Carrier bonded 1550 nm VCSEL with InP substrate removal
    1.
    发明授权
    Carrier bonded 1550 nm VCSEL with InP substrate removal 失效
    载体键合1550nm VCSEL,其中去除了InP衬底

    公开(公告)号:US07286584B2

    公开(公告)日:2007-10-23

    申请号:US11007081

    申请日:2004-12-08

    IPC分类号: H01S5/00

    摘要: A vertical cavity surface emitting laser (VCSEL) structure includes a bottom distributed Bragg reflector (DBR) arranged over a substrate; a metal layer interposed between the bottom DBR and the substrate, wherein the metal layer and bottom DBR form a composite mirror structure. A patterned dielectric layer may be interposed between the metal layer and the bottom DBR to reduce a deleterious chemical reaction between the metal layer and the bottom DBR. The metal layer directly contacts a portion of the bottom DBR to enhance the electrical and thermal conductivity of the VCSEL structure.

    摘要翻译: 垂直腔表面发射激光器(VCSEL)结构包括布置在衬底上的底部分布布拉格反射器(DBR); 插入在底部DBR和基板之间的金属层,其中金属层和底部DBR形成复合反射镜结构。 可以在金属层和底部DBR之间插入图案化的介电层,以减少金属层和底部DBR之间的有害的化学反应。 金属层直接接触底部DBR的一部分以增强VCSEL结构的电导率和导热性。

    Enhanced lateral oxidation
    2.
    发明授权
    Enhanced lateral oxidation 有权
    增强侧向氧化

    公开(公告)号:US07054345B2

    公开(公告)日:2006-05-30

    申请号:US10607887

    申请日:2003-06-27

    IPC分类号: H01S5/00

    摘要: A vertical cavity surface emitting laser having an oxidizable layer oxidized with enhanced lateral oxidation. The oxidation may involve adding oxygen in the form of a fluid, with or without other fluid such as water vapor, in the oxidizing environment, and/or in the layer to be oxidized. This oxidation approach may be used for layers with relatively low aluminum content such as in InP based structures, or with high aluminum content such as in GaAs based structures.

    摘要翻译: 一种垂直腔面发射激光器,其具有被增强的侧向氧化氧化的可氧化层。 氧化可以包括在氧化环境中和/或待氧化的层中加入流体形式的氧气,其中有或没有其它流体,例如水蒸汽。 该氧化方法可用于具有相对低的铝含量的层,例如基于InP的结构,或者具有高的铝含量,例如在GaAs基结构中。

    InP based long wavelength VCSEL
    3.
    发明授权
    InP based long wavelength VCSEL 失效
    基于InP的长波长VCSEL

    公开(公告)号:US07433381B2

    公开(公告)日:2008-10-07

    申请号:US10606104

    申请日:2003-06-25

    IPC分类号: H01S5/00 H01S3/08

    摘要: A long wavelength vertical cavity surface emitting laser having a substrate, a first mirror situated on the substrate, an active region situated on the first mirror, a second mirror situated on the active region. The first mirror may have several pairs of layers with an oxidized layer in one or more pairs of that mirror. The substrate may include InP and the mirror components may be compatible with the InP. The one or more layers in the first mirror may be oxidized via a trench-like approach or other arrangement.

    摘要翻译: 具有衬底的长波长垂直腔表面发射激光器,位于衬底上的第一反射镜,位于第一反射镜上的有源区,位于有源区上的第二反射镜。 第一反射镜可以具有几对层,其中一对或多对该反射镜具有氧化层。 衬底可以包括InP,并且镜组件可以与InP兼容。 第一反射镜中的一个或多个层可以通过沟槽状方法或其它布置被氧化。

    Metal-assisted DBRs for thermal management in VCSELs
    4.
    发明授权
    Metal-assisted DBRs for thermal management in VCSELs 有权
    用于VCSEL中热管理的金属辅助DBR

    公开(公告)号:US07860143B2

    公开(公告)日:2010-12-28

    申请号:US11026161

    申请日:2004-12-30

    IPC分类号: H01S3/08

    摘要: A VCSEL includes a substrate having a partially removed portion; a metal-assisted DBR having a metal layer and a first mirror stack, wherein the metal layer is located at the partially removed portion of the substrate; an active region having a plurality of quantum wells over the metal-assisted DBR; and a second mirror stack over the active region, wherein a number of alternating layers of the first mirror stack is substantially smaller than a number typically required for a VCSEL without the integrated metal reflector. Such a metal-assisted DBR is especially useful for a long-wavelength VCSEL on a InP substrate or a red-color VCSEL on a GaAs substrate.

    摘要翻译: VCSEL包括具有部分去除部分的基板; 具有金属层和第一反射镜叠层的金属辅助DBR,其中所述金属层位于所述基板的部分去除部分; 在金属辅助DBR上具有多个量子阱的有源区; 以及在所述有源区域上的第二反射镜堆叠,其中所述第一反射镜叠层的多个交替层比不具有所述集成金属反射器的VCSEL通常需要的数量小得多。 这种金属辅助DBR对于InP衬底上的长波长VCSEL或GaAs衬底上的红色VCSEL特别有用。

    Mode selective semiconductor mirror for vertical cavity surface emitting lasers
    5.
    发明授权
    Mode selective semiconductor mirror for vertical cavity surface emitting lasers 有权
    用于垂直腔表面发射激光器的模式选择半导体镜

    公开(公告)号:US07391799B2

    公开(公告)日:2008-06-24

    申请号:US11176615

    申请日:2005-07-07

    IPC分类号: H01S5/00

    摘要: A vertical cavity surface emitting laser with a mode-selective mirror. A filter is formed on the top DBR stack of a VCSEL. The filter includes semiconductor layers that are etch stops for immediately superior layers. The filter is selectively etched to create a first region that is phase matched to the top DBR stack and a second region that is phase mismatched to the top DBR stack. The second region inhibits undesired modes and provides additional absorption for the undesired modes. The first region is formed using a wet-etch process whose etch depth is controlled because the semiconductor layers are etch stops for immediately superior layers.

    摘要翻译: 具有模式选择镜的垂直腔表面发射激光器。 在VCSEL的顶部DBR堆叠上形成滤波器。 该滤波器包括半导体层,其是用于立即优越层的蚀刻停止。 选择性地蚀刻滤波器以创建与顶部DBR堆叠相位匹配的第一区域和与顶部DBR堆叠相位失配的第二区域。 第二区域抑制不期望的模式并为不期望的模式提供额外的吸收。 使用湿式蚀刻工艺形成第一区域,其蚀刻深度被控制,因为半导体层是用于立即优越层的蚀刻停止。

    Long wavelength vertical cavity surface emitting lasers
    6.
    发明授权
    Long wavelength vertical cavity surface emitting lasers 失效
    长波长垂直腔表面发射激光器

    公开(公告)号:US07564887B2

    公开(公告)日:2009-07-21

    申请号:US11066793

    申请日:2005-02-25

    IPC分类号: H01S5/00 H01S3/08

    摘要: A vertical cavity surface emitting laser (VCSEL) includes independently definable current and optical confinement structures that provide unique forms of drive current and transverse mode confinement, respectively. The optical guide may be formed from an upper distributed Bragg reflector (DBR), as an etched mesa structure and/or as an intracavity optical guide. The current guide may include an ion-implanted region within the upper DBR. A dielectric structure is formed over the upper DBR and surrounds the optical guide.

    摘要翻译: 垂直腔表面发射激光器(VCSEL)包括分别提供独特形式的驱动电流和横向限制的独立可定义的电流和光限制结构。 光导可以由上分布布拉格反射器(DBR)形成,作为蚀刻的台面结构和/或作为腔内光导。 当前引导件可以包括上部DBR内的离子注入区域。 在上DBR上形成电介质结构,并围绕光导。

    Strained-layer superlattice focal plane array having a planar structure
    8.
    发明授权
    Strained-layer superlattice focal plane array having a planar structure 有权
    具有平面结构的应变层超晶格焦平面阵列

    公开(公告)号:US07755079B2

    公开(公告)日:2010-07-13

    申请号:US11840263

    申请日:2007-08-17

    IPC分类号: H01L31/00

    摘要: An infrared focal plane array (FPA) is disclosed which utilizes a strained-layer superlattice (SLS) formed of alternating layers of InAs and InxGa1−xSb with 0≦x≦0.5 epitaxially grown on a GaSb substrate. The FPA avoids the use of a mesa structure to isolate each photodetector element and instead uses impurity-doped regions formed in or about each photodetector for electrical isolation. This results in a substantially-planar structure in which the SLS is unbroken across the entire width of a 2-D array of the photodetector elements which are capped with an epitaxially-grown passivation layer to reduce or eliminate surface recombination. The FPA has applications for use in the wavelength range of 3-25 μm.

    摘要翻译: 公开了一种红外焦平面阵列(FPA),其利用由InAs和In x Ga 1-x Sb的交替层形成的应变层超晶格(SLS),其在GaSb衬底上外延生长0和nlE; x和nlE 0.5。 FPA避免使用台面结构来隔离每个光电检测器元件,而是使用形成在每个光电检测器内或周围的杂质掺杂区域进行电隔离。 这导致基本上平面的结构,其中SLS在被外延生长的钝化层封盖的光电检测器元件的2-D阵列的整个宽度上是不间断的,以减少或消除表面复合。 FPA具有在3-25μm波长范围内使用的应用。

    Strained-Layer Superlattice Focal Plane Array Having a Planar Structure
    10.
    发明申请
    Strained-Layer Superlattice Focal Plane Array Having a Planar Structure 有权
    具有平面结构的应变层超晶格焦平面阵列

    公开(公告)号:US20090045395A1

    公开(公告)日:2009-02-19

    申请号:US11840263

    申请日:2007-08-17

    IPC分类号: H01L31/0352

    摘要: An infrared focal plane array (FPA) is disclosed which utilizes a strained-layer superlattice (SLS) formed of alternating layers of InAs and InxGa1−xSb with 0≦x≦0.5 epitaxially grown on a GaSb substrate. The FPA avoids the use of a mesa structure to isolate each photodetector element and instead uses impurity-doped regions formed in or about each photodetector for electrical isolation. This results in a substantially-planar structure in which the SLS is unbroken across the entire width of a 2-D array of the photodetector elements which are capped with an epitaxially-grown passivation layer to reduce or eliminate surface recombination. The FPA has applications for use in the wavelength range of 3-25 μm.

    摘要翻译: 公开了一种红外焦平面阵列(FPA),其利用由在GaSb衬底上外延生长的具有0 <= x <= 0.5的InAs和In x Ga 1-x Sb的交替层形成的应变层超晶格(SLS)。 FPA避免使用台面结构来隔离每个光电检测器元件,而是使用形成在每个光电检测器内或周围的杂质掺杂区域进行电隔离。 这导致基本上平面的结构,其中SLS在被外延生长的钝化层封盖的光电检测器元件的2-D阵列的整个宽度上是不间断的,以减少或消除表面复合。 FPA具有3-25 mum波长范围内的应用。