IMPRINTING APPARATUS
    1.
    发明申请

    公开(公告)号:US20220088834A1

    公开(公告)日:2022-03-24

    申请号:US17541089

    申请日:2021-12-02

    Abstract: An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

    ARRAYS INCLUDING A RESIN FILM AND A PATTERNED POLYMER LAYER

    公开(公告)号:US20180179575A1

    公开(公告)日:2018-06-28

    申请号:US15848640

    申请日:2017-12-20

    Abstract: An example of an array includes a support, a cross-linked epoxy polyhedral oligomeric silsesquioxane (POSS) resin film on a surface of the support, and a patterned hydrophobic polymer layer on the cross-linked epoxy POSS resin film. The patterned hydrophobic polymer layer defines exposed discrete areas of the cross-linked epoxy POSS resin film, and a polymer coating is attached to the exposed discrete areas. Another example of an array includes a support, a modified epoxy POSS resin film on a surface of the support, and a patterned hydrophobic polymer layer on the modified epoxy POSS resin film. The modified epoxy POSS resin film includes a polymer growth initiation site, and the patterned hydrophobic polymer layer defines exposed discrete areas of the modified epoxy POSS resin film. A polymer brush is attached to the polymer growth initiation site in the exposed discrete areas.

    IMPRINTING APPARATUS
    5.
    发明申请

    公开(公告)号:US20250114980A1

    公开(公告)日:2025-04-10

    申请号:US18964377

    申请日:2024-11-30

    Abstract: An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

    METHODS FOR MAKING FLOW CELLS
    10.
    发明申请

    公开(公告)号:US20240375075A1

    公开(公告)日:2024-11-14

    申请号:US18658753

    申请日:2024-05-08

    Applicant: ILLUMINA, INC.

    Abstract: In an example of a method of making a flow cell, a functional material is deposited over a resin layer including depressions separated by interstitial regions. The resin layer includes an ultraviolet (UV) light blocking additive. The depressions overlie a first portion of the resin layer having a first thickness, and the interstitial regions overlie a second portion of the resin layer having a second thickness that is greater than the first thickness. The functional material is susceptible to interaction with the resin layer when exposed to UV light. A predetermined UV light dosage is directed through the resin layer, whereby the functional material within the depressions is exposed to the UV light and attaches to the resin layer within the depressions. The functional material overlying the interstitial regions is blocked from being exposed to the UV light by the second resin portion.

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