Method for manufacturing magnetoresistive element
    8.
    发明申请
    Method for manufacturing magnetoresistive element 有权
    制造磁阻元件的方法

    公开(公告)号:US20070092639A1

    公开(公告)日:2007-04-26

    申请号:US11583968

    申请日:2006-10-20

    IPC分类号: B05D5/12

    摘要: There is provided a method for manufacturing a magnetoresistive element having a magnetization pinned layer, a magnetization free layer, and a spacer layer including an insulating layer arranged between the magnetization pinned layer and the magnetization free layer and current paths passing through the insulating layer. The method includes, in producing the spacer layer, depositing a first non-magnetic metal layer forming the current paths, depositing a second metal layer to be converted into the insulating layer on the first non-magnetic metal layer, and performing two stages of oxidation treatments in which a partial pressure of an oxidizing gas in a first oxidation treatment is set to 1/10 or less of a partial pressure of an oxidizing gas in a second oxidation treatment, and the second metal layer being irradiated with an ion beam or a RF plasma of a rare gas in the first oxidation treatment.

    摘要翻译: 提供了一种用于制造具有磁化钉扎层,磁化自由层和包括布置在磁化钉扎层和磁化自由层之间的绝缘层和穿过绝缘层的电流路径的间隔层的磁阻元件的方法。 该方法包括在制造间隔层时,沉积形成电流路径的第一非磁性金属层,在第一非磁性金属层上沉积待转换成绝缘层的第二金属层,并进行两个阶段的氧化 将第一氧化处理中的氧化气体的分压设定为第二氧化处理中的氧化气体的分压的1/10以下的处理,将第二金属层照射离子束或 RF等离子体中的稀有气体进行第一次氧化处理。

    Magnetoresistive effect element, magnetic head and magnetic recording/reproducing apparatus
    10.
    发明授权
    Magnetoresistive effect element, magnetic head and magnetic recording/reproducing apparatus 有权
    磁阻效应元件,磁头和磁记录/重放装置

    公开(公告)号:US07808747B2

    公开(公告)日:2010-10-05

    申请号:US11702582

    申请日:2007-02-06

    IPC分类号: G11B5/39

    摘要: A magnetoresistive effect element includes a fixed magnetization layer; a free magnetization layer; a nonmagnetic spacer layer between the fixed magnetization layer and the free magnetization layer; and an insertion layer disposed on an opposite side of the free magnetization layer from the nonmagnetic spacer layer, wherein the first insulating layer has an oxide, a nitride, or an oxynitride including at least one kind of element selected from a group constituted of Al (aluminum), Si (silicon), Mg (magnesium), Ta (tantalum) and Zn (zinc) as a major constituent, and the insertion layer has an oxide, a nitride, or an oxynitride including at least one kind of element selected from a group constituted of Al (aluminum), Si (silicon), Mg (magnesium), Ta (tantalum) and Zn (zinc) as a major constituent.

    摘要翻译: 磁阻效应元件包括固定磁化层; 自由磁化层; 在固定磁化层和自由磁化层之间的非磁性间隔层; 以及插入层,其设置在所述自由磁化层与所述非磁性间隔层的相对侧上,其中,所述第一绝缘层具有氧化物,氮化物或氮氧化物,所述氧化物,氮化物或氮氧化物包含选自由Al组成的组中的至少一种元素 铝),Si(硅),Mg(镁),Ta(钽)和Zn(锌)作为主要成分,并且所述插入层具有氧化物,氮化物或氧氮化物,其包含至少一种选自 以Al(铝),Si(硅),Mg(镁),Ta(钽)和Zn(锌)为主要成分的基团。