公开(公告)号：US20080061163A1

公开(公告)日：2008-03-13

申请号：US11650676

申请日：2007-01-08

申请人： Joel A. Kubby ,  Nancy Y. Jia ,  Edward Francis ,  Robert M. Duffner ,  Jun Ma ,  Cathie J. Burke ,  James C. Diehl

发明人： Joel A. Kubby ,  Nancy Y. Jia ,  Edward Francis ,  Robert M. Duffner ,  Jun Ma ,  Cathie J. Burke ,  James C. Diehl

IPC分类号： B05B1/08

CPC分类号： B05B12/082 ,  A01M1/205 ,  A61L9/14 ,  B05B12/12

摘要： A fluid dispensing device comprises one or more micromechanical fluid dispensing mechanisms arranged to dispense fluids into the atmosphere. The fluids include any of a perfume, pheromone, fragrance, disinfectant, moisturizer, humectant, miticide, fumigant, deodorizer, sanitizing agent and insecticide. A dispenser controller communicates with the fluid micromechanical dispensing mechanisms to selectively activate the fluid micromechanical dispensing mechanisms. Optionally, the fluid dispensing device includes a sensor to detect the airborne concentration of fluids that are dispersed in the atmosphere. Optionally, one or more fluid dispensing devices may be arranged to form a system, perhaps including a system sensor and a system controller.

摘要翻译： 流体分配装置包括布置成将流体分配到大气中的一个或多个微机械流体分配机构。 流体包括香料，信息素，香料，消毒剂，保湿剂，保湿剂，杀螨剂，熏蒸剂，除臭剂，消毒剂和杀虫剂中的任何一种。 分配器控制器与流体微机械分配机构连通，以选择性地启动流体微机械分配机构。 可选地，流体分配装置包括用于检测分散在大气中的流体的空气传播浓度的传感器。 可选地，一个或多个流体分配装置可以被布置成形成系统，可能包括系统传感器和系统控制器。

公开(公告)号：US07183216B2

公开(公告)日：2007-02-27

申请号：US11132000

申请日：2005-05-18

申请人： Cathie J. Burke ,  Peter M. Gulvin

发明人： Cathie J. Burke ,  Peter M. Gulvin

IPC分类号： H01L21/311

CPC分类号： H01L21/76224

摘要： A thermal oxidation process is used to fill trenches with an oxide; however, the oxidation process consumes some of the silicon. The embodiments herein advantageously apply this tendency for the oxidation process to consume silicon so as to convert all the silicon substrate material between the multiple trenches into an oxide. Therefore, because all of the silicon between the multiple trenches is consumed by the oxidation process, the multiple smaller trenches are combined into a single larger trench filled with the oxide.

摘要翻译： 使用热氧化工艺用氧化物填充沟槽; 然而，氧化工艺消耗了一些硅。 本文的实施例有利地应用这种氧化过程消耗硅的趋势，以将多个沟槽之间的所有硅衬底材料转化为氧化物。 因此，由于多个沟槽之间的全部硅被氧化处理所消耗，所以将多个较小的沟槽组合成填充有氧化物的单个更大的沟槽。

公开(公告)号：US06315398B1

公开(公告)日：2001-11-13

申请号：US07963969

申请日：1992-10-21

申请人： Cathie J. Burke ,  Narayan V. Desphande ,  William G. Hawkins ,  Dale R. Ims ,  Michael P. O'Horo ,  Gary A. Kneezel ,  Thomas A. Tellier ,  Ivan Rezanka

发明人： Cathie J. Burke ,  Narayan V. Desphande ,  William G. Hawkins ,  Dale R. Ims ,  Michael P. O'Horo ,  Gary A. Kneezel ,  Thomas A. Tellier ,  Ivan Rezanka

IPC分类号： B41J205

CPC分类号： B41J2/1604 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646

摘要： The new heater element design has a pit layer which protects the overglaze passivation layer, PSG step region, portions of the Ta layer and dielectric isolation layer and junctions or regions susceptible to the cavitational pressures. Further, the inner walls of the pit layer define the effective heater area and the dopant lines define the actual heater area. In alternative embodiments, the dopant lines define the actual and effective heater areas, and an inner wall and a dopant line define the actual and effective heater areas. Further, when the new heater element designs are incorporated into printheads having full pit channel geometry and open pit channel geometry, the operating lifetime of the printhead is extended because the added protection of the pit layer prevents: 1) passivation damage and cavitational damages of the heater elements; and 2) degradation of heater robustness, hot spot formations and heater failures well into the 109 pulse range. The printhead incorporating the new heater element design can be incorporated into drop-on-demand printing systems of a carriage type or a full width type.

摘要翻译： 新的加热器元件设计具有凹坑层，其保护釉面钝化层，PSG阶梯区域，Ta层和电介质隔离层的部分以及对空穴压力敏感的结或区域。 此外，凹坑层的内壁限定有效的加热器面积，并且掺杂剂线限定实际的加热器面积。 在替代实施例中，掺杂剂线限定实际和有效的加热器区域，并且内壁和掺杂剂线限定实际和有效的加热器区域。 此外，当新的加热器元件设计结合到具有全坑通道几何形状和露天通道几何形状的打印头中时，打印头的工作寿命延长，因为凹坑层的附加保护防止：1）钝化损伤和空穴损伤 加热元件; 和2）加热器鲁棒性，热点形成和加热器故障的恶化达到109脉冲范围。 包含新的加热器元件设计的打印头可以结合到托架型或全宽型的按需按需打印系统中。

公开(公告)号：US5699094A

公开(公告)日：1997-12-16

申请号：US515180

申请日：1995-08-11

申请人： Cathie J. Burke ,  Almon P. Fisher ,  Diane Atkinson ,  Mildred Calistri-Yeh

发明人： Cathie J. Burke ,  Almon P. Fisher ,  Diane Atkinson ,  Mildred Calistri-Yeh

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  B41J2/178

CPC分类号： B41J2/1604 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2202/03

摘要： An ink jet printhead has improved resistance to the corrosive effects of ink by coating ink sensitive areas with a photo-imageable benzocyclobutene (BCB) polymer. The BCB can be patterned so as to provide a protective coating over selected areas while leaving other areas uncoated. In one described embodiment, a thermal ink jet printer is formed by bonding together a channel plate and a heater plate. Resistors and electrical connections are formed in the surface of the heater plate. A BCB layer is formed so as to overlie the heater plate to protect the electrical elements while providing pit structure for the heater and for ink flow bypass.

摘要翻译： 通过用可光成像的苯并环丁烯（BCB）聚合物涂布油墨敏感区域，喷墨打印头改善了对油墨的腐蚀作用的抵抗力。 BCB可以被图案化，以便在选定区域上提供保护涂层，同时使其他区域未涂覆。 在一个描述的实施例中，通过将通道板和加热器板接合在一起而形成热喷墨打印机。 电阻器和电气连接形成在加热器板的表面。 形成BCB层，以覆盖加热板，以保护电气元件，同时为加热器和墨水旁路提供凹坑结构。

公开(公告)号：US5010355A

公开(公告)日：1991-04-23

申请号：US456431

申请日：1989-12-26

申请人： William G. Hawkins ,  Cathie J. Burke ,  Daniel O. Roll ,  Pamela J. Hartman ,  Diane Atkinson

发明人： William G. Hawkins ,  Cathie J. Burke ,  Daniel O. Roll ,  Pamela J. Hartman ,  Diane Atkinson

IPC分类号： B41J2/05 ,  B41J2/16 ,  H01L23/29 ,  H01L23/31

CPC分类号： B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  H01L23/291 ,  H01L23/3157 ,  B41J2202/13 ,  H01L2924/0002

摘要： An improved ink jet printhead is disclosed of the type having a plurality of parallel ink flow channels which terminate with an ink droplet emitting nozzle, a heating element with a cavitational protective layer thereover located in each channel, and MOS electronic circuitry monolithically integrated within the printhead for applying electrical pulses to the heating elements. The pulsed heating elements produce bubbles momentarily on the protective layer of the heating elements which expel ink droplets from the nozzles. The improvement is obtained by providing multi-layer ionic passivation of the MOS electronic circuitry which is exposable to the ink. This is accomplished through the deposition of a multi-layered, thin film insulative coating thereon consisting of a first layer of doped or undoped silicon dioxide having a thickness of 200 .ANG. to 2 .mu.m followed by a second layer of plasma nitride having a thickness of 1000 .ANG. to 3 .mu.m. The silicon nitride is etched from the protective layers of the heating elements and electrical contact pads for external connection to electrical power so that the first layer of silicon oxide is exposed, followed by etching of the silicon oxide to remove it from the protective layer and contact pads. Thus, the MOS circuitry is protected from mobile ions in the ink while the cost effective fabrication of a printhead is maintained. In an alternate embodiment, the multi-layered ionic passivation comprises three thin film layers comprising polyimide interfacing with the ink, followed by silicon nitride, and doped or undoped silicon dioxide directly interfacing with the metallization.

公开(公告)号：US07445315B2

公开(公告)日：2008-11-04

申请号：US10990110

申请日：2004-11-15

申请人： Michael Yu Tak Young ,  Steven A. Buhler ,  Scott Jong Ho Limb ,  Karl A. Littau ,  Beverly J. Russo ,  Scott E. Solberg ,  Michael C. Weisberg ,  Cathie J. Burke ,  Richard Schmachtenberg ,  Peter J. Nystrom ,  Sharon Berger ,  Timothy Trang ,  Thomas Long

发明人： Michael Yu Tak Young ,  Steven A. Buhler ,  Scott Jong Ho Limb ,  Karl A. Littau ,  Beverly J. Russo ,  Scott E. Solberg ,  Michael C. Weisberg ,  Cathie J. Burke ,  Richard Schmachtenberg ,  Peter J. Nystrom ,  Sharon Berger ,  Timothy Trang ,  Thomas Long

IPC分类号： B41J2/05

CPC分类号： B41J2/1626 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/14153 ,  B41J2/1603 ,  B41J2/1631

摘要： A liquid drop ejector comprising a jet stack, thin film or thick film heaters formed on the surface of the jet stack, and at least one thin film or thick film temperature sensor operative to provide feedback temperature control for the thin film or thick film heater elements is provided. In one form, the liquid drop ejector also has the thin film or thick film heater elements grouped in segments that are operative to be individually controlled. In addition, in another form, the signal lines provided to the liquid drop ejector are patterned to allow for more uniform resistance over the span of the liquid drop ejector.

摘要翻译： 一种液滴喷射器，包括形成在射流堆叠表面上的喷射叠层，薄膜或厚膜加热器，以及至少一个薄膜或厚膜温度传感器，用于为薄膜或厚膜加热器元件提供反馈温度控制 被提供。 在一种形式中，液滴喷射器还具有分组的薄膜或厚膜加热器元件，其可操作以单独控制。 此外，在另一种形式中，提供给液滴喷射器的信号线被图案化以允许在液滴喷射器的跨度上具有更均匀的电阻。

公开(公告)号：US06596644B1

公开(公告)日：2003-07-22

申请号：US09683542

申请日：2002-01-16

申请人： John R. Andrews ,  Cathie J. Burke ,  Roger G. Markham

发明人： John R. Andrews ,  Cathie J. Burke ,  Roger G. Markham

IPC分类号： H01L21302

CPC分类号： B29C59/16 ,  B23K26/066 ,  B23K26/382 ,  B23K26/389 ,  B23K26/40 ,  B23K2103/172 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1645

摘要： 12 Methods of forming features in polymeric materials by laser ablation techniques alone, or by the combined use of laser ablation techniques and photolithography, are disclosed. The methods can be used to pattern non-photosensitized materials, as well as photosensitized materials. The patterned features can have different shapes, dimensions and aspect ratios in the same polymer layer. Structures including the patterned features can include multiple layers formed of photosensitized and/or non-photosensitized polymer materials.

摘要翻译： 公开了通过单独的激光烧蚀技术或通过组合使用激光烧蚀技术和光刻法在聚合材料中形成特征的方法。 该方法可用于对非感光材料以及光敏材料进行图案化。 图案特征可以在同一聚合物层中具有不同的形状，尺寸和纵横比。 包括图案特征的结构可以包括由光敏化和/或非光敏化聚合物材料形成的多层。

公开(公告)号：US6146914A

公开(公告)日：2000-11-14

申请号：US207071

申请日：1998-12-07

申请人： Cathie J. Burke ,  Alan D. Raisanen ,  Sean D. O'Brien

发明人： Cathie J. Burke ,  Alan D. Raisanen ,  Sean D. O'Brien

IPC分类号： B41J2/14 ,  B41J2/16 ,  H01L21/00

CPC分类号： B41J2/1632 ,  B41J2/14129 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642

摘要： An improved method is disclosed for forming heater elements for an ink jet printhead. The resistance is more closely controlled by doping a central heater region which is formed relatively thinner than the heavily doped heater regions which are used as the gate and contact areas. The thinner central region can doped relatively heavy in order to more accurately adjust the heater resistance.In another embodiment, the thin layer is amorphous silicon rather than the polysilicon to increase the latitude of the energy input.

摘要翻译： 公开了用于形成用于喷墨打印头的加热器元件的改进方法。 通过掺杂形成为比用作栅极和接触区域的重掺杂加热器区域相对更薄的中心加热器区域来更牢固地控制电阻。 更薄的中心区域可以掺杂较重，以便更准确地调节加热器电阻。 在另一个实施例中，薄层是非晶硅而不是多晶硅，以增加能量输入的纬度。

公开(公告)号：US6102528A

公开(公告)日：2000-08-15

申请号：US953656

申请日：1997-10-17

申请人： Cathie J. Burke ,  Biay-Cheng Hseih ,  William G. Hawkins

发明人： Cathie J. Burke ,  Biay-Cheng Hseih ,  William G. Hawkins

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  H01L29/76

CPC分类号： B41J2/0455 ,  B41J2/0458 ,  B41J2/14072 ,  B41J2202/13

摘要： A drive transistor for a high resolution ink jet printhead having a pocket implant in the gate region of the device. The pocket implant enables a reduced source to drain spacing without loss of breakdown voltage. Accordingly, the size of the transistor may be reduced. Alternatively, this device is suitable for addressing 1200 spi resolution printheads. In one embodiment, the pocket implant extends about 1 .mu.m beyond the gate region towards the drain region. Both embodiments produce a graded drift region.

摘要翻译： 一种用于高分辨率喷墨打印头的驱动晶体管，其具有在该器件的栅极区域中的凹穴注入。 袋式注入使得能够减少源极间距而不损失击穿电压。 因此，可以减小晶体管的尺寸。 或者，该器件适用于寻址1200个spi分辨率打印头。 在一个实施例中，口袋植入物向漏极区域延伸超过栅极区域约1μm。 两个实施例都产生渐变漂移区域。

公开(公告)号：US5969392A

公开(公告)日：1999-10-19

申请号：US344397

申请日：1994-11-23

申请人： William G. Hawkins ,  Cathie J. Burke

发明人： William G. Hawkins ,  Cathie J. Burke

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  H01L21/8236 ,  H01L49/00 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： B41J2/1631 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  H01L21/8236 ,  B41J2202/13

摘要： A high voltage MOS transistor, for use in a thermal ink jet printhead, is fabricated with a single, uniformly thick layer of polysilicon that serves as a field plate over the drift region and a gate over the channel region. The fabrication of the drift region and associated drift oxide is performed in a sequence independent of the device channel stop and field oxide fabrication, allowing the drift region to be optimized by varying the thickness of the drift oxide. Using a field plate to increase the breakdown voltage of the device by reducing the concentration of the electric field, the device transconductance is increased by increasing the doping of the drift region without an attendant decrease in breakdown voltage.

摘要翻译： 用于热喷墨打印头的高电压MOS晶体管被制造成具有单个均匀厚度的多晶硅层，其用作漂移区上的场板和沟道区上的栅极。 漂移区域和相关的漂移氧化物的制造以独立于器件沟道截止和场氧化物制造的顺序执行，允许通过改变漂移氧化物的厚度来优化漂移区域。 使用场板通过降低电场的浓度来增加器件的击穿电压，器件跨导通过增加漂移区的掺杂而不降低击穿电压而增加。