Single-exposure interferometer with no moving parts
    9.
    发明授权
    Single-exposure interferometer with no moving parts 失效
    单曝光干涉仪,无移动部件

    公开(公告)号:US07050171B1

    公开(公告)日:2006-05-23

    申请号:US10701408

    申请日:2003-11-03

    IPC分类号: G01B9/02 G01B11/02

    摘要: A interferometer that has no moving parts and can acquire an interferogram in a single exposure is disclosed. Embodiments according to the invention can be used for polychromatic and/or monochromatic detection and include a fixed-position element that divides a beam segment into a plurality of parallel sub-beams of successively increasing path lengths. Embodiments according to the invention can be constructed from separate elements or can be combined into a one-piece device to provide increased stability and ruggedness.

    摘要翻译: 公开了一种没有移动部件并且可以在单次曝光中获取干涉图的干涉仪。 根据本发明的实施例可以用于多色和/或单色检测,并且包括固定位置元件,其将光束段划分为连续增加的路径长度的多个平行子光束。 根据本发明的实施例可以由单独的元件构成,或者可以组合成一件式装置以提供增加的稳定性和坚固性。