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公开(公告)号：US20230359022A1
公开(公告)日：2023-11-09
申请号：US18196686
申请日：2023-05-12
申请人： HUAWEI TECHNOLOGIES CO., LTD. , FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： Frank Senger , Ulrich Hofmann , Stephan Marauska , Christian Janicke , Thomas Von Wantoch , Joerg Albers , Gunnar Wille , Yong Cao
CPC分类号： G02B26/101 , G02B26/0841 , G02B26/0858 , G02B26/085
摘要： The present disclosure provides a deflection device (100, 200, 300, 400) for use in a scanner. The deflection device (100, 200, 300, 400) includes a substrate (102, 202), a mirror (106, 206, 304, 404) and actuator means (110). The mirror (106, 206, 304, 404) arranged in a recess (104, 204, 306, 406) in the substrate (102, 202) by connector means (108) in such a way that it can rotate about at least two axes in an oscillatory manner. The actuator means (110) causes the mirror (106, 206, 304, 404) to oscillate. The actuator means (110) are arranged in one or more trenches (112A-D) in the substrate (102, 202) surrounding the recess (104, 204, 306, 406), in such a way that a change of shape of the actuator means (110) will cause a movement in the substrate (102, 202), thereby inducing oscillatory movement of the mirror (106, 206, 304, 404).
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公开(公告)号：US20230359019A1
公开(公告)日：2023-11-09
申请号：US18196678
申请日：2023-05-12
申请人： HUAWEI TECHNOLOGIES CO., LTD. , FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： Thomas Knieling , Ulrich Hofmann , Stephan Marauska , Berkan Zorlubas , Fabian Schwarz , Frank Senger , Yong Cao
CPC分类号： G02B26/0858 , H03H3/0073 , H03H9/1057
摘要： A micromechanical resonator wafer assembly includes an actuator wafer supporting an outer actuator layer. The outer actuator layer includes an oscillating part configured to be driven by an electrical drive signal. The micromechanical resonator wafer assembly further includes a device wafer mounted on top of the actuator wafer. The device wafer includes a plurality of inner actuators. Each of the inner actuators include an oscillation body configured to oscillate about one or more axes. The device wafer is physically connected to the actuator wafer such that each of the inner actuators forms with the outer actuator layer a coupled oscillation system for excitation of the oscillation body of the respective inner actuator. The micromechanical resonator wafer assembly provides external actuation of the oscillation body of each of the inner actuators by use of the outer actuator layer and hence, provides improved scan angles with fast start-up time.
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公开(公告)号：US10647915B2
公开(公告)日：2020-05-12
申请号：US16063606
申请日：2016-12-13
IPC分类号： C09K11/08 , G09F13/00 , F21K9/64 , H01L33/50 , B81C1/00 , C23C16/455 , G02F1/13357 , C23C16/04
摘要： A converter assembly for converting a primary light into a secondary light includes at least one element which has a light-converting structure with open pores and which is laterally held by a frame. The surfaces of both the light-converting structure as well as of the inner face of the frame are covered with a transparent layer such that each of the afore-mentioned elements forms a region in which a property of the incident light and preferably of the wavelength thereof is changed. In specific embodiments, the converter assembly can be part of display assemblies or of miniaturized components for example. There is also described a method for producing the converter assembly.
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4.发明申请公开(公告)号：US20150049374A1
公开(公告)日：2015-02-19
申请号：US14386744
申请日：2013-03-20
CPC分类号： G02B26/0833 , B32B37/16 , B32B38/0008 , B32B38/10 , B32B2307/416 , B32B2310/0875 , B32B2551/08 , G02B1/12 , G02B7/1815 , G02B7/1821
摘要： A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.
摘要翻译： 一种微镜系统，其包括芯片框架，至少一个弹簧元件和经由所述至少一个弹簧元件振荡地悬挂在所述芯片框架中的至少一个镜板。 芯片框架和至少一个弹簧元件包括至少一个微通道，其设置有用于引导流过冷却剂的入口开口和出口开口。
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公开(公告)号：US20150144795A1
公开(公告)日：2015-05-28
申请号：US14547581
申请日：2014-11-19
发明人： Ulrich Hofmann , Manfred Weiss , Joachim Janes , Frank Senger
CPC分类号： G01J5/047 , G01J5/045 , G01J5/0806 , G01J5/0837 , G01J5/084 , G01J5/0871 , G01J5/44 , G01J2005/0077
摘要： The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.
摘要翻译： 本发明涉及具有至少一个检测元件的放射线成像传感器，该检测元件在作为微机械谐振器的基板上实现并且吸收待检测的辐射。 谐振器被设置为具有激励装置的谐振振荡，并且利用检测装置检测在暴露于辐射下的检测元件的谐振频率的偏移。 辐射传感器的特征在于它包括具有单轴或多轴可倾斜扫描元件的扫描装置。 倾斜设备的设备意味着检测元件可用于检测来自不同方向的辐射。 成像传感器可以以紧凑的方式实现并且经济地制造。
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6.发明授权Device comprising a spring and an element suspended thereon, and method for manufacturing same 有权包括弹簧和悬挂在其上的元件的装置及其制造方法公开(公告)号：US09399573B2
公开(公告)日：2016-07-26
申请号：US14280154
申请日：2014-05-16
CPC分类号： B81B3/0027 , B81B3/0029 , B81B2201/042 , B81B2203/0109 , B81B2203/0163 , B81C1/00357 , B81C1/00626 , B81C2201/014 , H01L29/84
摘要： The invention relates to an MEMS structure with a stack made of different layers and a spring-and-mass system varying in its thickness which is formed of the stack, and wherein, starting from a back side of the stack and the substrate, at laterally different positions, the substrate while leaving the first semiconductor layer, or the substrate, the first etch-stop layer and the first semiconductor layer are removed, and to a method for manufacturing such a structure.
摘要翻译： 本发明涉及一种具有由不同层组成的叠层的MEMS结构，以及由堆叠形成的其厚度变化的弹簧和质量系统，并且其中，从堆叠和衬底的背侧开始，在侧向 不同的位置，离开第一半导体层的衬底，或衬底，第一蚀刻停止层和第一半导体层被去除，以及制造这种结构的方法。
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公开(公告)号：US09523848B2
公开(公告)日：2016-12-20
申请号：US14386744
申请日：2013-03-20
CPC分类号： G02B26/0833 , B32B37/16 , B32B38/0008 , B32B38/10 , B32B2307/416 , B32B2310/0875 , B32B2551/08 , G02B1/12 , G02B7/1815 , G02B7/1821
摘要： A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.
摘要翻译： 一种微镜系统，其包括芯片框架，至少一个弹簧元件和经由所述至少一个弹簧元件振荡地悬挂在所述芯片框架中的至少一个镜板。 芯片框架和至少一个弹簧元件包括至少一个微通道，其设置有用于引导流过冷却剂的入口开口和出口开口。
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公开(公告)号：US20150040368A1
公开(公告)日：2015-02-12
申请号：US14361392
申请日：2012-09-28
CPC分类号： G02B27/0006 , B81B2201/042 , B81C1/00317 , B81C1/00793 , G02B1/118 , G02B5/0242 , G02B5/0278 , G02B26/0833 , G02B26/0841 , Y10T29/49826
摘要： The method according to the invention is used for producing optical components, in particular covers for encapsulating micro-systems, wherein at least one reinforcing element, which is produced before being arranged, is arranged on a first substrate, as a result of which a stack is produced. This stack is heated after being connected to a second substrate, as a result of which the first substrate is deformed such that at least one region, covered by the reinforcing element, of the first substrate is moved and/or is inclined or the first substrate is brought into contact with the reinforcing element. In an alternative method according to the invention, the reinforcing element is arranged on the second substrate, wherein this stack is then connected to the first substrate. The first substrate is subsequently heated and deformed such that a region of the first substrate is brought into contact with the reinforcing element.
摘要翻译： 根据本发明的方法用于制造光学部件，特别是用于封装微系统的盖，其中在布置之前产生的至少一个加强元件布置在第一基板上，结果是堆叠 生产。 该叠层在与第二基板连接之后被加热，其结果是第一基板变形使得第一基板的被增强元件覆盖的至少一个区域移动和/或倾斜，或者第一基板 与增强元件接触。 在根据本发明的替代方法中，加强元件布置在第二基板上，其中该堆叠然后连接到第一基板。 随后第一衬底被加热和变形，使得第一衬底的区域与增强元件接触。
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公开(公告)号：US10665938B2
公开(公告)日：2020-05-26
申请号：US15727858
申请日：2017-10-09
发明人： Alfred Ebberg , Ulrich Hofmann , Winfried Schernus , Frank Senger
摘要： The invention relates to an antenna device having at least one antenna element. The antenna element is implemented so as to emit electromagnetic radiation in a beam direction advantageously at frequencies in the GHz range and/or receive same from a beam direction. In addition, the antenna element is arranged on a carrier element which is arranged relative to a holding element. In addition, the carrier element is movable relative to the holding element.
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公开(公告)号：US10041837B2
公开(公告)日：2018-08-07
申请号：US14547581
申请日：2014-11-19
发明人： Ulrich Hofmann , Manfred Weiss , Joachim Janes , Frank Senger
摘要： The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.
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