公开(公告)号：US5528619A

公开(公告)日：1996-06-18

申请号：US436757

申请日：1995-05-08

申请人： Hansjoerg Bochum ,  Rolf Nowack ,  Hans Opower ,  Wolfram Schock ,  Klaus Wessel

发明人： Hansjoerg Bochum ,  Rolf Nowack ,  Hans Opower ,  Wolfram Schock ,  Klaus Wessel

IPC分类号： H01S3/03 ,  H01S3/0975 ,  H05H1/46 ,  H01S3/097

CPC分类号： H01S3/0315 ,  H01S3/0975 ,  H05H1/46

摘要： In order to produce a gas discharge structure for two-dimensionally extending gas discharges comprising a pair of electrodes including a first and a second electrode which have mutually facing electrode surfaces, a gas discharge space arranged between the electrode surfaces with a plasma gas provided therein and a high frequency source with which a current can be fed into the pair of electrodes for producing a plasma between the first and the second electrode, in such a way that wavelength dependent modulations of the field strength substantially no longer occur in the gas discharge space, it be proposed that, the electrode surface of the first electrode is divided into two partial electrode surfaces that are located adjacent to one another in this electrode surface but are electrically separated from one another, that the partial electrode surfaces have mutually facing edge regions which extend at a defined distance from one another, that the partial electrode surfaces be connected to two terminals of the high frequency source which are at different potentials in such a way that a surface current flows over one of the edge regions to and then over the other one and that the second electrode be at an intermediate potential which lies between that of the two partial electrodes.

摘要翻译： 为了产生用于二维延伸的气体放电的气体放电结构，包括一对电极，其包括具有相互面对的电极表面的第一和第二电极，设置在电极表面之间的气体放电空间，其中设置有等离子体气体， 电流可以被馈送到一对电极中以在第一和第二电极之间产生等离子体的高频源，使得在气体放电空间中基本上不再发生场强的波长依赖性调制， 要提出的是，第一电极的电极表面被分成两个部分电极表面，这两个部分电极表面在该电极表面中彼此相邻设置，但是彼此电分离，部分电极表面具有相互面对的边缘区域， 在彼此限定的距离处，部分电极表面被连接到 高频源的两个端子处于不同的电位，使得表面电流流过其中一个边缘区域并且然后超过另一个边缘区域，并且第二电极处于位于 两个部分电极。

公开(公告)号：US5936993A

公开(公告)日：1999-08-10

申请号：US961922

申请日：1997-10-31

申请人： Hans Opower ,  Rolf Nowack

发明人： Hans Opower ,  Rolf Nowack

IPC分类号： H01S3/063 ,  H01S3/081

CPC分类号： H01S3/063 ,  H01S3/081 ,  H01S3/005 ,  H01S3/0602 ,  H01S3/0813 ,  H01S3/083 ,  H01S3/2333 ,  H01S3/2383

摘要： In order to improve upon a laser system, comprising a laser-active medium which is arranged between mutually opposed waveguide surfaces of an optical waveguide and a resonator which by means of resonator mirrors defines a coherent resonator radiation field permeating the optical waveguide and from which a plurality of mutually coherent radiation fields issue, in such manner that higher laser output power levels can be attained it is proposed that the plurality of radiation fields are conducted as coupled-out radiation fields to a coupling element, and that the coupling element combines the plurality of radiation fields with a defined mutual phase relationship to form one single coherent output radiation field.

摘要翻译： 为了改进激光系统，包括布置在光波导的相互相对的波导表面和谐振器之间的激光活性介质，其通过谐振器反射镜限定穿透光波导的相干谐振器辐射场， 发出多个相互相干的辐射场，使得能够获得较高的激光输出功率电平的方式，提出将多个辐射场作为耦合的辐射场传导到耦合元件，并且耦合元件组合多个 具有确定的相互关系的辐射场形成一个单一的相干输出辐射场。

公开(公告)号：US5373525A

公开(公告)日：1994-12-13

申请号：US10830

申请日：1993-01-29

申请人： Rolf Nowack ,  Hans Opower

发明人： Rolf Nowack ,  Hans Opower

IPC分类号： H01S3/02 ,  H01S3/03 ,  H01S3/08

CPC分类号： H01S3/0315

摘要： In order to improve a wave guide laser comprising a wave guide arranged between two resonator mirrors and having an outer cylindrical wave guide surface and an inner cylindrical wave guide surface facing the outer surface and arranged within this outer surface in spaced relation thereto, the two surfaces together forming a wave guide having a radiation coherent in the entire wave guide and essentially expanding in axial direction, and a high-frequency excited and diffusion-cooled laser gas arranged between the wave guide surfaces, such that the high-power Laser beam can be outcoupled by an element which is constructionally simple to produce and inexpensive, it is suggested that the second resonator mirror be composed in azimuthal direction of a plurality of successive reflecting segments, that outcoupling openings for the laser radiation to be outcoupled be provided between the respective reflecting segments and that the entire radiation expanding in the wave guide be diffraction-coupled in azimuthal direction.

摘要翻译： 为了改进波导激光器，其包括布置在两个谐振器反射镜之间的波导，并且具有外圆柱形波导表面和面向外表面的内圆柱形波导表面并且以与其隔开的关系布置在该外表面内， 一起形成在整个波导中具有辐射相干并且在轴向上基本上扩展的波导，以及布置在波导表面之间的高频激发和扩散冷却的激光气体，使得大功率激光束可以 通过构造简单的制造和便宜的元件外耦合，建议将第二谐振镜组成在多个连续的反射段的方位角方向上，用于激光辐射的外耦合开口被提供在各个反射器之间 并且波导中扩展的整个辐射是衍射耦合 在方位角方向。

公开(公告)号：US5874929A

公开(公告)日：1999-02-23

申请号：US425123

申请日：1995-04-19

申请人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

发明人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

IPC分类号： G09F9/00 ,  B41J2/47 ,  G02F1/35 ,  G02F1/377 ,  G03F7/20 ,  H01S5/183 ,  H01S5/40 ,  H04N9/31 ,  G09G3/00 ,  H04N5/64

CPC分类号： G03F7/70391 ,  B41J2/473 ,  H04N9/3129 ,  G02F1/377 ,  G02F2001/3548 ,  H01S5/18305 ,  H01S5/4012

摘要： An image is produced in an image plane using a row of semiconductor laser emitters which provide a corresponding row of outlet spots as light sources. An optical projection system receives radiation from the outlet spots and the radiation on the image plane as one or more rows of images by virtue of the illumination of individual, adjacently located imaging spots. The optical projection system associates at least one outlet spot with each of the imaging spots, and simultaneously forms the image of the outlet spots of all of the semiconductor laser emitters of the row of light sources at the imaging spots associated therewith.

摘要翻译： 使用提供相应排出点作为光源的半导体激光发射器行在图像平面中产生图像。 光学投影系统通过单独的相邻位置的成像点的照射，从出射点和图像平面上的辐射接收作为一行或多行图像的辐射。 光学投影系统将至少一个出射点与每个成像点相关联，同时在与其相关联的成像点处形成该行光源的所有半导体激光发射器的出射点的图像。

公开(公告)号：US5492861A

公开(公告)日：1996-02-20

申请号：US112711

申请日：1993-08-26

申请人： Hans Opower

发明人： Hans Opower

IPC分类号： C23C14/00 ,  C23C14/22 ,  G03F7/16 ,  H01L21/203 ,  H01L21/268 ,  H01L21/283 ,  H01L21/285 ,  C23C14/14

CPC分类号： C23C14/048 ,  C23C14/28 ,  G03F7/16 ,  H01L21/2855 ,  Y10S148/093 ,  Y10S438/94

摘要： In order to provide a process for applying structured layers of a functional structure of a semiconductor component, with which structured layers of a functional structure of a semiconductor component can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components, it is suggested that a material film be arranged above a surface region of a process substrate to be provided with the structured layer, that the material film be acted upon on its side remote from the process substrate by a focus of a laser beam located in a defined position corresponding to the structured layer to be produced and that with the laser beam in the region of the focus the material from the material film migrate to the surface region.

摘要翻译： 为了提供一种用于施加半导体部件的功能结构的结构层的工艺，半导体部件的功能结构的结构层可以尽可能简单地制造，并且在质量上尽可能少的敏感性 的半导体部件，建议将材料膜布置在处理基板的表面区域之上，以提供结构化层，使材料膜通过焦点位于远离处理基板的一侧 激光束位于对应于要产生的结构化层的限定位置，并且激光束在聚焦区域中，材料膜的材料迁移到表面区域。

公开(公告)号：US4930138A

公开(公告)日：1990-05-29

申请号：US399030

申请日：1989-08-24

申请人： Hans Opower

发明人： Hans Opower

IPC分类号： H01S3/03 ,  H01S3/07 ,  H01S3/08

CPC分类号： H01S3/0315 ,  H01S3/076 ,  H01S3/08081

摘要： In order to improve an electrically excited, diffusion-cooled laser system comprising two wall surfaces slightly spaced from one another and forming an optical waveguide, the width of the wall surfaces being a multiple of the space between them and the surfaces enclosing between them a flow-free discharge chamber, and also comprising an optically unstable resonator having a resonator beam path travelling through at least part of the discharge chamber and extending lengthwise of a resonator axis as well as having an expansion transverse to the resonator axis extending as far as at least one laser beam exiting from the resonator, this transverse expansion extending transversely to a longitudinal direction of said waveguide and approximately parallel to said wall surfaces, such that the waveguide can be constructed with as large a surface area as possible without losing the beam quality of the beam exiting the waveguide, it is suggested that the resonator be followed by a laser amplifier, the amplifier beam path thereof travelling through an additional part of said discharge chamber.

摘要翻译： 为了改进电激发的扩散冷却激光系统，其包括彼此稍微间隔开并形成光波导的两个壁表面，壁表面的宽度是它们之间的空间和包围它们之间的表面的倍数 并且还包括光学不稳定的谐振器，其具有穿过至少部分放电室并且沿着谐振器轴线的纵向延伸的谐振器光束路径，并且具有横向于至少延伸的谐振器轴线的扩展 一个从谐振器出射的激光束，该横向膨胀横向于所述波导的纵向方向延伸并且大致平行于所述壁表面，使得波导可以被构造成具有尽可能大的表面积，而不会损失波导质量 光束离开波导，建议谐振器后面是激光放大器， 其放大器光束路径穿过所述放电室的附加部分。

公开(公告)号：US4611329A

公开(公告)日：1986-09-09

申请号：US654383

申请日：1984-09-25

申请人： Volker Ernst ,  Hans Opower

发明人： Volker Ernst ,  Hans Opower

IPC分类号： H01S3/03 ,  H01S3/038 ,  H01S3/041 ,  H01S3/097

CPC分类号： H01S3/03 ,  H01S3/038 ,  H01S3/041

摘要： Gas laser of circular cross section perpendicular to the direction of beam propagation, having an optical resonator. The laser has, for continuous or modulated continuous beam operation, a tube as the inner electrode (2), which is connected to a high-frequency voltage source. The outer electrode (4) likewise comprises a tube which is disposed coaxially with the inner electrode (2). Between the two electrodes (2, 4) is the annular excitation chamber (3). The tube wall serving as outer electrode (4) is provided with slot-like cavities (1) which are open toward the excitation chamber (3) and serve for the cooling of the gas therein.

摘要翻译： 具有垂直于光束传播方向的圆形截面的气体激光器，具有光学谐振器。 对于连续或调制的连续光束操作，激光器具有连接到高频电压源的作为内部电极（2）的管。 外电极（4）同样包括与内电极（2）同轴设置的管。 在两个电极（2,4）之间是环形激励室（3）。 用作外部电极（4）的管壁设置有朝向激发室（3）开口并用于冷却其中的气体的槽状空腔（1）。

公开(公告)号：US08811665B2

公开(公告)日：2014-08-19

申请号：US13332467

申请日：2011-12-21

申请人： Hans Opower ,  Klaus Juenger

发明人： Hans Opower ,  Klaus Juenger

IPC分类号： G06K9/00 ,  G03F7/20 ,  G03F9/00

CPC分类号： G03F7/70791 ,  G03F9/00

摘要： A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.

摘要翻译： 提供了一种用于板状物体的处理系统，其具有曝光装置和具有用于接收物体的物体载体表面的物体载体。 曝光装置和载体可相对于彼此移动，使得物体相对于载体的精确位置是可确定的。 提供一种边缘检测装置，其包括具有照明区域的至少一个边缘照明单元，在该边缘照明单元中位于相应物体边缘区域中的物体边缘具有从载体的侧面引导到其上的光。 至少一个边缘图像检测单元设置在与载体相对的一侧的物体侧，边缘图像检测单元将位于照明区域中的物体边缘的边缘部分成像为边缘图像，使得各个边缘图像是 在其相对于载体的确切位置可检测。

公开(公告)号：US07652750B2

公开(公告)日：2010-01-26

申请号：US11392970

申请日：2006-03-28

申请人： Hans Opower ,  Stefan Scharl

发明人： Hans Opower ,  Stefan Scharl

IPC分类号： G03B27/52

CPC分类号： G03F7/7005 ,  G03F7/70383 ,  G03F7/704

摘要： A lithography exposure device is provided which includes a mounting device for the layer sensitive to light, an exposure unit with several laser radiation sources, an optical focusing means associated with the laser radiation sources, a movement unit for generating a relative movement between the optical focusing means and the mounting device, and a control for controlling intensity and position of exposure spots so that exposed structures which are as precisely structured as possible can be produced. A laser radiation field propagating in the direction of the light-sensitive layer generates each of the exposure spots from respective focal points and has a power density which leads in the conversion area in the light-sensitive layer to formation of a channel penetrating the light-sensitive layer with an index of refraction increased in relation to its surroundings by the Kerr effect and which guides the laser radiation field in a spatially limited manner.

摘要翻译： 提供了一种光刻曝光装置，其包括用于对光敏感的层的安装装置，具有若干激光辐射源的曝光单元，与激光辐射源相关联的光学聚焦装置，用于在光学聚焦之间产生相对运动的移动单元 装置和安装装置，以及用于控制曝光点的强度和位置的控制，使得可以产生尽可能精确构造的暴露结构。 在感光层的方向上传播的激光辐射场从各个焦点产生每个曝光点，并且具有在感光层的转换区域中引起的功率密度，从而形成穿透光敏层的通道， 具有折射率的敏感层相对于其周围环境通过克尔效应增加，并以空间有限的方式引导激光辐射场。

公开(公告)号：US20060244943A1

公开(公告)日：2006-11-02

申请号：US11406049

申请日：2006-04-17

申请人： Hans Opower ,  Stefan Scharl

发明人： Hans Opower ,  Stefan Scharl

IPC分类号： G03B27/58

CPC分类号： G03F7/70391 ,  G03F7/704 ,  G03F7/70858

摘要： In an exposure system for substrate members which bear a photosensitive coating on a substrate surface, comprising a machine frame, a substrate carrier bearing the substrate member and an exposure device, wherein the substrate member and the exposure device can be moved relative to one another such that the photosensitive coating can be exposed as a result of this relative movement, it is suggested for an exposure of the photosensitive coating which is as precise as possible that the exposure device have an optics slide which can be moved in the second direction and on which an optical imaging device for the exposure of the substrate member is arranged, and that the exposure device have a light source unit which is arranged on the machine frame separately from the optics slide and has a plurality of light sources, the radiation of which can be coupled into the optical imaging device.

摘要翻译： 在用于在基片表面上承载感光涂层的基片部件的曝光系统中，包括机架，承载基片部件的基片载体和曝光装置，其中基片部件和曝光装置可相对于彼此移动， 由于这种相对运动，感光涂层可能被曝光，所以建议使感光涂层的曝光尽可能精确，使得曝光装置具有可沿第二方向移动的光学滑块，并且其上 布置用于曝光基板构件的光学成像装置，并且曝光装置具有与光学滑块分开布置在机架上的光源单元，并且具有多个光源，其辐射可以是 耦合到光学成像装置中。