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    Methods for forming high-k dielectrics containing hafnium and zirconium using atomic layer deposition
    1.
    发明授权
    Methods for forming high-k dielectrics containing hafnium and zirconium using atomic layer deposition 有权
    使用原子层沉积形成含有铪和锆的高k电介质的方法

    公开(公告)号：US09245743B2

    公开(公告)日：2016-01-26

    申请号：US14109728

    申请日：2013-12-17

    Applicant: Intermolecular Inc.

    Inventor： Khaled Ahmed ,  Frank Greer

    IPC: H01L21/02 ,  H01L29/51 ,  H01L21/28 ,  C23C16/40 ,  C23C16/455

    CPC classification number: H01L21/02181 ,  C23C16/405 ,  C23C16/45531 ,  H01L21/02189 ,  H01L21/02194 ,  H01L21/0228 ,  H01L21/28194 ,  H01L29/513 ,  H01L29/517

    Abstract: Embodiments provided herein describe high-k dielectric layers and methods for forming high-k dielectric layers. A substrate is provided. The substrate includes a semiconductor material. The substrate is exposed to a hafnium precursor. The substrate is exposed to a zirconium precursor. The substrate is exposed to an oxidant only after the exposing of the substrate to the hafnium precursor and the exposing of the substrate to the zirconium precursor. The exposing of the substrate to the hafnium precursor, the exposing of the substrate to the zirconium precursor, and the exposing of the substrate to the oxidant causes a layer to be formed over the substrate. The layer includes hafnium, zirconium, and oxygen.

    Abstract translation: 本文提供的实施例描述了高k电介质层和用于形成高k电介质层的方法。 提供基板。 基板包括半导体材料。 将基底暴露于铪前体。 将基底暴露于锆前体。 只有在将基底暴露于铪前体并将基底暴露于锆前体之后，才将基底暴露于氧化剂。 将衬底暴露于铪前体，将衬底暴露于锆前体，以及将衬底暴露于氧化剂引起在衬底上形成一层。 该层包括铪，锆和氧。

    Gate Stacks Including TaXSiYO for MOSFETS
    2.
    发明申请
    Gate Stacks Including TaXSiYO for MOSFETS 有权
    包括用于MOSFET的TaXSiYO的栅极堆叠

    公开(公告)号：US20150041912A1

    公开(公告)日：2015-02-12

    申请号：US14135381

    申请日：2013-12-19

    Applicant: Intermolecular, Inc.

    Inventor： Khaled Ahmed ,  Frank Greer

    IPC: H01L21/28 ,  H01L27/092

    CPC classification number: H01L21/28158 ,  H01L21/0215 ,  H01L21/0228 ,  H01L21/28255 ,  H01L21/28264 ,  H01L21/8258 ,  H01L27/092 ,  H01L29/16 ,  H01L29/20 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/7833

    Abstract: Provided are field effect transistor (FET) assemblies and methods of forming thereof. An FET assembly may include a dielectric layer formed from tantalum silicon oxide and having the atomic ratio of silicon to tantalum and silicon (Si/(Ta+Si)) of less than 5% to provide a low trap density. The dielectric layer may be disposed over an interface layer, which is disposed over a channel region. The same type of the dielectric layer may be used a common gate dielectric of an nMOSFET (e.g., III-V materials) and a pMOSFET (e.g., germanium). The channel region may include one of indium gallium arsenide, indium phosphate, or germanium. The interface layer may include silicon oxide to provide a higher energy barrier. The dielectric layer may be formed using an atomic layer deposition technique by adsorbing both tantalum and silicon containing precursors on the deposition surface and then oxidizing both precursors in the same operation.

    Abstract translation: 提供场效应晶体管（FET）组件及其形成方法。 FET组件可以包括由钽氧化硅形成并且具有小于5％的硅与钽和硅（Si /（Ta + Si））的原子比的介电层以提供低陷阱密度。 电介质层可以设置在界面层上，该界面层设置在沟道区域上。 可以使用相同类型的电介质层的nMOSFET（例如，III-V材料）和pMOSFET（例如，锗）的公共栅极电介质。 沟道区可以包括砷化铟镓，磷酸铟或锗中的一种。 界面层可以包括氧化硅以提供更高的能量势垒。 可以使用原子层沉积技术，通过在沉积表面上吸附含有钽和硅的两种前体，然后在相同的操作中氧化两种前体来形成电介质层。

    GATE STACKS AND OHMIC CONTACTS FOR SIC DEVICES
    6.
    发明申请
    GATE STACKS AND OHMIC CONTACTS FOR SIC DEVICES 有权
    用于SIC设备的门盖和OHMIC联系

    公开(公告)号：US20150179438A1

    公开(公告)日：2015-06-25

    申请号：US14136271

    申请日：2013-12-20

    Applicant: Intermolecular, Inc.

    Inventor： Khaled Ahmed ,  Frank Greer ,  Raj Jammy

    IPC: H01L21/02 ,  H01L29/40

    CPC classification number: H01L21/02301 ,  C23C16/0227 ,  C23C16/56 ,  H01L21/02164 ,  H01L21/02178 ,  H01L21/022 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02307 ,  H01L21/02315 ,  H01L21/0234 ,  H01L21/0485 ,  H01L29/66068 ,  H01L29/78

    Abstract: SiC substrates are cleaned and provided to a process chamber. In-situ plasma surface treatments are applied to further clean the surface of the substrate. A dielectric interface layer is deposited in-situ to passivate the surface. Metal layers having a low work function are deposited above the dielectric interface layer. The stack is annealed at about 500C in forming gas to form low resistivity ohmic contacts to the SiC substrate. SiC substrates are cleaned and provided to a process chamber. In-situ plasma surface treatments are applied to further clean the surface of the substrate. A silicon oxide dielectric interface layer is deposited in-situ to passivate the surface. Optional plasma surface treatments are applied to further improve the performance of the silicon oxide dielectric interface layer. An aluminum oxide gate dielectric layer is deposited above the silicon oxide dielectric interface layer.

    Abstract translation: 将SiC衬底清洁并提供给处理室。 施加原位等离子体表面处理以进一步清洁基底的表面。 电介质界面层原位沉积以钝化表面。 具有低功函数的金属层沉积在电介质界面层的上方。 堆叠在大约500℃下在形成气体中退火以形成到SiC衬底的低电阻率欧姆接触。 将SiC衬底清洁并提供给处理室。 施加原位等离子体表面处理以进一步清洁基底的表面。 氧化硅介电界面层原位沉积以钝化表面。 施加可选的等离子体表面处理以进一步提高氧化硅介电界面层的性能。 在氧化硅介电界面层上沉积氧化铝栅极电介质层。

    Methods and Systems for Forming Reliable Gate Stack on Semiconductors
    7.
    发明申请
    Methods and Systems for Forming Reliable Gate Stack on Semiconductors 审中-公开
    在半导体上形成可靠栅极叠层的方法和系统

    公开(公告)号：US20150132938A1

    公开(公告)日：2015-05-14

    申请号：US14079410

    申请日：2013-11-13

    Applicant: Intermolecular, Inc.

    Inventor： Khaled Ahmed ,  Frank Greer

    IPC: H01L29/51 ,  H01L21/28

    CPC classification number: H01L29/517 ,  H01L21/28176 ,  H01L29/78

    Abstract: Methods are provided for the deposition of high-k gate dielectric materials which are doped with fluorine and/or nitrogen to improve the performance and reliability. The high-k dielectric materials may include at least one of hafnium oxide, hafnium silicon oxide, hafnium aluminum oxide, zirconium oxide, zirconium silicon oxide, zirconium aluminum oxide, titanium oxide, titanium silicon oxide, or titanium aluminum oxide. The fluorine dopant is provided from a layer including titanium nitride or amorphous silicon, where the layer is doped with at least one of fluorine or nitrogen. The dopants diffuse into the high-k dielectric material during a subsequent anneal process.

    Abstract translation: 提供了用于沉积掺杂有氟和/或氮的高k栅极电介质材料以提高性能和可靠性的方法。 高k电介质材料可以包括氧化铪，氧化铪铪，氧化铪铝，氧化锆，氧化锆锆，氧化锆锆，氧化钛，氧化钛或氧化钛铝中的至少一种。 氟掺杂剂由包括氮化钛或非晶硅的层提供，其中该层掺杂有氟或氮中的至少一种。 在随后的退火过程中，掺杂剂扩散到高k电介质材料中。

    Reduction of native oxides by annealing in reducing gas or plasma
    8.
    发明申请
    Reduction of native oxides by annealing in reducing gas or plasma 有权
    还原气体或等离子体中还原天然氧化物

    公开(公告)号：US20150118828A1

    公开(公告)日：2015-04-30

    申请号：US14068906

    申请日：2013-10-31

    Applicant: Intermolecular Inc.

    Inventor： Frank Greer ,  Amol Joshi ,  Kevin Kashefi ,  Albert Sanghyup Lee ,  Abhijit Pethe ,  J Watanabe

    IPC: H01L21/28 ,  H01L21/02

    CPC classification number: H01L21/28158 ,  C23C16/0218 ,  C23C16/45525 ,  H01L21/02175 ,  H01L21/0228 ,  H01L21/28194 ,  H01L21/28238

    Abstract: Native oxide growth on germanium, silicon germanium, and InGaAs undesirably affects CET (capacitive equivalent thickness) and EOT (effective oxide thickness) of high-k and low-k metal-oxide layers formed on these semiconductors. Even if pre-existing native oxide is initially removed from the bare semiconductor surface, some metal oxide layers are oxygen-permeable in thicknesses below about 25 Å thick. Oxygen-containing species used in the metal-oxide deposition process may diffuse through these permeable layers, react with the underlying semiconductor, and re-grow the native oxide. To eliminate or mitigate this re-growth, the substrate is exposed to a gas or plasma reductant (e.g., containing hydrogen). The reductant diffuses through the permeable layers to react with the re-grown native oxide, detaching the oxygen and leaving the un-oxidized semiconductor. The reduction product(s) resulting from the reaction may then be removed from the substrate (e.g., driven off by heat).

    Abstract translation: 在锗，硅锗和InGaAs上的天然氧化物生长不利地影响在这些半导体上形成的高k和低k金属氧化物层的CET（电容等效厚度）和EOT（有效氧化物厚度）。 即使预先存在的原生氧化物最初从裸露的半导体表面去除，一些金属氧化物层的厚度可以在大约25埃的厚度下透氧。 在金属氧化物沉积工艺中使用的含氧物质可以扩散通过这些可渗透层，与下面的半导体反应，并重新生长天然氧化物。 为了消除或减轻这种再生长，将基底暴露于气体或等离子体还原剂（例如含有氢气）中。 还原剂通过可渗透层扩散以与再生的天然氧化物反应，分离氧并留下未氧化的半导体。 然后可以从反应物中除去由反应产生的还原产物（例如，通过加热驱除）。

    Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection
    9.
    发明授权
    Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection 有权
    组合可变蚀刻堆叠，包括用于蚀刻坑密度检查的两种不同材料

    公开(公告)号：US08906709B1

    公开(公告)日：2014-12-09

    申请号：US14138797

    申请日：2013-12-23

    Applicant: Intermolecular, Inc.

    Inventor： Khaled Ahmed ,  Frank Greer ,  George Mirth ,  Zhi-Wen Sun

    IPC: H01L21/66

    CPC classification number: H01L22/12 ,  H01L21/6708 ,  H01L21/67253 ,  H01L22/20

    Abstract: Provided are methods of high productivity combinatorial (HPC) inspection of semiconductor substrates. A substrate includes two layers of dissimilar materials interfacing each other, such as a stack of a silicon bottom layer and an indium gallium arsenide top layer. The dissimilar materials have one or more of thermal, structural, and lattice mismatches. As a part of the inspection, the top layer is etched in a combinatorial manner. Specifically, the top layer is divided into multiple different site-isolated regions. One such region may be etched using different process conditions from another region. Specifically, etching temperature, etching duration and/or etchant composition may vary among the site-isolated regions. After combinatorial etching, each region is inspected to determine its etch-pit density (EPD) value. These values may be then analyzed to determine an overall EPD value for the substrate, which may involve discarding EPD values for over-etched and under-etched regions.

    Abstract translation: 提供了半导体衬底的高生产率组合（HPC）检验方法。 衬底包括彼此相互接合的两层不同材料，例如硅底层和砷化铟镓顶层的叠层。 不同材料具有热，结构和晶格失配中的一种或多种。 作为检查的一部分，顶层以组合方式蚀刻。 具体来说，顶层被分成多个不同的位置隔离区域。 可以使用与另一区域不同的工艺条件来蚀刻一个这样的区域。 具体地，蚀刻温度，蚀刻持续时间和/或蚀刻剂组成可以在位置隔离区域之间变化。 在组合蚀刻之后，检查每个区域以确定其蚀刻坑密度（EPD）值。 然后可以分析这些值以确定衬底的整体EPD值，这可能涉及丢弃过蚀刻和欠蚀刻区域的EPD值。

    Plasma cleaning of superconducting layers
    10.
    发明授权
    Plasma cleaning of superconducting layers 有权

    公开(公告)号：US09425376B2

    公开(公告)日：2016-08-23

    申请号：US14138672

    申请日：2013-12-23

    Applicant: Intermolecular Inc.

    Inventor： Frank Greer ,  Andy Steinbach

    IPC: H01L39/24

    CPC classification number: H01L39/2493

    Abstract: In a “window-junction” formation process for Josephson junction fabrication, a spacer dielectric is formed over the first superconducting electrode layer, then an opening (the “window” is formed to expose the part of the electrode layer to be used for the junction. In an atomic layer deposition (ALD) chamber (or multi-chamber sealed system) equipped with direct or remote plasma capability, the exposed part of the electrode is sputter-etched with Ar, H2, or a combination to remove native oxides, etch residues, and other contaminants. Optionally, an O2 or O3 pre-clean may precede the sputter etch. When the electrode is clean, the tunnel barrier layer is deposited by ALD in-situ without further oxidant exposure.

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