摘要:
A method suitable for etching hydrophilic trenches into a substrate, such as silicon, is provided. The method comprises etching and sidewall passivation processes for achieving anisotropy. Sidewalls of the etched trench are made hydrophilic during the etch by virtue of a hydrophilizing dopant in a passivating gas plasma. The method is useful for etching ink supply channels in inkjet printheads.
摘要:
A method of etching an ink supply channel for an inkjet printhead. The method comprises simultaneous etching and passivation processes. A single etching and passivating gas plasma comprises: (a) a passivating gas comprising oxygen; (b) an inert sputtering gas; (c) a fluorinated etching gas; and (d) a hydrophilizing dopant. The resultant ink supply channel has relatively hydrophilic sidewalls.
摘要:
An inkjet printhead assembly includes: an ink supply manifold; printhead integrated circuits attached to the ink supply manifold, each printhead integrated circuit having a frontside including drive circuitry and a plurality of inkjet nozzle assemblies disposed on the drive circuitry; and a connector film for supplying power to the drive circuitry. An integrated circuit contact positioned in a backside recessed portion of each printhead integrated circuit is connected to the connector film. The integrated circuit contact is electrically connected to the drive circuitry via a connector rod extending through the printhead integrated circuit.
摘要:
A fluid sensor for detecting fluid in a chamber, has a MEMS sensing element of conductive material with a resistance that is a function of temperature, and electrical contacts for connection to an electrical power source for heating the sensing element with an electrical signal, so that control circuitry can measure the current passing through the sensing element during heating of the sensing element; and determine the temperature of the sensing element from the known applied voltage, the measured current and the known relationship between the current, resistance and temperature. As the temperature of the element will be greater if it is in the presence of gas rather than liquid, the sensor determines if there is liquid or gas in the chamber. This is particularly useful to detect if the chambers of an inkjet printhead are primed with ink.
摘要:
A printhead integrated circuit includes: a substrate comprising drive circuitry; a ceramic nozzle plate spaced apart from the substrate, the nozzle plate having a plurality of nozzle openings and a plurality of moveable portions defined therein; an active beam disposed on each moveable portion of the nozzle plate, such that each moveable portion is moveable towards the substrate when a current from the drive circuitry is passed through a respective active beam; and a polymer layer coating the nozzle plate and the active beams, wherein the polymer layer is comprised of a polymerized siloxane.
摘要:
A microfluidic diaphragm valve. The valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from said sealing surface.
摘要:
An ink jet printhead includes a plurality of nozzles each having a nozzle aperture; a plurality of bubble forming chambers, each corresponding respectively to one of the plurality of nozzles; an inlet for communicating printing fluid between the nozzle aperture and a printing fluid supply, the inlet and the nozzle aperture being aligned along a common central axis; and a heater element disposed in each of the bubble forming chambers. Each heater element has two bubble nucleation regions suspended within the bubble forming chamber in a plane parallel to that of the nozzle aperture. The two bubble nucleation regions are laterally offset from the central axis, such that the lateral offset of one of the bubble nucleation regions is equal and opposite to the lateral offset of the other bubble nucleation region. The bubble nucleation regions are spaced from each other such that bubbles nucleated at each will grow until they unite to form the gas bubble that causes the ejection of a drop of ejectable liquid.
摘要:
A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve.
摘要:
An inkjet printhead includes a ceramic nozzle plate having a plurality of movable portions defined therein and a polymeric material covering the nozzle plate and the plurality of movable portions.
摘要:
A printhead assembly for a pagewidth printer includes a substrate channel; a plurality of printhead modules positioned in the channel to form a pagewidth printhead module assembly; an ink hose positioned within the substrate channel to supply the printhead modules with ink; an extrusion for housing bus bars providing electrical power to the printhead modules; a cover plate securing a flex printed circuit board (PCB) in the assembly, the PCB forming a data bus to the printhead modules; and compressible conductive strips provided between the busbars abutting contacts on an upper side of parts of the flex PCB. The substrate channel defines a series of groups of holes through which the printhead modules are supplied with differently colored inks. The hose defines parallel channels extending a length of the hose, the channels connected to ink containers at one end and sealed with a channel extrusion cap at the other end.