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    Film bulk acoustic resonator filters with a coplanar waveguide
    1.
    发明授权
    Film bulk acoustic resonator filters with a coplanar waveguide 有权
    具有共面波导的膜体声波谐振器滤波器

    公开(公告)号：US07187254B2

    公开(公告)日：2007-03-06

    申请号：US10380985

    申请日：2001-07-11

    申请人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

    发明人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

    IPC分类号： H03H9/54

    CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

    摘要： Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20). The arrangement of the resonators (10, 11) between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2×2, and hither order filters are described.

    摘要翻译： 在共面波导线结构内串联（10）和平行（11）配置的多个薄膜体声波谐振器（10,11）提供了紧凑的梯形滤波器。 谐振器（10,11）形成在衬底（20）中的开口（28）上，并通过形成在衬底（20）上的一个或多个传输线连接到相关联的电路。 在共面线结构的接地和信号线之间的谐振器（10,11）的布置提供了使滤波器的面积最小化的手段。 在共面传输线结构内嵌入梯形滤波器消除了对引线键合的需要，从而简化了制造。 描述了2x2的实施例和两个阶次滤波器。

    Film bulk acoustic resonator filter
    3.
    发明授权
    Film bulk acoustic resonator filter 有权
    薄膜体声波谐振滤波器

    公开(公告)号：US07199504B2

    公开(公告)日：2007-04-03

    申请号：US10718799

    申请日：2003-11-24

    申请人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

    发明人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

    IPC分类号： H03H9/54

    CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

    摘要： A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

    摘要翻译： 梯形薄膜体声波谐振器（FBAR）滤波器包括两个串联FBAR和两个并联FBAR。 每个FBAR具有顶部电极，底部电极和夹在顶部和底部电极之间的压电层。 两个串联FBAR的顶部电极构成共面波导传输线的信号线的一部分。 两个串联FBAR的顶部电极连接到相关电路。 两个串联FBAR有一个共同的底部电极。

    Method for manufacturing piezo-resonator
    6.
    发明申请
    Method for manufacturing piezo-resonator 有权
    制造压电谐振器的方法

    公开(公告)号：US20050090033A1

    公开(公告)日：2005-04-28

    申请号：US10968976

    申请日：2004-10-21

    申请人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

    发明人： Masaaki Imuri ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

    IPC分类号： H01L41/22 ,  H01L21/00 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/253 ,  H01L41/29 ,  H03H3/02 ,  H03H3/04 ,  H03H9/56

    CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

    摘要： A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

    摘要翻译： 一种制造压电谐振器的方法，包括：在压电膜14上形成上电极层20的第一步骤，用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤，以便 具有上电极的形状，除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤，去除抗蚀剂21的第四步骤，第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b，以及除去抗蚀剂22的第七步骤。

    Method of manufacturing polarizing plate
    7.
    发明授权
    Method of manufacturing polarizing plate 失效
    偏光板的制造方法

    公开(公告)号：US06251297B1

    公开(公告)日：2001-06-26

    申请号：US09207659

    申请日：1998-12-09

    申请人： Eiju Komuro ,  Tohru Kineri

    发明人： Eiju Komuro ,  Tohru Kineri

    IPC分类号： G02B530

    CPC分类号： G02B5/3058 ,  G02B5/1809 ,  G02B5/204

    摘要： A method of manufacturing a polarizing plate of a resonance absorption effect type wherein plural bar-like polarizing members are arranged in a light-transmittable polarizing matrix layer with major axes thereof orienting in a constant direction. The method includes a preparing process of a forming die for preparing a forming die having a concavoconvex pattern corresponding to a layout pattern of the bar-like polarizing members, a forming process of a concavoconvex pattern on a resin layer for forming a resin layer directly or indirectly on a substrate and pressing the forming die onto the resin layer so as to form a concavoconvex pattern on the resin layer, a forming process of bar-like polarizing members for forming the bar-like polarizing members in the foregoing layout pattern using the concavoconvex pattern of the resin layer, and a forming process of a polarizing matrix layer for forming the light-transmittable polarizing matrix layer so as to bury the formed bar-like polarizing members. Accordingly, the polarizing plate of the resonance absorption effect type can be obtained, which is low in price, massproducible, high in extinction ratio, high in performance and high in reliability.

    摘要翻译： 制造共振吸收效果型的偏振片的方法，其中多个棒状偏振构件布置在其可沿着恒定方向取向的长轴的透光偏振矩阵层中。 该方法包括用于制备具有对应于棒状偏振构件的布局图案的凹凸图案的成形模具的成形模具的制备方法，用于直接形成树脂层的树脂层上的凹凸图案的形成工艺 间接地在基板上并将成形模挤压到树脂层上，以在树脂层上形成凹凸图案，使用凹凸形状在上述布局图案中形成棒状偏振构件的棒状偏振构件的形成工艺 树脂层的图案，以及用于形成可透光偏振矩阵层的偏振矩阵层的形成工艺，以便掩埋形成的棒状偏振构件。 因此，可以获得价格低廉，生产量大，消光比高，性能高，可靠性高的共振吸收效果型偏振片。

    Electric filter, and duplexer using the same
    9.
    发明授权
    Electric filter, and duplexer using the same 有权
    电动过滤器和使用相同的双工器

    公开(公告)号：US07183879B2

    公开(公告)日：2007-02-27

    申请号：US10995365

    申请日：2004-11-24

    申请人： Eiju Komuro

    发明人： Eiju Komuro

    IPC分类号： H03H9/70 ,  H03H9/54

    CPC分类号： H03H9/175 ,  H03H9/174

    摘要： An electric filter according to an embodiment of the present invention is an electric filter having a piezoelectric resonator 10 to obtain a signal of a predetermined resonance frequency from a bulk wave propagating inside a piezoelectric film 15. This electric filter is configured to satisfy k2>(BP/0.6f), where k2 is the square of an effective electromechanical coupling coefficient of the piezoelectric resonator 10, BP a pass bandwidth of the electric filter, and f a center frequency of a target pass band of the electric filter.

    摘要翻译： 根据本发明的实施例的电动过滤器是具有压电谐振器10的电动过滤器，以从压电膜15内传播的体波获得预定的共振频率的信号。该电过滤器被配置为满足k 2 >（BP / 0.6f），其中k 2是压电谐振器10的有效机电耦合系数的平方，BP是电滤波器的通带宽度，fa 电滤波器的目标通带的中心频率。

    Method of manufacturing a piezoelectric thin film resonator
    10.
    发明授权
    Method of manufacturing a piezoelectric thin film resonator 有权
    制造压电薄膜谐振器的方法

    公开(公告)号：US07124485B2

    公开(公告)日：2006-10-24

    申请号：US10819134

    申请日：2004-04-07

    申请人： Eiju Komuro

    发明人： Eiju Komuro

    IPC分类号： H04R17/00

    CPC分类号： H03H3/02 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156

    摘要： A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, a resist layer so as to cover the piezoelectric film, forms a mask composed of the resist layer on the piezoelectric film by forming, in the resist layer, an exposure hole for exposing a formation part of an upper electrode on the piezoelectric film, forms an electrode material layer for forming the upper electrode on the piezoelectric film exposed via the exposure hole and on the mask, and then forms the upper electrode by removing the electrode material layer on the mask by removing the mask.

    摘要翻译： 一种制造压电薄膜谐振器的方法，在基板上形成压电膜以覆盖形成在基板上的下电极之后形成抗蚀剂层以覆盖压电膜，形成由抗蚀剂层 通过在抗蚀剂层中形成用于使压电膜上的上电极的形成部分露出的曝光孔，形成在通过曝光孔暴露的压电膜上形成上电极的电极材料层，并且在 然后通过除去掩模去除掩模上的电极材料层形成上电极。