公开(公告)号：US20190385809A1

公开(公告)日：2019-12-19

申请号：US16480405

申请日：2017-12-08

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshiaki KUSUNOKI ,  Keigo KASUYA ,  Takashi OHSHIMA ,  Tomihiro HASHIZUME ,  Noriaki ARAI ,  Yoichi OSE

IPC: H01J37/073 ,  H01J37/20

Abstract: An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.

公开(公告)号：US20130087704A1

公开(公告)日：2013-04-11

申请号：US13624607

申请日：2012-09-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Tohru ISHITANI ,  Yoichi OSE ,  Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Tomihiro HASHIZUME ,  Muneyuki FUKUDA

IPC: H01J37/285 ,  H01J27/26

CPC classification number: H01J37/285 ,  B82Y15/00 ,  H01J27/024 ,  H01J27/26 ,  H01J37/08 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/0458 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0835 ,  H01J2237/1501 ,  H01J2237/188 ,  H01J2237/24514

Abstract: A gas field ionization ion source (GFIS) is characterized in that the aperture diameter of the extraction electrode can be set to any of at least two different values or the distance from the apex of the emitter to the extraction electrode can be set to any of at least two different values. In addition, solid nitrogen is used for cooling. It may be possible to not only let divergently emitted ions go through the aperture of the extraction electrode but also, in behalf of differential pumping, reduce the diameter of the aperture. In addition, it may be possible to reduce the physical vibration of the cooling means. Consequently, it may be possible to provide a highly stable GFIS and a scanning charged particle microscope equipped with such a GFIS.

Abstract translation: 气体电离离子源（GFIS）的特征在于，提取电极的孔径可以被设置为至少两个不同的值中的任何一个，或者从发射极的顶点到引出电极的距离可以被设置为 至少两个不同的值。 此外，固体氮用于冷却。 可能不仅使发散的离子通过提取电极的孔径，而且代表差分泵浦，减小孔径的直径。 此外，可以减小冷却装置的物理振动。 因此，可以提供高度稳定的GFIS和装备有这种GFIS的扫描带电粒子显微镜。

公开(公告)号：US20200303152A1

公开(公告)日：2020-09-24

申请号：US16089281

申请日：2016-03-29

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takashi OHSHIMA ,  Hiroyuki MINEMURA ,  Yumiko ANZAI ,  Momoyo ENYAMA ,  Yoichi OSE ,  Toshihide AGEMURA

IPC: H01J37/073 ,  H01J37/22

Abstract: To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathode 101 with negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beam 13 generated from the photocathode by excitation light 12 irradiated through the excitation optical system onto a sample, the excitation optical system including a light source device 107 for the excitation light; and an optical modulation means 108 which is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.

公开(公告)号：US20190066966A1

公开(公告)日：2019-02-28

申请号：US16081372

申请日：2016-11-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshiaki KUSUNOKI ,  Tomihiro HASHIZUME ,  Keigo KASUYA ,  Takashi OHSHIMA ,  Yusuke SAKAI ,  Yoichi OSE ,  Noriaki ARAI

IPC: H01J37/073 ,  H01J9/02 ,  H01J37/28

Abstract: In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.

公开(公告)号：US20160300690A1

公开(公告)日：2016-10-13

申请号：US15035265

申请日：2014-11-05

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Akira IKEGAMI ,  Hideto DOHI ,  Hideyuki KAZUMI ,  Yoichi OSE ,  Naomasa SUZUKI ,  Momoyo ENYAMA ,  Ryuji NISHI ,  Akio TAKAOKA

IPC: H01J37/28 ,  H01J37/153 ,  H01J3/12 ,  H01J37/14

CPC classification number: H01J37/28 ,  H01J3/12 ,  H01J37/14 ,  H01J37/147 ,  H01J37/153 ,  H01J2237/15 ,  H01J2237/2611 ,  H01J2237/2814

Abstract: Provided is a charged-particle-beam device capable of simultaneously cancelling out a plurality of aberrations caused by non-uniform distribution of the opening angle and energy of a charged particle beam. The charged-particle-beam device is provided with an aberration generation lens for generating an aberration due to the charged particle beam passing off-axis, and a corrective lens for causing the trajectory of the charged particle beam to converge on the main surface of an objective lens irrespective of the energy of the charged particle beam. The main surface of the corrective lens is disposed at a crossover position at which a plurality of charged particle beams having differing opening angles converge after passing through the aberration generation lens.

Abstract translation: 提供一种带电粒子束装置，其能够同时消除由打开角度的非均匀分布和带电粒子束的能量引起的多个像差。 带电粒子束装置设有像差产生透镜，用于产生由于穿过离轴的带电粒子束造成的像差，以及校正透镜，用于使带电粒子束的轨迹会聚在 物镜不管带电粒子束的能量如何。 校正透镜的主表面设置在交叉位置，在该交叉位置处，具有不同开口角度的多个带电粒子束在通过像差产生透镜之后会聚。