公开(公告)号：US07553765B2

公开(公告)日：2009-06-30

申请号：US11490164

申请日：2006-07-21

申请人： Eiju Komuro ,  Osamu Shinoura ,  Yumiko Ozaki ,  Akira Shibue

发明人： Eiju Komuro ,  Osamu Shinoura ,  Yumiko Ozaki ,  Akira Shibue

IPC分类号： H01L21/44

CPC分类号： H01L27/016

摘要： A method of manufacturing a thin-film electronic device comprising providing a dielectric layer on a base, providing a first electrically conductive layer having a first opening and covering at least part of the dielectric layer; and forming a first through-hole extending through the base and communicating with the first opening. A second electrically conductive layer may be provided on the base, and a dielectric layer may be provided so as to cover at least part of this second conductive layer.

摘要翻译： 一种制造薄膜电子器件的方法，包括在基底上提供电介质层，提供具有第一开口并覆盖所述电介质层的至少一部分的第一导电层; 以及形成延伸穿过所述基座并与所述第一开口连通的第一通孔。 可以在基底上设置第二导电层，并且可以设置介电层以覆盖该第二导电层的至少一部分。

公开(公告)号：US20070026581A1

公开(公告)日：2007-02-01

申请号：US11490164

申请日：2006-07-21

申请人： Eiju Komuro ,  Osamu Shinoura ,  Yumiko Ozaki ,  Akira Shibue

发明人： Eiju Komuro ,  Osamu Shinoura ,  Yumiko Ozaki ,  Akira Shibue

IPC分类号： H01L21/84

CPC分类号： H01L27/016

摘要： A method of manufacturing a thin-film electronic device comprising providing a dielectric layer on a base, providing a first electrically conductive layer having a first opening and covering at least part of the dielectric layer; and forming a first through-hole extending through the base and communicating with the first opening. A second electrically conductive layer may be provided on the base, and a dielectric layer may be provided so as to cover at least part of this second conductive layer.

摘要翻译： 一种制造薄膜电子器件的方法，包括在基底上提供电介质层，提供具有第一开口并覆盖所述电介质层的至少一部分的第一导电层; 以及形成延伸穿过所述基座并与所述第一开口连通的第一通孔。 可以在基底上设置第二导电层，并且可以设置介电层以覆盖该第二导电层的至少一部分。

公开(公告)号：US06954117B2

公开(公告)日：2005-10-11

申请号：US10806378

申请日：2004-03-23

申请人： Eiju Komuro ,  Toshiyuki Nagatsuka ,  Tsutomu Yasui

发明人： Eiju Komuro ,  Toshiyuki Nagatsuka ,  Tsutomu Yasui

IPC分类号： H01L41/09 ,  H01L41/08 ,  H01L41/18 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/17 ,  H03H9/52 ,  H03H9/54 ,  H03H9/70

CPC分类号： H03H9/1014 ,  H01L2224/16225 ,  H03H9/0514 ,  H03H9/175 ,  H03H9/706

摘要： In an electronic component having a piezo-electric resonator 10 formed on an element substrate 11 and obtaining a signal having a predetermined resonant frequency by a bulk wave propagating within a piezo-electric film 15, a mounting substrate 19 on which the piezo-electric resonator 10 is mounted by face-down bonding through N bumps 18, when a maximum diameter of said N bumps 18 is defined as D μm, die shear strength of said N bumps 18 is not smaller than ND/6 (g), preferably, not smaller than ND/3.6 (g).

摘要翻译： 在具有形成在元件基板11上的压电谐振器10并通过在压电薄膜15内传播的体波获得具有预定谐振频率的信号的电子部件中，安装基板19，压电谐振器 如图10所示，当N个凸块18的最大直径被定义为D mum时，所述N个凸起18的冲模剪切强度不小于ND / 6（g），优选地不是 小于ND / 3.6（g）。

公开(公告)号：US20050090033A1

公开(公告)日：2005-04-28

申请号：US10968976

申请日：2004-10-21

申请人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

发明人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

IPC分类号： H01L41/22 ,  H01L21/00 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/253 ,  H01L41/29 ,  H03H3/02 ,  H03H3/04 ,  H03H9/56

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

摘要翻译： 一种制造压电谐振器的方法，包括：在压电膜14上形成上电极层20的第一步骤，用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤，以便 具有上电极的形状，除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤，去除抗蚀剂21的第四步骤，第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b，以及除去抗蚀剂22的第七步骤。

公开(公告)号：US07187254B2

公开(公告)日：2007-03-06

申请号：US10380985

申请日：2001-07-11

申请人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

发明人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

IPC分类号： H03H9/54

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

摘要： Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20). The arrangement of the resonators (10, 11) between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2×2, and hither order filters are described.

摘要翻译： 在共面波导线结构内串联（10）和平行（11）配置的多个薄膜体声波谐振器（10,11）提供了紧凑的梯形滤波器。 谐振器（10,11）形成在衬底（20）中的开口（28）上，并通过形成在衬底（20）上的一个或多个传输线连接到相关联的电路。 在共面线结构的接地和信号线之间的谐振器（10,11）的布置提供了使滤波器的面积最小化的手段。 在共面传输线结构内嵌入梯形滤波器消除了对引线键合的需要，从而简化了制造。 描述了2x2的实施例和两个阶次滤波器。

公开(公告)号：US07046103B2

公开(公告)日：2006-05-16

申请号：US10031239

申请日：2001-05-23

申请人： Roger W. Whatmore ,  Paul B. Kirby ,  Qingxin Su ,  Eiju Komuro

发明人： Roger W. Whatmore ,  Paul B. Kirby ,  Qingxin Su ,  Eiju Komuro

IPC分类号： H01P3/08

CPC分类号： H03H9/02094 ,  H03H3/04 ,  H03H9/605 ,  H03H2003/0435 ,  H03H2003/0457

摘要： An electric filter comprises a plurality of thin film bulk acoustic resonants (10, 11) arranged in series and in parallel which have electrodes (24, 25) of different working area (L) and optionally a piezoelectric layer (23) of different thickness (T).

摘要翻译： 电滤波器包括串联并联布置的多个薄膜体声共振器（10,11），其具有不同工作区域（L）的电极（24,25）和可选地具有不同厚度的压电层（23） T）。

公开(公告)号：US06251297B1

公开(公告)日：2001-06-26

申请号：US09207659

申请日：1998-12-09

申请人： Eiju Komuro ,  Tohru Kineri

发明人： Eiju Komuro ,  Tohru Kineri

IPC分类号： G02B530

CPC分类号： G02B5/3058 ,  G02B5/1809 ,  G02B5/204

摘要： A method of manufacturing a polarizing plate of a resonance absorption effect type wherein plural bar-like polarizing members are arranged in a light-transmittable polarizing matrix layer with major axes thereof orienting in a constant direction. The method includes a preparing process of a forming die for preparing a forming die having a concavoconvex pattern corresponding to a layout pattern of the bar-like polarizing members, a forming process of a concavoconvex pattern on a resin layer for forming a resin layer directly or indirectly on a substrate and pressing the forming die onto the resin layer so as to form a concavoconvex pattern on the resin layer, a forming process of bar-like polarizing members for forming the bar-like polarizing members in the foregoing layout pattern using the concavoconvex pattern of the resin layer, and a forming process of a polarizing matrix layer for forming the light-transmittable polarizing matrix layer so as to bury the formed bar-like polarizing members. Accordingly, the polarizing plate of the resonance absorption effect type can be obtained, which is low in price, massproducible, high in extinction ratio, high in performance and high in reliability.

摘要翻译： 制造共振吸收效果型的偏振片的方法，其中多个棒状偏振构件布置在其可沿着恒定方向取向的长轴的透光偏振矩阵层中。 该方法包括用于制备具有对应于棒状偏振构件的布局图案的凹凸图案的成形模具的成形模具的制备方法，用于直接形成树脂层的树脂层上的凹凸图案的形成工艺 间接地在基板上并将成形模挤压到树脂层上，以在树脂层上形成凹凸图案，使用凹凸形状在上述布局图案中形成棒状偏振构件的棒状偏振构件的形成工艺 树脂层的图案，以及用于形成可透光偏振矩阵层的偏振矩阵层的形成工艺，以便掩埋形成的棒状偏振构件。 因此，可以获得价格低廉，生产量大，消光比高，性能高，可靠性高的共振吸收效果型偏振片。

公开(公告)号：US07199504B2

公开(公告)日：2007-04-03

申请号：US10718799

申请日：2003-11-24

申请人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

发明人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

IPC分类号： H03H9/54

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

摘要： A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

摘要翻译： 梯形薄膜体声波谐振器（FBAR）滤波器包括两个串联FBAR和两个并联FBAR。 每个FBAR具有顶部电极，底部电极和夹在顶部和底部电极之间的压电层。 两个串联FBAR的顶部电极构成共面波导传输线的信号线的一部分。 两个串联FBAR的顶部电极连接到相关电路。 两个串联FBAR有一个共同的底部电极。

公开(公告)号：US07183879B2

公开(公告)日：2007-02-27

申请号：US10995365

申请日：2004-11-24

申请人： Eiju Komuro

发明人： Eiju Komuro

IPC分类号： H03H9/70 ,  H03H9/54

CPC分类号： H03H9/175 ,  H03H9/174

摘要： An electric filter according to an embodiment of the present invention is an electric filter having a piezoelectric resonator 10 to obtain a signal of a predetermined resonance frequency from a bulk wave propagating inside a piezoelectric film 15. This electric filter is configured to satisfy k2>(BP/0.6f), where k2 is the square of an effective electromechanical coupling coefficient of the piezoelectric resonator 10, BP a pass bandwidth of the electric filter, and f a center frequency of a target pass band of the electric filter.

摘要翻译： 根据本发明的实施例的电动过滤器是具有压电谐振器10的电动过滤器，以从压电膜15内传播的体波获得预定的共振频率的信号。该电过滤器被配置为满足k ^{2 >（BP / 0.6f），其中k 2是压电谐振器10的有效机电耦合系数的平方，BP是电滤波器的通带宽度，fa 电滤波器的目标通带的中心频率。}

公开(公告)号：US07124485B2

公开(公告)日：2006-10-24

申请号：US10819134

申请日：2004-04-07

申请人： Eiju Komuro

发明人： Eiju Komuro

IPC分类号： H04R17/00

CPC分类号： H03H3/02 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, a resist layer so as to cover the piezoelectric film, forms a mask composed of the resist layer on the piezoelectric film by forming, in the resist layer, an exposure hole for exposing a formation part of an upper electrode on the piezoelectric film, forms an electrode material layer for forming the upper electrode on the piezoelectric film exposed via the exposure hole and on the mask, and then forms the upper electrode by removing the electrode material layer on the mask by removing the mask.

摘要翻译： 一种制造压电薄膜谐振器的方法，在基板上形成压电膜以覆盖形成在基板上的下电极之后形成抗蚀剂层以覆盖压电膜，形成由抗蚀剂层 通过在抗蚀剂层中形成用于使压电膜上的上电极的形成部分露出的曝光孔，形成在通过曝光孔暴露的压电膜上形成上电极的电极材料层，并且在 然后通过除去掩模去除掩模上的电极材料层形成上电极。