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8 条记录 (耗时 0.012 秒)

    Retarding Field Analyzer Integral with Particle Beam Column
    2.
    发明申请
    Retarding Field Analyzer Integral with Particle Beam Column 有权
    阻塞场分析仪与粒子束积分

    公开(公告)号：US20140117233A1

    公开(公告)日：2014-05-01

    申请号：US13847313

    申请日：2013-03-19

    申请人： FEI Company

    发明人： David William Tuggle ,  James B. McGinn ,  Charles Otis

    IPC分类号： H01J37/147

    CPC分类号： H01J37/244 ,  H01J2237/12 ,  H01J2237/1501 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24514

    摘要： A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of the beam with the analyzer.

    摘要翻译： 延迟场分析仪使用带电粒子束系统的现有部件，消除了插入单独的延迟场分析仪装置的需要。 使用现有列的组件可减少分析光束所需的时间。 使用现有列的成像能力有助于光束与分析仪的对准。

    Chicane Blanker Assemblies for Charged Particle Beam Systems and Methods of Using the Same
    8.
    发明申请
    Chicane Blanker Assemblies for Charged Particle Beam Systems and Methods of Using the Same 审中-公开
    用于带电粒子束系统的Chicane Blanker组件及其使用方法

    公开(公告)号：US20160093470A1

    公开(公告)日：2016-03-31

    申请号：US14502099

    申请日：2014-09-30

    申请人： FEI Company

    发明人： Kevin Kagarice ,  Charles Otis ,  N. William Parker

    IPC分类号： H01J37/32

    CPC分类号： H01J37/045 ,  H01J37/05 ,  H01J2237/004 ,  H01J2237/028 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/28 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01J2237/32

    摘要： A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector, and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector, a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.

    摘要翻译： 一种用于带电粒子束系统的通道消除器组件包括入口和出口，至少一个中性阻挡结构，多个拐角偏转器，光束消隐偏转器和光束阻挡结构。 入口构造成接受沿着轴传播的带电粒子束。 至少一个中性阻挡结构与轴相交。 多个拐角偏转器包括顺序地布置在入口和出口之间并被配置为沿着旁路中性阻塞的路径偏转光束的第一拐角拐弯器，第二拐角偏转器，第三拐角偏转器和第四通道偏转器 结构，并通过出口离开通道阻塞组件。 在实施例中，拐弯夹板组件包括两个中性阻挡结构。 在实施例中，梁阻挡结构布置在第三拐角偏转器和第四通道偏转器之间。