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    ROTATABLE TARGET, BACKING TUBE, SPUTTERING INSTALLATION AND METHOD FOR PRODUCING A ROTATABLE TARGET
    4.
    发明申请
    ROTATABLE TARGET, BACKING TUBE, SPUTTERING INSTALLATION AND METHOD FOR PRODUCING A ROTATABLE TARGET 审中-公开
    可旋转的目标，背衬管，溅射安装和生产可旋转目标的方法

    公开(公告)号：US20110220489A1

    公开(公告)日：2011-09-15

    申请号：US12723490

    申请日：2010-03-12

    申请人： Lothar Lippert ,  Wolfgang Buschbeck

    发明人： Lothar Lippert ,  Wolfgang Buschbeck

    IPC分类号： C23C14/34 ,  C23C14/50

    CPC分类号： H01J37/3491 ,  C23C14/3407 ,  C23C14/3414 ,  H01J37/3405 ,  H01J37/3435

    摘要： A rotatable target for a sputtering installation and a method for producing a rotatable target are provided. The target includes a backing tube to which a target tube is shrink-fitted. The method includes setting a positive temperature difference between a target tube and a backing tube. The method further includes pulling the target tube over the backing tube while the temperature difference remains positive. Furthermore, a backing tube having a middle part with an outer lateral area and a notch extending in a longitudinal direction on the outer lateral area is provided.

    摘要翻译： 提供了用于溅射设备的可旋转靶材以及用于制造可旋转靶材的方法。 目标包括一个背管，目标管被收缩配合到其上。 该方法包括设置目标管和背衬管之间的正温差。 该方法还包括在温度差保持为正时将目标管牵拉在背衬管上。 此外，提供了具有外侧横向区域的中间部分和在外侧区域上沿纵向方向延伸的凹口的背衬管。

    Sputtering device with a cathode with permanent magnet system
    5.
    发明授权
    Sputtering device with a cathode with permanent magnet system 有权
    具有永磁体系统阴极的溅射装置

    公开(公告)号：US06207028B1

    公开(公告)日：2001-03-27

    申请号：US09371605

    申请日：1999-08-10

    申请人： Dieter Haas ,  Wolfgang Buschbeck ,  Jörg Krempel-Hesse

    发明人： Dieter Haas ,  Wolfgang Buschbeck ,  Jörg Krempel-Hesse

    IPC分类号： C23C1400

    CPC分类号： H01J37/3423 ,  H01J37/3402

    摘要： In a sputtering device with magnetic amplification, a magnetic field is generated by means of a permanent magnet system, whose lines of force run above and penetrate the sputtering surface, whereby the permanent magnet system is formed of two dosed, coaxial circular or oval rows (7, 8) of individual magnets (5, 5′ . . . , 6, 6′ . . . ) that are connected via a yoke (15), whereby the surface of the target (3) that faces away from the rows of permanent magnets (7, 8) is formed of two partial surfaces (3a, 3b) that form an angle to each other and whereby the edge (3c) that is formed by the two partial surfaces (3a, 3b) runs parallel to the two rows (7, 8) of permanent magnets (5, 5′ . . , 6, 6′ . . . ) and whereby an insert (14) made of ferromagnetic material is inserted between the magnetic yoke (15) and the surface of the target (3) that faces the magnetic yoke (15).

    摘要翻译： 在具有磁放大的溅射装置中，通过永磁体系统产生磁场，永磁体系线的力线在其上方并穿过溅射表面，由此永磁体系统由两个定量的，同轴的圆形或椭圆形的行（ 通过轭架（15）连接的单个磁体（5,5'，...，6，6'），从而使目标（3）的远离行 永磁体（7,8）由两个彼此成角度的部分表面（3a，3b）形成，由此由两个部分表面（3a，3b）形成的边缘（3c）平行于两个 永磁体（5,5'，...，6“）的排（7,8），并且由铁磁材料制成的插入件（14）插入在磁轭（15）和 目标（3）面向磁轭（15）。

    Apparatus for the rapid evacuation of a vacuum chamber
    6.
    发明授权
    Apparatus for the rapid evacuation of a vacuum chamber 失效
    用于快速排空真空室的装置

    公开(公告)号：US6004109A

    公开(公告)日：1999-12-21

    申请号：US674535

    申请日：1996-07-02

    申请人： Thomas Gebele ,  Wolfgang Buschbeck

    发明人： Thomas Gebele ,  Wolfgang Buschbeck

    IPC分类号： F04B37/16 ,  B01J3/02 ,  F04B37/14 ,  F04B49/00 ,  F04C28/02 ,  F04B23/08 ,  F04C25/02

    CPC分类号： F04C28/02 ,  F04B37/14 ,  F04B49/007 ,  F04C25/02

    摘要： A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).

    摘要翻译： 第一真空泵（14）通过其中具有第一真空阀（4）的初级进气管（13）连接到真空室（5）。 第二真空泵（15）通过其中具有第二真空阀（12）的连接管线（20）连接到第一真空泵（14）的输出端。 吹气阀（17）连接到第一泵（14）和第二阀（12）之间的连接管线（20）。 其中具有第三真空阀（13）的次级进气管线（19）连接在真空室（5）和第二真空泵（15）的进气口之间。

    Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
    7.
    发明授权
    Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof 失效
    用于排空低真空室和HGH真空室的方法以及用于实施它的高真空装置

    公开(公告)号：US5228838A

    公开(公告)日：1993-07-20

    申请号：US936035

    申请日：1992-08-26

    申请人： Thomas Gebele ,  Wolfgang Buschbeck

    发明人： Thomas Gebele ,  Wolfgang Buschbeck

    IPC分类号： B01J3/00 ,  F04B37/14

    CPC分类号： B01J3/006 ,  F04B37/14

    摘要： For the evacuation of a low-vacuum chamber (4) and of a high-vacuum chamber (5), two pump trains (6, 7) are provided, each consisting of a vacuum pump unit (8, 9) and a forepump unit (10, 11). The forepump unit (11) of the pump train (7) of the high-vacuum chamber (5) can draw selectively from the vacuum pump unit (9) of the high-vacuum chamber (5) or from a high-vacuum pump unit (12) connected likewise to the high-vacuum chamber (5). The vacuum pump unit (9) can aspirate either from the highvacuum chamber (5) or from the low-vacuum chamber (4) and discharge to the forepump unit (10) of pump train (6) or to the forepump unit (11) of pump train (7).

    摘要翻译： 为了排空低真空室（4）和高真空室（5），提供了两个泵系列（6,7），每个泵系列由真空泵单元（8,9）和前级泵单元 （10,11）。 高真空室（5）的泵排（7）的前泵单元（11）可以从高真空室（5）的真空泵单元（9）或高真空泵单元 （12）同样连接到高真空室（5）。 真空泵单元（9）可以从高真空室（5）或低真空室（4）吸出并排出到泵系（6）的前置泵单元（10）或前泵单元（11） 的泵列车（7）。

    Linear thermal evaporator for vacuum vapor depositing apparatus
    8.
    发明授权
    Linear thermal evaporator for vacuum vapor depositing apparatus 失效
    用于真空气相沉积设备的线性热蒸发器

    公开(公告)号：US5216742A

    公开(公告)日：1993-06-01

    申请号：US928970

    申请日：1992-08-11

    申请人： Thomas Krug ,  Friedrich Anderle ,  Albert Feuerstein ,  Eggo Sichmann ,  Wolfgang Buschbeck

    发明人： Thomas Krug ,  Friedrich Anderle ,  Albert Feuerstein ,  Eggo Sichmann ,  Wolfgang Buschbeck

    IPC分类号： C23C14/24

    CPC分类号： C23C14/243

    摘要： A crucible (9) of a nonmetallic material with an elongated cavity (42) to contain the material to be evaporated has on top a vapor emission slot (45) which is defined at its longitudinal edges (43, 44) by two elongated plates (40, 41) of a likewise nonmetallic material. In the cavity (42) two heating rods (46, 47) are disposed in a mirror-symmetrical relationship to a plane of symmetry (S) through the vapor emission slot (45), one under each of the plates (40, 41) defining the vapor emission slot (45). Additional heating means are provided outside of the crucible and inside of a thermal barrier system.

    摘要翻译： 具有用于容纳待蒸发的材料的细长空腔（42）的坩埚（9）在其顶部形成有蒸气发射狭槽（45），其在其纵向边缘（43,44）处由两个细长板（ 40,41）同样的非金属材料。 在空腔（42）中，两个加热棒（46,47）通过蒸汽发射槽（45）与对称平面（S）以镜对称的关系设置，每个板（40,41）下方一个， 限定蒸汽发射槽（45）。 附加的加热装置设置在坩埚的外部和热障系统的内部。