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33 条记录 (耗时 0.02 秒)

    Contact cooling of a projection mask
    1.
    发明授权
    Contact cooling of a projection mask 失效
    联系冷却投影面膜

    公开(公告)号：US5142120A

    公开(公告)日：1992-08-25

    申请号：US633583

    申请日：1990-12-21

    申请人： Eric G. Hanson ,  Si-Ty Lam ,  William J. West

    发明人： Eric G. Hanson ,  Si-Ty Lam ,  William J. West

    IPC分类号： B23K26/06 ,  G03F1/00 ,  G03F1/08 ,  G03F7/20 ,  H01L21/027 ,  H01S3/00

    CPC分类号： G03F7/70866 ,  G03F7/2041 ,  G03F7/70875

    摘要： An apparatus and method for cooling a large-area, pass-through projection mask for excimer ablation. In a preferred embodiment, a laser-transparent window is spaced apart from the projection mask to provide a thermal escape path. The thermal escape path receives a liquid flow which is in direct contact with patterned masking material of the projection mask. The liquid, preferably deionized water, is caused to flow in a laminar fashion. The liquid intersects the laser energy of the excimer laser. In a second embodiment, the liquid flow is along the periphery of the patterned masking material.

    摘要翻译： 一种用于冷却用于准分子消融的大面积直通投影掩模（14）的装置和方法。 在优选实施例中，激光透明窗口（12）与投影掩模间隔开以提供热逸散路径（26）。 热逸散路径接收与投影掩模的图案化掩模材料（18）直接接触的液体流。 使液体，优选去离子水以层流方式流动。 液体与准分子激光器的激光能量（10）相交。 在第二实施例中，液体流沿图案化掩模材料的周边。

    Integral ink jet print head
    6.
    发明授权
    Integral ink jet print head 失效
    一体式喷墨打印头

    公开(公告)号：US5016024A

    公开(公告)日：1991-05-14

    申请号：US462670

    申请日：1990-01-09

    申请人： Si-Ty Lam ,  William J. Lloyd

    发明人： Si-Ty Lam ,  William J. Lloyd

    IPC分类号： B41J2/05 ,  B41J2/16

    CPC分类号： B41J2/1643 ,  B41J2/1603 ,  B41J2/1625 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1637 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

    摘要： Disclosed is an integral ink jet print head having an improved design. An ink reservoir wall at the base of print head guides a flow of ink from a remote reservoir. Ink is drawn by capillary action past flow restrictors and an ink channel into an ink heating zone. The ink heating zone is a chamber residing below an integrated ink heating structure which has been fabricated, using processes including photolithography, directly on the underside of an orifice plate. An orifice is located to one side of the ink heating zone. The ink heating structure housing the ink heating zone is a combination of thin layers deposited directly on the orifice plate. The multilayered structure includes an insulating layer of silicon dioxide, a resistive layer of tantalum aluminum alloy, and a top conductive layer formed of gold. The invention provides a single integrated print head that combines the separate elements of the previous designs into one unit having many ink jets on one ink jet print head.

    Multi-layer thin film in a ballistic electron emitter
    7.
    发明申请
    Multi-layer thin film in a ballistic electron emitter 审中-公开
    弹道电子发射器中的多层薄膜

    公开(公告)号：US20060151777A1

    公开(公告)日：2006-07-13

    申请号：US11033768

    申请日：2005-01-12

    申请人： Steven Naberhuis ,  Huei-Pei Kuo ,  Si-Ty Lam ,  Henryk Birecki ,  Xia Sheng

    发明人： Steven Naberhuis ,  Huei-Pei Kuo ,  Si-Ty Lam ,  Henryk Birecki ,  Xia Sheng

    IPC分类号： H01L29/06

    CPC分类号： B82Y10/00 ,  H01J1/312 ,  H01J9/022

    摘要： An electron emitter that includes a metal film having a set of layers that are selected and arranged to adhere the metal film to a remainder of a structure of the electron emitter while avoiding electron loss in the metal film. A multiple layer metal film according to the present techniques enables a balance among adhesion properties, metal diffusion, and oxide properties that might otherwise hinder the performance of an electron emitter.

    摘要翻译： 一种电子发射器，其包括具有一组层的金属膜，所述层被选择并布置成将金属膜附着到电子发射体的其余部分，同时避免金属膜中的电子损失。 根据本技术的多层金属膜能够在粘合性能，金属扩散性以及可能阻碍电子发射体性能的氧化物性质之间取得平衡。

    Anodizing process for improving electron emission in electronic devices
    9.
    发明申请
    Anodizing process for improving electron emission in electronic devices 审中-公开
    用于改善电子器件中电子发射的阳极氧化工艺

    公开(公告)号：US20050051764A1

    公开(公告)日：2005-03-10

    申请号：US10656635

    申请日：2003-09-04

    申请人： Huei-Pei Kuo ,  Xia Sheng ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Naberhuis

    发明人： Huei-Pei Kuo ,  Xia Sheng ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Naberhuis

    IPC分类号： H01J1/312 ,  H01J9/02 ,  H01L29/06

    CPC分类号： B82Y10/00 ,  H01J1/312 ,  H01J9/025

    摘要： A method is presented for forming pores within a central area of a semi-conductive or conductive surface. The method includes forming a semi-conductive or conductive surface on a substrate. This semi-conductive or conductive surface is formed in a manner ensuring that upon application of an electric field at the semi-conductive or conductive surface an intensity of the electric field at a central area of the surface is at least as great as an intensity of the electric field at a perimeter of the surface. Finally, the method includes anodizing the semi-conductive or conductive surface by generating the electric field at the semi-conductive or conductive surface to form a porous region within the semi-conductive or conductive surface.

    摘要翻译： 提出了一种用于在半导体或导电表面的中心区域内形成孔的方法。 该方法包括在衬底上形成半导体或导电表面。 这种半导体或导电表面以确保在半导体或导电表面上施加电场的方式形成，表面中心区域处的电场的强度至少等于 表面周边的电场。 最后，该方法包括通过在半导体或导电表面处产生电场来在半导体或导电表面内形成多孔区域来阳极氧化半导体或导电表面。

    Three dimensional nozzle orifice plates
    10.
    发明授权
    Three dimensional nozzle orifice plates 失效
    三维喷嘴孔板

    公开(公告)号：US5255017A

    公开(公告)日：1993-10-19

    申请号：US621506

    申请日：1990-12-03

    申请人： Si-Ty Lam

    发明人： Si-Ty Lam

    IPC分类号： B05B1/00 ,  B41J2/135 ,  B41J2/16 ,  C25D1/08

    CPC分类号： B41J2/1623 ,  B41J2/162 ,  B41J2/1625 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  C25D1/08

    摘要： A process of forming a mandrel for manufacturing inkjet orifice plates and the like includes the steps of providing an electrically-conductive layer on a substrate, providing a pattern of electrically conductive surfaces on the conductive layer, and surface treating the pattern of conductive surfaces to reduce adhesion of a subsequently applied electroplated film to the pattern of conductive surfaces. The mandrel includes a substrate, a pattern of electrically conductive surfaces on the substrate and an oxide layer on the pattern of conductive surfaces for reducing adhesion of an electroplated film to the pattern of conductive surfaces. The pattern of conductive surfaces can be an electro-deposited layer of nickel, and the release means can be a nickel oxide and/or nickel hydroxide film on the layer of nickel.

    摘要翻译： 形成用于制造喷墨孔板（6,13）等的心轴（1,2,4,5,7,8,9,11,12）的方法包括以下步骤：提供导电层（2 ，8）在基板（1,7）上，在导电层（2,8）上提供导电表面（4a，11a）的图案，并且对导电表面（4a，11a）的图案进行表面处理以减少粘合 随后施加的电镀膜（6,13）到导电表面（4a，11a）的图案。 心轴（1,2,4,5,7,8,9,11,12）包括衬底（1,7），衬底（1,7）上的导电表面（4a，11a）的图案和 在导电表面（4a，11a）的图案上的氧化物层（5,12），用于减少电镀膜（6,13）与导电表面（4a，11a）的图案的粘附。 导电表面（4a，11a）的图案可以是镍的电沉积层，并且释放装置（5,12）可以是镍层上的氧化镍和/或氢氧化镍膜。