pole having a front edge that defines a secondary flare point. First and second non-magnetic side walls are formed at the first and second sides of the write pole. The non-magnetic side walls extend from the substrate at least to the trailing edge of the write pole in a first region near an air bearing surface and wherein the first and second non-magnetic side walls extend from the substrate to a point between the substrate and the trailing edge, allowing the stitched magnetic pole to extend partially over the sides of the write pole.
摘要翻译： 用于垂直磁数据记录的磁写头。 写入头包括形成在衬底上的衬底和磁性写入磁极，写入极具有后缘和第一和第二侧。 在磁性写入磁极的一部分上形成有磁性的缝合磁极，缝合的磁极具有限定二次闪光点的前部边缘。 第一和第二非磁性侧壁形成在写入极的第一和第二侧。 所述非磁性侧壁在靠近空气支承表面的第一区域中从所述基板至少延伸到所述写柱的后缘，并且其中所述第一和第二非磁性侧壁从所述基板延伸到所述基板之间的点 和后缘，允许缝合的磁极部分地延伸在写柱的侧面上。
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2.发明授权Process for self-aligned flare point and shield throat definition prior to main pole patterning 有权在主极图案化之前，自对准耀斑和屏蔽喉定义的过程公开(公告)号：US07881010B2
公开(公告)日：2011-02-01
申请号：US11956277
申请日：2007-12-13
申请人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.
摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。
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公开(公告)号：US07083738B2
公开(公告)日：2006-08-01
申请号：US10632631
申请日：2003-07-31
CPC分类号： G11B5/1877 , G11B5/3163
摘要： A method for fabricating a magnetic head using a modified P1 cap process. A first pole is formed. A cap is formed above the first pole. A gap layer is formed above the cap. A second pole is formed above the gap layer. Exposed portions of the gap layer are removed. The cap and first pole are milled for creating a shoulder of the first pole tapered upwardly towards the cap. Another method for fabricating a magnetic head includes forming a first pole, forming a gap layer above the first pole, forming a second pole above the gap layer, forming a layer of photoresist above the second pole, patterning the photoresist such that the photoresist covers areas of the gap layer positioned towards the second pole, removing exposed portions of the gap layer, removing part of exposed portions of the first pole for forming steps in the first pole on opposite sides of the photoresist, removing the photoresist, and milling for creating a shoulder of the first pole tapering upwardly towards the cap.
摘要翻译： 一种使用改进的P 1帽工艺制造磁头的方法。 形成第一极。 在第一极上方形成帽。 在盖上形成间隙层。 在间隙层上方形成第二极。 去除间隙层的露出部分。 铣头和第一杆被铣削以产生第一杆的肩部向上朝向帽部锥形。 制造磁头的另一方法包括形成第一极，在第一极上方形成间隙层，在间隙层上方形成第二极，在第二极上形成光致抗蚀剂层，使光致抗蚀剂覆盖区域 间隔层定位成朝向第二极，去除间隙层的暴露部分，去除第一极的暴露部分的一部分，以在光致抗蚀剂的相对侧上的第一极中形成台阶，去除光致抗蚀剂，并研磨以产生 第一杆的肩部朝向帽部向上逐渐变细。
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公开(公告)号：US08108985B2
公开(公告)日：2012-02-07
申请号：US11934687
申请日：2007-11-02
申请人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-Chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
发明人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-Chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T428/11 , Y10T428/1186
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.
摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括形成写极，然后沉积补充层。 掩模结构可以形成在写极和再填充层上，掩模结构被配置为限定缝合极。 然后可以执行离子铣或反应离子研磨以去除未被掩模结构保护的部分填充层。 然后可以沉积磁性材料以形成限定二次闪光点的缝合写入极。 缝合的杆也可以与电动研磨引导件自对准，以便相对于写入头的空气轴承表面精确地定位二次扩张点的前边缘。
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5.发明授权Methods for creating a magnetic main pole with side shield and systems thereof 有权用于制造具有侧面屏蔽的磁性主极和其系统的方法公开(公告)号：US08059367B2
公开(公告)日：2011-11-15
申请号：US12341925
申请日：2008-12-22
申请人： Edward Hin Pong Lee , Aron Pentek
发明人： Edward Hin Pong Lee , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T428/1186
摘要： A method according to another embodiment includes forming a side shield layer of ferromagnetic material above a substrate; masking the side shield layer; milling an unmasked region of the side shield layer for forming a pole trench therein; and forming a pole layer in the pole trench. A structure according to one embodiment includes a substrate; a side shield layer of ferromagnetic material on the substrate, wherein the substrate has a region covered by the side shield layer and a region not covered by the side shield layer; a pole trench in the side shield layer and the region of the substrate not covered by the side shield layer; a layer of nonmagnetic material in the pole trench; and a pole layer in the pole trench, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
摘要翻译： 根据另一实施例的方法包括在基板上形成铁磁材料的侧屏蔽层; 遮蔽侧面屏蔽层; 研磨用于在其中形成极沟槽的侧屏蔽层的未掩模区域; 以及在所述极沟槽中形成极层。 根据一个实施例的结构包括基底; 在所述基板上的铁磁材料的侧屏蔽层，其中所述基板具有被所述侧屏蔽层覆盖的区域和未被所述侧屏蔽层覆盖的区域; 侧屏蔽层中的极沟槽和未被侧屏蔽层覆盖的衬底的区域; 在磁极沟中的一层非磁性材料; 以及在所述极沟槽中的极层，其中所述极层在不被所述侧屏蔽层覆盖的所述衬底的区域之上具有比在所述侧屏蔽层覆盖的衬底的区域之上更大的厚度。
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公开(公告)号：US07593186B2
公开(公告)日：2009-09-22
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
发明人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译： 公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P1层，在P1层上形成的间隙层和形成在间隙层上的P2层。 P1层包括具有颈部和斜面部分的肩部结构。 还公开了具有具有肩部形成的P1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P1层的磁性记录头的写入磁极的方法。
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公开(公告)号：US07120988B2
公开(公告)日：2006-10-17
申请号：US10672896
申请日：2003-09-26
申请人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
发明人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
摘要翻译： 一种用于制造后屏蔽写入极的方法和材料，其解决了在后续结构的制造期间控制写入间隙并防止对写入间隙或极的损坏的问题。 该过程还引入CMP辅助剥离过程以去除再沉积和栅栏（增加产量）以及在写柱顶部产生凹陷的方法。 此外，本公开中还包括可用作离子磨转移层，CMP层和可分离层的合适材料。
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8.发明授权Method for confining sense current of a read transducer to an air-bearing surface(ABS) side of a free layer 有权将读取传感器的感测电流限制在自由层的空气轴承表面（ABS）侧的方法公开(公告)号：US08225487B2
公开(公告)日：2012-07-24
申请号：US12180313
申请日：2008-07-25
申请人： Ying Hong , Edward Hin Pong Lee , Aron Pentek , David John Seagle
发明人： Ying Hong , Edward Hin Pong Lee , Aron Pentek , David John Seagle
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G11B5/3163 , G11B5/3929 , G11B5/398 , G11B2005/3996 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method according to one embodiment includes forming a mask above a thin film sensor stack; forming an electrically insulating layer above the mask and sensor stack, the insulating layer having a portion extending along a nonhorizontal end of the mask; selectively removing the insulating layer except for the portion thereof extending along the nonhorizontal end of the mask; removing portions of the sensor stack that are not covered by the mask and the portion of the insulating layer, wherein an end of the portion of the insulating layer positioned away from the mask is about aligned with a back end of the sensor stack after removing the portions thereof; and removing the mask.
摘要翻译： 根据一个实施例的方法包括在薄膜传感器堆叠之上形成掩模; 在所述掩模和传感器堆叠之上形成电绝缘层，所述绝缘层具有沿着所述掩模的非水平端延伸的部分; 选择性地除去除了沿着掩模的非水平端延伸的部分之外的绝缘层; 去除未被掩模覆盖的部分和绝缘层的部分，其中绝缘层的远离掩模的部分的一端在移除之后与传感器堆的后端大致对准 其部分; 并取下面罩。
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9.发明申请METHODS FOR CREATING A MAGNETIC MAIN POLE WITH SIDE SHIELD AND SYSTEMS THEREOF 有权用于创建具有侧面屏蔽的磁性主体的方法及其系统公开(公告)号：US20100159282A1
公开(公告)日：2010-06-24
申请号：US12341925
申请日：2008-12-22
申请人： Edward Hin Pong Lee , Aron Pentek
发明人： Edward Hin Pong Lee , Aron Pentek
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T428/1186
摘要： A method according to another embodiment includes forming a side shield layer of ferromagnetic material above a substrate; masking the side shield layer; milling an unmasked region of the side shield layer for forming a pole trench therein; and forming a pole layer in the pole trench. A structure according to one embodiment includes a substrate; a side shield layer of ferromagnetic material on the substrate, wherein the substrate has a region covered by the side shield layer and a region not covered by the side shield layer; a pole trench in the side shield layer and the region of the substrate not covered by the side shield layer; a layer of nonmagnetic material in the pole trench; and a pole layer in the pole trench, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
摘要翻译： 根据另一实施例的方法包括在基板上形成铁磁材料的侧屏蔽层; 遮蔽侧面屏蔽层; 研磨用于在其中形成极沟槽的侧屏蔽层的未屏蔽区域; 以及在所述极沟槽中形成极层。 根据一个实施例的结构包括基底; 在所述基板上的铁磁材料的侧屏蔽层，其中所述基板具有被所述侧屏蔽层覆盖的区域和未被所述侧屏蔽层覆盖的区域; 侧屏蔽层中的极沟槽和未被侧屏蔽层覆盖的衬底的区域; 在磁极沟中的一层非磁性材料; 以及在所述极沟槽中的极层，其中所述极层在不被所述侧屏蔽层覆盖的所述衬底的区域之上具有比在所述侧屏蔽层覆盖的衬底的区域之上更大的厚度。
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10.发明申请公开(公告)号：US20090152234A1
公开(公告)日：2009-06-18
申请号：US11956277
申请日：2007-12-13
申请人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.
摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。
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