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    Ultrashort laser micro-texture printing
    1.
    发明授权
    Ultrashort laser micro-texture printing 有权
    超短激光微纹理印刷

    公开(公告)号：US08995029B2

    公开(公告)日：2015-03-31

    申请号：US14198434

    申请日：2014-03-05

    Applicant: IMRA America, inc.

    Inventor： Lawrence Shah ,  Martin E. Fermann

    IPC: H04N1/04 ,  G06K15/12 ,  B41J2/44 ,  B41J2/47 ,  H04N1/40 ,  H04N1/407

    CPC classification number: G06K15/1209 ,  B41J2/442 ,  B41J2/471 ,  G06K15/129 ,  H04N1/40037 ,  H04N1/407

    Abstract: Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

    Abstract translation: 公开了用于提供固体基底的激光纹理化的系统和方法。 纹理可以用于提供可从包括钢，铝，玻璃和硅的基底获得的灰度图像。 在一些实施例中，可以通过在衬底上形成随机，周期性和/或半周期微结构特征来修改衬底或衬底表面的反射，衍射和/或吸收特征，从衬底获得图像（ 或基板表面）。 为了改变例如光学曝光时间，脉冲串强度，激光偏振，激光波长或上述的组合，可以调制超快脉冲串。 可以相对于彼此扫描超快速脉冲串和衬底，以向衬底（或衬底表面）的不同区域提供不同的光学能量。 在一些实施例中，通过相对于衬底进行超快激光脉冲串的一次或多次通过来提供图像。

    LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS
    3.
    发明申请
    LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 审中-公开
    基于激光的材料加工方法与系统

    公开(公告)号：US20140312469A1

    公开(公告)日：2014-10-23

    申请号：US14319845

    申请日：2014-06-30

    Applicant: IMRA America, Inc.

    Inventor： Lawrence Shah ,  Gyu Cheon Cho ,  Jingzhou Xu

    IPC: B23K26/36 ,  H01L21/268 ,  B23K26/08

    CPC classification number: H01L21/268 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/082 ,  B23K26/083 ,  B23K26/364 ,  B23K26/38 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

    Abstract: Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.

    Abstract translation: 各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。 处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料， 或者两者相对于以较低的重复率可获得的量减少。 超短脉冲激光系统的实施例可以包括光纤放大器或光纤激光器。 各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。 工件材料可以包括金属，无机或有机电介质，或任何要用飞秒，皮秒和/或纳秒脉冲微加工的材料。

    ULTRASHORT LASER MICRO-TEXTURE PRINTING
    7.
    发明申请
    ULTRASHORT LASER MICRO-TEXTURE PRINTING 有权
    ULTRASHORT激光微纹理印刷

    公开(公告)号：US20140185065A1

    公开(公告)日：2014-07-03

    申请号：US14198434

    申请日：2014-03-05

    Applicant: IMRA America, inc.

    Inventor： Lawrence Shah ,  Martin E. Fermann

    IPC: G06K15/12 ,  H04N1/407 ,  B41J2/44 ,  H04N1/40

    CPC classification number: G06K15/1209 ,  B41J2/442 ,  B41J2/471 ,  G06K15/129 ,  H04N1/40037 ,  H04N1/407

    Abstract: Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

    Abstract translation: 公开了用于提供固体基底的激光纹理化的系统和方法。 纹理可以用于提供可从包括钢，铝，玻璃和硅的基底获得的灰度图像。 在一些实施例中，可以通过在衬底上形成随机，周期性和/或半周期微结构特征来修饰衬底或衬底表面的反射，衍射和/或吸收特征，从衬底获得图像（ 或基板表面）。 为了改变例如光学曝光时间，脉冲串强度，激光偏振，激光波长或上述的组合，可以调制超快脉冲串。 可以相对于彼此扫描超快速脉冲串和衬底，以向衬底（或衬底表面）的不同区域提供不同的光学能量。 在一些实施例中，通过相对于衬底进行超快激光脉冲串的一次或多次通过来提供图像。

    Ultrashort laser micro-texture printing
    8.
    发明授权
    Ultrashort laser micro-texture printing 有权
    超短激光微纹理印刷

    公开(公告)号：US08670151B2

    公开(公告)日：2014-03-11

    申请号：US13799754

    申请日：2013-03-13

    Applicant: IMRA America, Inc.

    Inventor： Lawrence Shah ,  Martin E. Fermann

    IPC: G06K1/00

    CPC classification number: G06K15/1209 ,  B41J2/442 ,  B41J2/471 ,  G06K15/129 ,  H04N1/40037 ,  H04N1/407

    Abstract: Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

    Abstract translation: 公开了用于提供固体基底的激光纹理化的系统和方法。 纹理可以用于提供可从包括钢，铝，玻璃和硅的基底获得的灰度图像。 在一些实施例中，可以通过在衬底上形成随机，周期性和/或半周期微结构特征来修饰衬底或衬底表面的反射，衍射和/或吸收特征，从衬底获得图像（ 或基板表面）。 为了改变例如光学曝光时间，脉冲串强度，激光偏振，激光波长或上述的组合，可以调制超快脉冲串。 可以相对于彼此扫描超快速脉冲串和衬底，以向衬底（或衬底表面）的不同区域提供不同的光学能量。 在一些实施例中，通过相对于衬底进行超快激光脉冲串的一次或多次通过来提供图像。

    ULTRASHORT LASER MICRO-TEXTURE PRINTING
    9.
    发明申请
    ULTRASHORT LASER MICRO-TEXTURE PRINTING 有权

    公开(公告)号：US20130194592A1

    公开(公告)日：2013-08-01

    申请号：US13799754

    申请日：2013-03-13

    Applicant: IMRA AMERICA, INC.

    Inventor： Lawrence Shah ,  Martin E. Fermann

    IPC: G06K15/12

    CPC classification number: G06K15/1209 ,  B41J2/442 ,  B41J2/471 ,  G06K15/129 ,  H04N1/40037 ,  H04N1/407

    Abstract: Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

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