SCHOTTKY BARRIER DIODE AND METHOD OF MANUFACTURING THE SAME
    1.
    发明申请
    SCHOTTKY BARRIER DIODE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    肖特彼勒二极管及其制造方法

    公开(公告)号:US20140183554A1

    公开(公告)日:2014-07-03

    申请号:US14066460

    申请日:2013-10-29

    Abstract: A Schottky barrier diode includes: an n+ type silicon carbide substrate; an n− type epitaxial layer disposed on a first surface of the n+ type silicon carbide substrate and includes an electrode area and a terminal area positioned outside of the electrode area; a first trench and a second trench disposed on the n− type epitaxial layer in the terminal area; a p area disposed under the first trench and the second trench; a Schottky electrode disposed on the n− type epitaxial layer in the electrode area; and an ohmic electrode disposed on a second surface of the n+ type silicon carbide substrate, wherein the first trench and the second trench are adjacently positioned to form a step.

    Abstract translation: 肖特基势垒二极管包括:n +型碳化硅衬底; n型外延层,设置在n +型碳化硅基板的第一表面上,并且包括电极区域和位于电极区域外部的端子区域; 设置在所述端子区域中的所述n型外延层上的第一沟槽和第二沟槽; 设置在所述第一沟槽和所述第二沟槽下方的p区域; 设置在电极区域中的n型外延层上的肖特基电极; 以及设置在所述n +型碳化硅衬底的第二表面上的欧姆电极,其中所述第一沟槽和所述第二沟槽相邻地定位以形成台阶。

    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
    7.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20160172461A1

    公开(公告)日:2016-06-16

    申请号:US15051023

    申请日:2016-02-23

    Abstract: A semiconductor device includes: a plurality of n type pillar regions and an n− type epitaxial layer disposed on a first surface of an n++ type silicon carbide substrate; a p type epitaxial layer and an n+ region disposed on the plurality of n type pillar regions and the n−type epitaxial layer; a trench penetrating the n+ region and the p type epitaxial layer and disposed on the plurality of n type pillar regions and the n−type epitaxial layer; a gate insulating film disposed within the trench; a gate electrode disposed on the gate insulating film; an oxide film disposed on the gate electrode; a source electrode disposed on the p type epitaxial layer, the n+ region, and the oxide film; and a drain electrode disposed on a second surface of the n+ type silicon carbide substrate, wherein each corner portion of the trench is in contact with a corresponding n type pillar region.

    Abstract translation: 一种半导体器件包括:多个n型支柱区域和n型外延层,其设置在n ++型碳化硅衬底的第一表面上; p型外延层和n +区域,设置在多个n型支柱区域和n型外延层上; 穿过n +区的沟槽和p型外延层,并且设置在多个n型支柱区域和n型外延层上; 设置在所述沟槽内的栅极绝缘膜; 设置在所述栅极绝缘膜上的栅电极; 设置在栅电极上的氧化膜; 设置在p型外延层上的源电极,n +区和氧化膜; 以及设置在n +型碳化硅衬底的第二表面上的漏电极,其中沟槽的每个拐角部分与相应的n型柱状区域接触。

    SCHOTTKY BARRIER DIODE AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    SCHOTTKY BARRIER DIODE AND METHOD OF MANUFACTURING THE SAME 有权
    肖特彼勒二极管及其制造方法

    公开(公告)号:US20140183558A1

    公开(公告)日:2014-07-03

    申请号:US14098359

    申请日:2013-12-05

    Abstract: A schottky barrier diode includes: an n− type epitaxial layer that is disposed at a first surface of an n+ type silicon carbide substrate; a plurality of n type pillar areas that are disposed at the inside of the n− type epitaxial layer and that are disposed at a first portion of the first surface of the n+ type silicon carbide substrate; a p type area that is disposed at the inside of the n− type epitaxial layer and that is extended in a direction perpendicular to the n type pillar areas; a plurality of p+ areas in which the n− type epitaxial layer is disposed at a surface thereof and that are separated from the n type pillar areas and the p type area; a schottky electrode that is disposed on the n− type epitaxial layer and the p+ areas; and an ohmic electrode that is disposed at a second surface of the n+ type silicon carbide substrate.

    Abstract translation: 肖特基势垒二极管包括:n型外延层,其设置在n +型碳化硅衬底的第一表面; 多个n型支柱区域,其设置在n型外延层的内部,并且设置在n +型碳化硅衬底的第一表面的第一部分; p型区域,其设置在所述n型外延层的内部,并且在垂直于所述n型支柱区域的方向上延伸; 多个p +区域,其中n型外延层设置在其表面并且与n型支柱区域和p型区域分离; 设置在n型外延层和p +区域上的肖特基电极; 以及设置在n +型碳化硅衬底的第二表面的欧姆电极。

    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
    9.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 有权
    半导体器件及其制造方法

    公开(公告)号:US20140167071A1

    公开(公告)日:2014-06-19

    申请号:US14025789

    申请日:2013-09-12

    Abstract: A semiconductor device includes: a plurality of n type pillar regions and an n− type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate; a p type epitaxial layer and an n+ region disposed on the plurality of n type pillar regions and the n− type epitaxial layer; a trench penetrating the n+ region and the p type epitaxial layer and disposed on the plurality of n type pillar regions and the n− type epitaxial layer; a gate insulating film disposed within the trench; a gate electrode disposed on the gate insulating film; an oxide film disposed on the gate electrode; a source electrode disposed on the p type epitaxial layer, the n+ region, and the oxide film; and a drain electrode disposed on a second surface of the n+ type silicon carbide substrate, wherein each corner portion of the trench is in contact with a corresponding n type pillar region.

    Abstract translation: 半导体器件包括:n +型碳化硅衬底的第一表面上的多个n型支柱区域和n型外延层; p型外延层和n +区,设置在所述多个n型支柱区域和所述n型外延层上; 穿过n +区的沟槽和p型外延层,并且设置在多个n型支柱区域和n型外延层上; 设置在所述沟槽内的栅极绝缘膜; 设置在所述栅极绝缘膜上的栅电极; 设置在栅电极上的氧化膜; 设置在p型外延层上的源电极,n +区和氧化膜; 以及设置在n +型碳化硅衬底的第二表面上的漏电极,其中沟槽的每个拐角部分与相应的n型柱状区域接触。

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