公开(公告)号：US08684262B1

公开(公告)日：2014-04-01

申请号：US13461235

申请日：2012-05-01

申请人： Jeffrey M. Eastman ,  Pedro Tula ,  Nam Le ,  David Nikkel ,  David Vidmar ,  Jhansi Arikatla ,  Erie S. VanKeulen ,  Wayne Wellbaum

发明人： Jeffrey M. Eastman ,  Pedro Tula ,  Nam Le ,  David Nikkel ,  David Vidmar ,  Jhansi Arikatla ,  Erie S. VanKeulen ,  Wayne Wellbaum

IPC分类号： G06Q40/00 ,  G06K5/00 ,  B65H5/22

CPC分类号： G06Q40/02 ,  G07D11/00 ,  G07F7/0873 ,  G07F19/20 ,  G07F19/201 ,  G07G5/00

摘要： An automated banking machine is operative to cause financial transfers responsive at least in part to data read from data bearing records. The automated banking machine includes a card reader that is operative to read card data from user cards corresponding to financial accounts. The automated banking machine is operative to cause a determination to be made that read card data corresponds to stored data for an account authorized to carry out transactions that transfer and/or allocate funds between accounts. The automated banking machine is further operative to provide users with a receipt for transactions conducted. The automated banking machine is operative to cause the value of cash dispensed or received to be assessed or credited to the financial accounts corresponding to card data.

摘要翻译： 一种自动银行机器可操作地至少部分地响应于从数据记录读取的数据来进行财务传送。 自动银行机包括读卡器，用于从对应于财务账户的用户卡读取卡数据。 自动银行机可操作地使得读卡数据对应于被授权执行在账户之间转移和/或分配资金的交易的帐户的存储数据。 自动银行机进一步操作以向用户提供进行的交易的收据。 自动银行业务机制可以使所分配或收到的现金的价值被评估或记入对应于卡数据的金融账户。

公开(公告)号：US08733634B1

公开(公告)日：2014-05-27

申请号：US13461258

申请日：2012-05-01

申请人： Jeffrey M. Eastman ,  Pedro Tula ,  Nam Le ,  David Nikkel ,  David Vidmar ,  Jhansi Arikatla ,  Eric S. VanKeulen ,  Wayne Wellbaum

发明人： Jeffrey M. Eastman ,  Pedro Tula ,  Nam Le ,  David Nikkel ,  David Vidmar ,  Jhansi Arikatla ,  Eric S. VanKeulen ,  Wayne Wellbaum

IPC分类号： G06Q40/00 ,  G06F17/00 ,  G06K5/00

CPC分类号： G07F19/20 ,  G06Q20/1085 ,  G06Q40/02 ,  G07D11/0081 ,  G07F19/201 ,  G07G5/00

摘要： An automated banking machine is operative to cause financial transfers responsive at least in part to data read from data bearing records. The automated banking machine includes a card reader that is operative to read card data from user cards corresponding to financial accounts. The automated banking machine is operative to cause a determination to be made that read card data corresponds to stored data for an account authorized to carry out transactions that transfer and/or allocate funds between accounts. The automated banking machine is further operative to provide users with a receipt for transactions conducted. The automated banking machine is operative to cause the value of cash dispensed or received to be assessed or credited to the financial accounts corresponding to card data.

公开(公告)号：US20060111575A1

公开(公告)日：2006-05-25

申请号：US11268152

申请日：2005-11-07

申请人： Michael DeCourcy ,  Nam Le

发明人： Michael DeCourcy ,  Nam Le

IPC分类号： G06F19/00 ,  C07D307/89 ,  C07D301/06 ,  C07C51/16 ,  C07C46/04

CPC分类号： B01J19/002 ,  B01J2208/00637 ,  B01J2219/00164 ,  B01J2219/002 ,  B01J2219/00225 ,  B01J2219/00231 ,  B01J2219/00261 ,  B01J2219/00263 ,  B01J2219/00272 ,  C07C45/33 ,  C07C45/35 ,  C07C46/06 ,  C07C51/215 ,  C07C51/252 ,  C07C51/265 ,  C07C51/313 ,  C07C47/22 ,  C07C50/18 ,  C07C57/04 ,  C07C63/16

摘要： The non-routine (e.g., emergency) shutdown of a chemical reaction process is achieved by a method of safely operating a chemical reaction process which comprises the steps of detecting an undesirable condition capable of affecting the process, minimizing the reaction of the reactants, and maintaining a flow of materials through the reaction zones of the process such that the reaction mixture is displaced from the reaction zones. The flow of materials may be maintained for a period of time such that the substantially all of the reaction mixture is displaced from the reaction zones, thereby flushing the reaction zones. The reaction mixture may then be purged to an ancillary vessel, such as an absorber.

摘要翻译： 通过安全操作化学反应过程的方法实现化学反应过程的非常规（例如，紧急）关闭，该方法包括以下步骤：检测能够影响该过程的不希望的条件，使反应物的反应最小化;以及 保持材料流过该方法的反应区域，使得反应混合物从反应区域移位。 可以将材料的流动保持一段时间，使得基本上所有的反应混合物从反应区域移位，从而冲洗反应区域。 然后将反应混合物吹扫到辅助容器，例如吸收器。

公开(公告)号：US06436303B1

公开(公告)日：2002-08-20

申请号：US09359148

申请日：1999-07-21

申请人： Bok Heon Kim ,  Nam Le ,  Joseph V. D'Souza ,  Ashish Shrotriya

发明人： Bok Heon Kim ,  Nam Le ,  Joseph V. D'Souza ,  Ashish Shrotriya

IPC分类号： H01L2100

CPC分类号： H01L21/67069 ,  C23C16/0245 ,  C23C16/4581 ,  C23C16/4585 ,  C30B25/12 ,  C30B25/14 ,  C30B33/00 ,  C30B33/12 ,  H01L21/31116

摘要： A method and device for removing film from a substrate are provided that take advantage of a remote plasma source to etch away undesired portions of films, such as dielectric films formed on a substrate. To that end, the method includes forming a plasma remotely with respect to the process chamber, from which a flow is created that is directed toward the substrate. The substrate is of a type having opposed major surfaces with a peripheral surface extending therebetween. A film, such as a dielectric film, is disposed on one of the opposed major surfaces and on the peripheral surface. The opposed major surface having the film thereon is shielded from the flow of reactive radicals while the peripheral surface is left exposed. In this fashion, the flow is maintained for a sufficient amount of time to remove film present on the peripheral surface.

摘要翻译： 提供了从基板去除膜的方法和装置，其利用远程等离子体源来蚀刻诸如形成在基板上的电介质膜等不期望的部分的膜。 为此，该方法包括相对于处理室远程形成等离子体，产生朝向衬底的流动。 衬底是具有相对的主表面的类型，其周边表面在它们之间延伸。 诸如电介质膜的膜被设置在相对的主表面之一和外围表面上的一个上。 当其周围表面露出时，具有其上的膜的相对的主表面与反应性基团的流动被屏蔽。 以这种方式，保持流动足够的时间以除去存在于外围表面上的膜。

公开(公告)号：US09325790B1

公开(公告)日：2016-04-26

申请号：US12372637

申请日：2009-02-17

申请人： Nam Le ,  Paul Yuedong Mu ,  John Russell Boyles

发明人： Nam Le ,  Paul Yuedong Mu ,  John Russell Boyles ,  John Eric Hoffman

IPC分类号： G06F15/167 ,  H04L29/08

CPC分类号： H04L63/102 ,  G06F3/0607 ,  G06F3/0622 ,  G06F3/0635 ,  G06F3/0637 ,  G06F3/0659 ,  G06F3/067 ,  G06F11/2069 ,  G06F12/1483 ,  G06F17/30067 ,  G06F21/6218 ,  G06F2201/805 ,  G06F2212/1052 ,  G06F2212/154 ,  H04L63/083 ,  H04L63/10 ,  H04L63/101 ,  H04L67/10 ,  H04L67/1097

摘要： Described herein are method and apparatus for servicing software components of nodes of a cluster storage system. During data-access sessions with clients, client IDs and file handles for accessing files are produced and stored to clients and stored (as session data) to each node. A serviced node is taken offline, whereby network connections to clients are disconnected. Each disconnected client is configured to retain its client ID and file handles and attempt reconnections. Session data of the serviced node is made available to a partner node (by transferring session data to the partner node). After clients have reconnected to the partner node, the clients may use the retained client IDs and file handles to continue a data-access session with the partner node since the partner node has access to the session data of the serviced node and thus will recognize and accept the retained client ID and file handles.

摘要翻译： 这里描述了用于维护集群存储系统的节点的软件组件的方法和装置。 在与客户端的数据访问会话期间，生成用于访问文件的客户端ID和文件句柄，并将其存储到客户端并存储（作为会话数据）到每个节点。 服务节点脱机，从而断开与客户端的网络连接。 每个断开连接的客户端被配置为保留其客户端ID和文件句柄并尝试重新连接。 服务节点的会话数据使对方节点可用（通过将会话数据传送到伙伴节点）。 在客户端重新连接到伙伴节点之后，客户端可以使用保留的客户端ID和文件句柄来继续与伙伴节点的数据访问会话，因为伙伴节点可以访问服务节点的会话数据，并且因此将识别和 接受保留的客户端ID和文件句柄。

公开(公告)号：US09215279B1

公开(公告)日：2015-12-15

申请号：US12372646

申请日：2009-02-17

申请人： Nam Le ,  Paul Yuedong Mu ,  John Russell Boyles

发明人： Nam Le ,  Paul Yuedong Mu ,  John Russell Boyles ,  John Eric Hoffmann

IPC分类号： G06F15/167 ,  H04L29/08

CPC分类号： H04L67/146 ,  H04L63/08 ,  H04L63/10 ,  H04L67/10 ,  H04L67/1097 ,  H04L67/143

摘要： Described herein are method and apparatus for servicing software components of nodes of a cluster storage system. During data-access sessions with clients, client IDs and file handles for accessing files are produced and stored to clients and stored (as session data) to each node. A serviced node is taken offline, whereby network connections to clients are disconnected. Each disconnected client is configured to retain its client ID and file handles and attempt reconnections. Session data of the serviced node is made available to a partner node (by transferring session data to the partner node). After clients have reconnected to the partner node, the clients may use the retained client IDs and file handles to continue a data-access session with the partner node since the partner node has access to the session data of the serviced node and thus will recognize and accept the retained client ID and file handles.

摘要翻译： 这里描述了用于维护集群存储系统的节点的软件组件的方法和装置。 在与客户端的数据访问会话期间，生成用于访问文件的客户端ID和文件句柄，并将其存储到客户端并存储（作为会话数据）到每个节点。 服务节点脱机，从而断开与客户端的网络连接。 每个断开连接的客户端被配置为保留其客户端ID和文件句柄并尝试重新连接。 服务节点的会话数据使对方节点可用（通过将会话数据传送到伙伴节点）。 在客户端重新连接到伙伴节点之后，客户端可以使用保留的客户端ID和文件句柄来继续与伙伴节点的数据访问会话，因为伙伴节点可以访问服务节点的会话数据，并且因此将识别和 接受保留的客户端ID和文件句柄。

公开(公告)号：US06843881B2

公开(公告)日：2005-01-18

申请号：US10115526

申请日：2002-04-02

申请人： Bok Hoen Kim ,  Nam Le ,  Martin Seamons ,  Ameeta Madhava ,  Michael P. Nault ,  Thomas Nowak ,  Tsutomu Tanaka ,  Moshe Sarfaty

发明人： Bok Hoen Kim ,  Nam Le ,  Martin Seamons ,  Ameeta Madhava ,  Michael P. Nault ,  Thomas Nowak ,  Tsutomu Tanaka ,  Moshe Sarfaty

IPC分类号： B08B7/00 ,  C23C16/44 ,  C23C16/52 ,  G01N21/76 ,  G05D27/02 ,  H01L21/306

CPC分类号： G05D27/02 ,  B08B7/0035 ,  C23C16/4405 ,  C23C16/52 ,  G01N21/76

摘要： In a substrate processing apparatus, a substrate processing chamber has a substrate support to support a substrate, a gas delivery system to provide an energized cleaning gas to the chamber to clean process residues formed on surfaces in the chamber during processing of the substrate, and an exhaust to exhaust the cleaning gas. A detector monitors a chemiluminescent radiation emitted from about a surface during cleaning of the process residues by the energized cleaning gas and generates a signal in relation to the monitored chemiluminescent radiation. A controller receives the signal and evaluates the signal to determine an endpoint of the cleaning process.

摘要翻译： 在基板处理装置中，基板处理室具有用于支撑基板的基板支撑件，气体输送系统，用于向所述室提供通电的清洁气体，以清洁在所述基板的处理期间在所述室中形成的工艺残留物，以及 排气以排出清洁气体。 检测器在通过通电的清洁气体清洁过程残留物期间监测从表面周围发射的化学发光辐射，并产生与被监测的化学发光辐射有关的信号。 控制器接收信号并评估信号以确定清洁过程的端点。

公开(公告)号：US06413321B1

公开(公告)日：2002-07-02

申请号：US09731601

申请日：2000-12-07

申请人： Bok Hoen Kim ,  Mario Dave Silvetti ,  Ameeta Madhava ,  Davood Khalili ,  Martin Seamons ,  Emanuele Cappello ,  Nam Le ,  Lloyd Berken

发明人： Bok Hoen Kim ,  Mario Dave Silvetti ,  Ameeta Madhava ,  Davood Khalili ,  Martin Seamons ,  Emanuele Cappello ,  Nam Le ,  Lloyd Berken

IPC分类号： C23C1600

CPC分类号： C23C16/4405 ,  C23C16/0209 ,  C23C16/4401 ,  C23C16/4404 ,  C23C16/4583

摘要： Backside particle contamination of semiconductor wafers subjected to chemical vapor deposition is significantly reduced by optimizing various process parameters, alone or in combination. A high quality oxide seasoning layer is deposited to improve adhesion and trapping of contaminants remaining after a prior chamber cleaning step. Second, wafer pre-heating reduces thermal stress on the wafer during physical contact between the wafer and heater. Third, the duration of the gas stabilization flow of thermally reactive process gas species prior to CVD reaction is reduced, thereby preventing side products produced during this stabilization flow from affecting the wafer backside. Fourth, the wafer heater is redesigned to minimize physical contact between the heater surface and the wafer backside. Redesign of the wafer heater may include providing only a few, small projections from the top wafer surface, and also may include providing a continuous circumferential rim supporting the edge of the wafer to interfere with the flow of process gases to the wafer backside during processing.

摘要翻译： 经过化学气相沉积的半导体晶片的背面颗粒污染通过单独或组合优化各种工艺参数而显着降低。 沉积高质量的氧化物调味剂层以改善在先前的室清洁步骤之后残留的污染物的粘附和捕获。 其次，晶片预热在晶片和加热器之间的物理接触期间降低了晶片上的热应力。 第三，CVD反应之前的热反应过程气体种类的气体稳定化流程的持续时间减少，从而防止在该稳定化流程期间产生的副产物影响晶片背面。 第四，重新设计晶片加热器以最小化加热器表面和晶片背面之间的物理接触。 晶片加热器的重新设计可以包括仅从顶部晶片表面提供几个小的突起，并且还可以包括提供支撑晶片边缘的连续圆周边缘，以干扰处理期间晶片背面的工艺气体流。