公开(公告)号：US4933565A

公开(公告)日：1990-06-12

申请号：US216834

申请日：1988-07-08

申请人： Hiroshi Yamaguchi ,  Keiya Saito ,  Mitsuyoshi Koizumi ,  Akira Shimase ,  Satoshi Haraichi ,  Tateoki Miyauchi ,  Shinji Kuniyoshi ,  Susumu Aiuchi

发明人： Hiroshi Yamaguchi ,  Keiya Saito ,  Mitsuyoshi Koizumi ,  Akira Shimase ,  Satoshi Haraichi ,  Tateoki Miyauchi ,  Shinji Kuniyoshi ,  Susumu Aiuchi

IPC分类号： G01Q10/00 ,  G01Q70/14 ,  G03F1/00 ,  G03F1/22 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F1/74 ,  G03F1/22

摘要： The present invention relates to a method and apparatus for correcting defects of an X-ray mask which includes a focused ion beam used to irradiate at least a region having a defective portion of an X-ray mask having a protective film and eliminating the protective film; exposing a circuit pattern having a defective portion located under the region or setting this circuit pattern to the state near the exposure; detecting one of the secondary electrons, secondary ions, reflected electrons, or absorbing current generated from that region and detecting a true defective position. Then positioning the focused ion beam to the true defective position and irradiating the focused ion beam to the defective portion thereby correcting the defect.

公开(公告)号：US20100103397A1

公开(公告)日：2010-04-29

申请号：US12540879

申请日：2009-08-13

申请人： Ryouji Nemoto ,  Tomoaki Hayashi ,  Satoshi Uehara ,  Mitsuyoshi Koizumi

发明人： Ryouji Nemoto ,  Tomoaki Hayashi ,  Satoshi Uehara ,  Mitsuyoshi Koizumi

IPC分类号： G03B27/54 ,  G03B27/32

CPC分类号： G03B27/32 ,  G03F7/70275

摘要： A position of a chuck 10 is detected. The movements of the stages 5 and 7 are controlled according to a result of detecting the position of the chuck 10, so as to position the chuck 10. Further, a light receiving means 51 is disposed on the chuck 10 for receiving a light beam irradiated from a head 20a of a light beam irradiation device 20. The misalignment of the head 20a of the light beam irradiation device 20 is detected based on the received light beam. According to a result of detecting the misalignment, a coordinate of drawing data supplied to a DMD driving circuit 27 of each light beam irradiation device 20 is modified. Moreover, the drawing data with the modified coordinate is supplied to the DMD driving circuit 27 of each light beam irradiation device 20.

摘要翻译： 检测卡盘10的位置。 根据检测卡盘10的位置的结果来控制级5和7的运动，以便定位卡盘10.此外，光盘接收装置51设置在卡盘10上以接收照射的光束 来自光束照射装置20的头部20a。基于所接收的光束来检测光束照射装置20的头部20a的未对准。 根据检测到未对准的结果，修改提供给每个光束照射装置20的DMD驱动电路27的绘图数据的坐标。 此外，具有改变的坐标的绘制数据被提供给每个光束照射装置20的DMD驱动电路27。

公开(公告)号：US20100040964A1

公开(公告)日：2010-02-18

申请号：US12540858

申请日：2009-08-13

申请人： RYOUJI NEMOTO ,  Tomoaki Hayashi ,  Satoshi Uehara ,  Mitsuyoshi Koizumi

发明人： RYOUJI NEMOTO ,  Tomoaki Hayashi ,  Satoshi Uehara ,  Mitsuyoshi Koizumi

IPC分类号： G03F7/20 ,  G03B27/58

CPC分类号： G03F7/70791 ,  G03F7/70291 ,  G03F7/70425 ,  G03F7/70475 ,  G03F7/70508

摘要： A range of a coordinate of drawing data supplied to a digital micromirror device (DMD) driving circuit 27 of a light beam irradiation device 20 is determined to configure a bandwidth of a light beam irradiated from an irradiation optical system of the light beam irradiation device 20. The drawing data having the determined range of the coordinate is supplied to the DMD driving circuit 27 of the light beam irradiation device 20. Movement of a stage 7 is controlled to move a chuck 10 for only a distance less than the bandwidth of the light beam irradiated from the irradiation optical system of the light beam irradiation device 20 towards a direction perpendicular to a scanning direction of the substrate by the light beam of the light beam irradiation device 20, at each scanning, and a same region of the substrate is scanned multiple times.

摘要翻译： 确定提供给光束照射装置20的数字微镜装置（DMD）驱动电路27的绘制数据的坐标范围，以构成从光束照射装置20的照射光学系统照射的光束的带宽 具有确定的坐标范围的绘图数据被提供给光束照射装置20的DMD驱动电路27.阶段7的移动被控制以将卡盘10移动到仅小于光的带宽的距离 通过光束照射装置20的光束，在每次扫描时，从基板的照射光学系统向与基板的扫描方向正交的方向照射的光束和基板的相同区域被扫描 多次。

公开(公告)号：US06284119B1

公开(公告)日：2001-09-04

申请号：US09385025

申请日：1999-08-30

申请人： Hiroaki Machida ,  Yusuke Miyazaki ,  Mitsuyoshi Koizumi

发明人： Hiroaki Machida ,  Yusuke Miyazaki ,  Mitsuyoshi Koizumi

IPC分类号： G01N2726

CPC分类号： G01N27/44721

摘要： A DNA base sequencer including a gel electrophoretic means having tracks for electrophoresing fluorophore-labelled DNA fragments, a laser diode as a light source for illuminating said tracks with exciting laser light and a CCD sensor for detecting the fluorescence emitted from the illuminated DNA fragments, the laser diode has a control unit including a Peltier device for controlling the temperature of the laser diode, a Peltier device temperature setting generating means having a processor and a memory, and a temperature control circuit that generates a drive current to the Peltier device for controlling its temperature. The CCD sensor receives part of the exciting light from the laser diode as stray light and detects its wavelength. The Peltier device temperature setting generating means is such that, in accordance with the wavelength of stray light as detected periodically with said CCD sensor according to the program stored in said memory, it calculates a corrective value that adjusts the detected wavelength of stray light to the desired wavelength of exciting light that corresponds to the desired temperature setting and that an appropriate temperature setting signal is generated on the basis of said corrective value and the desired temperature setting and sent to the Peltier device temperature control circuit.

摘要翻译： 一种DNA碱基测序仪，包括具有用于电泳荧光团标记的DNA片段的轨道的凝胶电泳装置，激光二极管作为用激发激光照射所述轨道的光源和用于检测从照射的DNA片段发出的荧光的CCD传感器， 激光二极管具有包括用于控制激光二极管的温度的珀耳帖装置的控制单元，具有处理器和存储器的珀尔帖装置温度设定发生装置，以及向珀尔帖装置产生驱动电流以控制其的存储器的温度控制电路 温度。 CCD传感器接收来自激光二极管的激光的一部分作为杂散光并检测其波长。 珀耳帖装置温度设定发生装置使得根据存储在所述存储器中的程序与所述CCD传感器周期性地检测的杂散光的波长，计算校正值，该校正值将检测到的杂散光波长调整到 对应于所需温度设定的激励光的期望波长，以及基于所述校正值和期望温度设定产生适当的温度设定信号，并发送到珀尔帖器件温度控制电路。

公开(公告)号：US4614427A

公开(公告)日：1986-09-30

申请号：US611947

申请日：1984-05-18

申请人： Mitsuyoshi Koizumi ,  Yoshimasa Oshima ,  Nobuyuki Akiyama ,  Toshiaki Yachi

发明人： Mitsuyoshi Koizumi ,  Yoshimasa Oshima ,  Nobuyuki Akiyama ,  Toshiaki Yachi

IPC分类号： G01N21/88 ,  G01B11/30 ,  G01N21/21 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/027 ,  H01L21/66

CPC分类号： G01N21/94 ,  G01N21/21 ,  G01N21/956

摘要： An automatic contaminants detection apparatus comprises a polarized laser beam source, a polarized laser beam irradiation optical system having irradiation angle switching means for switching an irradiation angle depending on the presence or absence of a pattern on a sample surface to irradiate the polarized laser beam emitted by the polarized laser beam source to the sample surface with an angle of grazing, a detector for detecting condensed scattered or reflected lights of the laser beam from the sample surface with or without interleave of an analyzer, and analyzer switching means for inserting or removing the analyzer into or from a detection light path of the detector depending on the presence or absence of the pattern on the sample surface. The apparatus can detect contaminants on the patterned or non-patterned sample surface with a high sensitivity.

摘要翻译： 一种自动污染物检测装置，包括：偏振激光束源，具有照射角度切换装置的偏光激光束照射光学系统，用于根据样品表面上有无图案切换照射角度，照射由 将偏振激光束源以放牧角度放置到样品表面，用于检测来自样品表面的来自样品表面的聚集的散射或反射光的检测器，具有或不具有分析仪的交错;以及分析器切换装置，用于插入或移除分析器 取决于样品表面上图案的存在或不存在，进入或离开检测器的检测光路。 该装置可以以高灵敏度检测图案化或非图案化样品表面上的污染物。

公开(公告)号：US06172709B2

公开(公告)日：2001-01-09

申请号：US08990089

申请日：1997-12-12

申请人： Shiro Yamano ,  Mitsuyoshi Koizumi ,  Makoto Amano ,  Akira Tamura

发明人： Shiro Yamano ,  Mitsuyoshi Koizumi ,  Makoto Amano ,  Akira Tamura

IPC分类号： H04N5232

CPC分类号： H04N5/23209 ,  H04N5/23212

摘要： A video camera system comprises a lens block and a camera block which are attachable and detachable through a block coupling mechanism to and from each other. The detachable lens block incorporates a focus lens drive mechanism for driving a focus lens and an autofocus control section for executing autofocus control. The autofocus control section receives a composite video signal obtained by processing a video signal from an image pickup device in a signal processing section of the camera block. The autofocus control section produces a focus control signal on the basis of the composite video signal to control the focus lens drive mechanism for the execution of the autofocus control. In addition, the detachable lens block is composed of an iris drive mechanism for optically adjusting an aperture of a lens and an autoiris control section for automatically controlling the iris drive mechanism, so that automatic iris control is executed on the basis of the composite video signal outputted from the camera block. This video camera system can decrease the number of connecting lines to be provided between the detachable lens block and the camera block.

摘要翻译： 摄像机系统包括透镜块和相机块，其可通过块耦合机构彼此附接和拆卸。 可拆卸透镜块包括用于驱动聚焦透镜的聚焦透镜驱动机构和用于执行自动对焦控制的自动对焦控制部。 自动对焦控制部分接收通过处理来自相机块的信号处理部分中的图像拾取装置的视频信号而获得的复合视频信号。 自动对焦控制部分根据复合视频信号产生聚焦控制信号，以控制用于执行自动对焦控制的聚焦透镜驱动机构。 此外，可拆卸透镜块由用于光学调节透镜孔径的光圈驱动机构和用于自动控制光圈驱动机构的自动控制部分组成，从而基于复合视频信号执行自动光圈控制 从相机块输出。 该摄像机系统可以减少可拆卸透镜块和相机块之间提供的连接线的数量。

公开(公告)号：US4952058A

公开(公告)日：1990-08-28

申请号：US184787

申请日：1988-04-22

申请人： Minori Noguchi ,  Hiroaki Shishido ,  Mitsuyoshi Koizumi

发明人： Minori Noguchi ,  Hiroaki Shishido ,  Mitsuyoshi Koizumi

IPC分类号： G01N21/94 ,  G01N21/956 ,  G03F7/20

CPC分类号： G03F7/70358 ,  G01N21/94 ,  G01N21/956 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N21/95623

摘要： A system for detecting abnormal patterns in a surface pattern on the surface of a sample wherein, when the abnormal pattern has a portion smaller than the surface pattern, the light for illuminating the sample is stopped down to an opening so that the abnormal pattern can be distinguished over the surface pattern, the surface pattern is limited to a predetermined opening by the illumination light to form an image on a detector, and the surface pattern detected by the detector is processed to detect the abnormal pattern in the surface pattern. Further, the plurality of light rays having good directivity are illuminated onto a point on the surface of the sample from dissimilar directions maintaining a predetermined angle of incidence, the detect signals are separated to be corresponded to said light rays, and the above processing is carried out to enhance the precision of detection.

摘要翻译： 一种用于检测样品表面上的异常图案的系统，其中当异常图案具有小于表面图案的部分时，用于照亮样品的光被停止到开口，使得异常图案可以 区分表面图案，通过照明光将表面图案限于预定的开口，以在检测器上形成图像，并且处理由检测器检测的表面图案以检测表面图案中的异常图案。 此外，具有良好方向性的多个光线沿保持预定入射角的不同方向被照射在样品表面上的点上，检测信号被分离成与所述光线相对应，并且进行上述处理 出来提高检测精度。

公开(公告)号：US4922308A

公开(公告)日：1990-05-01

申请号：US67136

申请日：1987-06-29

申请人： Minori Noguchi ,  Mitsuyoshi Koizumi ,  Hiroaki Shishido ,  Sachio Uto ,  Yoshimasa Ohshima

发明人： Minori Noguchi ,  Mitsuyoshi Koizumi ,  Hiroaki Shishido ,  Sachio Uto ,  Yoshimasa Ohshima

IPC分类号： G01N21/94

CPC分类号： G01N21/94 ,  G01N2021/4792

摘要： A method of and an apparatus for detecting a fine foreign substance in which the surface of a specimen is illuminated with linearly-polarized laser beam to detect light scattered from the surface and having passed through a polarization filter, the back side of the specimen is illuminated with light from a light source such as a mercury lamp to obtain the light and darkness information or phase information on the specimen surface by transmitted light from the specimen, and fine massive and filmy foreign substances on the specimen surface are detected on the basis of information given by the scattered light and transmitted light.

摘要翻译： 一种检测细微异物的方法和装置，其中用线性偏振激光束照射试样的表面，以检测从表面散射并穿过偏振滤光器的光，使样本的背面被照亮 来自诸如汞灯的光源的光从样品透射光获得样品表面上的光和黑信息或相位信息，并且根据信息检测样品表面上的细小块状和薄膜异物 由散射光和透射光给出。

公开(公告)号：US4541715A

公开(公告)日：1985-09-17

申请号：US456296

申请日：1983-01-06

申请人： Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

发明人： Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

IPC分类号： G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G01N21/00

CPC分类号： G03F7/70866 ,  G01N21/94 ,  G03F7/70916 ,  G01N21/47 ,  G01N2201/1085

摘要： An apparatus for detecting contaminants depositing on the reticle of a reduction projection mask aligner comprises a laser spot projector which conducts a laser beam to the light path upstream of the condenser lens of the aligner such that the laser beam is in the same direction as of the exposure light beam. The laser spot projector projects the laser beam from above the reticle through the condenser lens so as to form a laser spot on the upper surface of the reticle. A laser spot scanner which scans the entire area of the reticle by the laser spot projected on to the reticle by the laser spot projector, and a photoelectric detector which receives the scattered light emitted aslant on the reticle surface, whereby a contaminant on the reticle is detected in accordance with the signal produced by the detector.

摘要翻译： 用于检测沉积在掩模版上的污染物的还原投影掩模对准器的装置包括：激光点投影仪，其将激光束传导到对准器的聚光透镜上游的光路，使得激光束处于与 曝光光束。 激光点投影仪将激光束从光罩上方投射聚光透镜，以在掩模版的上表面上形成激光斑点。 一种激光点扫描器，其通过由激光点投影仪投射在掩模版上的激光光斑扫描掩模版的整个区域，以及光电检测器，其接收在光罩表面上倾斜发射的散射光，由此掩模版上的污染物为 根据由检测器产生的信号检测。

公开(公告)号：US20100167431A1

公开(公告)日：2010-07-01

申请号：US12571559

申请日：2009-10-01

申请人： Hironaru YAMAGUCHI ,  Mikio Hongo ,  Mitsuyoshi Koizumi ,  Masaki Araki

发明人： Hironaru YAMAGUCHI ,  Mikio Hongo ,  Mitsuyoshi Koizumi ,  Masaki Araki

IPC分类号： H01L21/66 ,  H01L21/306

CPC分类号： H01L31/046 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/40 ,  B23K26/702 ,  B23K2103/172 ,  Y02E10/50

摘要： A laser processing apparatus which achieves both shorter TAT and reduction in processing defects. In the apparatus, a laser radiation section, an undulation measurement section for measuring undulation of a substrate or a film thickness measuring section for measuring the thickness of a thin film formed on the substrate, and an optical inspection section for optically inspecting grooves formed by laser-processing the thin film on the substrate are fixed so that their positional relationship is kept constant.

摘要翻译： 实现了较短的TAT和减少加工缺陷的激光加工设备。 在该装置中，激光照射部，用于测量基板波动的波动测量部或用于测量在基板上形成的薄膜的厚度的膜厚测量部，以及用于光学检查由激光形成的凹槽的光学检查部 处理基板上的薄膜是固定的，使得它们的位置关系保持恒定。