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    Carbon nanotube structures made using catalyst islands
    1.
    发明授权
    Carbon nanotube structures made using catalyst islands 有权
    使用催化剂岛形成的碳纳米管结构

    公开(公告)号：US06346189B1

    公开(公告)日：2002-02-12

    申请号：US09133948

    申请日：1998-08-14

    申请人： Hongjie Dai ,  Calvin F. Quate ,  Hyongsok Soh ,  Jing Kong

    发明人： Hongjie Dai ,  Calvin F. Quate ,  Hyongsok Soh ,  Jing Kong

    IPC分类号： G01B528

    CPC分类号： B82B1/00 ,  B82B3/00 ,  C01B32/162 ,  C01B2202/02 ,  G01N27/127 ,  G01Q70/12 ,  G11C13/025 ,  G11C17/16 ,  G11C17/165 ,  Y10S427/102 ,  Y10S977/742 ,  Y10S977/746 ,  Y10S977/842 ,  Y10S977/843 ,  Y10S977/876 ,  Y10S977/894 ,  Y10S977/895 ,  Y10S977/957 ,  Y10T428/2918 ,  Y10T428/2975

    摘要： The present invention includes several nanotube structures which can be made using catalyst islands disposed on a substrate (e.g. silicon, alumina, or quartz) or on the free end of an atomic force microscope cantilever. The catalyst islands are capable of catalyzing the growth of carbon nanotubes from carbon containing gases (e.g. methane). The present invention includes an island of catalyst material (such as Fe2O3) disposed on the substrate with a carbon nanotube extending from the island. Also included in the present invention is a pair of islands with a nanotube extending between the islands, electrically connecting them. Conductive metal lines connected to the islands (which may be a few microns on a side) allows for external circuitry to connect to the nanotube. Such a structure can be used in many different electronic and microelectromechanical devices. For example, a nanotube connected between two islands can function as a resonator if the substrate beneath the nanotube is etched away. Also, the present invention includes a catalyst particle disposed on the free end of an AFM cantilever and having a nanotube extending from the particle. The nanotube can be used as the scanning tip of the AFM as is know in the art.

    摘要翻译： 本发明包括可以使用设置在基底（例如硅，氧化铝或石英）上的催化剂岛或者在原子力显微镜悬臂的自由端上制造的几种纳米管结构。 催化剂岛能够催化来自含碳气体（例如甲烷）的碳纳米管的生长。 本发明包括设置在具有从岛延伸的碳纳米管的基板上的催化剂材料岛（例如Fe 2 O 3）。 本发明还包括一对岛，其中纳米管在岛之间延伸，将它们电连接。 连接到岛的导电金属线（其可以在一侧可以是几微米）允许外部电路连接到纳米管。 这种结构可以用于许多不同的电子和微机电装置。 例如，如果纳米管下方的衬底被蚀刻掉，则连接在两个岛之间的纳米管可用作谐振器。 此外，本发明包括设置在AFM悬臂的自由端上并具有从颗粒延伸的纳米管的催化剂颗粒。 如本领域所知，纳米管可以用作AFM的扫描尖端。

    Method of etching a pattern on a substrate using a scanning probe microscope
    2.
    发明授权
    Method of etching a pattern on a substrate using a scanning probe microscope 失效
    使用扫描探针显微镜对基板上的图案进行蚀刻的方法

    公开(公告)号：US5618760A

    公开(公告)日：1997-04-08

    申请号：US311763

    申请日：1994-09-23

    申请人： Hyongsok Soh ,  Stephen C. Minne ,  Calvin F. Quate

    发明人： Hyongsok Soh ,  Stephen C. Minne ,  Calvin F. Quate

    IPC分类号： B81B1/00 ,  B81B3/00 ,  B82B3/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q70/16 ,  G01Q80/00 ,  G03F7/20 ,  H01L21/31 ,  H01L21/465

    CPC分类号： G03F7/2049 ,  B82Y35/00 ,  G01Q20/04 ,  G01Q60/30 ,  G03F7/70358 ,  G03F7/70375 ,  Y10S148/046 ,  Y10S438/947 ,  Y10S438/949 ,  Y10S977/856

    摘要： A scanning probe microscope is used to pattern a layer of resist, and the pattern is transferred to a substrate. First, an underlayer formed of, for example, polyimide and a top layer formed of, for example, amorphous silicon are deposited on the substrate. A pattern is formed on the top layer using the tip of the cantilever in a scanning probe microscope. The pattern may consist of an oxide formed by an electric field at the cantilever tip. The top layer is then etched using the pattern as a mask and using an etchant that is selective against the underlayer. The underlayer is then etched using an etchant that is selective against the top layer and substrate. The substrate is etched with an etchant that removes the top layer but is selective against the underlayer. Finally, the underlayer is removed.

    摘要翻译： 使用扫描探针显微镜对抗蚀剂层进行图案化，并将图案转印到基底上。 首先，由例如聚酰亚胺和由例如非晶硅形成的顶层形成的底层沉积在基板上。 在扫描探针显微镜中使用悬臂的尖端在顶层上形成图案。 该图案可以由在悬臂尖端处的电场形成的氧化物组成。 然后使用图案作为掩模蚀刻顶层，并使用对底层有选择性的蚀刻剂。 然后使用对顶层和衬底选择性的蚀刻剂来蚀刻底层。 用蚀刻剂蚀刻衬底，除去顶层，但是对底层是选择性的。 最后，底层被去除。

    Packaged MEMS device and method for making the same
    9.
    发明授权
    Packaged MEMS device and method for making the same 有权
    封装的MEMS器件及其制造方法

    公开(公告)号：US06519075B2

    公开(公告)日：2003-02-11

    申请号：US09769192

    申请日：2001-01-25

    申请人： Dustin W. Carr ,  Dennis S. Greywall ,  Sungho Jin ,  Flavio Pardo ,  Hyongsok Soh

    发明人： Dustin W. Carr ,  Dennis S. Greywall ,  Sungho Jin ,  Flavio Pardo ,  Hyongsok Soh

    IPC分类号： G02B2600

    CPC分类号： G02B6/266 ,  B81B2201/042 ,  B81C3/002 ,  B81C2203/035 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B26/0841 ,  G02B2006/12104

    摘要： A MEMs device comprises a component layer including a frame structure and at least one component movably coupled to the frame and an actuator layer including at least one conductive path and at least one actuator for moving the component. The component layer and the actuator layer are bonded together with solder or other materials in lateral alignment. Advantageously the layers are provided with metallization pads and are bonded together in lateral alignment with predetermined vertical gap spacing by solder bonds between the pads. In a preferred embodiment the MEMs device, however bonded, comprises a component layer, an actuator layer and an intervening spacer. The spacer provides the walls of a cavity between the component and the pertinent actuators to permit movement of the component. The walls cover the bulk of the peripheral boundary of the cavity to provide aerodynamic isolation. Advantageously the walls are conductive to provide electrostatic isolation. The device has particular utility in optical cross connection, variable attenuation and power gain equalization.

    摘要翻译： MEM器件包括包括框架结构的组件层和可移动地联接到框架的至少一个部件和包括至少一个导电路径的致动器层和用于移动部件的至少一个致动器。 组件层和致动器层用焊料或其它材料以横向对准结合在一起。 有利地，这些层设置有金属化焊盘，并且通过焊盘之间的焊接接合以预定的垂直间隙间隔横向对准地结合在一起。 在优选实施例中，MEM装置（然而粘合的）包括部件层，致动器层和中间间隔件。 间隔件提供组件和相关致动器之间的空腔的壁，以允许部件移动。 墙壁覆盖了空腔的周边边界的大部分，以提供空气动力隔离。 有利地，壁是导电的以提供静电隔离。 该器件在光交叉连接，可变衰减和功率增益均衡方面具有特殊的用途。

    Target Detection Using a Single-Stranded, Self-Complementary, Triple-Stem DNA Probe
    10.
    发明申请
    Target Detection Using a Single-Stranded, Self-Complementary, Triple-Stem DNA Probe 审中-公开
    使用单链，自我互补的三重DNA探针进行目标检测

    公开(公告)号：US20110256637A1

    公开(公告)日：2011-10-20

    申请号：US13123577

    申请日：2009-10-13

    申请人： Hyongsok Soh ,  Yi Xiao

    发明人： Hyongsok Soh ,  Yi Xiao

    IPC分类号： G01N33/53 ,  C07H21/00 ,  C40B40/06

    CPC分类号： C12Q1/6827 ,  C12Q1/6818 ,  C12Q1/6839 ,  C12Q2565/607 ,  C12Q2565/519 ,  C12Q2537/119 ,  C12Q2565/1015

    摘要： Provided are novel single-stranded oligonucleotide probes that have a triple-stem configuration in the absence of target binding to the target binding sequence. The probes also have a fluorophore and a quencher. In the absence of target binding to the target binding sequence, these single-stranded oligonucleotide probes are capable of forming self-complementary duplexes such that the probe is in the triple-stem configuration and the fluorophore is positioned adjacent the quencher. In the presence of target binding to the target binding sequence, formation of the self-complementary duplexes is inhibited such that the probe is configured to position the fluorophore away from the quencher such that a signal of the fluorophore is detectable. Also provided are methods of using the probes.

    摘要翻译： 提供的是在不与靶结合序列靶结合的情况下具有三原子构型的新型单链寡核苷酸探针。 探针也具有荧光团和猝灭剂。 在目标结合靶结合序列不存在的情况下，这些单链寡核苷酸探针能够形成自身互补的双链体，使得探针处于三重茎构型并且荧光团邻近猝灭剂定位。 在目标结合靶结合序列的存在下，抑制自身互补双链体的形成，使得探针被配置为使荧光团远离猝灭剂使得荧光团的信号是可检测的。 还提供了使用探针的方法。