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    Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
    5.
    发明授权
    Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
    用于检测压力型流量控制器孔堵塞的方法和装置

    公开(公告)号：US06302130B1

    公开(公告)日：2001-10-16

    申请号：US09529985

    申请日：2000-07-18

    申请人： Tadahiro Ohmi ,  Seiichi Iida ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Kazuhiro Yoshikawa ,  Mutsunori Koyomogi ,  Tomio Uno ,  Eiji Ideta ,  Takashi Hirose

    发明人： Tadahiro Ohmi ,  Seiichi Iida ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Kazuhiro Yoshikawa ,  Mutsunori Koyomogi ,  Tomio Uno ,  Eiji Ideta ,  Takashi Hirose

    IPC分类号： F17D116

    CPC分类号： G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

    摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.

    摘要翻译： 一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。 检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路 （32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为 由计算流量QC和设定流量QS之间的差分信号QY控制。 该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞 ，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报​​警电路（46） 从标准压力衰减数据Y（t）到特定程度或以上。

    Diaphragm valve
    6.
    发明授权
    Diaphragm valve 失效
    隔膜阀

    公开(公告)号：US5820105A

    公开(公告)日：1998-10-13

    申请号：US670169

    申请日：1996-06-27

    申请人： Michio Yamaji ,  Kazuhiro Yoshikawa ,  Shigeru Itoi

    发明人： Michio Yamaji ,  Kazuhiro Yoshikawa ,  Shigeru Itoi

    IPC分类号： F16K7/17 ,  C22C19/05 ,  C22F1/10 ,  F16K7/16 ,  F16K41/12

    CPC分类号： F16K41/12 ,  C22C19/055 ,  C22F1/10 ,  F16K7/16

    摘要： In a diaphragm valve designed to seal with a metal diaphragm, corrosion resistance and strength of the diaphragm are improved by forming the diaphragm from a thin alloy sheet containing, by weight, 12.5-14.5% Mo, 20.0-22.5% Cr, 2.0-6% Fe, 2.5-3.5% W, 2.5% or less Co, 0.015% or less C, 0.08% or less Si, 0.50% or less Mn, 0.35% or less V, 0.02% or less P, 0.02% or less S and the remainder Ni. The thin alloy sheet is cold-rolled after annealing to enhance the strength of the diaphragm.

    摘要翻译： 在设计成与金属隔膜密封的隔膜阀中，通过从包含重量比为12.5-14.5％的Mo，20.0-22.5％的Cr，2.0-6的薄合金板形成隔膜来改善隔膜的耐腐蚀性和强度 ％Fe，2.5-3.5％W，2.5％以下Co，0.015％以下C，0.08％以下Si，0.50％以下Mn，0.35％以下V，0.02％以下P，0.02％以下S 余数为Ni。 退火后的薄合金薄板进行冷轧以提高隔膜的强度。

    Pipe joint
    7.
    发明授权
    Pipe joint 失效
    管接头

    公开(公告)号：US5720505A

    公开(公告)日：1998-02-24

    申请号：US648501

    申请日：1996-05-15

    申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Tsutomu Shinohara ,  Kazuhiro Yoshikawa ,  Tetsuya Kojima

    发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Tsutomu Shinohara ,  Kazuhiro Yoshikawa ,  Tetsuya Kojima

    IPC分类号： F16L19/02 ,  F16L19/03 ,  F16L27/08 ,  F16L25/00

    CPC分类号： F16L19/0218 ,  F16L19/0212 ,  Y10S285/906 ,  Y10S285/917

    摘要： A pipe joint comprises a pair of tubular joint members, an annular gasket interposed between abutting end faces of the joint members, and a nut for joining the joint members. A seal projection is formed on the abutting end face of each joint member at a position radially outward of an inner periphery of the end face. When an end of the seal projection is brought into contact with an end face of the gasket by tightening the nut, a clearance is formed between an outer flat portion of the abutting end face of each joint member and the gasket end face opposed thereto. The clearance is greater than a clearance between an inner flat portion of the abutting end face of each joint member and the gasket end face opposed thereto, and is eliminated when the nut is completely tightened up.

    摘要翻译： 管接头包括一对管状接头构件，插入在接头构件的邻接端面之间的环形垫圈和用于接合接头构件的螺母。 在端面的内周的径向外侧的位置的每个接合构件的邻接端面上形成有密封突起。 当通过拧紧螺母将密封突起的端部与垫圈的端面接触时，在每个接头构件的邻接端面的外部平坦部分和与其相对的垫圈端面之间形成间隙。 间隙大于每个接头构件的邻接端面的内部平坦部分和与其相对的垫圈端面之间的间隙，并且在螺母完全拧紧时消除。

    Gas supply system equipped with pressure-type flow rate control unit
    8.
    发明授权
    Gas supply system equipped with pressure-type flow rate control unit 有权
    供气系统配有压力式流量控制单元

    公开(公告)号：US06289923B1

    公开(公告)日：2001-09-18

    申请号：US09463514

    申请日：2000-06-02

    申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

    发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Eiji Ideta ,  Ryousuke Dohi ,  Tomio Uno ,  Michio Yamaji

    IPC分类号： G05D706

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.

    摘要翻译： 公开了一种改进的，尺寸较小的低成本的气体供应系统，其配备有例如半导体制造设备中使用的压力式流量控制单元。 提高瞬态流量特性，防止气体开始时气体过冲，提高设备的流量控制精度和可靠性。 这消除了产品或半导体的不均匀性并提高了生产效率。 配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体，气体流量被控制以供应气体 通过孔口相关阀进行气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置在控制阀之间的压力检测器 所述控制阀和所述节流孔相关阀，设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中，基于由所述压力检测器检测到的压力P1，流量Qc 用公式Qc = KP1（K：常数）计算，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

    Pipe joint and gasket retainer for use in pipe joint
    9.
    发明授权
    Pipe joint and gasket retainer for use in pipe joint 失效
    管接头和垫圈保持架用于管接头

    公开(公告)号：US5340170A

    公开(公告)日：1994-08-23

    申请号：US46885

    申请日：1993-04-14

    申请人： Tsutomu Shinohara ,  Michio Yamaji ,  Kazuhiro Yoshikawa ,  Kenji Yamamoto

    发明人： Tsutomu Shinohara ,  Michio Yamaji ,  Kazuhiro Yoshikawa ,  Kenji Yamamoto

    IPC分类号： F16L19/02 ,  F16L19/03 ,  F16L27/08 ,  F16L19/00

    CPC分类号： F16L19/0212 ,  F16L27/0832

    摘要： A pipe joint comprises a pair of tubular joint members having a gasket holding annular projection on each of butting end faces thereof, an annular gasket interposed between the butting end faces of the joint members, a retainer for causing one of the joint members to hold the gasket thereto, and a nut for connecting the joint members together. The retainer comprises an annular portion, a gasket holding portion having a plurality of claws inwardly projecting from the annular portion for holding the outer periphery of the gasket, and a joint member holding portion formed in the annular portion and engageable with the end face of one of the joint members. The gasket is provided on its outer periphery with a slipping-off preventing portion engageable with the claws of the gasket holding portion of the retainer.

    摘要翻译： 管接头包括一对管状接头构件，其具有在其每个对接端面上保持环形突起的垫圈，插入在接头构件的对接端面之间的环形垫圈，用于使一个接头构件保持 垫圈，以及用于将接合件连接在一起的螺母。 保持器包括环形部分，垫圈保持部分具有从环形部分向内突出以保持垫圈的外周的多个爪，以及形成在环形部分中并可与一个端部的端面接合的接合构件保持部分 的联合成员。 垫圈在其外周设置有可与保持器的垫圈保持部的爪接合的防滑部。