Wiring substrate
    1.
    发明授权

    公开(公告)号:US11622446B2

    公开(公告)日:2023-04-04

    申请号:US17359805

    申请日:2021-06-28

    申请人: IBIDEN CO., LTD.

    摘要: A wiring substrate includes a resin insulating layer, a conductor pad formed on the resin insulating layer, a coating insulating layer formed on the resin insulating layer such that the coating insulating layer is covering the conductor pad, and a metal post connected to the conductor pad and protruding from the coating insulating layer such that a gap is formed between the metal post and the conductor pad at a peripheral edge of the metal post. The coating insulating layer is formed such that the coating insulating layer has an interposed portion formed in the gap between the metal post and the conductor pad at the peripheral edge of the metal post.

    Method for manufacturing wiring substrate

    公开(公告)号:US12033927B2

    公开(公告)日:2024-07-09

    申请号:US17361522

    申请日:2021-06-29

    申请人: IBIDEN CO., LTD.

    IPC分类号: H01L21/48 H01L23/498

    CPC分类号: H01L23/49822 H01L21/4857

    摘要: A method for manufacturing a wiring substrate includes forming multiple conductor pads on an insulating layer such that the conductor pads include multiple first conductor pads and multiple second conductor pads, forming multiple protruding parts on surfaces of the first conductor pads of the conductor pads, respectively, forming a resin layer such that the resin layer covers the insulating layer and the conductor pads, exposing, from the resin layer, end portions of the protruding parts on the opposite side with respect to the insulating layer, forming, in the resin layer, multiple openings such that the openings expose surfaces of the second conductor pads of the conductor pads, respectively; and forming a coating film on the surfaces of the second conductor pads exposed in the openings.