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    Method and system for discharging a sample
    1.
    发明申请
    Method and system for discharging a sample 有权
    放样样品的方法和系统

    公开(公告)号：US20060255288A1

    公开(公告)日：2006-11-16

    申请号：US11129463

    申请日：2005-05-12

    申请人： Igor Petrov ,  Oren Zoran ,  Juergen Frosien

    发明人： Igor Petrov ,  Oren Zoran ,  Juergen Frosien

    IPC分类号： G01N23/225 ,  H05F3/00

    CPC分类号： G01N23/2251 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/0041 ,  H01J2237/006 ,  H01J2237/1526 ,  H01J2237/2817

    摘要： A method for discharging a sample, the method includes: determining whether to discharge a negatively charged area of a sample or to discharge a positively charged area of the sample; and injecting gas, via an electrode and gas supply component, or setting a first electrode to a first voltage and set the electrode and gas supply component to a second voltage, in response to the determination. A system including: a first electrode adapted to be set to at least a first potential; an electrode and gas supply component, adapted to be set to at least a second potential and to selectively supply gas to a vicinity of the sample; wherein at least one out of the first electrode and the electrode and gas supply component are positioned close to the sample.

    摘要翻译： 一种用于放电样品的方法，所述方法包括：确定是否放电样品的带负电区域或放电样品的带正电区域; 以及通过电极和气体供应部件注入气体，或者将第一电极设置为第一电压，并且响应于该确定将电极和气体供应部件设置为第二电压。 一种系统，包括：适于被设置为至少第一电位的第一电极; 电极和气体供应部件，其适于被设置为至少第二电位并且选择性地向所述样品的附近供应气体; 其中所述第一电极和所述电极和气体供应部件中的至少一个定位成靠近所述样品。

    Method and system for discharging a sample
    2.
    发明授权
    Method and system for discharging a sample 有权
    放样样品的方法和系统

    公开(公告)号：US07170068B2

    公开(公告)日：2007-01-30

    申请号：US11129463

    申请日：2005-05-12

    申请人： Igor Petrov ,  Oren Zoran ,  Juergen Frosien

    发明人： Igor Petrov ,  Oren Zoran ,  Juergen Frosien

    IPC分类号： G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  G01N23/00 ,  G21K7/00

    CPC分类号： G01N23/2251 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/0041 ,  H01J2237/006 ,  H01J2237/1526 ,  H01J2237/2817

    摘要： A method for discharging a sample, the method includes: determining whether to discharge a negatively charged area of a sample or to discharge a positively charged area of the sample; and injecting gas, via an electrode and gas supply component, or setting a first electrode to a first voltage and set the electrode and gas supply component to a second voltage, in response to the determination. A system including: a first electrode adapted to be set to at least a first potential; an electrode and gas supply component, adapted to be set to at least a second potential and to selectively supply gas to a vicinity of the sample; wherein at least one out of the first electrode and the electrode and gas supply component are positioned close to the sample.

    摘要翻译： 一种用于放电样品的方法，所述方法包括：确定是否放电样品的带负电区域或放电样品的带正电区域; 以及通过电极和气体供应部件注入气体，或者将第一电极设置为第一电压，并且响应于该确定将电极和气体供应部件设置为第二电压。 一种系统，包括：适于被设置为至少第一电位的第一电极; 电极和气体供应部件，其适于被设置为至少第二电位并且选择性地向所述样品的附近供应气体; 其中所述第一电极和所述电极和气体供应部件中的至少一个定位成靠近所述样品。

    Charged particle beam apparatus and method for inspecting samples
    3.
    发明授权
    Charged particle beam apparatus and method for inspecting samples 有权
    带电粒子束装置和检测样品的方法

    公开(公告)号：US06674075B2

    公开(公告)日：2004-01-06

    申请号：US10146218

    申请日：2002-05-13

    申请人： Igor Petrov ,  Zvika Rosenberg

    发明人： Igor Petrov ,  Zvika Rosenberg

    IPC分类号： H01J3726

    CPC分类号： G01N23/22 ,  H01J37/1472 ,  H01J37/1478 ,  H01J37/244

    摘要： A beam directing method and device are presented for spatially separating between a primary charged particle beam and a beam of secondary particles returned from a sample as a result of its interaction with the primary charged particle beam. The primary charged particle beam is directed towards the beam directing device along a first axis passing an opening in a detector, which has charged particle detecting regions outside this opening. The trajectory of the primary charged particle beam is then affected to cause the primary charged particle beam propagation to the sample along a second axis substantially parallel to and spaced-apart from the first axis. This causes the secondary charged particle beam propagation to the detecting region outside the opening in the detector.

    摘要翻译： 提出了一种射束引导方法和装置，用于通过与初级带电粒子束的相互作用在空间上分离初级带电粒子束和从样品返回的二次粒子束之间的空间分离。 初级带电粒子束沿着通过检测器中的开口的第一轴线朝向光束引导装置，该检测器具有在该开口外部的带电粒子检测区域。 然后影响初级带电粒子束的轨迹，使得初级带电粒子束沿着基本上平行于第一轴线并与第一轴线间隔开的第二轴线传播到样品。 这导致二次带电粒子束传播到检测器中的开口外部的检测区域。

    CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF
    4.
    发明申请
    CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF 审中-公开
    具有动态聚焦的充电颗粒光束装置及其操作方法

    公开(公告)号：US20130214155A1

    公开(公告)日：2013-08-22

    申请号：US13405759

    申请日：2012-02-27

    申请人： Dieter Winkler ,  Igor Petrov

    发明人： Dieter Winkler ,  Igor Petrov

    IPC分类号： H01J37/04

    CPC分类号： H01J37/145 ,  H01J37/1474 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/28

    摘要： A retarding field scanning electron microscope is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over a specimen, one or more controllers in communication with the scanning deflection assembly for controlling the electron beam scanning pattern, and a combined magnetic-electrostatic objective lens configured for focusing the electron beam including an electrostatic lens portion. The electrostatic lens portion includes a first electrode with a high potential bias, and a second electrode disposed between the first electrode and the specimen plane with a potential bias lower than the first electrode, wherein the second electrode is configured for providing a retarding field. The microscope further includes a voltage supply connected to the second electrode for biasing the second electrode and being in communication with the controllers, wherein the controllers synchronize a variation of the potential of the second electrode with the scanning pattern.

    摘要翻译： 描述了延迟场扫描电子显微镜。 显微镜包括扫描偏转组件，其被配置为扫描试样上的电子束，与用于控制电子束扫描图案的扫描偏转组件连通的一个或多个控制器，以及组合的静电物镜，其被配置用于聚焦电子束 包括静电透镜部分。 静电透镜部分包括具有高电位偏置的第一电极和设置在第一电极和检体平面之间的电位偏压低于第一电极的第二电极，其中第二电极被配置为提供延迟场。 显微镜还包括连接到第二电极的电压源，用于偏置第二电极并与控制器连通，其中控制器使第二电极的电位变化与扫描图案同步。

    Method and system for the examination of specimen
    5.
    发明授权
    Method and system for the examination of specimen 有权
    样品检查方法和系统

    公开(公告)号：US07800062B2

    公开(公告)日：2010-09-21

    申请号：US10912792

    申请日：2004-08-06

    申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

    发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

    IPC分类号： G01B15/04

    CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

    摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

    摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

    Beam directing system and method for use in a charged particle beam column
    6.
    发明授权
    Beam directing system and method for use in a charged particle beam column 有权
    光束引导系统和用于带电粒子束柱的方法

    公开(公告)号：US07112803B2

    公开(公告)日：2006-09-26

    申请号：US10897635

    申请日：2004-07-23

    申请人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

    发明人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

    IPC分类号： H01J37/10 ,  H01J37/147

    CPC分类号： H01J37/147 ,  H01J37/026 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/1405 ,  H01J2237/1526

    摘要： A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.

    摘要翻译： 提出了一种用于将带电粒子束朝向和远离样品引导的方法和系统。 该系统包括透镜装置，其具有形成有用于带电粒子束通过的光束开口的电极; 和磁偏转器。 磁偏转器具有由用于承载励磁线圈的芯部和极靴部分形成的磁路。 磁偏转器的极点与透镜装置的电极电连通，并且与磁路的另一部分电绝缘。

    Method and system for the examination of specimen
    7.
    发明申请
    Method and system for the examination of specimen 有权
    样品检查方法和系统

    公开(公告)号：US20050116164A1

    公开(公告)日：2005-06-02

    申请号：US10912792

    申请日：2004-08-06

    申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas

    发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas

    IPC分类号： G01N23/203 ,  G01N23/22 ,  G21K7/00 ,  G01N23/00

    CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

    摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

    摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

    Charged particle beam column and method of its operation
    10.
    发明授权
    Charged particle beam column and method of its operation 有权
    带电粒子束柱及其操作方法

    公开(公告)号：US07067807B2

    公开(公告)日：2006-06-27

    申请号：US10937802

    申请日：2004-09-08

    申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

    发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

    IPC分类号： H01J37/28 ,  H01J37/145

    CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

    摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

    摘要翻译： 提出了一种用于控制带有带电粒子束的样品检查的方法和系统。 将一定的给定电压提供给柱的阳极以提供用于带电粒子束的所需加速电压。 向选择的样品提供一定的负电压，以便在阳极的所述给定电压下提供柱的期望的高有效电压。 向位于更靠近样品的透镜装置的电极提供一定电压，该电压被选择为满足以下条件之一：电极电压等于或略低于样品的电压; 电极电压明显高于样品。